TW243470B - Film layer forming device and method for forming a film layer - Google Patents
Film layer forming device and method for forming a film layerInfo
- Publication number
- TW243470B TW243470B TW83105933A TW83105933A TW243470B TW 243470 B TW243470 B TW 243470B TW 83105933 A TW83105933 A TW 83105933A TW 83105933 A TW83105933 A TW 83105933A TW 243470 B TW243470 B TW 243470B
- Authority
- TW
- Taiwan
- Prior art keywords
- film layer
- forming
- vaporization
- forming device
- vaporize
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9370194A JPH07278800A (ja) | 1994-04-06 | 1994-04-06 | 被膜形成装置及びその被膜形成方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW243470B true TW243470B (en) | 1995-03-21 |
Family
ID=14089715
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW83105933A TW243470B (en) | 1994-04-06 | 1994-06-30 | Film layer forming device and method for forming a film layer |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH07278800A (ja) |
TW (1) | TW243470B (ja) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7173370B2 (en) | 2001-02-01 | 2007-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Organic light emitting element and display device using the element |
US7196360B2 (en) | 2001-02-08 | 2007-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
US7332857B2 (en) | 2001-01-18 | 2008-02-19 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and manufacturing method thereof |
US7342355B2 (en) | 2000-12-28 | 2008-03-11 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device having organic light emitting material with mixed layer |
US7399991B2 (en) | 2001-02-22 | 2008-07-15 | Semiconductor Energy Laboratory Co., Ltd. | Organic light emitting device and display device using the same |
US7432116B2 (en) | 2001-02-21 | 2008-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Method and apparatus for film deposition |
US7550173B2 (en) | 2001-01-17 | 2009-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Luminescent device and method of manufacturing same |
US7629025B2 (en) | 2001-02-08 | 2009-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Film formation apparatus and film formation method |
US8310147B2 (en) | 2000-12-28 | 2012-11-13 | Semiconductor Energy Laboratory Co., Ltd. | Luminescent device |
US8354786B2 (en) | 2001-02-01 | 2013-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
-
1994
- 1994-04-06 JP JP9370194A patent/JPH07278800A/ja active Pending
- 1994-06-30 TW TW83105933A patent/TW243470B/zh active
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7915807B2 (en) | 2000-12-28 | 2011-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and method of manufacturing the same |
US9362518B2 (en) | 2000-12-28 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and method of manufacturing the same |
US7342355B2 (en) | 2000-12-28 | 2008-03-11 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device having organic light emitting material with mixed layer |
US9209418B2 (en) | 2000-12-28 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and method of manufacturing the same |
US8878431B2 (en) | 2000-12-28 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and method of manufacturing the same |
US8432094B2 (en) | 2000-12-28 | 2013-04-30 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and method of manufacturing the same |
US8310147B2 (en) | 2000-12-28 | 2012-11-13 | Semiconductor Energy Laboratory Co., Ltd. | Luminescent device |
US7550173B2 (en) | 2001-01-17 | 2009-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Luminescent device and method of manufacturing same |
US7332857B2 (en) | 2001-01-18 | 2008-02-19 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and manufacturing method thereof |
US8674348B2 (en) | 2001-02-01 | 2014-03-18 | Semiconductor Energy Laboratory Co., Ltd. | Organic light emitting element and display device using the element |
US7173370B2 (en) | 2001-02-01 | 2007-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Organic light emitting element and display device using the element |
US7858977B2 (en) | 2001-02-01 | 2010-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Organic light emitting element and display device using the element |
US9608224B2 (en) | 2001-02-01 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Organic light emitting element and display device using the element |
US8174007B2 (en) | 2001-02-01 | 2012-05-08 | Semiconductor Energy Laboratory Co., Ltd. | Organic light emitting element and display device using the element |
US7459722B2 (en) | 2001-02-01 | 2008-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Organic light emitting element and display device using the element |
US8354786B2 (en) | 2001-02-01 | 2013-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9349977B2 (en) | 2001-02-01 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device having mixed layer including hole transporting compound |
US9219241B2 (en) | 2001-02-01 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Organic light emitting element and display device using the element |
US7456425B2 (en) | 2001-02-08 | 2008-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
US8513648B2 (en) | 2001-02-08 | 2013-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
US7196360B2 (en) | 2001-02-08 | 2007-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
US7629025B2 (en) | 2001-02-08 | 2009-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Film formation apparatus and film formation method |
US7432116B2 (en) | 2001-02-21 | 2008-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Method and apparatus for film deposition |
US7399991B2 (en) | 2001-02-22 | 2008-07-15 | Semiconductor Energy Laboratory Co., Ltd. | Organic light emitting device and display device using the same |
US7663149B2 (en) | 2001-02-22 | 2010-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Organic light emitting device and display device using the same |
Also Published As
Publication number | Publication date |
---|---|
JPH07278800A (ja) | 1995-10-24 |
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