TWI359970B - Glass adhering structure for dispenser stage - Google Patents
Glass adhering structure for dispenser stage Download PDFInfo
- Publication number
- TWI359970B TWI359970B TW095111834A TW95111834A TWI359970B TW I359970 B TWI359970 B TW I359970B TW 095111834 A TW095111834 A TW 095111834A TW 95111834 A TW95111834 A TW 95111834A TW I359970 B TWI359970 B TW I359970B
- Authority
- TW
- Taiwan
- Prior art keywords
- platform
- glass
- suction holes
- inclined surfaces
- channels
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
- B32B38/1858—Handling of layers or the laminate using vacuum
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Coating Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050090160A KR100596022B1 (ko) | 2005-09-27 | 2005-09-27 | 디스펜서 스테이지의 글라스 흡착구조 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200712628A TW200712628A (en) | 2007-04-01 |
TWI359970B true TWI359970B (en) | 2012-03-11 |
Family
ID=37183543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095111834A TWI359970B (en) | 2005-09-27 | 2006-04-03 | Glass adhering structure for dispenser stage |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2007090322A (ja) |
KR (1) | KR100596022B1 (ja) |
CN (1) | CN100439991C (ja) |
TW (1) | TWI359970B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101084713B1 (ko) * | 2009-07-30 | 2011-11-22 | (주)오토엠아이티 | 편광필름 흡착 스테이지의 구조 |
CN104199218B (zh) * | 2014-08-18 | 2017-07-25 | 深圳市华星光电技术有限公司 | 液晶滴注装置 |
CN106853432B (zh) * | 2016-11-24 | 2019-04-16 | 重庆市永川区锐峰玻璃制品有限公司 | 旋转涂胶台 |
CN106975586A (zh) * | 2017-04-27 | 2017-07-25 | 常州亿莱顿电子科技有限公司 | 一种精密自动点胶机工装及其点胶方法 |
KR20220125874A (ko) | 2021-03-05 | 2022-09-15 | 삼성디스플레이 주식회사 | 윈도우 제조 장치, 윈도우 제조 방법 및 표시장치 제조 방법 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2590759B2 (ja) * | 1994-10-13 | 1997-03-12 | 日本電気株式会社 | 偏光板貼付装置 |
JP3493081B2 (ja) * | 1995-08-09 | 2004-02-03 | 株式会社日本マイクロニクス | 表示パネルの吸着テーブル |
JP3863245B2 (ja) * | 1997-03-26 | 2006-12-27 | 東芝電子エンジニアリング株式会社 | フラットパネルディスプレイの組立方法および組立装置 |
JP2000221479A (ja) * | 1999-02-01 | 2000-08-11 | Matsushita Electric Ind Co Ltd | 液晶パネルの吸着ステージ |
JP2001118913A (ja) * | 1999-10-18 | 2001-04-27 | Dainippon Printing Co Ltd | 基板吸着プレート |
JP2002236292A (ja) * | 2001-02-09 | 2002-08-23 | Matsushita Electric Ind Co Ltd | 液晶パネルの製造方法および基板貼り合わせ装置 |
JP2002350804A (ja) * | 2001-05-29 | 2002-12-04 | Matsushita Electric Ind Co Ltd | 液晶パネルの製造方法および液晶パネルの製造装置 |
KR100966451B1 (ko) * | 2003-06-25 | 2010-06-28 | 엘지디스플레이 주식회사 | 액정적하장치 |
WO2005069366A1 (en) * | 2004-01-16 | 2005-07-28 | Sharp Kabushiki Kaisha | Substrate adsorption device and substrate bonding device |
-
2005
- 2005-09-27 KR KR1020050090160A patent/KR100596022B1/ko active IP Right Grant
-
2006
- 2006-04-03 TW TW095111834A patent/TWI359970B/zh active
- 2006-04-10 JP JP2006107504A patent/JP2007090322A/ja active Pending
- 2006-04-28 CN CNB2006100781459A patent/CN100439991C/zh active Active
Also Published As
Publication number | Publication date |
---|---|
JP2007090322A (ja) | 2007-04-12 |
TW200712628A (en) | 2007-04-01 |
CN1940655A (zh) | 2007-04-04 |
KR100596022B1 (ko) | 2006-07-05 |
CN100439991C (zh) | 2008-12-03 |
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