201237989 六、發明說明： 【發明所屬之技術領域】 本發明係涉及一種太陽能石夕晶片加 一種太陽能石夕晶片加工之中心定位結構 者。 【先前技術】 按’太陽能矽晶片（SOLAR CELL )本 材質，它除了本身易碎之問題外，外觀 ，以6吋大小為例，公差就可能達到丄 );由於太陽能矽晶片外尺寸大小不— 身亦碎的特性’所以在材料的中心定位 圖所示’通常必需仰賴電荷耦合元件（ •，簡稱CCD )進行定位抓取，並透過抓 心計算，如第1圖所揭加工流程；而固 可太強’否則會有破裂或片體翹曲的情 一般而言，雷射加工的時間係為固 商縮減作業時間（TACT TIME )的方法， 尋邊定位」這個加工程序上。若精確度 有些國内外相關業界是採用設置多組高 陽能碎晶片個各側邊緣分佈位置上，以 晶片各側邊緣影像；有些則是利用單組 作台的位移到各位置進行影像擷取；而 者成本頗高且相關的機構件複雜度也頗 頗多時間在影像擷取上。 工技術；特別是指 及方法之創新設計 身是很容易破裂的 尺寸公差也比較大 mm ( 156 ± 0.5 mm ，再加上其材料本 加工作業上如第1 Charge Coupled Device 取之邊緣值去做中 定失持的力道也不 形產生。 定，而各家設備廠 多數是花在^ CCD 要求較高的做法’ 解析度的CCD在太 同步插取太陽能石夕 CCD透過X-Y軸工 就優劣點而言’前 高，後者則會花費 201237989 是以’針對上述習知太陽能矽晶片加工 構及方法所存在之問題點，如何研發出一種 業政率又兼具低成本、更具理想實用性之創 待相關業界再加以思索突破者。 女 趣於此，發明人本於多年從事相關產 與設汁缓驗，針對上述之目標，詳加設計與 終彳寻—確具實用性之本發明。 【發明内容】 本發明之主要目的’係在提供一種太陽 之中 又位結構及其方法，其所欲解決之問 如何研發出一種能夠達到高作業效率又兼具 能矽晶片加工之中心定位結構與方法為目標 者； 本發明解決問題之技術特點 晶片加工之中心定位結構係包含 二承养限位構件，分設於該工作 放位置的X 、γ軸相臨二側向固 能矽晶片置放時，令太陽能矽晶 於該第〜、第二承靠限位構件； 機構，分設於該工作台上相對於 之另側X、Y軸相臨二側向位置 持該太陽能石夕晶片另相臨之二側 第一、第二夾持機構、工作台上 置係藉以偵測第_、第_ 矛一夾持機 ’主要在: * 第一承 台上欲供 定位置處 片之相臨 第一失持 第一 處， 邊； 任其 構之 、第 之中心定位結 能夠達到高作 新設計，實有 品之製造開發 審慎評估後， 能石夕晶片加工 題點，係針對 低成本之太陽 加以思索突破 所述太陽能石夕 限位構件及第 陽能矽晶片置 精以當該太陽 .側邊能夠抵靠 :構及第二夾持 •承靠限位構件 :移作動抵靠夾 .置，附設於該 ’所述測距裝 '作位移距離或 4 201237989 第一、第二夹持機構之夹持端與太陽能石夕 相對距離、或測距裝置與太陽能石夕:谢邊之間的 離任其中-種距離狀態；—邏輯乂邊：間的相對距 電性連結，肖以依據該第二：：凡，與該;則距裝置 承靠限位構件之預# 一失持機構與第—、第二 <頂s又已知相對距離數 得之距離數值加以運算，進以 =及測距裝置所測 之中心點定位精確位置； 寸%迠矽晶片定位狀態 本發明之另—主孽 加工之令心定位方法，所述中則，提供一種太陽能矽晶片 :將太陽能石夕晶片置放於該工;c特徵主要包括 土持機構之位移作動抵靠推動以::用該第―、第二 邊，令太陽能矽晶片另並 犯夕曰曰片其中相臨二側 第二承靠限位構件：匕目T之二側邊抵靠於該第一、 第-、第二夫持機構晶片穩固定位；於該 測該第-、第二失持機中’藉由該測距裝置情 —夾持機構之夾持端與二々動作位移距離或第一、第 :、：距^狀態；利用該邏輯運算:對距離任其 第一夹持機構盘第一 一早几之運作，以依據第 相對距離數值及測距裝置所^承靠限位構件之預設已知 以獲得太陽能碎晶片定位狀態:以運算，進 藉此創新獨特#蚪點疋位精確位置； 要是透過將測距裝置附設於：J明對照先前技術而言，主 新結構設計，使得第―、第：、第二夹持機構上之創 程中，同拄$ 一爽持機構於夾持位较t :Π時透過測距裝置债測該第 T位移作動過 持動作位移距離或第— 、第一失持機構之失 5夕晶片之間的相對距離任其；^機構之夹持端與太陽能 -、第二失持機構抵靠炎持此，當第 場犯矽日日片另相臨之二側 201237989 邊時，俾可一併獲得太陽能矽晶片定位狀態之中心點 精確位置，藉此，係達到高作業效率又兼具低成本夂 與實用進步性。 定饮 優點 【實施 請 加工之 例僅供 述太陽 持於一 定位精 第 該工作 臨二側 令太陽 承靠限 第 05上相 軸相臨 晶片06 測 工作台 、第二 失持機 對距離 距離等 方式】 參閱第1 、2 中心定位結構 說明之用，在 月色碎晶片加工 工作台05上之 破位置，包括 一承靠限位構 台05上欲供太 向固定位置處 月匕碎晶片〇6之 位構件11、12 一夾持機構21 對於第_、第 —側向位置處 另相臨之二側 距裝置30，附 〇 5上任其中— 夾持機構21、 構21、22之失 '或測距裝置 、3圖所示，係本發明 及其方法之較佳實施例 專利申請上並不受此結 之中。疋位結構’係藉 一太陽能矽晶片06定位 件11及第二承靠限位構 陽能石夕晶片06置放位置 ，藉以當該太陽能矽晶 相臨二側邊能夠抵靠於 太陽能石夕 ，惟此等 構之限制 以取得置 狀態之中201237989 VI. Description of the Invention: [Technical Field] The present invention relates to a solar stone wafer and a central positioning structure for solar stone wafer processing. [Prior Art] According to the SOLAR CELL material, in addition to its own fragile problem, the appearance, in the case of 6 inches, the tolerance may reach 丄); due to the size of the solar 矽 wafer outside the size - The characteristics of the body are also 'so that the center of the material's positioning map' usually depends on the charge-coupled component (•, CCD for short) for positioning and grasping, and through the grasping of the heart, as shown in Figure 1, the process is fixed; Can be too strong 'otherwise there will be cracks or warping of the sheet. Generally speaking, the time of laser processing is the method of "TACT TIME", the method of "edge finding". If the accuracy is concerned, some domestic and foreign related industries use multiple sets of high-powered chips to distribute the edge of each side of the wafer, and image the edges of each side of the wafer; some use a single set of displacements to each position for image capture; The cost is high and the associated machine components are also quite complex in image capture. The technical design; especially the innovative design of the method is very easy to break the size tolerance is also relatively large mm (156 ± 0.5 mm, plus the material in the processing work as the first Charge Coupled Device take the edge value to do In the meantime, the strength of the loss of the system does not arise. Ding, and most of the equipment factory is spent in the CCD CCD requires a higher practice 'resolution CCD in the too synchronous insertion of solar stone 夕 CCD through the XY axis work advantages and disadvantages In terms of 'the former high, the latter will cost 201237989 to solve the problem of the above-mentioned conventional solar wafer processing structure and method, how to develop a business rate and low cost, more ideal and practical. Innovative people in the relevant industry to think about breakthroughs. Female interest in this, the inventor has been engaged in the relevant production and design of the slow-test for many years, in response to the above objectives, detailed design and final search - the practical invention. SUMMARY OF THE INVENTION The main object of the present invention is to provide a structure and method for the sun, and how to develop a method for achieving high operational efficiency. The central positioning structure and method capable of processing the wafer are the target; the technical feature of the invention solves the problem. The central positioning structure of the wafer processing includes a two-receiving limiting member, and the X and γ axes respectively disposed at the working position are adjacent to each other. When the two lateral solid-state 矽 wafers are placed, the solar energy is crystallized on the first and second bearing limit members; the mechanism is disposed on the table opposite to the other side of the X and Y axes. The first and second clamping mechanisms and the table are placed on the two sides of the solar stone cherished chip to detect the first and the first spear-holding machine. The main one is: * The first cap On the first place where the position of the film is to be placed at the first place, the first place is the same; the center of the structure can achieve high design and new design. The problem is to think about the low-cost sun to break through the solar stone limit member and the first solar energy chip to be placed in the sun. The side can be abutted: the second clamping and the bearing limit Component: move and move against the clamp. In the 'the distance measuring device' for the displacement distance or 4 201237989, the first and second clamping mechanisms are clamped to the opposite side of the solar energy, or the distance between the distance measuring device and the solar energy stone: Xiebian - a kind of distance state; - logical edge: the relative distance between the electrical connection, according to the second:: where, and; then from the device bearing the limit member of the pre-# a lost organization and the first, The second <top s is also known to calculate the distance value of the relative distance, and the position of the center point is measured by the distance measuring device; and the position of the wafer is positioned to be in the position of the wafer. The method for positioning the center of the heart, wherein the solar raft wafer is provided: the solar slab wafer is placed on the work; the c feature mainly includes the displacement of the soil holding mechanism to act against the push:: using the first and the On the two sides, the solar raft wafers are further smashed into the smashing slabs, and the two sides of the two sides are supported by the limiting members: the two sides of the cymbal T are abutted against the first, second, and second holding mechanism wafers. Steady fixed position; in the measurement of the first and second lost machines, by the test Device situation—the clamping end of the clamping mechanism and the displacement distance of the two jaws or the first, first:: distance ^ state; using the logic operation: the operation of the first clamping mechanism of the first clamping mechanism According to the relative distance value and the preset of the distance measuring device by the distance measuring device, it is known to obtain the positioning state of the solar chip: by operation, the innovation is unique and the precise position is obtained; The distance measuring device is attached to: J Ming compared with the prior art, the main new structure design makes the first, second, and second clamping mechanisms in the process of creation, the same as the holding device in the clamping position : Π 透过 透过 透过 透过 透过 透过 透过 透过 透过 透过 透过 透过 透过 透过 透过 机构 透过 透过 机构 透过 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 机构 测 测 测 测 测 测 测 测 测 测 测 测 测 测 测 测The second lost organization relied on Yan to hold this. When the first game was on the side of the second side of the day, the next day, 201237989, the position of the center point of the solar raft wafer positioning status was obtained. Achieve high operating efficiency and low cost and practical Sex. Advantages of the fixed drink [The implementation of the processing example is only for the sun to hold in a positioning fine. The work is on the second side of the sun. The sun is limited to the 05th phase axis. The measuring station, the second lost machine, the distance, etc. Method] Refer to the description of the centering structure of the 1st and 2nd, and the broken position on the moon-color chip processing table 05, including a support frame 05 on the support frame 05 for the too-fixed position at the fixed position. The position member 11, 12 has a clamping mechanism 21 for the two side spacing devices 30 at the _th and the first lateral positions, and the attachment 5 is in which the clamping mechanism 21, the structure 21, 22 is lost or The distance measuring device, shown in Figure 3, is not included in the patent application of the preferred embodiment of the present invention and its method. The 结构 position structure is a placement position of the solar energy 矽 wafer 06 positioning member 11 and the second bearing limit structure, and the solar energy can be placed on the side of the solar energy. , but the limits of this structure are in the state of being acquired.
件12 的X 分 任其中一種 距 一邏輯運算單元 依據該第一、第二夾 及第二夹持機構 二承靠限位構件 ’藉以位移作動 邊； 設於該第一、第 處，所述測距裝 22之夾持動作位 持端與太陽能石夕 30與太陽能矽晶 離狀態； 40，與該挪距裝 持機構21、22與 22 ’分 11、12 抵靠夹 二夾持 置30係 移距離 晶片06 片06側 片06置放 該第一、 設於該工 之另側X 持該太陽 機構21、 藉以偵測 或第一、 側邊之間 邊之間的 置30電性連結， 第一、第二承靠 晶片 實施 ;所 放夹 心點 設於 軸相 時， 第二 作台 、Y 能矽 22、 第一 第二 的相 相對 藉以 限位 6 201237989 構件11、12之預設已4 得之距離數值加以運_目對距離數值以及剛距裝置30所測 態之中心點定位精確=置進以獲得太陽能矽晶片06定位狀 其中，該第一、證一 乐一承靠限位構件11、·ι 9及* &冰— 點轉動之軸承所構成。 12係為此夠疋 ，传Π =測距裝置3°能夠表現的具體型態可為多種 第一第：所揭；下述所揭測距裝置30皆附設於 弟、第一夾持機構21、22上： 觸二4圖所示，該測距裝置30分別為推力計、接 觸式里測益所構成，藉以偵 22之*括#貝測該第 第二失持機構21、 未作==移距離’所述第一、第二失持機構" 構件U:12陽能…〇6抵靠於該第-、第二承靠限位 第-史持機：:丨邊距離為已知（如第3、4圖所揭X)，當 、機構21及第二失持機構22向太陽能 位移並呈夾持狀能眛，总 呀月匕矽日日片06側邊 犬符狀態肖，係可透過為推力計 之測距裝置3。得知位移距離（如第 冑式里測裔 )，接著拉士 圖所標示XI所指 曰由與測距裝置3〇電性連結 算出太陽能石夕晶片06的外尺寸，進而以早凡4〇推 晶片。6側邊至中心的距離（：第异出太陽能碎 定位精確:置:可獲得太陽……6定位狀態之中心點 再如第6圖所示測距裝置3。 器型態’藉以備測該第第二失持二“電感應感知 與太陽能矽s g μ彳& 、 、22之失持端 ^日日片06側邊之間的相對座冬 〇6之相臨二側邊抵靠於該第一、第丄“％能石夕晶片 弟 第〜承罪限位構件11、12 7 201237989 時，該對照式光電感應感知器呈移動狀態，構成對照 電感應感知器中間對位於太陽能矽晶片06，由於對照 電感應感知器移動距離為固定狀態（如第6圖所標示 指），而當太陽能矽晶片06對位於對照式光電感應感 ，所述對照式光電感應感知器則會顯示出數值X5，進 夠推算出太陽能矽晶片06側邊至中心的距離（如第6 標示X4所指）。 又如第5圖所揭測距裝置30，係附設於工作台05 該測距裝置30係為反射式光電感應感知器，為反射式 感應感知器之測距裝置30係具有回授距離讀值功能， 第一、第二夾持機構21、22未作動前與太陽能矽晶片 靠於該第一、第二承靠限位構件11、12之側邊距離為 (如第5圖所揭X)，當第一、第二夾持機構21、22位 動對太陽能矽晶片06進行夾持，令該太陽能矽晶片06 二側邊抵靠於該第一、第二承靠限位構件11、12時， 電感應感知器將發射感測光源L1投射於太陽能矽晶片 相臨之二側邊，如此一來，光電感應感知器則顯示所 的距離值（如第5圖所標示XI所指），進而能夠推算 陽能矽晶片06側邊至中心的距離（如第5圖所標示X2 )。 承上述結構組成設計，本發明所揭太陽能矽晶片 之中心定位方法係如下述： a 、將太陽能矽晶片06置放於該工作台05上； b 、利用該第一、第二夾持機構21、22之位移作動抵 持該太陽能矽晶片06其中相臨之二側邊，令該太 式光 式光 X3所 知器 而能 圖所 上， 光電 所述 06抵 已知 移作 相臨 該光 06另 測到 出太 所指 加工 靠夾 陽能 8 201237989One of the X divisions of the piece 12 is a displacement operation member according to the first and second clamping members and the second clamping mechanism 2; and is disposed at the first, the first, the The clamping action holding position of the distance measuring device 22 is in a state of being separated from the solar energy stone 30 and the solar energy; 40, and the distance holding mechanism 21, 22 and 22 '11, 12 are placed against the clamp 2 The distance between the wafers 06 and the 06 side pieces 06 is placed on the other side, and the other side of the work is held by the sun mechanism 21, thereby detecting or electrically connecting the first and the sides. The first and second substrates are implemented by the wafer; when the center of the sandwich is set in the axial phase, the second stage, the Y-energy 22, and the first and second phases are relatively limited by the limit 6 201237989 The presets of the components 11, 12 The distance value obtained by 4 is calculated by the distance value and the center point of the state measured by the device 30 is accurately set to obtain the positioning position of the solar raft wafer 06, wherein the first, the card and the license are limited. The position member 11, the ι 9 and the * & ice-point rotating bearing are formed. The 12 series is sufficient for this purpose, and the specific type that the range measuring device can represent can be a plurality of first types: the following distance measuring devices 30 are attached to the first clamping mechanism 21; 22: As shown in Figure 2, the distance measuring device 30 is composed of a thrust meter and a contact type, respectively, so as to detect the second missing mechanism 21, which is not used. = Shift distance 'The first and second lost mechanism" Member U: 12 Yang energy ... 〇 6 against the first and second bearing limit - History holding machine:: The distance between the sides is Knowing (as shown in Figures 3 and 4), when the mechanism 21 and the second lost mechanism 22 are displaced toward the solar energy and are in a gripping state, the total 呀月匕矽日日06 side dog state XI It can be passed through the distance measuring device 3 for the thrust meter. Knowing the displacement distance (such as the 裔 里 ) ) , , , , , , , , XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI XI Push the wafer. 6 side to center distance (: the first out of the solar fragmentation accuracy: set: get the sun ... 6 positioning state of the center point and then as shown in Figure 6 distance measuring device 3. The device type 'by the test The second second holding two "electric induction sensing and solar energy 矽 sg μ 彳 amp 、 22 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ 06 之间 之间 之间 之间 之间 之间 之间 之间 之间 之间 之间The first and the third "% can be the eve of the chip - the guilty limit member 11, 12 7 201237989, the contrast photoelectric sensor is in a moving state, and the middle of the contrast sensor is located in the solar raft wafer 06 Since the moving distance of the inductive sensing sensor is in a fixed state (as indicated by FIG. 6), when the solar cell wafer 06 is in a comparative photoelectric sensing sense, the comparative photoelectric sensing sensor displays a value of X5. Further, the distance from the side of the solar raft wafer 06 to the center is calculated (as indicated by the sixth symbol X4). The distance measuring device 30 as shown in Fig. 5 is attached to the table 05. The distance measuring device 30 is Reflective photoelectric sensing sensor for reflective sensing The distance measuring device 30 of the device has a feedback distance reading function. Before the first and second clamping mechanisms 21 and 22 are not actuated, the solar raft wafers are placed against the first and second bearing limiting members 11 and 12. The side distance is (as disclosed in FIG. 5), when the first and second clamping mechanisms 21, 22 are positioned to clamp the solar raft wafer 06, the two sides of the solar raft wafer 06 are abutted against the When the first and second members are supported by the limiting members 11, 12, the electric induction sensor projects the emission sensing light source L1 on the two sides of the solar ray wafer, so that the photoelectric sensing sensor displays the distance. The value (as indicated by XI in Figure 5), in turn, can calculate the distance from the side of the solar cell to the center (as indicated by X2 in Figure 5). The solar cell wafer disclosed in the present invention is designed according to the above structural composition. The central positioning method is as follows: a, placing the solar raft wafer 06 on the table 05; b, using the displacement of the first and second clamping mechanisms 21, 22 to actuate the solar raft wafer 06 The side of the adjacent two sides, so that the Tai-style optical light X3 knows the device and can On, the optoelectronics said 06 arrived, known to move, adjacent to the light, 06, another detected, too pointed, processing, relying on the clamp, Yang Neng 8 201237989
C d 矽晶片06 限位構件 於該第_ 由該測距 夾持動作 持端與太 30與太陽 種距離狀 利用該邏 持機構21 设已知相 加以運算 點定位精 另相臨之二 11 、 12 ，藉 、第二爽持 裝置30偵測 位移距離或 陽能石夕晶片 能砍晶片06 態； 輯運算單元 側邊能抵靠於該第一、第二承靠 此令太陽能矽晶片06穩固定位； 機構21、22位移作動過程中，藉 該第一、第二失持機構21、22之 第一、第二夾持機構21、22之夹 06之間的相對距離、或測距裝置 側邊之間的相對距離等任其中一 40之運作，以依據第一、第二夾 22與第-、第二承靠限位構件u、12之預 及測距裝置30所測得之距離數值 太陽能矽晶片〇6定位狀態之中心 對距離數值 ，進以獲得 確位置。 本發明之優點： 本發明所揭「太陽能石夕晶片加工之 要熹读讲&、+. T u心位結構」 :疋透過所遂測距裝置之創新結構設 失持機構於夾持位移作動過程 吏件第-、第 該第一、坌_十 同時透過測距裝置偵 夾持機摄7 機構之夾持動作位移距離或第 鬼 龙持機構之夾持端與太陽 離次第-、第 距裝置與太陽能砂晶片二，間的相對距離、或 離狀態，如此，當第一、 4的相對距離任其中一種 石夕晶片另相臨之二側邊時，俾^機構抵靠夹持該太陽 位狀態之中心點定位精確位置…併獲得太陽能矽晶片 又兼具低成本之優點與實用進步=此，係達到高作業效 9 201237989 【圖式簡單說明】 第1圖：習知加工流程之方塊示意圖。 第2圖：本發明較佳實施例之結構立體示意圖 第3圖：本發明較佳實施例之作動示意圖。 第4圖：本發明另一測距裝置之作動示意圖。 第5圖：本發明又一測距裝置之作動示意圖。 第6圖：本發明再一測距裝置之作動示意圖。 【主要元件符號說明】 0 5 工 作 台 0 6 太 陽 能 矽 晶 片 1 1 第 一 承 靠 限 位 構 件 1 2 第 二 承 靠 限 位 構 件 2 1 第 一 夾 持 機 構 2 2 第 二 夾 持 機 構 3 0 測距 裝 置 4 0 邏 輯 運 算 早 元 10The C d 矽 wafer 06 the limiting member is located at the first _ by the ranging clamping action holding end and the distance between the sun 30 and the sun species, using the logic mechanism 21 to set a known operation point to locate the other two 12, borrowing, the second refreshing device 30 detects the displacement distance or the solar energy chip can cut the wafer 06 state; the side of the arithmetic unit can abut the first and second bearing the solar cell wafer 06 a fixed position; a relative distance between the clamps 06 of the first and second clamping mechanisms 21, 22 of the first and second lost mechanisms 21, 22, or a distance measuring device during the displacement operation of the mechanisms 21, 22 The relative distance between the sides is equal to the operation of one of the 40, based on the distance measured by the first and second clips 22 and the first and second bearing members u, 12 to the distance measuring device 30. The value of the center-to-distance value of the numerical solar 矽 wafer 〇6 positioning state is obtained to obtain the exact position. Advantages of the Invention: According to the present invention, "the solar energy stone wafer processing needs to read the speech &, +. T u heart position structure": 疋 through the innovative structure of the 遂 distance measuring device, the holding mechanism is in the clamping displacement Actuation process element -, the first, the first _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The relative distance between the device and the solar sand wafer, or the state of separation, so that when the relative distance between the first and the fourth is one of the two sides of the stone-like wafer, the mechanism is abutted against the clamping Positioning the precise position of the center point of the solar position state and obtaining the advantages of low cost and practical progress of the solar 矽 wafer = this is a high work efficiency 9 201237989 [Simple description of the drawing] Figure 1: Conventional processing flow Block diagram. Fig. 2 is a perspective view showing the structure of a preferred embodiment of the present invention. Fig. 3 is a schematic view showing the operation of a preferred embodiment of the present invention. Fig. 4 is a schematic view showing the operation of another distance measuring device of the present invention. Fig. 5 is a schematic view showing the operation of another distance measuring device of the present invention. Figure 6 is a schematic view showing the operation of the further distance measuring device of the present invention. [Main component symbol description] 0 5 Table 0 6 Solar raft wafer 1 1 First bearing stopper member 1 2 Second bearing stopper member 2 1 First clamping mechanism 2 2 Second clamping mechanism 3 0 Measure Distance device 4 0 logic operation early 10