TW351691B - Method for polishing thin plate and apparatus for polishing - Google Patents
Method for polishing thin plate and apparatus for polishingInfo
- Publication number
- TW351691B TW351691B TW086117297A TW86117297A TW351691B TW 351691 B TW351691 B TW 351691B TW 086117297 A TW086117297 A TW 086117297A TW 86117297 A TW86117297 A TW 86117297A TW 351691 B TW351691 B TW 351691B
- Authority
- TW
- Taiwan
- Prior art keywords
- polishing
- thin plate
- plate
- rotating
- polish
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31663496A JPH10156710A (ja) | 1996-11-27 | 1996-11-27 | 薄板の研磨方法および研磨装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW351691B true TW351691B (en) | 1999-02-01 |
Family
ID=18079231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086117297A TW351691B (en) | 1996-11-27 | 1997-11-19 | Method for polishing thin plate and apparatus for polishing |
Country Status (5)
Country | Link |
---|---|
US (1) | US5934981A (zh) |
EP (1) | EP0845329B1 (zh) |
JP (1) | JPH10156710A (zh) |
DE (1) | DE69711818T2 (zh) |
TW (1) | TW351691B (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4236292B2 (ja) * | 1997-03-06 | 2009-03-11 | 日本碍子株式会社 | ウエハー吸着装置およびその製造方法 |
JP3618220B2 (ja) * | 1998-03-30 | 2005-02-09 | 信越半導体株式会社 | 薄板の研磨方法および薄板保持プレート |
WO2000025981A1 (fr) * | 1998-10-30 | 2000-05-11 | Shin-Etsu Handotai Co., Ltd. | Plan non poli de maintien/travail et son procede de fabrication ; technique et dispositif de polissage |
JP3772954B2 (ja) * | 1999-10-15 | 2006-05-10 | 株式会社村田製作所 | チップ状部品の取扱方法 |
DE10009656B4 (de) * | 2000-02-24 | 2005-12-08 | Siltronic Ag | Verfahren zur Herstellung einer Halbleiterscheibe |
DE10012840C2 (de) * | 2000-03-16 | 2001-08-02 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung einer Vielzahl von polierten Halbleiterscheiben |
JP6088919B2 (ja) * | 2013-06-28 | 2017-03-01 | 株式会社東芝 | 半導体装置の製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4010583A (en) * | 1974-05-28 | 1977-03-08 | Engelhard Minerals & Chemicals Corporation | Fixed-super-abrasive tool and method of manufacture thereof |
JP2632738B2 (ja) * | 1990-04-27 | 1997-07-23 | 信越半導体 株式会社 | パッキングパッド、および半導体ウェーハの研磨方法 |
US5140782A (en) * | 1990-10-29 | 1992-08-25 | Honore Mecteau | Tool and method for forming a lens |
US5380387A (en) * | 1992-10-13 | 1995-01-10 | Loctite Corporation | Lens blocking/deblocking method |
JPH06320414A (ja) * | 1993-05-11 | 1994-11-22 | Hitachi Ltd | 研磨プレートおよびそれを用いた研磨装置 |
JP3042293B2 (ja) * | 1994-02-18 | 2000-05-15 | 信越半導体株式会社 | ウエーハのポリッシング装置 |
JPH07297195A (ja) * | 1994-04-27 | 1995-11-10 | Speedfam Co Ltd | 半導体装置の平坦化方法及び平坦化装置 |
JP2719113B2 (ja) * | 1994-05-24 | 1998-02-25 | 信越半導体株式会社 | 単結晶シリコンウェーハの歪付け方法 |
US5664990A (en) * | 1996-07-29 | 1997-09-09 | Integrated Process Equipment Corp. | Slurry recycling in CMP apparatus |
-
1996
- 1996-11-27 JP JP31663496A patent/JPH10156710A/ja active Pending
-
1997
- 1997-11-18 US US08/972,680 patent/US5934981A/en not_active Expired - Fee Related
- 1997-11-19 TW TW086117297A patent/TW351691B/zh active
- 1997-11-21 DE DE69711818T patent/DE69711818T2/de not_active Expired - Fee Related
- 1997-11-21 EP EP97309423A patent/EP0845329B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69711818T2 (de) | 2002-09-12 |
EP0845329A2 (en) | 1998-06-03 |
EP0845329A3 (en) | 1998-12-16 |
US5934981A (en) | 1999-08-10 |
DE69711818D1 (de) | 2002-05-16 |
JPH10156710A (ja) | 1998-06-16 |
EP0845329B1 (en) | 2002-04-10 |
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