TWI359970B - Glass adhering structure for dispenser stage - Google Patents
Glass adhering structure for dispenser stage Download PDFInfo
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- TWI359970B TWI359970B TW095111834A TW95111834A TWI359970B TW I359970 B TWI359970 B TW I359970B TW 095111834 A TW095111834 A TW 095111834A TW 95111834 A TW95111834 A TW 95111834A TW I359970 B TWI359970 B TW I359970B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
- B32B38/1858—Handling of layers or the laminate using vacuum
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
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- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Coating Apparatus (AREA)
Description
1359970 玖、發明說明： 【發明所屬之技術領域】 本發明是有關於一種用於一液晶顯示器（LCD )製造 之分散器，且特別是有關於一種用於一分散器平臺之玻璃 黏附結構，其有助於清潔操作與減少自平臺抬舉玻璃之靜 電發生。1359970 发明, DESCRIPTION OF THE INVENTION: TECHNICAL FIELD The present invention relates to a disperser for the manufacture of a liquid crystal display (LCD), and more particularly to a glass adhesion structure for a diffuser platform, Helps clean operation and reduces static electricity from the platform lift glass.
【先前技術】 大體上來說，一液晶顯示器（LCD)至少包含：一平 坦式玻璃平板之底部或後方基材，其被提供有驅動元件（例 如電晶體；一亦為平坦式玻璃平板之頂部或前方基材，其 被提供有一彩色濾光層；一密封材料，其係將該底部基材 與該頂部基材黏接在一起；以及一液晶層，其係形成在介 於該底部基材與該頂部基材之間。 液晶層之液晶分子是被形成在底部基材上之驅動元件 重新定向，以控制穿透液晶層之光量，藉此顯示出資訊。[Prior Art] In general, a liquid crystal display (LCD) includes at least: a bottom or rear substrate of a flat glass plate provided with a driving element (for example, a transistor; a top of a flat glass plate or a front substrate provided with a color filter layer; a sealing material bonding the bottom substrate to the top substrate; and a liquid crystal layer formed between the bottom substrate and the substrate Between the top substrates, the liquid crystal molecules of the liquid crystal layer are redirected by the driving elements formed on the bottom substrate to control the amount of light penetrating through the liquid crystal layer, thereby displaying information.
對於用以製造一 LCD裝置之方法來說，一基材是藉由 形成驅動元件於一特定尺寸的玻璃平板上來製備，另一基 材是藉由形成一彩色濾光層於另一玻璃平板上來製備。然 後，將一密封材料滴入至該兩基材之一者上而具有一特定 形狀之圖案，並且將液晶液滴滴入密封材料圖案内。之後， 將該兩基材相互接合在一起。被接合之基材係稱為母玻 璃。然後，藉由切割母玻璃，即可製造個別的液晶面板（其 每一者構成一 LCD )。For the method for manufacturing an LCD device, a substrate is prepared by forming a driving element on a glass plate of a specific size, and another substrate is formed by forming a color filter layer on another glass plate. preparation. Then, a sealing material is dropped onto one of the two substrates to have a pattern of a specific shape, and liquid crystal droplets are dropped into the pattern of the sealing material. Thereafter, the two substrates are joined to each other. The joined substrate is referred to as mother glass. Then, by cutting the mother glass, individual liquid crystal panels (each of which constitutes an LCD) can be manufactured.
1359970 製造過程是在一生產線上執行，其中該生產線上被提 供有具有不同功能之製造設備。一用以分散液晶之製程與 一用以射出密封材料之製程是藉由該些製造設備中的分散 器來執行。 第1圖為一根據習知技術之分散器實例之立體圖。請 參閱第1圖，將依據用以分散液晶之製程來說明分散器之 操作。.1359970 The manufacturing process is performed on a production line where manufacturing equipment with different functions is provided. A process for dispersing the liquid crystal and a process for ejecting the sealing material are performed by a disperser in the manufacturing equipment. Figure 1 is a perspective view of an example of a disperser according to the prior art. Referring to Figure 1, the operation of the disperser will be described in terms of a process for dispersing the liquid crystal. .
首先，一玻璃G置放在一線性可往復之平臺200上， 該平臺200是裝設在一框架100上。接著，液晶根據一預 定圖案而經由構成一頭單元300之一噴嘴310滴下（其中 該頭單元300是裝設在該平臺200上），並且經由喷嘴310 滴下之液晶係在玻璃G上圖案化成一預定形狀（其中該玻 璃G是置放在平臺200上）。First, a glass G is placed on a linear reciprocable platform 200 that is mounted on a frame 100. Next, the liquid crystal is dropped according to a predetermined pattern through a nozzle 310 constituting a head unit 300 (where the head unit 300 is mounted on the stage 200), and the liquid crystal system dropped through the nozzle 310 is patterned on the glass G to be predetermined. Shape (where the glass G is placed on the platform 200).
因為頭支撐件400裝設在框架100上，頭單元300之 喷嘴3 1 0能夠以一預定圖案來移動而能線性往復，並且裝 設在頭支撐件400上之頭單元3 00能線性往復地移動。頭 支撐件400移動之方向是垂直於頭單元300移動之方向。 元件代表符號5 0 0係表示導引構件，而元件代表符號 600係表示一固定桌臺。 置放在分散器之平臺200上的玻璃G係在一真空吸引 壓力下黏附在平臺2 0 0上，以避免在操作期間玻璃G在平 臺上移動。以下，將解釋根據習知技術用以黏附玻璃G至 平臺2 0 0上之結構。 第2圖與第3圖係分別為俯視圖與前視圖，其顯示出 6 1359970Since the head support member 400 is mounted on the frame 100, the nozzles 310 of the head unit 300 can be moved in a predetermined pattern to linearly reciprocate, and the head unit 3 00 mounted on the head support member 400 can linearly reciprocate. mobile. The direction in which the head support 400 moves is perpendicular to the direction in which the head unit 300 moves. The component symbol 50 indicates the guiding member, and the component symbol 600 indicates a fixed table. The glass G placed on the platform 200 of the disperser is attached to the platform 200 under a vacuum suction pressure to avoid the glass G moving on the platform during operation. Hereinafter, the structure for adhering the glass G to the platform 200 according to the prior art will be explained. Figures 2 and 3 are a top view and a front view, respectively, showing 6 1359970
跟據習知技術用於分散器平臺之玻璃黏附結構。 用於分散器之平臺200具有一特定厚度與面積 2 00之一上表面為平坦的，並且玻璃G是置放在平 之上表面上。複數個主穿孔210形成在平臺之一橫 中而具有特定間隔。複數個與主穿孔2 1 0連通之小 220形成在平臺200之上表面中。此外，複數個分 穿孔210連通之真空入口 230形成在平臺200之一 中 〇 主穿孔210之末端兩者是密閉的，且該複數個 220是沿著主穿孔210而形成。真空入口 230係連 外部真空產生單元（未顯示）（例如一真空幫浦）。 吾人將解釋玻璃黏附結構之操作。當玻璃G置 臺200上時，真空產生單元則***作以吸引空氣。 生單元之吸引力量會經由真空入口 230、主穿孔2] 引孔220而施加到玻璃G之下表面，因此玻璃G會 高的周圍壓力施加在玻璃G之上表面而黏附在平臺 上表面。 當用以滴下液晶至固定在平臺200上的玻璃G 程完成時，真空產生單元之操作即會停止，因而施 璃G之吸引力量會被去除。是以，玻璃G是可移動 放在平臺200上，藉此置放在平臺2 00上之玻璃G 著被一額外的傳送機械手臂（未顯示）傳送以用於 程。 在用於分散器平臺之玻璃黏附結構中，因為平 。平臺 臺200 向表面 吸引孔 別與主 下表面 吸引孔 接至一 放在平 真空產 0與吸 因為較 200之 上之製 加到玻 地被置 可以接 下一製 臺 200 7 1359970 之上表面為一平面，這有助於清潔操作，且在清潔操作之 後殘存在平臺上的微粒量是非常少的。然而，該結構具有 下述缺失。由於平臺200之上表面為一平面，平臺200與 玻璃G之間的接觸面積是很寬廣的，因而在平臺200與玻 璃G之間造成大量靜電。是以，當玻璃G被傳送機械手臂 抬舉時，可能會在玻璃G中產生裂縫，或可能會因為高靜 電荷而損壞由半導體製程所形成之電路或彩色濾光層。A glass adhesion structure used in a disperser platform according to conventional techniques. The platform 200 for the disperser has a specific thickness and an area of 200. The upper surface is flat, and the glass G is placed on the flat upper surface. A plurality of main perforations 210 are formed in one of the platforms and have a specific interval. A plurality of small 220s in communication with the main perforations 210 are formed in the upper surface of the platform 200. Further, a plurality of vacuum inlets 230 communicating with the plurality of perforations 210 are formed in one of the platforms 200. Both ends of the main perforations 210 are hermetically sealed, and the plurality of 220 are formed along the main perforations 210. The vacuum inlet 230 is connected to an external vacuum generating unit (not shown) (e.g., a vacuum pump). We will explain the operation of the glass adhesion structure. When the glass G is placed on the table 200, the vacuum generating unit is operated to attract air. The amount of attraction of the raw unit is applied to the lower surface of the glass G via the vacuum inlet 230, the main perforation 2], and thus the high ambient pressure of the glass G is applied to the upper surface of the glass G to adhere to the upper surface of the platform. When the glass G to drop the liquid crystal to be fixed to the stage 200 is completed, the operation of the vacuum generating unit is stopped, and the amount of attraction of the glass G is removed. Therefore, the glass G is movably placed on the platform 200, whereby the glass G placed on the platform 200 is transported by an additional transfer robot (not shown) for use in the process. In the glass adhesion structure used for the diffuser platform, because it is flat. The platform table 200 is attached to the surface suction hole and the main lower surface suction hole to a flat vacuum production 0 and suction 200 is added to the glass to be placed on the surface of the next stage 200 7 1359970 As a plane, this contributes to the cleaning operation, and the amount of particles remaining on the platform after the cleaning operation is very small. However, this structure has the following drawbacks. Since the upper surface of the platform 200 is a flat surface, the contact area between the stage 200 and the glass G is wide, thereby causing a large amount of static electricity between the stage 200 and the glass G. Therefore, when the glass G is lifted by the transfer robot, cracks may be generated in the glass G, or the circuit or the color filter layer formed by the semiconductor process may be damaged due to high static charge.
為了解決這些問題，根據習知技術另一用於分散器平 臺之玻璃黏附結構係被提出，如第4圖所示。請參閱第4 圖，複數個具有特定深度、寬度與長度之溝槽或槽道240 係形成在平臺200之上表面中，其中玻璃G係置放在平臺 200上。槽道24 0具有一方形之截面。在該其他傳統之用 於分散器平臺的玻璃黏附結構中，當玻璃G自平臺200被 抬舉時所產生之靜電量可以被減少。然而，因為具有方形 截面之槽道240是形成在平臺200之上表面中，難以進行 清潔操作，並且即使在清潔操作之後，仍可能殘存許多微 粒在平臺上。 【發明内容】 因此，本發明之一目的在於提供一種用於這樣的分散 器平臺之玻璃黏附結構，其可以簡化清潔操作且減少在玻 璃自平臺被抬升時之靜電發生性。 為了達到這些與其他優點及根據本發明目的，如同本 文所具體化者且廣泛地描述者，本發明提供一種用於分散 8 ⑧ 1359970In order to solve these problems, another glass adhesion structure for a disperser platform has been proposed according to the prior art, as shown in Fig. 4. Referring to FIG. 4, a plurality of grooves or channels 240 having a particular depth, width and length are formed in the upper surface of the platform 200, wherein the glass G is placed on the platform 200. The channel 240 has a square cross section. In this other conventional glass adhesion structure for a disperser platform, the amount of static electricity generated when the glass G is lifted from the platform 200 can be reduced. However, since the channel 240 having a square cross section is formed in the upper surface of the stage 200, it is difficult to perform the cleaning operation, and even after the cleaning operation, many fine particles may remain on the stage. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a glass adhesion structure for such a disperser platform that simplifies the cleaning operation and reduces the electrostatic generation when the glass is lifted from the platform. In order to achieve these and other advantages and in accordance with the purpose of the present invention, as embodied and broadly described herein, the present invention provides a method for dispersing 8 8 1359970
器之平臺的玻璃黏附結構，該分散器包含一平臺與一真 產生單元，一例如玻璃之平板可以置放在該平臺上，該 臺具有一溝槽於其中，該真空產生單元連接至該平臺之 槽以施加一吸引力量至該溝槽，該玻璃黏附結構至少 含：複數個吸引孔，其係以列形成在該平臺之上表面中 連接至該平臺之溝槽，其中例如玻璃之平板可以置放在 平臺上；以及多個下凹槽道，其係形成在該平臺之上表 中而介於吸引孔列之間，每一槽道具有傾斜表面以減少 玻璃之接觸面積且平順地排出微粒。 在本發明之另一態樣中，用於分散器平臺的玻璃黏 結構包括有複數個吸引孔與多個下凹槽道，該些吸引孔 成在該平臺之上表面中，其中例如玻璃之平板可以置放 該平臺上，該些下凹槽道形成在該平臺之上表面中而使 每一該些吸引孔之邊緣係線性接觸於例如玻璃之平板。 當參閱圖式時，本發明之前述與其他目的、特徵、 樣與優點將可以由以下詳細說明而變得明顯。 【實施方式】 吾人將詳細描述本發明，本發明之實例係繪示於所 隨之圖式中。 請參閱所伴隨圖式，以下將解釋根據本發明之用於 散器平臺的玻璃黏附結構。 第5圖與第6圖係分別為根據本發明之用於分散器 空 平 溝 包 且 該 面 至 附 形 在 得 態 伴 分 平 9 1359970 臺的玻璃黏附結構之俯視圖與前視圖。 如圖所示，分散器平臺700具有特定厚度與面積。複 數個主穿孔710形成在平臺700之一橫向表面中而具有特 定間隔。複數個與主穿孔7 1 〇連通之小吸引孔720形成在 平臺700之上表面中，其中該上表面置放有玻璃G。此外， 複數個分別與主穿孔710連通之真空入口 730形成在平臺 700之一下表面中。The glass adhesion structure of the platform of the device, the disperser comprises a platform and a real generating unit, and a plate such as glass can be placed on the platform, the table has a groove therein, and the vacuum generating unit is connected to the platform a groove for applying an attractive amount to the groove, the glass adhesion structure comprising: at least a plurality of suction holes formed in a groove formed on the upper surface of the platform and connected to the platform, wherein a plate such as glass may Placed on the platform; and a plurality of lower groove channels formed in the table above the platform and between the columns of suction holes, each channel having an inclined surface to reduce the contact area of the glass and smoothly discharged particle. In another aspect of the invention, the glass adhesive structure for the diffuser platform includes a plurality of suction holes and a plurality of lower groove channels, the suction holes being formed in the upper surface of the platform, wherein, for example, glass The plate may be placed on the platform, and the lower grooves are formed in the upper surface of the platform such that the edges of each of the suction holes are in linear contact with a flat plate such as glass. The above and other objects, features, aspects and advantages of the present invention will become apparent from [Embodiment] The present invention will be described in detail, and examples of the invention are illustrated in the accompanying drawings. Referring to the accompanying drawings, a glass adhesion structure for a diffuser platform according to the present invention will be explained below. Fig. 5 and Fig. 6 are respectively a plan view and a front view, respectively, of a glass adhering structure for a diffuser ditch bag according to the present invention, which is in a state of approximating with a level of 9 1359970. As shown, the diffuser platform 700 has a particular thickness and area. A plurality of main perforations 710 are formed in one of the lateral surfaces of the platform 700 with a specific interval. A plurality of small suction holes 720 communicating with the main perforations 7 1 〇 are formed in the upper surface of the platform 700, wherein the upper surface is provided with the glass G. Further, a plurality of vacuum inlets 730 respectively communicating with the main perforations 710 are formed in a lower surface of the platform 700.
具有V形截面之傾斜槽道740係形成在平臺700之上 表面中而介於相鄰的吸引孔720列之間，每一傾斜槽道740 具有兩傾斜表面741。傾斜槽道740延伸在平臺700之相 對側表面（例如前與後）之間。構成該傾斜槽道740之該 兩傾斜表面741為平面，並且形成在該兩傾斜表面741之 間的角度較佳為鈍角。該些傾斜槽道740之間的間隙較佳 為吸引孔720之内徑的二至四倍，其中該些傾斜槽道740 係位於每一列吸引孔720之兩側。An inclined channel 740 having a V-shaped cross section is formed in the upper surface of the platform 700 between adjacent columns of suction holes 720, each inclined channel 740 having two inclined surfaces 741. The inclined channels 740 extend between opposite side surfaces (e.g., front and rear) of the platform 700. The two inclined surfaces 741 constituting the inclined groove 740 are flat, and an angle formed between the inclined surfaces 741 is preferably an obtuse angle. The gap between the inclined channels 740 is preferably two to four times the inner diameter of the suction holes 720, wherein the inclined channels 740 are located on both sides of each of the columns of suction holes 720.
對於傾斜槽道740之另一實施例，如第7圖所示，傾 斜槽埠740’是由兩傾斜表面 741 ’與一彎曲表面 742所構 成，該彎曲表面742是形成在該兩傾斜表面741’之間。也 就是說，該兩傾斜表面741’形成時，該彎曲表面742即形 成在該兩傾斜表面741’之間。 對於傾斜槽道7 4 0之又一實施例，如第8圖所示，傾 斜槽道740’’是由兩傾斜表面741’’與一具有特定寬度的平 表面 743所構成，該平表面 743是形成在該兩傾斜表面 7 4 1 ’’之間。 10 1359970 7 20之間，一平板（例如玻璃G )係置放在平臺700之上 表面上以用於施加一吸引力量至一玻璃。並且，一與每一 吸引孔 720同心之環狀接觸表面 770係被提供在吸引孔 720之邊緣。環狀接觸表面770構成了平臺700之上表面。 以下將解釋根據本發明之用於分散器平臺的玻璃黏附 結構之操作。For another embodiment of the inclined channel 740, as shown in FIG. 7, the inclined groove 740' is constituted by two inclined surfaces 741' and a curved surface 742 formed on the inclined surfaces 741. 'between. That is, when the two inclined surfaces 741' are formed, the curved surface 742 is formed between the inclined surfaces 741'. For still another embodiment of the inclined channel 74, as shown in Fig. 8, the inclined channel 740'' is composed of two inclined surfaces 741'' and a flat surface 743 having a specific width, the flat surface 743 It is formed between the two inclined surfaces 7 4 1 ''. Between 10 1359970 and 7 20, a plate (e.g., glass G) is placed on the upper surface of the platform 700 for applying an attractive amount to a glass. Also, an annular contact surface 770 concentric with each of the suction holes 720 is provided at the edge of the suction hole 720. The annular contact surface 770 constitutes the upper surface of the platform 700. The operation of the glass adhesion structure for a disperser platform according to the present invention will be explained below.
當玻璃G置放在平臺700上時，即操作真空產生單元 以吸引空氣。真空產生單元之吸引力量係經由真空入口 730、主穿孔710與吸引孔720而被施加至玻璃G，因此玻 璃G可以在較高的施加至上平板表面之環境壓力下而黏附 至平臺700之上表面上。 當用以滴下液晶至固定在平臺700上的玻璃G上之製 程完成時，真空產生單元之操作則停止，且因此施加至玻 璃G的吸引力量會移除。是以，玻璃G係可移動地置放在 平臺700上。接著，置放在平臺700上之玻璃G可以被一 額外的傳送機械手臂（未顯示）以用於下一製程。When the glass G is placed on the stage 700, the vacuum generating unit is operated to attract air. The attractive amount of the vacuum generating unit is applied to the glass G via the vacuum inlet 730, the main perforation 710 and the suction hole 720, so the glass G can be adhered to the upper surface of the platform 700 at a higher ambient pressure applied to the upper plate surface. on. When the process for dropping the liquid crystal onto the glass G fixed to the stage 700 is completed, the operation of the vacuum generating unit is stopped, and thus the amount of attraction applied to the glass G is removed. Therefore, the glass G is movably placed on the platform 700. Next, the glass G placed on the platform 700 can be used by an additional transfer robot (not shown) for the next process.
在根據本發明另一實施例之用於分散器平臺的玻璃黏 附結構中，玻璃G接觸於環狀接觸表面7 7 0，其中環狀接 觸表面770是形成在平臺700之吸引孔720的邊緣而與吸 引孔720同心。 在本發明中，吸引孔720形成在平臺700中，並且具 有傾斜表面741之傾斜槽道740形成在平臺700之上表面 中，藉此減少玻璃G與平臺7 00之間的接觸面積。是以， 當玻璃G被抬升而在玻璃G與平臺700之間產生的靜電量In a glass adhesion structure for a disperser platform according to another embodiment of the present invention, the glass G is in contact with the annular contact surface 770, wherein the annular contact surface 770 is formed at the edge of the suction hole 720 of the platform 700. Concentric with the suction hole 720. In the present invention, the suction holes 720 are formed in the stage 700, and the inclined channels 740 having the inclined surfaces 741 are formed in the upper surface of the stage 700, thereby reducing the contact area between the glass G and the stage 700. Therefore, the amount of static electricity generated between the glass G and the stage 700 when the glass G is lifted up
(D 12 u)997〇 得以減少。再者’因為該些傾斜槽道740各自具有兩傾斜 表面741，有助於平臺70〇之清潔操作，且可以更容易地 自該些傾斜槽道740移除微粒。 根據本發明之另一實施例’玻璃G接觸於環狀接觸表 面77〇，其中環狀接觸表面770是被形成為與平臺7〇〇之 吸引孔720同心。因此，當破璃G自平臺700被抬升而在 破壤G與平臺7〇〇之間產生的靜電量得以減少。 如前所述，在根據本發明之用於分散器平臺的破璃黏 附結構中，玻璃與平臺之間產生的靜電量得以減少，藉此 能避免破璃“ #冑而發生裂冑，並且能冑免形成在‘璃 上的電路被損瓌。是以，可以降低玻璃之缺陷率。 又’可以減少殘存在平臺上之微粒，因而能減少所黏 附至置放在平臺上之破璃 m lL a Ab # m因此更能降低破璃之(D 12 u)997〇 can be reduced. Furthermore, because the inclined channels 740 each have two inclined surfaces 741, it facilitates the cleaning operation of the platform 70, and the particles can be more easily removed from the inclined channels 740. According to another embodiment of the present invention, the glass G is in contact with the annular contact surface 77, wherein the annular contact surface 770 is formed to be concentric with the suction hole 720 of the stage 7A. Therefore, when the broken glass G is lifted from the platform 700, the amount of static electricity generated between the broken soil G and the platform 7〇〇 is reduced. As described above, in the glass-adhesive structure for a disperser platform according to the present invention, the amount of static electricity generated between the glass and the platform can be reduced, thereby preventing the occurrence of cracks in the glass. The circuit that is formed on the glass is damaged. Therefore, the defect rate of the glass can be reduced. In addition, the particles remaining on the platform can be reduced, thereby reducing the adhesion to the glass placed on the platform. a Ab # m is therefore more able to reduce the glass
雖然本發明能夠在不脫M 也不脫離其精神與主要特徵 化成-些形式，應當瞭解的 破具體 明之任何細節所限制住（ ^述說 ^ t ^ 非特別指明），而應該是在陆糾 申請專利範圍中所定義的A t h 在隨附 因此所有落入申請專利範園 解讀， 2圍之乾疇與界限或這樣的 界限之均等物中的變化盥 軏疇與 蓋。 、變更疋被隨附申請專利範圍所涵 【圖式簡單說明】 用以提供本發明進—击 ’瞭解之所伴隨圖式係被 13 1359970 說明書中，並且構成本說明書之一部份，其繪示出本發明 及用以解釋本發明原理的描述之實施例，其中： 第1圖為根據習知技術之分散器的立體圖； 第2、3圖分別為俯視圖與前視圖，其顯示出跟據習知 技術用於分散器平臺之玻璃黏附結構的一實施例； 第4圖為側視圖，其顯示根據習知技術用於分散器平 臺之玻璃黏附結構的另一實施例；Although the invention can be carried out without departing from the spirit and the main features of the invention, it should be understood that the details of the details are limited (the description is not specifically specified), but should be applied in the land The Ath defined in the scope of the patent is attached to all the changes in the scope of the application of the patent application, the boundaries between the boundaries and boundaries or such boundaries. </ RTI> </ RTI> </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; The invention and the embodiments for explaining the principles of the present invention are illustrated, wherein: Figure 1 is a perspective view of a disperser according to the prior art; Figures 2 and 3 are top and front views, respectively, showing One embodiment of a conventional technique for a glass adhesion structure for a dispenser platform; FIG. 4 is a side elevational view showing another embodiment of a glass adhesion structure for a dispenser platform in accordance with conventional techniques;
第5、6圖分別為俯視圖與前視圖，其顯示根據本發明 之用於分散器平臺的玻璃黏附結構； 第7、8、9圖為放大的部份側視圖，其分別顯示根據 本發明之用於分散器平臺的玻璃黏附結構中之槽道的變更 實例； 第10圖為放大的部份俯視圖，其顯示根據本發明之用 於分散器平臺的玻璃黏附結構之一部分； 第11圖為俯視圖，其顯示根據本發明另一實施例之用 於分散器平臺的玻璃黏附結構；以及5 and 6 are top and front views, respectively, showing a glass adhesion structure for a disperser platform according to the present invention; FIGS. 7, 8, and 9 are enlarged partial side views respectively showing according to the present invention. A modified example of a channel in a glass adhesion structure for a disperser platform; Fig. 10 is an enlarged partial plan view showing a portion of a glass adhesion structure for a disperser platform according to the present invention; and Fig. 11 is a plan view , which shows a glass adhesion structure for a diffuser platform in accordance with another embodiment of the present invention;
第1 2、1 3圖分別為俯視圖與前視圖，其顯示根據本發 明又一實施例之用於分散器平臺的‘玻璃黏附結構。 【主要元件符號說明】 G 玻璃 W 間隙 100 框架 200 平臺 14 1359970The first and second figures are top and front views, respectively, showing a 'glass adhesion structure for a diffuser platform in accordance with yet another embodiment of the present invention. [Main component symbol description] G glass W gap 100 frame 200 platform 14 1359970
210 主穿孔 220 吸引孔 230 真空入口 240 槽道 300 頭單元 310 噴嘴 400 頭支撐件 500 導引構件 600 固定桌臺 700 分散器平臺 7005 分散器平臺 710 主穿孔 720 小吸引孔 730 真空入口 740 傾斜槽道 7401 傾斜槽道 740’， 傾斜槽道 740’， ’傾斜槽道 741 傾斜表面 741 5 傾斜表面 741 ’， 傾斜表面 742 彎曲表面 743 平表面 744 彎曲表面 15 1359970 750 平臺基座 760 塊體 770 環狀接觸表面210 Main perforation 220 Suction hole 230 Vacuum inlet 240 Channel 300 Head unit 310 Nozzle 400 Head support 500 Guide member 600 Fixed table 700 Disperser platform 7005 Disperser platform 710 Main perforation 720 Small suction hole 730 Vacuum inlet 740 Tilt groove Lane 7401 inclined channel 740', inclined channel 740', 'inclined channel 741 inclined surface 741 5 inclined surface 741', inclined surface 742 curved surface 743 flat surface 744 curved surface 15 1359970 750 platform base 760 block 770 ring Contact surface
1616
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| KR1020050090160A KR100596022B1 (en) | 2005-09-27 | 2005-09-27 | Structure for sucking glass in stage of dispenser |
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| KR101084713B1 (en) * | 2009-07-30 | 2011-11-22 | (주)오토엠아이티 | A Polarizer film attachment stage device |
| CN104199218B (en) * | 2014-08-18 | 2017-07-25 | 深圳市华星光电技术有限公司 | Liquid crystal drip device |
| CN106853432B (en) * | 2016-11-24 | 2019-04-16 | 重庆市永川区锐峰玻璃制品有限公司 | Rotating gluing coating platform |
| CN106975586A (en) * | 2017-04-27 | 2017-07-25 | 常州亿莱顿电子科技有限公司 | A kind of accurate automatic dispensing machine frock and its dispensing method |
| KR20220125874A (en) | 2021-03-05 | 2022-09-15 | 삼성디스플레이 주식회사 | Window manufacturing device, manufacturing method of window, and manufacturing method of display device |
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| JP3493081B2 (en) * | 1995-08-09 | 2004-02-03 | 株式会社日本マイクロニクス | Display panel suction table |
| JP3863245B2 (en) * | 1997-03-26 | 2006-12-27 | 東芝電子エンジニアリング株式会社 | Method and apparatus for assembling flat panel display |
| JP2000221479A (en) * | 1999-02-01 | 2000-08-11 | Matsushita Electric Ind Co Ltd | Attraction stage of liquid crystal panel |
| JP2001118913A (en) * | 1999-10-18 | 2001-04-27 | Dainippon Printing Co Ltd | Substrate suction plane |
| JP2002236292A (en) * | 2001-02-09 | 2002-08-23 | Matsushita Electric Ind Co Ltd | Manufacturing method for liquid crystal panel and substrate sticking device |
| JP2002350804A (en) * | 2001-05-29 | 2002-12-04 | Matsushita Electric Ind Co Ltd | Method and device for manufacturing liquid crystal panel |
| KR100966451B1 (en) * | 2003-06-25 | 2010-06-28 | 엘지디스플레이 주식회사 | Liquid crystal dispensing apparatus |
| WO2005069366A1 (en) * | 2004-01-16 | 2005-07-28 | Sharp Kabushiki Kaisha | Substrate adsorption device and substrate bonding device |
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