TWI586599B - Device to take flat workpieces and to transport the same away - Google Patents

Device to take flat workpieces and to transport the same away Download PDF

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TWI586599B
TWI586599B TW099124117A TW99124117A TWI586599B TW I586599 B TWI586599 B TW I586599B TW 099124117 A TW099124117 A TW 099124117A TW 99124117 A TW99124117 A TW 99124117A TW I586599 B TWI586599 B TW I586599B
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work
nozzle
gripper
suction
air
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TW201111255A (en
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米夏埃爾 許爾波
約瑟夫 契摩曼
阿道夫 契茲曼
嚴斯 海爾維希
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契摩曼&許爾波運用技術有限公司
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Description

用於抓取及輸送平坦工件的裝置 Device for gripping and conveying flat workpieces

本發明關於一種用於將板狀工作物──例如太陽電池、晶圓、平版監視器(Flachmonitor)用的面板(Paneel)、及其他大得多且重得多的板例如玻璃桶板(Glasfassaden)用的玻璃板──拿起的裝置。舉例而言,該工作物可從一堆疊拿走,但也可從一枱或一條輸送帶將它拿起。然後,將該工作物在一條運送帶上以懸掛方式運走。The present invention relates to a panel for panel work, such as solar cells, wafers, lithographic monitors (Panehm), and other much larger and much heavier panels such as glass buckets (Glasfassaden) ) The glass plate used - the device that is picked up. For example, the work can be removed from a stack, but it can also be picked up from one or a conveyor belt. The work is then carried away on a conveyor belt in a suspended manner.

舉例而言,先前技術已有習知手段用於從一堆疊(Stapel,英:staple)的板狀工作物將最上方的工作物拿走並放到一輸送帶上,利用一個受驅動的橡膠滾子將上方工作物拉到輸送帶上。For example, prior art techniques have been used to remove the topmost work from a stacked (Staple) sheet work and place it on a conveyor belt, using a driven rubber. The roller pulls the upper work onto the conveyor belt.

然而如果要將表面易受損的工作物拿走,則這種技術不適用。However, this technique does not apply if the work surface is to be taken away.

文獻國際專利WO 2009/059586A1提到一種個別的板的運送器,它需適用於將對接觸敏感的工作物從一堆疊卸除及運走。一條經由至少二個滾子運轉的「穿孔輸送帶」被施以真空,因此所要運送的板狀工作物受到大氣的過壓力影響保持懸掛在輸送帶上。原則上也可利用此個別板運送器將工作物拿起。但為此,該輸送帶須很密封地定位在工作物的表面上,因為如若不然,要將工作物拿起的所需的吸力只能用一強力真空泵達成。The document international patent WO 2009/059586 A1 refers to an individual plate carrier which is suitable for unloading and transporting contact-sensitive work from a stack. A "perforated conveyor belt" that is operated via at least two rollers is subjected to a vacuum, so that the plate-like workpiece to be conveyed is kept suspended on the conveyor belt by the influence of atmospheric overpressure. In principle, this individual plate transporter can also be used to pick up the work. To this end, however, the conveyor belt must be positioned very tightly on the surface of the work, because otherwise the required suction to lift the work can only be achieved with a powerful vacuum pump.

依此,要作吸取,需要提高吸取功率,以將工作物舉起。在工作物已達到它在輸送帶上或在運送軌上的終位置之前,人們希望吸取功率能減少,因為否則的話,就有一種危險:該被加速的工作物由於慣性力大,會太強地撞擊在輸送帶或運送軌表面而受損。Accordingly, in order to absorb, it is necessary to increase the suction power to lift the work. Before the work object has reached its final position on the conveyor belt or on the transport rail, it is desirable to reduce the power absorbed, because otherwise there is a danger that the accelerated work will be too strong due to inertia. The ground impact on the conveyor belt or the surface of the transport rail is damaged.

在實用上往往需要將用於拿起工作物的吸力選設成比本來所需的保持力量大十倍(該保持力量只需略大於工作物的質量造成的重力略大)。In practice, it is often necessary to select the suction force for picking up the work object to be ten times larger than the originally required holding force (the holding force is only slightly larger than the mass caused by the mass of the work object).

也有一些拿起工作物的操作方式,在此中吸力還須選設成更高,這種情形,舉例而言,係當玻璃板放在一堆疊上或放在具有很光滑的表面的枱面上的情況。在此情形,玻璃板與枱面之間幾乎沒有空氣。如果將玻璃板舉起,首先要克服周圍的空氣壓力,因為在舉起時產生一小縫隙,空氣須流入該縫隙。只有在該縫隙充以空氣且因此縫隙空間內的壓力等於外界空氣壓力時,最先作用的空氣的壓迫力量也才會等於零,因此只要克服重力,用於將平滑板分開所需的附加力量在以下稱為「剝離力量」。There are also some ways of picking up the work, in which the suction must be set higher, in this case, for example, when the glass plate is placed on a stack or placed on a table with a very smooth surface. Case. In this case, there is almost no air between the glass plate and the table top. If the glass plate is lifted, the surrounding air pressure must first be overcome, because a small gap is created when lifting, and air must flow into the gap. Only when the gap is filled with air and therefore the pressure in the gap space is equal to the outside air pressure, the pressing force of the first acting air is equal to zero, so the additional force required to separate the smoothing plates is overcome as long as the gravity is overcome. Hereinafter referred to as "peeling power."

一真空吸取站(在此站該工作物藉吸取而被拿起)須依此設計成使抓持器的吸力先克服該剝離力量,然後該工作物反抗地心引力而加速。如果工作物距輸送帶面有一段距離,則人們希望將工作物剎止住,使它絕不會受慣性力衝撞在抓持器面上。A vacuum suction station (where the work object is picked up by suction) is designed such that the suction force of the gripper first overcomes the peeling force, and then the work object accelerates against gravity. If the work object is at a distance from the conveyor belt surface, it is desirable to stop the work object so that it will never be hit by the inertial force on the gripper surface.

WO 2009/059586A1的技術構想基本上不能滿足這些需求。此構想的另一缺點為:工作物受真空作用牢牢壓到輸送帶上,因此板形工作物只能相對於一假想的Z軸有一定的位置,在X-Y平面中的側面方向很難控制,因為工作物在吸取時不但沿Z軸運動,而且也會在X-Y平面不可控制地轉動,然後固定在一錯誤位置。另一缺點為這類裝置的能量消耗大,因為這裡存在著一種技術上的矛盾。要將構件保持在輸送帶上,具有小噴嘴的噴嘴場就夠了。如果極多小噴嘴分佈在輸送帶表面上,則薄構件均勻地被保持住,但這種噴嘴場不大適合從一堆疊將構件拿起來,因為要做此目的,在WO 2009/059586A1所述的裝置整體須很密不漏氣地移過來到工作物的堆疊上,這點只能用繁複的控制技術達成。此外,儘管上述裝置緊密,但它太重且龐大,因此使此裝置運動的機械成本很大。另一種變更的解決方案在於對將堆疊跟踪(nachfhren,英:tracking)到輸送帶表面上。這種方式中,要將堆疊以不連續方式舉起,其調節成本也相對地高,因為往往要在工作物表面與輸送帶表面之間的很小的間隔作「後調整」(nachregeln,英:after-regulate)。The technical concept of WO 2009/059586 A1 basically fails to meet these needs. Another disadvantage of this concept is that the work object is firmly pressed onto the conveyor belt by the vacuum, so the plate-shaped work can only have a certain position relative to an imaginary Z-axis, and the lateral direction in the XY plane is difficult to control. Because the work moves not only along the Z axis, but also uncontrollably in the XY plane, and then fixed in an incorrect position. Another disadvantage is that the energy consumption of such devices is large because there is a technical contradiction here. To keep the components on the conveyor belt, a nozzle field with small nozzles is sufficient. If a very large number of small nozzles are distributed on the surface of the conveyor belt, the thin members are held evenly, but such a nozzle field is not suitable for picking up the components from a stack, for this purpose, as described in WO 2009/059586 A1. The overall device must be moved tightly and tightly to the stack of work, which can only be achieved with complicated control techniques. Moreover, although the above device is compact, it is too heavy and bulky, so the mechanical cost of moving the device is large. Another solution to the change is to track the stack (nachf Hren, English: tracking) to the surface of the conveyor belt. In this way, the stack is lifted in a discontinuous manner, and the adjustment cost is relatively high, because it is often necessary to make a "post-adjustment" at a small interval between the surface of the work object and the surface of the conveyor belt (nachregeln, :after-regulate).

為了要能將工作物由一較大的距離從堆疊舉起,必須產生較高的吸取壓力。這點也只有當輸送帶具有較大的孔時(俾能配合較強力的真空泵產生較大的空氣體積流)才有可能。但如此一來,產生的「空氣通過量」(Luftdurchsatz,英:air-throughput)就大得多,這是因為特別是在輸送帶上沒有工作物懸掛的那些位置會吸取極多空氣之故。這點使能量成本大大增加。In order to be able to lift the work from the stack by a large distance, a higher suction pressure must be generated. This is only possible when the conveyor belt has a large hole (a vacuum pump with a strong force can generate a large air volume flow). But in this case, the resulting "air throughput" (Luftdurchsatz, English: air-throughput) is much larger, because especially in the conveyor belt where there is no work hanging, it will absorb a lot of air. This makes the energy cost greatly increased.

所有那些依WO 2009/059586A1所述原理工作的結構的另一個共同的缺點係如下所述:只有當該堆疊係自由地(亦即非放在容器中而係外露者)豎立著或至少最上方的工作物係自由不被遮住地放置著時(亦即從容器突出外露),則才能將工作物從一堆疊拿開。然而實用上往往有必要且較宜將該堆疊的工作物儲放在一儲匣(Magazin)中。如果不作附加的技術措施,使堆疊的最上方的工作物突出超出儲匣的邊緣之上而外露或與該邊緣在一平面上,則利用WO 2009/059586A1殆不可能將工作物從這種卡匣取出。Another common disadvantage of all those structures that operate according to the principles described in WO 2009/059586 A1 is as follows: only when the stack is freely (ie, not exposed to the container but exposed) is erected or at least topped The work can be removed from a stack when it is free to be placed in a hidden position (ie, exposed from the container). However, it is often practical and necessary to store the stacked work in a reservoir (Magazin). If no additional technical measures are taken to cause the uppermost work of the stack to protrude beyond the edge of the magazine and be exposed or in a plane with the edge, it is not possible to use the work from such a card using WO 2009/059586 A1 Take out.

因此本發明的目的在提供一種將平坦工作物拿起及運走的裝置,該裝置構成一緊密的構造組,且利用此裝置,即使在一儲匣中的工作物也可從該儲匣取出。此外該工作物可在輸送帶上在X-Y平面中很容易地調整,換言之,可送到一預定位置。SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a device for picking up and transporting a flat work object, the device forming a compact construction set, and with which the work object in a magazine can be removed from the storage. . In addition, the work can be easily adjusted on the conveyor belt in the X-Y plane, in other words, can be sent to a predetermined position.

這種目的係利用申請專利範圍第1項的一種用於將平坦工作物拿起及運走的裝置達成,其中該裝置具有以下特點:──至少有一運送軌,該運送軌具有真空保持噴嘴以將該工作物在運送軌下方懸掛保持住,及且有一空氣軸承以將該工作物沿運送軌以無接觸的方式保持住;──至少有一驅動裝置,用於將該工作物沿運送軌移動;以及──至少有一氣壓式抓持裝置,它具有至少一氣壓式抓持器噴嘴,其中該抓持器噴嘴整合在運送軌中,使該噴嘴上緣用該運送軌道的運送表面封閉或設成在運送表面中下降的方式。由於有一氣壓式抓持裝置整合在輸送帶中,故輸送帶的拿起位置(Aufnahmestelle,英:take-up position)可定位在一工作物卡匣(Werkstckkassette,英:workpiece-cassette)上方,且即使是在儲匣邊緣下方的工作物也能拿掉換言之,該抓取裝置以氣壓方式伸入儲匣進去,且將工作物舉起到一高度,使真空噴嘴能接手該工作物並將它保持在運送軌的下側,為了使工作物不會接觸到運送軌,該工作物須利用一空氣軸承保持在距運送軌一段距離處。如此工作物可在XY平面自由運動,因此在有必要時,其位置可修正。This object is achieved by a device for picking up and transporting a flat work object of claim 1 wherein the device has the following features: - at least one transport rail having a vacuum holding nozzle Holding the work object under the transport rail, and having an air bearing to hold the work object in a contactless manner along the transport rail; at least one driving device for moving the work object along the transport rail And at least one pneumatic gripping device having at least one pneumatic gripper nozzle, wherein the gripper nozzle is integrated in the transport rail such that the upper edge of the nozzle is closed or provided with the transport surface of the transport rail The way it falls in the transport surface. Since a pneumatic gripping device is integrated in the conveyor belt, the take-up position of the conveyor belt (Aufnahmestelle, take-up position) can be positioned in a work cartridge (Werkst Ckkassette, English:workpiece-cassette) above, and even the work under the edge of the storage can be removed, in other words, the gripping device is pneumatically inserted into the storage and lifts the work to a height, The vacuum nozzle is capable of taking over the work and holding it on the underside of the transport rail so that the work object must be held at a distance from the transport rail by an air bearing so that the work does not come into contact with the transport rail. Such a work can move freely in the XY plane, so its position can be corrected if necessary.

在依申請專利範圍第2項的該用於將平坦工作物拿起及運走的裝置的一進一步特點,該空氣軸承為一噴嘴場(Dsenfeld,英:nozzle field,具有多數噴嘴的區域),壓縮空氣由該噴嘴場出來。A further feature of the apparatus for picking up and transporting a flat work object according to item 2 of the scope of the patent application, the air bearing is a nozzle field (D Senfeld, English: nozzle field, the area with most nozzles, compressed air coming out of the nozzle field.

在依申請專利範圍第3項的一種用於將平坦工作物拿起及運走的裝置的進一步特點,該空氣軸承為一種超音波空氣軸承(Ultraschallluftlager,英:ultrasonic air bearing)。A further feature of a device for picking up and transporting a flat work item according to item 3 of the patent application is an ultrasonic air bearing.

在依申請專利範圍第4項的一種用於將平坦工作物拿起及運走的裝置的進一步特點,該驅動裝置為一運轉的帶,聯動器的突起部設在該帶上。According to a further feature of the apparatus for picking up and transporting a flat work item according to item 4 of the patent application, the drive unit is a running belt, and the projection of the coupler is provided on the belt.

在依申請專利範圍第5項的一種用於將平坦工作物拿起及運走的裝置的進一步特點,該驅動裝置為一運轉的聯動器帶,而運送軌向側邊傾斜,因此工作物由於重力而向側邊朝向聯動器帶滑動,且由於摩擦力而受聯動器帶帶動沿運送方向運動。According to a further feature of the apparatus for picking up and transporting a flat work object according to claim 5, the drive device is a running coupler belt, and the transport rail is inclined to the side, so that the work object is Gravity slides toward the side of the coupler belt and is moved by the coupler belt in the transport direction due to the frictional force.

在依申請專利範圍第6項的一種用於將平坦工作物拿起及運走的裝置的進一步特點,該工作物係由於運送軌向下傾斜而被運送。According to a further feature of the apparatus for picking up and transporting a flat work item according to item 6 of the patent application, the work item is transported due to the downward inclination of the transport rail.

在依申請專利範圍第7項的一種用於將平坦工作物拿起及運走的裝置的進一步特點,該工作物被斜設的吹氣噴嘴(Blasdse,英:blowing nozzle)吹動而運送。According to a further feature of the device for picking up and transporting a flat work item according to item 7 of the patent application, the work object is obliquely blown nozzle (Blasd Se, English: blowing nozzle) is blown and shipped.

在依申請專利範圍第8項的一種用於將平坦工作物拿起及運走的裝置的進一步特點,該工作物利用斜設的吸取噴嘴(Saugdse,英:sucking nozzle)吸取而運送。A further feature of a device for picking up and transporting a flat work item according to item 8 of the patent application, the work object utilizing a slanted suction nozzle (Saugd Se, English: sucking nozzle) pick up and transport.

在依申請專利範圍第9項的一種用於將平坦工作物拿起及運走的裝置的進一步特點,該工作物利用斜設的超音波產生器而運送。According to a further feature of the apparatus for picking up and transporting a flat work item according to claim 9 of the patent application, the work object is transported using a slanted ultrasonic generator.

在依申請專利範圍第10項的一種用於將平坦工作物拿起及運走的裝置的進一步特點,該抓持裝置為一種柏努利噴嘴(Bernoulli-Dse,英:Bernoulli-nozzle)。A further feature of a device for picking up and transporting a flat work object according to claim 10, the gripping device being a Bernoulli-D nozzle (Bernoulli-D) Se, English: Bernoulli-nozzle).

在依申請專利範圍第11項的一種用於將平坦工作物拿起及運走的裝置的進一步特點,該抓持裝置為一真空吸取噴嘴。A further feature of a device for picking up and transporting a flat work object according to claim 11 of the patent application is that the gripping device is a vacuum suction nozzle.

在依申請專利範圍第12項的一種用於將平坦工作物拿起及運走的裝置的進一步特點,該抓持裝置為一具有壓力平衡室的真空吸取噴嘴,其中在該壓力平衡室中至少設有一個除空氣孔。利用此真空吸取噴嘴,即使很薄的工作物也可舉起,而不會使它們飄擺不定。此外連重的工作物也可乾淨俐落地舉起,因此可避免工作物由於慣性力而撞擊在輸送帶上的情事。A further feature of a device for picking up and transporting a flat work object according to claim 12, wherein the gripping device is a vacuum suction nozzle having a pressure balance chamber, wherein at least the pressure balance chamber is There is a hole in addition to the air. With this vacuum suction nozzle, even thin workpieces can be lifted without making them float. In addition, the heavy work can be lifted and cleaned up, so that the work object can be prevented from hitting the conveyor belt due to inertial force.

此具有壓力平衡室的真空吸取噴嘴在以下說明。This vacuum suction nozzle having a pressure balance chamber is explained below.

要作吸取,需要一預定的吸取功率,以將工作物舉起。人們希望在工作物達到其終位置之前將吸取功率減少,否則會有一種危險:該被加速的工作物由於慣性力而克服了空氣軸承的逆向阻力並衝撞到抓持器表面。To make a suction, a predetermined suction power is required to lift the work. It is desirable to reduce the suction power before the work reaches its final position, otherwise there is a danger that the accelerated work overcomes the reverse resistance of the air bearing and collides with the gripper surface due to inertial forces.

在實用上往往需要使最大吸取力量選設成比本來所需的保持力量大十倍(此保持力量只需比由工作物的質量所決定的重力略大)。In practice, it is often necessary to set the maximum suction force ten times larger than the original required holding force (this maintains the force only slightly larger than the gravity determined by the quality of the work).

還有一些抓持器在操作中,其最大吸取力量還須選設成更大。舉例而言,如果玻璃板倚在具有很平滑的堆疊或枱上時,情形就是如此,在此情形中,在玻璃板與枱面之間幾乎沒有空氣,如果將玻璃板舉起,則在開始時須克服周圍的一股空氣壓力,俾在舉起時能產生一小縫隙,使空氣能流入此縫隙。當該縫隙充以空氣且因此在縫隙空間中的壓力等於外界空氣壓力時,也就是最初作用的壓迫力量等於零時,就只有重力需要克服。這種將光滑的板分開所需的附加力量在以下稱為剝離力量。There are also some grippers in operation, the maximum suction force must be selected to be larger. This is the case, for example, if the glass plate rests on a very smooth stack or table, in which case there is almost no air between the glass plate and the table, and if the glass plate is lifted, at the beginning It is necessary to overcome the surrounding air pressure, and when it is lifted, it can create a small gap so that air can flow into the gap. When the gap is filled with air and therefore the pressure in the gap space is equal to the outside air pressure, that is, when the initially acting compressive force is equal to zero, only gravity needs to be overcome. The additional force required to separate the smooth panels is referred to below as the peeling force.

因此一種真空吸取抓持器(它以無機械式接觸的方式吸取工作物)須設計成使抓持器的吸取力量先克服該剝離力量,然後將工作物逆著地心引力向抓持器面的方向加速。如果工作物距抓持器面還有一段預定距離時,則人們希望此時將工作物剎止住,俾使它不會由於慣性力而向抓持器面衝擊。Therefore, a vacuum suction gripper (which sucks the workpiece in a manner that does not mechanically contact) must be designed such that the suction force of the gripper overcomes the peeling force first, and then the work object is biased against the gravity to the gripper surface. The direction is accelerating. If the work object still has a predetermined distance from the gripper surface, then it is desirable to stop the work at this time so that it does not impact the gripper surface due to the inertial force.

由於在自動程序中,所要舉起的工作物都相同因此重量也都相同,因此在理論上可在吸取噴嘴後方設一快速反應的閥控制手段,它在克服剝離力後,將吸取氣流作第一次節流(drosseln,英:thnottling),因此吸取力量設定成配合板的最佳加速度。當板已舉起一預定的路徑,則可作第二次節流,以將其速度剎止到使板如此達到在抓持器面上它的終位置。Since in the automatic program, the work to be lifted is the same and the weight is also the same, it is theoretically possible to provide a quick-reacting valve control means behind the suction nozzle, which overcomes the peeling force and then draws the airflow as the first One throttling (drosseln, English: thnottling), so the suction force is set to match the optimum acceleration of the plate. When the board has lifted a predetermined path, a second throttle can be made to brake its speed until the board reaches its final position on the gripper surface.

行家們很清楚,要控制這種高動力的程序係極端複雜且因此成本很高,因為氣態介質係可壓縮者而很難控制。It is clear to the experts that controlling such a highly dynamic program is extremely complicated and therefore costly because the gaseous medium is compressible and difficult to control.

依此,將一種具有以下特點的真空抓持器整合到輸送帶中:此抓持器板配合輸送帶的底面形狀。在抓持器板中至少設一「吸取開口」(Ansaugffnung,英:sucking opening),它被施以一預定之真空(低壓),有一「工作物節流面」(Werkstck-Drossel-Flche,英:workpiece-throttling-face)繞該吸取開口形成。此稱為「工作物節流面」的面係為一「面部段」,它在吸取工作物時,與工作物表面形成一定縫隙,當工作物已達到其終位置時,工作物掛在抓持板上的此縫隙上。依此,該工作物節流面的度量尺寸設計成使在工作物節流面上產生的吸取力量比該工作物之反向的重力(它與工作物的質量有關)更大。Accordingly, a vacuum gripper having the following features is integrated into the conveyor belt: the gripper plate cooperates with the bottom surface shape of the conveyor belt. At least one "suction opening" is provided in the gripper plate (Ansaug Ffnung, English: sucking opening), it is applied to a predetermined vacuum (low pressure), there is a "work throttle" (Werkst ck-Drossel-Fl Che, English: workpiece-throttling-face) is formed around the suction opening. The surface called the "work surface throttle surface" is a "facial section" which forms a certain gap with the surface of the workpiece when the workpiece is sucked. When the work object has reached its final position, the work object is hung in the scratch. Hold this gap on the board. Accordingly, the throttling surface of the work is sized such that the suction force generated on the throttling surface of the work object is greater than the gravity of the work object (which is related to the quality of the work object).

此外,在抓持器板之朝向工作物的那一側上至少設有一凹隙。依本發明的技術內容,該凹隙設置成使它經常在工作物節流面之外。換言之,吸取的空氣從抓持器板邊緣流出,沿抓持器板流到吸取開口過去,且通過與此吸取開口相關的凹隙。在凹隙中至少有一除空氣孔。Furthermore, at least one recess is provided on the side of the gripper plate facing the workpiece. According to the teachings of the present invention, the recess is arranged such that it is often outside the throttle surface of the workpiece. In other words, the sucked air flows out from the edge of the gripper plate, flows along the gripper plate to the suction opening, and passes through the recess associated with the suction opening. There is at least one air removal hole in the recess.

以下說明該真空抓持器的功能:如果抓持器下側已接近到工作物表面的約2mm~0.5mm處,則該真空抓持器的作用一如傳統真空抓持器,換言之,空氣從抓持器邊緣吸取且流到吸取開口過去,在整個抓持器面的範圍形成一真空,真空強度朝向抓持器邊緣降低。在凹隙的區域,該真空度係為恆定值。一股預定之空氣體積流也經該除空氣孔被吸取。但此體積流相較於在抓持器面上在該2mm~0.5mm寬的縫隙內吸取的體積流而言,比較小。在這種組成(Konstellation,英:constellation)中,抓持器在一預設之恆定吸取壓力及預設之抓持器板面積的場合具有其最大的慣性力量。The function of the vacuum gripper is described below: if the lower side of the gripper is close to about 2 mm to 0.5 mm of the surface of the workpiece, the vacuum gripper functions as a conventional vacuum gripper, in other words, air from The gripper edge draws and flows past the suction opening, creating a vacuum across the gripper surface that reduces the vacuum strength toward the gripper edge. In the region of the recess, the degree of vacuum is a constant value. A predetermined air volume flow is also drawn through the air removal aperture. However, this volumetric flow is relatively small compared to the volumetric flow taken up in the 2 mm to 0.5 mm wide gap on the gripper surface. In this composition (Konstellation, English: constellation), the gripper has its maximum inertial force at a predetermined constant suction pressure and a preset gripper plate area.

工作物越接近抓持器表面,則該縫隙越窄,因此流動橫截面(空氣可經此流動橫截面由外──亦即從抓持器邊緣開始──後流)越小。但除空氣孔的橫截面保持恆定。這點導致在凹隙中不再能形成真空,因為經常有外界空氣經除空氣孔後流過去,流動橫截面(空氣可從邊緣開始經此橫截面後流)越小,此效應越加強。因此凹隙的面積的範圍內不再能促進吸取力量,換言之,由於吸取力量為有效吸取面積乘以吸取壓力──且該有效吸取面大致只仍限於工作物節流面的範圍,因此該有效吸取面積比起在抓持器面距工作物表面較大距離時小了許多倍。因此吸取力量也比在抓持器表面距工作物表面較大距離時小了許多倍。The closer the workpiece is to the gripper surface, the narrower the gap, so the smaller the flow cross section (air flow through the flow cross-section - ie from the gripper edge - back flow). However, the cross section of the air hole remains constant. This results in a vacuum no longer being formed in the recess, since the outside air often flows through the air removal hole, and the smaller the flow cross section (air can flow from the edge through the cross section), the stronger the effect. Therefore, the suction force can no longer be promoted in the range of the area of the recess, in other words, since the suction force is the effective suction area multiplied by the suction pressure - and the effective suction surface is substantially only limited to the range of the throttle surface of the workpiece, the effective The suction area is many times smaller than when the gripper surface is a large distance from the surface of the workpiece. Therefore, the suction force is also many times smaller than when the gripper surface is at a large distance from the surface of the workpiece.

如此產生所要效果:當距離所要抓持的工作物的表面的距離較大時,該真空抓持器有很大的吸力,當工作物表面進一步靠近真空抓持器時,此吸力很快降低,因此當度量尺寸適當設計時,工作物撞到抓持器的情事可避免。This produces the desired effect: the vacuum gripper has a large suction force when the distance from the surface of the workpiece to be grasped is large, and the suction force is rapidly lowered when the surface of the work object is further close to the vacuum gripper. Therefore, when the metric is properly designed, the work of hitting the gripper can be avoided.

因此吸力係自動地降低。當該真空抓持器依工作物重量及吸取壓力大小而定由行家作對應的度量設計時,工作物可漂浮,換言之,工作物表面不會接觸到真空抓持器。在此情形中,在該將工作物舉起的吸力以及該將工作物向下拉的重力之間調整成力量平衡。如果吸力改變,例如變得稍微較弱,則工作物略下降。然而如此一來,有效吸取面積加大,因此吸力提高,且工作物再被向上拉。Therefore, the suction system is automatically lowered. When the vacuum gripper is designed according to the weight of the work object and the suction pressure by the expert, the work object can float, in other words, the surface of the work object does not contact the vacuum gripper. In this case, the force balance is adjusted between the suction force lifting the work object and the gravity that pulls the work object downward. If the suction changes, for example, becomes slightly weaker, the work is slightly lowered. However, as a result, the effective suction area is increased, so the suction force is increased and the work is pulled up again.

這種漂浮狀態一直在調整,且與工作物的表面性質無關。因此利用此抓持器不但可拿住具有很光滑的表面的玻璃板,而且也可拿住具粗糙表面的木板。This floating state is constantly being adjusted and is independent of the surface properties of the work. Therefore, the gripper can be used not only to hold a glass plate having a very smooth surface, but also to hold a wooden board having a rough surface.

此用於將平坦工作拿起及運走的裝置利用實施例配合圖式詳細說明。This means for picking up and transporting the flat work is explained in detail by way of an embodiment with reference to the drawings.

首先說明可在該裝置中較佳地使用的真空抓持器,然後說明在一可能之實施例中該裝置之整體構造。First, a vacuum gripper that can be preferably used in the apparatus will be described, and then the overall configuration of the apparatus in a possible embodiment will be described.

圖1a及1b顯示一圓形真空抓持器的橫截面,它用於拿住一工作物(1),其中該真空抓持器具有以下特徵:一圓盤形抓持器板(2)的中央點有一吸取開口(3),有一圓環形工作物節流面(6)繞該吸取開口(3)形成,其作用方式在下文說明。沿抓持器板邊緣的方向設有一環形凹隙(4),它在此情形中具有二個錯開180度的除空氣孔,換言之,整個凹隙(4)與外界大氣連通。Figures 1a and 1b show a cross section of a circular vacuum gripper for holding a workpiece (1), wherein the vacuum gripper has the following features: a disc shaped gripper plate (2) The central point has a suction opening (3) around which a toroidal working material throttle surface (6) is formed, the mode of action of which is explained below. An annular recess (4) is provided in the direction of the edge of the gripper plate, which in this case has two air removal holes offset by 180 degrees, in other words, the entire recess (4) is in communication with the outside atmosphere.

圖1a顯示的工作物(1)仍在起始位置。利用吸取孔(3)將空氣吸取,空氣經縫隙(7)向側邊後流,該縫隙一般為約2mm~0.5mm之間。在此位置時,真空抓持器有其最大的吸力,此力大於工作物(1)的重力。The work item (1) shown in Figure 1a is still in the starting position. The air is sucked by the suction hole (3), and the air flows backward through the slit (7), and the gap is generally between about 2 mm and 0.5 mm. In this position, the vacuum gripper has its maximum suction force, which is greater than the weight of the work (1).

如此,工作物(1)被舉起,換言之,如果抓持器下側靠近工作物表面,則此真空抓持器的作用一如傳統真空抓持器,換言之,空氣從抓持器邊緣開始被吸取,並流到吸取開口過去。在整個抓持器面的範圍形成一真空(低壓),其強度向抓持器邊緣減弱。但在凹隙(4)的範圍中,該真空度P為恆定者,這點在以下的座標圖A中可看出呈高原線(Plateau-Linie,英:plateau-line)(8)的形式。一預定之空氣體積流也經此除空氣孔吸取。但此體積流相較於在該2mm~0.5mm寬的縫隙內的抓持器面積上吸取的空氣流來較小。Thus, the work object (1) is lifted, in other words, if the lower side of the gripper is close to the surface of the work object, the vacuum gripper functions as a conventional vacuum gripper, in other words, the air is started from the edge of the gripper. Draw and flow to the suction opening in the past. A vacuum (low pressure) is formed across the entire gripper surface, the strength of which weakens toward the gripper edge. However, in the range of the recess (4), the degree of vacuum P is constant, which can be seen in the form of Plateau-Linie (plateau-line) (8) in the following coordinate diagram A. . A predetermined volumetric flow of air is also drawn through the air holes. However, this volumetric flow is relatively small compared to the airflow drawn over the gripper area within the 2 mm to 0.5 mm wide gap.

在座標圖B中除了座標圖A的壓力走勢外,另外還顯示壓力走勢(9),一如它在不具凹隙(4)時所調整者。In addition to the pressure trend of the coordinate map A in the coordinate map B, the pressure trend (9) is also displayed, as it is adjusted without the recess (4).

工作物越靠近抓持器表面(如圖1b所示),則縫隙(7)越窄[空氣可經該縫隙由外─亦即從抓持器板的邊緣開始-後流]。流過橫截面(空氣可經該橫截面從邊緣開始後流)越小,則這種效應越強。如此,此時該凹隙(4)的面積不再促進吸取力量。換言之,由於吸力為有效吸取面積和吸取壓力的乘積,而且有效吸取面積主要還只限於工作物節流面(6)的範圍,因此有效吸取面積比當抓持器表面距工作物表面的距離較大時小了許多倍。因此吸力也比當抓持器表面距工作物表面距離較大時要小於許多倍。The closer the workpiece is to the gripper surface (as shown in Figure 1b), the narrower the gap (7) [air can pass outside the gap - that is, from the edge of the gripper plate - back flow]. The smaller the flow through the cross section (air can flow from the edge through the cross section), the stronger this effect. Thus, the area of the recess (4) at this time no longer promotes the suction force. In other words, since the suction force is the product of the effective suction area and the suction pressure, and the effective suction area is mainly limited to the range of the working material throttle surface (6), the effective suction area is larger than the distance from the gripper surface to the surface of the workpiece. It is many times smaller when it is big. Therefore, the suction force is also less than many times when the distance of the gripper surface is larger than the surface of the workpiece.

如此產生所要效果:該真空抓持器在距所要抓持的工作物的表面有較大距離時有很大的吸力。當工作物表面進一步靠近真空抓持器時,此吸力大大下降,因此當度量尺寸適當設計時,可避免工作物碰到抓持器。This produces the desired effect: the vacuum gripper has a large suction force when there is a large distance from the surface of the workpiece to be gripped. When the surface of the work object is further close to the vacuum gripper, the suction force is greatly reduced, so that when the metric is appropriately designed, the work object can be prevented from hitting the gripper.

在此圖下方的座標圖A及B顯示具有或不具凹隙(4)時的壓力走勢。The coordinate plots A and B below the graph show the pressure trend with or without the recess (4).

因此,吸力係自動地下降。當真空抓持器依工作物重量及吸取壓力強度由行家作對應的度量設計時,工作物可漂浮,換言之,工作物表面不會接觸到真空抓持器,在此情形中,在吸力(它將工作物舉起)與重力(它將工作物往下拉)之間調整成力量平衡。如果吸力改變,例如變得稍弱一些,則工作物(1)略下降,但如此該有效吸取面積加大,如此吸力提高,並將工作物(1)再向力拉。Therefore, the suction system automatically drops. When the vacuum gripper is designed according to the weight of the work object and the suction pressure intensity by the expert, the work object can float, in other words, the surface of the work object does not touch the vacuum gripper, in this case, in the suction force (it Adjust the balance between the work and the gravity (which pulls the work down) into a balance of forces. If the suction changes, for example, becomes slightly weaker, the work (1) is slightly lowered, but the effective suction area is increased, so that the suction is increased, and the work (1) is pulled again.

噴嘴的幾何性質及所需壓力和真空度係利用所要抓持的工作物的性質決定。在許多工程的程序,工作物係相同,因此噴嘴和壓力的參數也可保持恆定。由於噴嘴和壓力的參數取決於大小、重量、表面積、及工作物的一系列特徵有關,因此不必提供特別的噴嘴類型及其他參數。The geometry of the nozzle and the required pressure and vacuum are determined by the nature of the work to be grasped. In many engineering procedures, the working system is the same, so the parameters of the nozzle and pressure can be kept constant. Since nozzle and pressure parameters are dependent on size, weight, surface area, and a range of features of the work, it is not necessary to provide special nozzle types and other parameters.

圖2a顯示本發明的一側視圖,它沒有用於移動工作物(1)[該工作物堆疊在二個卡匣(10)中]的驅動裝置。運送軌(11)定位在該二個卡匣(10)之上方。在運送軌下側上設有「真空保持噴嘴」(12),其吸力夠大,以將工作物保持在運送軌的下側。此外,運送軌設計成超音波空氣軸承的形式,換言之,該運送軌被一超音波產生器(圖未示)振動,因此在工作物(1)與運送軌之間形成一空氣膜,這種超音波空氣軸承或超音波輸送帶係先前技術習知者。因此不作進一步說明。如此,工作物(1)以無接觸的方式在運送軌下方漂浮。該真空保持噴嘴(12)的吸力不足以從一卡匣(13)將一工作物(1)拿出。因此將一氣壓式抓持裝置(2)整合在該運送軌中,該氣壓式抓持裝置(2)產生夠強的吸取壓力,以將工作物舉起。雖然圖1a中說明者係一種較佳的適合的吸取噴嘴(2),但也可使用如抓持器技術習知的其他吸取噴嘴或柏努利噴嘴,這點係利用雙箭頭象徵性地表示。利用此裝置,即使卡匣或儲匣的上緣(13a)突出超過堆疊上側,也能將其中的工作物抓起來及運走。Figure 2a shows a side view of the invention without the drive means for moving the work (1) [the work is stacked in two cassettes (10)]. A transport rail (11) is positioned above the two cassettes (10). A "vacuum holding nozzle" (12) is provided on the lower side of the transport rail, the suction force being large enough to hold the work on the underside of the transport rail. Further, the transport rail is designed in the form of an ultrasonic air bearing, in other words, the transport rail is vibrated by an ultrasonic generator (not shown), thereby forming an air film between the work object (1) and the transport rail. Ultrasonic air bearings or ultrasonic conveyor belts are known to those skilled in the art. Therefore, no further explanation will be given. In this way, the work (1) floats under the transport rail in a contactless manner. The suction of the vacuum holding nozzle (12) is not sufficient to take a workpiece (1) out of a cassette (13). Therefore, a pneumatic gripping device (2) is integrated in the transport rail, and the pneumatic gripping device (2) generates a strong suction pressure to lift the work. Although a preferred suitable suction nozzle (2) is illustrated in Figure 1a, other suction nozzles or Bernoulli nozzles as is known in the art of grippers may be used, which are symbolically represented by double arrows. . With this device, even if the upper edge (13a) of the cassette or the magazine protrudes beyond the upper side of the stack, the work therein can be caught and carried away.

圖號(14)表示用於將工作物堆疊舉起用的舉升裝置,利用它可將放在最上面的工作物定位到一位置,工作物可被抓持器(2)由此位置拿出。圖號(15)表示吹氣噴嘴,利用它可將工作物以一定方式例如儲放到一儲放枱(16)上。Figure (14) shows a lifting device for lifting the work stack, with which the uppermost work can be positioned to a position where the work can be taken up by the gripper (2) . Figure (15) shows the blowing nozzle with which the work can be stored, for example, on a storage station (16) in a certain manner.

圖2b顯示一驅動裝置的設計的數種可能方式,輸送帶(17)在運送軌兩側上運轉,這些輸送帶隔預定距離具有「聯動器突起部」(18)。這些聯動器突起部(18)從後面搭住工作物(1)的後緣並將它向前推動。Figure 2b shows several possible ways of designing a drive unit with the conveyor belt (17) running on either side of the transport rail with "coupling projections" (18) at predetermined distances. These coupler projections (18) hold the trailing edge of the work (1) from behind and push it forward.

要強調一點,圖示之本發明的裝置的實施例可配合一工程的程序,因此,舉例而言,上述的裝置可在一系統中與數個運送軌合作。It is emphasized that the illustrated embodiment of the apparatus of the present invention can be adapted to an engineering procedure such that, for example, the apparatus described above can cooperate with a plurality of shipping rails in a system.

(1)...工作物(1). . . Work object

(2)...抓持器板(2). . . Gripper plate

(3)...吸取開口(3). . . Suction opening

(4)...凹隙(4). . . Gap

(6)...工作物節流面(6). . . Work throttle

(7)...縫隙(7). . . Gap

(8)...高原線(8). . . Plateau line

(9)...壓力走勢(9). . . Pressure trend

(10)...卡匣(10). . . Card

(11)...運送軌(11). . . Transport rail

(12)...真空保持噴嘴(12). . . Vacuum holding nozzle

(13)...卡匣(13). . . Card

(13a)...上緣(13a). . . Upper edge

(14)...舉升裝置(14). . . Lifting device

(15)...吹氣噴嘴(15). . . Blowing nozzle

(16)...儲放枱(16). . . Storage platform

(17)...輸送帶(17). . . conveyor

(18)...聯動器突起部(18). . . Coupling protrusion

圖1係該較佳之抓持器噴嘴的構造及作用方式;Figure 1 is a configuration and mode of operation of the preferred gripper nozzle;

圖2a係不具驅裝置之用於將平坦工作物拿起及運走的裝置的側視圖;Figure 2a is a side view of a device for picking up and transporting a flat work without a drive;

圖2b係具驅裝置之用於將平坦工作物拿起及運走的裝置的側視圖。Figure 2b is a side view of the device for picking up and transporting a flat work with a drive.

(1)...工作物(1). . . Work object

(2)...抓持器板(2). . . Gripper plate

(11)...運送軌(11). . . Transport rail

(12)...真空保持噴嘴(12). . . Vacuum holding nozzle

(13)...卡匣(13). . . Card

(13a)...上緣(13a). . . Upper edge

(14)...舉升裝置(14). . . Lifting device

(15)...吹氣噴嘴(15). . . Blowing nozzle

(16)...儲放枱(16). . . Storage platform

Claims (9)

一種用於將平坦工作物拿起及運走的裝置,其中該裝置具有以下特點:--至少一運送軌(11),該運送軌具有真空保持噴嘴(12)以將該工作物在運送軌(11)下方懸掛保持住,及且有一空氣軸承以將該工作物沿運送軌(11)以無接觸的方式保持住;--至少一驅動裝置(17)(18),用於將該工作物沿運送軌移動;--至少一氣壓式抓持裝置(2),它具有至少一氣壓式抓持器噴嘴,其中該抓持器噴嘴整合在運送軌中,使該噴嘴上緣用該運送軌道的運送表面封閉或設成在運送表面中下降的方式,且該抓持裝置(2)設計成一真空吸取噴嘴,具有以下特點:在一抓持器板中至少設有一吸取開口(3)其中繞著該吸取開口(3)形成一個環形工作物節流面(6),該工作物節流面(6)構成該抓持器板的一副區域,其中在該工作物節流面和該工作物的一表面之間在該工作物相對於該真空抓持裝置的一最終位置時,定出一個空氣間隙,在此最終位置時,工作物被該真空抓持裝置拿住,且該工作物在該最終位置時主要係經由該空氣間隙被被拿住,在該抓持器板朝向工作物那一側至少設有一環形凹隙(4),且繞該吸取開口(3)越過該工作物節流面,各凹隙(4)中至少設一排氣孔(5),至少有一排氣孔(5)直接將一整個凹 隙(4)與外界大氣連通,俾一直容許外界大氣的空氣流入該凹隙(4)中。 A device for picking up and transporting a flat work, wherein the device has the following features: at least one transport rail (11) having a vacuum holding nozzle (12) to place the work on the transport rail (11) the lower suspension is held, and an air bearing is provided to hold the workpiece in a contactless manner along the transport rail (11); at least one driving device (17) (18) for the work Moving along the transport rail; at least one pneumatic gripping device (2) having at least one pneumatic gripper nozzle, wherein the gripper nozzle is integrated in the transport rail so that the upper edge of the nozzle is transported by the nozzle The conveying surface of the rail is closed or arranged to descend in the conveying surface, and the gripping device (2) is designed as a vacuum suction nozzle having the following features: at least one suction opening (3) is provided in a gripper plate. Forming an annular working material throttle surface (6) around the suction opening (3), the working material throttle surface (6) constituting a sub-area of the gripper plate, wherein the working object throttle surface and the a final surface of the work object relative to the vacuum gripping device At the time of setting, an air gap is determined, in which the work object is held by the vacuum gripping device, and the work object is mainly taken through the air gap when the work object is in the final position, in the grasping At least one annular recess (4) is disposed on the side of the working plate facing the working object, and the working throttle throttling surface is disposed around the suction opening (3), and at least one exhaust hole (5) is disposed in each of the recesses (4) , at least one vent (5) directly will be a whole concave The gap (4) is in communication with the outside atmosphere, and the air is always allowed to flow into the recess (4). 如申請專利範圍第1項之裝置,其中:該空氣軸承為一噴嘴場,壓縮空氣從該噴嘴出來。 The device of claim 1, wherein the air bearing is a nozzle field from which compressed air exits. 如申請專利範圍第1項之裝置,其中:該空氣軸承為一超音波空氣軸承。 The device of claim 1, wherein the air bearing is an ultrasonic air bearing. 如申請專利範圍第1項之裝置,其中:該驅動裝置為一運轉的輸送帶(12),其上設有聯動器突起部(18)。 The device of claim 1, wherein the drive device is a running conveyor belt (12) having a coupler projection (18) thereon. 如申請專利範圍第1項之裝置,其中:該驅動裝置為一運轉的聯動器帶,且該運送軌向側邊傾斜,因此工作物受重力向側邊向聯動器帶滑動,且受摩擦力而被該聯動器帶沿運送方向移動。 The device of claim 1, wherein: the driving device is a running coupling belt, and the conveying rail is inclined to the side, so that the workpiece is slid to the side of the coupling belt by gravity, and is subjected to friction. The belt is moved in the transport direction by the coupler belt. 如申請專利範圍第1項之裝置,其中:該工作物係利用運送軌向下傾斜而運送。 The apparatus of claim 1, wherein the work item is transported by tilting the transport rail downward. 如申請專利範圍第1項之裝置,其中:該工作物利用斜設的吹氣噴嘴吹動而運送。 The apparatus of claim 1, wherein the workpiece is transported by blowing with a slanting blowing nozzle. 如申請專利範圍第1項之裝置,其中:該工作物係利用斜設的吸取噴嘴吸引而運送。 The apparatus of claim 1, wherein the work item is transported by suction using a slanted suction nozzle. 如申請專利範圍第1項之裝置,其中:該工作物利用斜設的超音波產生器作用而運送。 The apparatus of claim 1, wherein the work object is transported by using a slanted ultrasonic generator.
TW099124117A 2009-07-22 2010-07-22 Device to take flat workpieces and to transport the same away TWI586599B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0383336A2 (en) * 1989-02-17 1990-08-22 Hitachi, Ltd. Article assembling device
US6027112A (en) * 1998-03-02 2000-02-22 Xerox Corporation Adaptive multiagent control system for controlling object motion with smart matter
CN1462253A (en) * 2001-05-04 2003-12-17 罗伯特-博希股份公司 Device for gripping and holding object in contactless mamner
US20040060801A1 (en) * 2001-01-31 2004-04-01 Norbert Vogel Device and method for conveying work pieces

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0383336A2 (en) * 1989-02-17 1990-08-22 Hitachi, Ltd. Article assembling device
US6027112A (en) * 1998-03-02 2000-02-22 Xerox Corporation Adaptive multiagent control system for controlling object motion with smart matter
US20040060801A1 (en) * 2001-01-31 2004-04-01 Norbert Vogel Device and method for conveying work pieces
CN1462253A (en) * 2001-05-04 2003-12-17 罗伯特-博希股份公司 Device for gripping and holding object in contactless mamner

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