TW588180B

TW588180B - Process for re-providing a useful transparent common electrode in manufacturing a liquid crystal display

Info

Publication number: TW588180B
Application number: TW90132533A
Authority: TW
Inventors: Lu-Ting Yang
Original assignee: Chi Mei Optoelectronics Corp
Priority date: 2001-12-27
Filing date: 2001-12-27
Publication date: 2004-05-21

Abstract

The invention relates to a process for re-providing a useful transparent common electrode in manufacturing liquid crystal display. The liquid crystal displayer comprises a clean transparent common electrode and a plurality of protrusions specifically arrayed on the transparent common electrode. The process comprises the steps of (a) treating the common electrode having the protrusions with an alkaline solution containing a detergent for removing the protrusions; and (b) removing the alkaline solution containing the detergent residual on the common electrode. The process provides a way to directly remove the protrusions to recycle the transparent common electrode when the protrusions are disposed on the transparent common electrode to form a flaw in the product. It improves the disadvantages of prior art that should concurrently remove the common electrode and color filters thereunder, thereby saving the cost and meeting the requirement of environmental protection.

Description

588180 A7 --- -B7 五、發明説明" 發明領域本發明係關於一種液晶顯示器製造方法，詳言之，係關於一種去除突出件以回收透明共同電極之液晶顯示器製造方法。發明背景在各式各樣的液晶顯示器中，傳統扭絞向列（t ^丨$ t e d nemaUC)型是最為被廣泛使用的，其包含兩分別位於上、下之透明基板’且在該等基板之内面皆具有透明共同電極，而在1茨下層基板上具有彩色濾光片，並於基板間具有一液晶層，且該等基板之外面分別具有極化器。但傳統扭絞向列型液晶顯示器之對比並不佳，故業界研發出垂直校準扭絞向列 (vertically aligned twisted nematic, VATN)型液晶顯 π器以提高對比，然而垂直校準扭絞向列型液晶顯示器卻有視角不大之缺點。為增大垂直校準扭絞向列型液晶顯示器之視角，業界乃在該透明電極上發展出突出件的設計。參看圖丨之液晶顯示器部分剖面示意圖，1代表一透明基板，在該透明基板丨上由包含紅、綠及藍三色之彩色光阻2及遮光用之黑框3形成彩色遽光片，並在其上設置有一透明共同電極4。該透明共同電極通常為銦錫氧化物（Indium Tin Oxide，ITO)，其為透明故不影響濾光效果，而可作為提供驅動液晶的電極。為加大視角，在該透明電極4上設置有複數個突出件5。由於此突出件5的存在，故液晶分予的長軸排列會趨向垂直於該等突出588180 A7 --- -B7 V. INTRODUCTION TO THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a liquid crystal display. In particular, the invention relates to a method for manufacturing a liquid crystal display by removing protruding members to recover a transparent common electrode. BACKGROUND OF THE INVENTION Among various liquid crystal displays, the traditional twisted nematic (t ^ 丨 $ ted nemaUC) type is the most widely used, which includes two transparent substrates located above and below, and Each of the inner surfaces has a transparent common electrode, and a color filter is provided on the lower substrate, and a liquid crystal layer is provided between the substrates. The outer surfaces of the substrates each have a polarizer. However, the contrast of traditional twisted nematic liquid crystal displays is not good. Therefore, the industry has developed a vertically aligned twisted nematic (VATN) type LCD display to improve the contrast. Liquid crystal displays have the disadvantage of a small viewing angle. In order to increase the viewing angle of the vertically aligned twisted nematic liquid crystal display, the industry has developed a design of a protrusion on the transparent electrode. Referring to FIG. 丨 a schematic sectional view of a part of a liquid crystal display, 1 represents a transparent substrate on which a color phosphor film is formed by a color photoresist 2 including three colors of red, green, and blue, and a black frame 3 for shielding, and A transparent common electrode 4 is provided thereon. The transparent common electrode is usually indium tin oxide (ITO), which is transparent and therefore does not affect the filtering effect, but can be used as an electrode for driving liquid crystal. In order to increase the viewing angle, a plurality of protrusions 5 are provided on the transparent electrode 4. Due to the existence of this protrusion 5, the long axis arrangement of the liquid crystal division will tend to be perpendicular to the protrusions

O:\74\74720-920821.DOC 本纸張尺度適用中國國家標準(CNS) A4規格(210 X 297公董） ' 588180 五、發明説明（2 件5之表面’而形成二個具有不同倾斜方向之區域，進而達到增廣視角之目的。上述圖i之液晶顯示器之製造方法，通常包含⑴提供一透明基板，並將其洗淨；⑺在透明基板上設置複數個黑框，孩等黑框可遮蔽光源’以避免過亮；⑴在已設置黑框之透明基板上以重複塗層光阻液、前製程烘烤（Prebaking)、 uv曝光、顯影 '後製程烘烤（p(mbak 紅、綠、藍三色光阻；⑷前述之彩色光阻上設置一透= 同電極；及（5)設置複數個突出件於該共同電極上。當該等突出件設置不良，則無法使液晶排列達到所欲之效果’而成為不良品。惟由於該透明共同電極之表面脆弱，，依習用之方法錢成功直接去除料U件，若處理不當，將會影響其下經後製程烘烤所獲得彩色光阻之效益。故於此情況下，_業界通常會將此不良品採條件極為嚴苛的回收過程，亦即將整個彩色光阻、透明共同電極，突出件一併去除’而還原成具黑框之透明基板，然後再重新製造彩色光阻、设置共同電極及突出件。由於光阻及透明共同電極之成本高昂，此方法不但使成本大幅提高，耗時耗工，且處理之藥劑及廢液必然將造成環境的負擔。综上所述，開發-可去除不良突出件而不傷害透明共同電極之方法，乃為本發明所致力之目標，以避免繁複之去除及再製造彩色光阻及透明共同電極製程，俾大幅降低成本。μ 發明概述 O:\74\74720-92082l. 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公爱） 588180O: \ 74 \ 74720-920821.DOC This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public directors) '588180 V. Description of the invention (2 pieces and 5 surfaces) and two have different inclinations Orientation area, thereby achieving the purpose of widening the viewing angle. The manufacturing method of the liquid crystal display shown in FIG. I above usually includes: (i) providing a transparent substrate and washing it; (ii) setting a plurality of black frames on the transparent substrate, and the like. The frame can shield the light source 'to avoid over-brightness; 重复 Repeated coating of photoresist liquid, pre-baking (prebaking), UV exposure, and development on a transparent substrate with a black frame (p (mbak red , Green, blue three-color photoresistors; 一 set one transparent = same electrode on the aforementioned color photoresistors; and (5) set a plurality of protruding members on the common electrode. When the protruding members are not set properly, the liquid crystal cannot be aligned To achieve the desired effect 'and become a defective product. However, due to the fragile surface of the transparent common electrode, the material U was successfully removed directly according to the method used. If it is not handled properly, it will affect its subsequent post-process baking. Effect of color photoresist Therefore, under this circumstance, the industry will usually collect the bad products under extremely severe recycling process, that is, the entire color photoresistor, transparent common electrode, and protruding parts are removed together to restore the transparent black frame. Substrate, and then remanufactured color photoresist, common electrode and protruding parts. Due to the high cost of photoresist and transparent common electrode, this method will not only greatly increase the cost, time and labor, but also the processed chemicals and waste liquid will inevitably In summary, the development of a method that can remove bad protrusions without harming the transparent common electrode is the goal of the present invention to avoid the complicated removal and remanufacturing of the color photoresist and the transparent common electrode. Manufacturing process greatly reduces costs. Μ Summary of invention O: \ 74 \ 74720-92082l. This paper size applies to China National Standard (CNS) A4 specification (210X297 public love) 588180

AT __ _B7 五、發明説明（j )^~ --- 本發明之目的在於提供一種在一液晶顯示器之製造中覆提供-有用透明共同電極之方法，其中該液晶顯示器包: 一清潔之透明共同電極，及複數個依特定排列設置於讀共同電極上又哭出件，該方法，包含下列步驟：（a)以内人界面活性劑之一鹼液處理具該設有複數突出件之共同二極，以去除該等突出件；及（b )將殘留於該共同電極1私孩含界面活性劑之鹼液洗淨。本方法提供當該等突出件2 置於孩透明共同電極上造成不良品時，可直接去除該等突出件以回收該透明共同電極之方法，改善了習知技術中必須連帶將該共同電極及其下之彩色光阻一併去除之缺點，可降低成本並達到環境保護的要求。圖式簡要說明圖1顯示液晶顯示器部分剖面示意圖。元件符號說明 1 :透明基板 2 :彩色光阻 3 :黑框 4 :透明共同電極 5 :突出件登明詳細說明本發明去除不良突出件以回收透明共同電極之液晶顯示器製造方法’其包含（1)提供一透明基板，並將其洗淨；（2) O:\74\74720-92082I.DOC g 本紙張尺度適用中國國豕標準⑴呢）A4規格(2i〇 X撕公f) A7 B7AT __ _B7 V. Description of the Invention (j) ^ ~ --- The purpose of the present invention is to provide a method for providing a common transparent electrode in the manufacture of a liquid crystal display, wherein the liquid crystal display package: a clean transparent common The electrode, and a plurality of crying pieces arranged on the reading common electrode in a specific arrangement, the method includes the following steps: (a) an alkaline liquid treating tool with one of the interfacial surfactants, and a common dipole provided with a plurality of protruding pieces; To remove the protruding pieces; and (b) washing the alkaline solution containing the surfactant remaining on the common electrode 1. This method provides a method for directly removing the protruding parts to recover the transparent common electrode when the protruding parts 2 are placed on the transparent common electrode and causing defective products, which improves the common electrode and the common electrode in the conventional technology. The disadvantages of removing the color photoresist below can reduce the cost and meet the requirements of environmental protection. Brief Description of the Drawings Figure 1 shows a schematic sectional view of a part of a liquid crystal display. Element symbol description 1: transparent substrate 2: color photoresist 3: black frame 4: transparent common electrode 5: protrusions are described in detail Detailed description of the method for manufacturing a liquid crystal display of the present invention by removing defective protrusions to recover the transparent common electrode includes (1 ) Provide a transparent substrate and wash it; (2) O: \ 74 \ 74720-92082I.DOC g This paper size is applicable to China National Standards) A4 size (2i〇X tear male f) A7 B7

588180 五、發明説明（4 在該透明基板上設置黑框；（3)在已設置黑框之透明基板上製得紅、綠、藍三色光阻；⑷提供一透明之共同電極；（5) 於該共同電極上設置複數個突出件；若該等突出件設置不良時’則進行(6)以含界面活性劑之驗液處理具該等突出件之共同電@ ’以去除該等突出件；⑺洗淨該共同電極上之該含界面活性劑之鹼，夜；及⑴於該已去除該等突出件之共同電極上，重新設置複數個突出件。本發明之特徵在於以舌性劑《驗液處理具該等突出件之共同電極，以去除該等突出件。在驗液的選擇上，較佳係為氫氧化鉀水溶液。且含量較佳為重量百分比少於1〇%，更佳為重量百分比介於6至8%。在界面活性劑的選擇上，較佳係NCW⑧（購自和光純葯工業株式会社）。其含量較佳為每1〇〇1111^鹼液添加1至1〇111[，更佳為每100mL鹼液添加3至8mL。該等反應可在室溫下進行。當以含界面活性劑之鹼液處理後，需洗淨去除該溶液後方能重新設置突出件。其洗淨可以超純水（DI_H2〇)再經多次漂洗。漂洗時可利用超音波震盪以加強效果。於洗淨後可另加上乾燥步驟。本發明去除突起件之效果，可以白、紅、綠、藍燈分別此試驗可分別檢視突出件殘留、黑框及彩色光阻之狀態，以檢測該透明共同電極，其中白燈可檢測出是否有突出件殘留以及黑框是否正常提供遮光效果，紅、綠，藍燈則分裝588180 V. Description of the Invention (4 Set a black frame on the transparent substrate; (3) Make red, green and blue photoresistors on a transparent substrate with a black frame; ⑷ Provide a transparent common electrode; (5) on A plurality of protrusions are provided on the common electrode; if the protrusions are not set well, then (6) the common electricity @ of the protrusions is treated with a test solution containing a surfactant to remove the protrusions; (2) washing the alkali containing the surfactant on the common electrode, and (ii) resetting the plurality of protruding pieces on the common electrode from which the protruding pieces have been removed. The present invention is characterized by using a tongue agent " The test solution is treated with a common electrode of the protruding parts to remove the protruding parts. In the selection of the test solution, a potassium hydroxide aqueous solution is preferred. The content is preferably less than 10% by weight, and more preferably The weight percentage is between 6 and 8%. In the selection of the surfactant, it is preferably NCW⑧ (purchased from Wako Pure Chemical Industries, Ltd.). The content is preferably 1 to 1 per 1001111 ^ alkaline solution. 〇111 [, more preferably 3 to 8 mL per 100 mL of lye. The reaction can be carried out at room temperature. After treatment with a surfactant-containing alkaline solution, the solution needs to be washed and removed before the protruding parts can be reset. It can be washed with ultrapure water (DI_H2〇) and then rinsed multiple times. . Ultrasonic vibration can be used during rinsing to enhance the effect. A drying step can be added after washing. The effect of removing the protruding parts of the present invention can be white, red, green and blue lights. The state of the black frame and the color photoresist to detect the transparent common electrode. The white light can detect whether there are protrusions remaining and whether the black frame normally provides the shading effect. Red, green, and blue lights are separately installed.

O:\74\74720-92082I.DOC 588180 A7 ___ __ B7 克、發明説明（5 ) 別檢測彩色光阻的濾光效果，或經顯微鏡檢視該透明電極之表面及厚度，以觀察該透明共同電極是否受本發明處理而影響其性質。除光學檢視外，可另以化學方法檢視該透明共同基板是否會有剝離、色彩阻擋、色差（Δε)等狀況’其中色差之數值越小，則代表該液晶顯示器品質越高’該化學方法檢視係採用業界用於測試附著度之氫氧化納試驗（以重量百分比3 %之氫氧化鈉處理1 〇分鐘）。本發明可芫全去除該等突出件，不會有任何殘留，且經該處理後之透明共同電極與未處理之透明共同電極比較，無論在光學性質或化學性質上，幾乎無差異，其可證明本發明確可達到去除突出件而不傷害透明共同電極，而達到回收使用透明共同電極以大幅減少成本之目的。經過去除該等突出件後之透明共同電極，則可用於重新設置突出件，在應用上也可視需要在去除該等突出件後，經簡易之化學檢視後，方使用合乎要求之回收透明共同電極，更可提高產品品質。兹以下列實例予以詳細說明本發明之效果，惟並不意味本發明僅侷限於此等實例所揭示之内容。實例1 方法本發明以含界面活性劑之鹼液處理具不良突出件之透明共同電極以去除突出件之條件如下表1 ·· 表1O: \ 74 \ 74720-92082I.DOC 588180 A7 ___ __ B7 grams, description of invention (5) Do not detect the filtering effect of color photoresist, or inspect the surface and thickness of the transparent electrode through a microscope to observe the transparent common electrode Whether it is treated by the present invention will affect its properties. In addition to the optical inspection, the transparent common substrate can be chemically inspected for conditions such as peeling, color blocking, and color difference (Δε). 'The smaller the value of the color difference, the higher the quality of the liquid crystal display.' The chemical method inspection It is a sodium hydroxide test used in the industry to test the adhesion (3% sodium hydroxide treatment for 10 minutes). The present invention can completely remove these protruding parts without any residue. Compared with the untreated transparent common electrode, the treated transparent common electrode has almost no difference in optical or chemical properties. It is proved that the present invention can achieve the purpose of removing the protruding parts without harming the transparent common electrode, and achieving the purpose of recycling and using the transparent common electrode to greatly reduce the cost. After removing the protruding common parts, the transparent common electrode can be used to reset the protruding parts. In the application, if necessary, after removing the protruding parts, after a simple chemical inspection, the qualified transparent common electrode can be used. , Which can improve product quality. The following examples are used to explain the effect of the present invention in detail, but it does not mean that the present invention is limited to what is disclosed in these examples. Example 1 Method According to the present invention, the alkaline solution containing a surfactant is used to treat the transparent common electrode with poor protrusions, and the conditions for removing the protrusions are as follows. Table 1 ·· Table 1

588180 A7 B7 五、發明説明（6 ) 樣品溶液溫度時間 1 每100mL之7%氫氧化鉀+ imL NCW⑧ 室溫 3分鐘 2 每100mL之7%氫氧化鉀+ 2mL NCW⑧ 室溫 ---^ 5分鐘 3 每100mL之7%氫氧化鉀+ 3mL NCW® 室溫 * —^ 1 〇分鐘 4 每10〇1111^之7%氫氧化鉀 + 41111^>^\^® 室溫 3分鐘 5 «—., 每10〇1!11^之7%氫氧化鉀 + 8111]^]^(：冒® 室溫 ----- 3分鐘 6 每100mL之7%氫氧化鉀+ 8mL NCW® 室溫 3.5分鐘 7 每100mL之7%氫氧化鉀 + 8mLNCW® 室溫 1 ^ 5分鐘 1------ 上表中之％表示重量百分比。經上述處理後’再以超純水沖洗5分鐘，並於超純水中超鍮波震i味洗3分4里兩次，洪乾後而得到回收之透明共同電極0 實例2 測試以下列方法檢視經實例1處理後之透明共同電極。白、紅、綠、藍燈檢視：正常，且無突出件殘留顯微鏡檢視··表面正常，厚度介於丨6 8 〇至丨7 2 〇 A之間氫氧化鈉試驗：無剥離、色彩阻擋，其中樣品6及7之色差如下表2 : -9-588180 A7 B7 V. Description of the invention (6) Sample solution temperature time 1 7% potassium hydroxide per 100mL + imL NCW⑧ 3 minutes at room temperature 2 7% potassium hydroxide per 100mL + 2mL NCW⑧ room temperature --- 5 minutes 3 7% potassium hydroxide per 100mL + 3mL NCW® room temperature * — ^ 10 minutes 4 7% potassium hydroxide per 1001111 ^ + 41111 ^ > ^ \ ^ ® room temperature 3 minutes 5 «-. , 7% potassium hydroxide per 100%! 11 ^ + 8111] ^] ^ (: ®® room temperature ----- 3 minutes 6 7% potassium hydroxide per 100mL + 8mL NCW® room temperature 3.5 minutes 7 7% potassium hydroxide per 100mL + 8mL NCW® at room temperature for 1 ^ 5 minutes 1 ------% in the table above represents weight percentage. After the above treatment, rinse with ultrapure water for 5 minutes, and Ultra-pure water was washed twice in three minutes and four miles, and the dried transparent common electrode was recovered after drying. Example 2 Test The transparent common electrode treated in Example 1 was examined in the following way. White, red, green Blue light inspection: normal, no residual inspection of protruding parts. Microscope inspection. Surface is normal, thickness is between 6800 and 7200A. Sodium hydroxide test: no peeling, color blocking, of which Color difference between the products 6 and 7 in Table 2 as follows: -9-

O:\74\74720-92082I.DOC 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公f) 588180 A7 ----------- B7 五、發明説明（7 ) 表2 -------- 色別處理後色差（△ E) 經氫氧化鈉試驗後色差 (Δ E) 樣品6 紅 0.25 ——-----、 J 0.13 綠 0.23 0.22 藍 0.16 0.10 樣品7 紅 0.14 —------- 0.08 綠 0.24 0.18 藍 0.6 1 ------- 0.72 經上述諸多測試，該透明共同電極並不因含界面活性劑 (驗夜處理而受到傷害’並可順利去除突出件，達到回收 (目的。故確可直接應用於之後的重新設置突出件製程。本發明的方法和特徵，經上述實例說明將更為明顧，現應瞭解的是，任何不脫離本㈣精神下所為之㈣或改變，^ 屬本發明意圖保護者。 O:\74\74720-920821.DOC - 10 -O: \ 74 \ 74720-92082I.DOC This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 male f) 588180 A7 ----------- B7 V. Description of the invention (7) Table 2 -------- Color difference after color treatment (△ E) Color difference (Δ E) after sodium hydroxide test Sample 6 Red 0.25 -------- J 0.13 Green 0.23 0.22 Blue 0.16 0.10 Sample 7 Red 0.14 --------- 0.08 Green 0.24 0.18 Blue 0.6 1 ------- 0.72 After many tests mentioned above, the transparent common electrode was not harmed by containing surfactant (night test treatment) 'And the protruding parts can be removed smoothly to achieve recycling (the purpose. Therefore, it can be directly applied to the process of resetting the protruding parts in the future. The method and features of the present invention will be more clearly considered through the above-mentioned examples. It should now be understood that Any changes or changes that do not depart from the spirit of this book are the intended protection of this invention. O: \ 74 \ 74720-920821.DOC-10-

Claims

ίουίου

口種在液印顯示器製程中重覆提供一有用透明共同電 ”之方法其中垓液晶顯示器包含一清潔之透明共同電極及#數個依特定排列設置於該透明共同電極上之突出件，該方法包含下列步驟·· (a )以内含界面活性劑之一鹼液處理具該設有複數突出件足共同電極，以去除該等突出件；及 (b )將殘留於孩共同電極上之該含界面活性劑之鹼液洗淨。 2 ·根據申請專利範圍第丨項之方法，其中該透明共同電極係為銦錫氧化物所製成。 3 ·根據申請專利範圍第丨項之方法，其中該鹼液包含氫氧化鉀。 4 ·根據冲明專利範圍第3項之方法，其中該驗液包含重量百分比少於1 0 %之氫氧化鉀。 5 ·根據申請專利範圍第4項之方法，其中該鹼液包含重 I百分比6至8 %之氫氧化^甲。 6 ·根據申請專利範圍第丨項之方法，其中該界面活性劑包含NC W⑧。 7 ·根據申請專利範圍第6項之方法，其中該含界面活性劑之驗液包含每1 〇〇 m乙鹼液添加1至丨〇 m L之 NCW®。 8 ·根據申請專利範圍第7項之方法，其中該含界面活性本紙張尺度適财目g家料(CNS) A4規格Gl〇X297公釐y A8 B8The method of repeatedly providing a useful and transparent common electricity in the process of the liquid crystal display is to repeatedly provide a clean common electrode and a number of protruding pieces arranged on the transparent common electrode in a specific arrangement. It includes the following steps: (a) an alkaline treatment tool containing one of the surfactants, the common electrode provided with a plurality of protruding members to remove the protruding members; and (b) the containing electrode remaining on the common electrode The alkaline solution of the surfactant is washed. 2 · The method according to item 丨 of the patent application, wherein the transparent common electrode is made of indium tin oxide. 3 · The method according to item 丨 of the patent application, wherein the The lye contains potassium hydroxide. 4 · The method according to item 3 of the Chongming patent scope, wherein the test solution contains less than 10% potassium hydroxide by weight. 5 · The method according to item 4 of the patent scope, wherein The lye contains 6% to 8% by weight of hydroxide A. 6 · The method according to item 丨 of the patent application scope, wherein the surfactant contains NC W 包含. 7 · According to the patent application The method according to item 6, wherein the test solution containing the surfactant comprises NCW® with an addition of 1 to 10 m L per 100 m of ethyl lye. 8 · The method according to item 7 of the scope of patent application, wherein Contains interfacial activity, paper size, suitable household materials (CNS), A4 size, G10 × 297mm, A8 B8

〈驗液包含每lOOmL驗液添加3至8%之NCW®。 9 · 才艮 11 、、田申請專利範圍第1項之方法，其中步驟（a)係在室 ‘下進行。 1 0 .根據申請專利範圍第 # ^ u . 视图罘丄貝 < 万法，其中步驟（b )係以超純水（DbhO)洗淨。、 11.根據申請專利範圍第1項之方法#、λ . ^ 洗潫β & & 万去，其於進行步驟（b )之，元乎稜序後，另包含一乾燥步驟。 U ·根據申請專利範圍第i項之方之冰攻^ t ’其中於進行步驟（b ) < ^淨程序後，另包含一檢視歩驟。 1 3 ·根據申請專利範圍第1 2項之方本w A Λ ♦，其中該檢視步驟包。以白、紅、綠，藍燈及顯微鏠見檢視之步騾0 本紙張尺度適用中國國家標準(CNS) Α4規格(210 X 297公釐）<The test solution contains 3 to 8% NCW® per 100 mL of test solution. 9 · The method of claim 11 and claim 1 of the patent application range, wherein step (a) is performed in a room ′. 1 0. According to the scope of application for patent # ^ u. View 罘丄 shell < Wanfa, wherein step (b) is washed with ultrapure water (DbhO). 11. According to the method # 1, λ. ^ Washing β & & 10,000 of the scope of the patent application, after performing step (b), the order includes a drying step. U · According to the ice attack of item i in the scope of application patent ^ t ′, after performing the step (b) < ^ net procedure, another inspection step is included. 1 3 · According to the formula of item 12 of the scope of patent application w A Λ ♦, where the inspection step package is included. With white, red, green, blue lights and microscopy (see step for review) 0 This paper size is in accordance with China National Standard (CNS) Α4 (210 X 297 mm)