玖、發明說明： 【發明所屬之技術領域】 系統，特別指一種利 藉由待測玻璃的位 本發明為一種簡易的玻璃厚度的量測 用不同介質對光線產生不同折射率的原理 置變化來求取玻璃厚度的量測方法。 【先前技術】 近年來隨著X具機、各種產t機械、量測—的高精度 化，加上超精密加工機、半導體製程裝置、電子資訊機器、原 子力顯微鏡等需要高精密定位技術儀器的發展，不論是在精密 機械、半導體產業、微（奈）米科技皆朝微小化、精密化與奈 米級的方向前進，因此在精密機械領域之量測設備、製造技 術、整合技術的發屐，厚度檢測技術的相關研究是不容克緩。 省用檢測玻璃量測儀器請參考我國專利證書第丨2658丨號 的「反射式液晶顯示單元間隙厚度量測的方法」❶該習用技術 係利用光的波長來求出玻璃厚度，以達到精密精械領域的量測 要求。但該習用技術因擺設困難且需要精密設備成本太高，故 仍非唯一的良善技術，而仍待產業界繼續研究發展。 因此’發明人根據前述習用缺失_構思改良，進而發明 一種簡易的玻璃厚度的量測方式，可做為線上量測玻璃厚度， 其提供玻璃厚度誤差補償訊號，以達到精確加工的目標。 【發明目的】 591203 本發明之目的即在於提供-種應用在原子力顯微鏡懸臂 上的多自由度量測系統，其中利用不同介質對光線不同的折射 率’將待測玻璃旋轉-角度時產生的光程差，得到折射光源的 位置改變量’而後依據玻璃旋轉的角度變化、折射光的位置改 變量、還有光在空氣和玻璃的折射率等等，即可精確求出玻璃 厚度。 【發明内容】 本發明係根據以下技術加以完成，其首先以雷射二極體為φ 光源，將該雷射光源固定’使其雷射光直接投射至待測玻璃 上’然後產生-折射光，利用雷射四象儀（2D psd)接收以 得到折射光位置，·進-步當玻璃旋轉時，折射光的位置在雷射 四象儀改變，以折射光的位置改變量和玻璃旋轉的角度變化 量’可得到玻璃定點厚度；把玻璃沿旋轉角度移動時即得到 玻璃之截面厚度。 【實施方式】 請參閱圖一至圖：„ 圖一所不，本發明主要包括有一雷射光源 1，特指一種雷射二極體，1沉立 /、了產生足夠同調長度的雷射光束； 一待測玻璃2，係泛指诱明％比^Γ ·发明 、 Explanation of the invention: [Technical field to which the invention belongs] The system, in particular, refers to a principle that uses the position of the glass to be measured. The present invention is a simple measurement of the thickness of the glass. How to measure the thickness of glass. [Previous technology] In recent years, with the high precision of X-tools, various production machines, and measurement, plus ultra-precision processing machines, semiconductor process equipment, electronic information equipment, atomic force microscopes and other instruments that require high-precision positioning technology Development, both in the precision machinery, semiconductor industry, and micro (nano) technology, is progressing towards miniaturization, precision and nanometer level. Therefore, the development of measurement equipment, manufacturing technology and integration technology in the field of precision machinery The related research of thickness detection technology is not to be delayed. For the provincial testing glass measuring instrument, please refer to the "Measurement Method of Gap Thickness of Reflective Liquid Crystal Display Units" No. 2658 丨 in China Patent Certificate. This conventional technology uses the wavelength of light to determine the thickness of the glass to achieve precise precision Measurement requirements in the field of mechanical engineering. However, the conventional technology is still not the only good technology because of its difficulty in setting up and the cost of precision equipment is too high, and it remains to be researched and developed by the industry. Therefore, the inventor improved the idea based on the lack of conventional usage, and then invented a simple glass thickness measurement method that can be used to measure glass thickness online, which provides a glass thickness error compensation signal to achieve the goal of accurate processing. [Objective of the invention] 591203 The purpose of the present invention is to provide a multi-free measurement system applied to the cantilever of an atomic force microscope, in which the light produced when the glass to be measured is rotated by an angle by using different refractive indexes of different media to the light is used. The difference of the position of the refracting light source is obtained, and then the thickness of the glass can be accurately determined according to the change in the angle of rotation of the glass, the amount of change in the position of the refracted light, and the refractive index of the light in the air and the glass. [Summary of the Invention] The present invention is completed according to the following technology. First, a laser diode is used as a φ light source, and the laser light source is fixed to 'project the laser light directly onto the glass to be measured', and then generates-refracted light. Received by a four-dimensional laser imager (2D psd) to obtain the position of the refracted light. · When the glass is rotated, the position of the refracted light is changed by the four-image laser, the position of the refracted light is changed and the angle of glass rotation The amount of change 'can be used to obtain the fixed-point thickness of the glass; the cross-sectional thickness of the glass is obtained when the glass is moved along the rotation angle. [Embodiment] Please refer to Fig. 1 to Fig .: "In Fig. 1, the present invention mainly includes a laser light source 1, specifically a laser diode, 1 which stands up to produce a laser beam of sufficient coherence length; A glass to be tested 2 refers to the percentage of induced light ^ Γ ·
”曰遊明物皆可，以及一二維光檢測器（2D PSD ) 3，本實施例為雷射条 ^ _ 象儀。其t该雷射光源必要時亦可 改採可見光、微波、红外共妙此μ 卜先、糸外先、X射線，皆可應用於絕 對距離量測。 1 (雷射二極體）固"You can use bright objects, and a two-dimensional light detector (2D PSD) 3, this embodiment is a laser bar ^ _ imager. Its laser light source can also be changed to visible light, microwave, infrared, if necessary A total of this μ Bu Xian, Xuan Wai Xian, X-ray can be used for absolute distance measurement. 1 (laser diode) solid
折射光垂直入射至二維光檢 前述系統建置時，其首先將雷射光源i 定，將待測玻填2固定在旋轉台4上，令雷 至待測玻璃2上，然後產生一穿透光，利用二 測器3，得到光線改變後的位置，如圖二所示。 接著利用類比/數位轉換卡（A/D卡）把二維光檢測器3量 經轉換得到實際位置，再由 經計算得到待測玻璃2厚度，把 t ’即得到待測玻璃2之截面厚 測位置時所產生的電壓傳至電腦 旋轉台4得到角度的改變量，經 待測玻璃2沿旋轉角度移動時， 度’如圖三所示。 本發明需使用各項光學組件，現就各項組件加以說明： 1、雷射二極體（Laser Diode)，其與一般的雷射光源一 樣，其光波具有高度的指向性與同調性，但是卻具有更小的體 積與更大的效率。 2 雷射四象儀（2D Posi tion Sensor Detector )，係接 收光的強度變化，產生電壓改變量，藉類比/數位轉換卡（a/d 卡）轉成數位訊號傳至電腦，藉此獲得位置變化。 另者，前述之折射（Refracti〇n)現象請參圖四所示，當 光線由一介質進入另一介質時，光線的方向會產生改變，此為 591203 光線在不同介質時， 介質的光線入射角度 b=dcosu( 有不同進行速度所導致。因此，調整不同 ，即可得到相關量測數據，其公式為 tan u 〜tan u, ) 〇 【特點及功效】 藉由前述所稱之_播虛m + π β 種應用在原子力顯微鏡懸臂上的多自 不同介質對光線不同的折射率，可簡 而精確求出玻璃厚度，有效節省量測 由度s:測系統，其中利用 化量測的工作與配置，進 支出與強化量測結果。 上列詳細說明孫n m '、十對本發明之一可行實施例之具體說 明’惟該實施例並非用 非用以限制本發明之專利範圍，凡未脫離本 發明技藝精神所為之等 寻政貫施或變更，均應包含於本案之專利 範圍中。 【圖式簡單說明】 月 > 閱以下有關本發明一較佳實施例之詳細說明及其附 將可進纟瞭解本發明之技術内容及其目的功效；有關該 實施例之附圖為： 圖一為本發明之量測動作示意圖（一）； 圖二為本發明之量測動作示意圖（二）； 圖三為本發明之量測動作示意圖（三）；以及 圖四為本發明之折射原理圖。 【主要部分代表符號】 591203 1雷射光源 2待測玻璃 3二維光檢測器 4旋轉台When the refracted light is incident perpendicularly to the two-dimensional optical inspection system, it first sets the laser light source i, fixes the glass filling 2 to be measured on the rotating table 4, and makes the laser reach the glass 2 to be measured. The light is transmitted through the second measuring device 3 to obtain the changed position of the light, as shown in FIG. Then use the analog / digital conversion card (A / D card) to convert the amount of the two-dimensional photodetector 3 to obtain the actual position, and then calculate the thickness of the glass 2 to be measured, and t ′ to obtain the thickness of the cross-section of the glass 2 to be measured. The voltage generated during the position measurement is transmitted to the computer rotating table 4 to obtain the angle change amount. When the glass 2 to be measured moves along the rotation angle, the degree 'is shown in Figure 3. The present invention requires the use of various optical components, and the components will now be described: 1. Laser diodes, which are the same as general laser light sources, and their light waves have a high degree of directivity and coherence, but But it has smaller size and greater efficiency. 2 Laser four-image sensor (2D Position Sensor Detector), which receives the change in the intensity of the received light and generates the amount of voltage change. The analog / digital conversion card (a / d card) is converted into a digital signal and transmitted to the computer to obtain the position. Variety. In addition, please refer to Figure 4 for the aforementioned Refraction phenomenon. When light enters another medium from one medium, the direction of the light will change. This is 591203. When light is in different mediums, the light of the medium is incident. The angle b = dcosu (caused by different speeds. Therefore, the relevant measurement data can be obtained by adjusting differently, and its formula is tan u ~ tan u,) 〇 [Features and effects] By the above-mentioned _ m + π β kinds of different refractive indexes of different media used on the cantilever of the atomic force microscope can calculate the thickness of the glass simply and accurately, which can effectively save the measurement system. The measurement system uses chemical measurement. And configuration, input expenditures and enhanced measurement results. The above list details Sun nm ', ten specific descriptions of one of the feasible embodiments of the present invention', but this embodiment is not intended to limit the scope of the patent of the present invention. Or changes should be included in the patent scope of this case. [Brief description of the drawings] Month > Read the following detailed description of a preferred embodiment of the present invention and its attachments to understand the technical content of the present invention and its purpose and effectiveness; the drawings related to this embodiment are: One is a schematic diagram of the measuring action of the present invention (1); FIG. 2 is a schematic diagram of the measuring action of the present invention (2); FIG. 3 is a schematic diagram of the measuring action of the present invention (3); and FIG. 4 is a principle of refraction of the present invention Illustration. [Representative symbols of main parts] 591203 1 Laser light source 2 Glass to be measured 3 Two-dimensional light detector 4 Rotary stage