TWI371316B - Pneumatic rotary coating method and device for thin films on surfaces of round workpieces - Google Patents

Pneumatic rotary coating method and device for thin films on surfaces of round workpieces

Info

Publication number
TWI371316B
TWI371316B TW098100461A TW98100461A TWI371316B TW I371316 B TWI371316 B TW I371316B TW 098100461 A TW098100461 A TW 098100461A TW 98100461 A TW98100461 A TW 98100461A TW I371316 B TWI371316 B TW I371316B
Authority
TW
Taiwan
Prior art keywords
coating method
thin films
rotary coating
pneumatic rotary
round workpieces
Prior art date
Application number
TW098100461A
Other languages
Chinese (zh)
Other versions
TW201026400A (en
Inventor
Yung Chun Lee
Chuan Hsiang Lee
Shou Chi Cho
Original Assignee
Univ Nat Cheng Kung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Cheng Kung filed Critical Univ Nat Cheng Kung
Priority to TW098100461A priority Critical patent/TWI371316B/en
Publication of TW201026400A publication Critical patent/TW201026400A/en
Application granted granted Critical
Publication of TWI371316B publication Critical patent/TWI371316B/en

Links

TW098100461A 2009-01-08 2009-01-08 Pneumatic rotary coating method and device for thin films on surfaces of round workpieces TWI371316B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW098100461A TWI371316B (en) 2009-01-08 2009-01-08 Pneumatic rotary coating method and device for thin films on surfaces of round workpieces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW098100461A TWI371316B (en) 2009-01-08 2009-01-08 Pneumatic rotary coating method and device for thin films on surfaces of round workpieces

Publications (2)

Publication Number Publication Date
TW201026400A TW201026400A (en) 2010-07-16
TWI371316B true TWI371316B (en) 2012-09-01

Family

ID=44852915

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098100461A TWI371316B (en) 2009-01-08 2009-01-08 Pneumatic rotary coating method and device for thin films on surfaces of round workpieces

Country Status (1)

Country Link
TW (1) TWI371316B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5790622B2 (en) * 2012-11-01 2015-10-07 東京エレクトロン株式会社 Coating film forming method, coating film forming apparatus, and storage medium

Also Published As

Publication number Publication date
TW201026400A (en) 2010-07-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees