TW200519368A - Holder for the support of a solid immersible lens - Google Patents

Holder for the support of a solid immersible lens

Info

Publication number
TW200519368A
TW200519368A TW093132877A TW93132877A TW200519368A TW 200519368 A TW200519368 A TW 200519368A TW 093132877 A TW093132877 A TW 093132877A TW 93132877 A TW93132877 A TW 93132877A TW 200519368 A TW200519368 A TW 200519368A
Authority
TW
Taiwan
Prior art keywords
immersible
lens
solid
holder
observed object
Prior art date
Application number
TW093132877A
Other languages
English (en)
Other versions
TWI370243B (en
Inventor
Hiroshi Tanabe
Ikuo Arata
Hirotoshi Terada
Original Assignee
Hamamatsu Photonics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics Kk filed Critical Hamamatsu Photonics Kk
Publication of TW200519368A publication Critical patent/TW200519368A/zh
Application granted granted Critical
Publication of TWI370243B publication Critical patent/TWI370243B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/14—Mountings, adjusting means, or light-tight connections, for optical elements for lenses adapted to interchange lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/33—Immersion oils, or microscope systems or objectives for use with immersion fluids

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Lens Barrels (AREA)
  • Instruments For Viewing The Inside Of Hollow Bodies (AREA)
TW093132877A 2003-10-31 2004-10-29 Holer for the support of a solid immersible lens TWI370243B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003372845 2003-10-31

Publications (2)

Publication Number Publication Date
TW200519368A true TW200519368A (en) 2005-06-16
TWI370243B TWI370243B (en) 2012-08-11

Family

ID=34544054

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093132877A TWI370243B (en) 2003-10-31 2004-10-29 Holer for the support of a solid immersible lens

Country Status (7)

Country Link
US (1) US7576928B2 (zh)
EP (1) EP1679535A4 (zh)
JP (1) JP4495086B2 (zh)
KR (1) KR101117831B1 (zh)
CN (1) CN100380153C (zh)
TW (1) TWI370243B (zh)
WO (1) WO2005043210A1 (zh)

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US6594086B1 (en) 2002-01-16 2003-07-15 Optonics, Inc. (A Credence Company) Bi-convex solid immersion lens
US7123035B2 (en) 2002-04-10 2006-10-17 Credence Systems Corporation Optics landing system and method therefor
CN100535700C (zh) * 2003-03-20 2009-09-02 浜松光子学株式会社 固浸透镜及利用该透镜的试料观察方法
US7312921B2 (en) 2004-02-27 2007-12-25 Hamamatsu Photonics K.K. Microscope and sample observation method
JP4643994B2 (ja) * 2005-01-19 2011-03-02 浜松ホトニクス株式会社 固浸レンズホルダ
US7110172B2 (en) * 2004-02-27 2006-09-19 Hamamatsu Photonics K.K. Microscope and sample observation method
JP4772394B2 (ja) * 2005-01-19 2011-09-14 浜松ホトニクス株式会社 対物レンズソケット
DE102005036252A1 (de) * 2005-08-02 2007-02-08 Carl Zeiss Jena Gmbh Haltemodul, das eine Festkörperimmersionslinse trägt
KR101507622B1 (ko) * 2006-12-01 2015-03-31 칼 짜이스 에스엠티 게엠베하 이미지 수차들을 감소시키기 위한, 교환가능하고 조작가능한 보정 배열을 구비하는 광학 시스템
JP5189321B2 (ja) 2007-06-20 2013-04-24 浜松ホトニクス株式会社 固浸レンズホルダ
JP5001075B2 (ja) * 2007-06-20 2012-08-15 浜松ホトニクス株式会社 観察装置及び方法
JP5364452B2 (ja) * 2009-06-03 2013-12-11 浜松ホトニクス株式会社 イマージョンレンズ支持装置
US8767199B2 (en) 2010-10-15 2014-07-01 Infrared Laboratories, Inc. Inspection system utilizing solid immersion lenses
CN106471412B (zh) * 2014-03-11 2020-04-21 Dcg***有限公司 自校准的悬浮固体浸没透镜端部
TWI673527B (zh) * 2014-09-26 2019-10-01 日商濱松赫德尼古斯股份有限公司 固態浸沒式透鏡保持器及圖像取得裝置
DE102015200927A1 (de) * 2015-01-21 2016-07-21 Carl Zeiss Microscopy Gmbh Vorrichtung und Verfahren zur Ausbildung eines Immersionsmittelfilms
CN110062903B (zh) * 2016-12-14 2021-03-19 浜松光子学株式会社 固体浸没透镜单元及半导体检查装置
US11256079B2 (en) 2016-12-14 2022-02-22 Hamamatsu Photonics K.K. Solid immersion lens unit and semiconductor detector device
CN107247328B (zh) * 2017-07-31 2020-03-27 山东建筑大学 一种用于液体分离的透明介质球固定显微装置及其方法
CN109696403B (zh) * 2017-10-23 2021-08-13 中国科学院重庆绿色智能技术研究院 一种用于浸没式显微成像的样品室
JP7025280B2 (ja) 2018-05-08 2022-02-24 浜松ホトニクス株式会社 メタレンズユニット、半導体故障解析装置、及び半導体故障解析方法
EP3807922A4 (en) 2018-06-18 2022-03-23 Fluidigm Canada Inc. HIGH RESOLUTION IMAGING APPARATUS AND METHOD
WO2020006101A1 (en) * 2018-06-27 2020-01-02 Carnegie Mellon University Immersion front-end lens system
GB2579163A (en) * 2018-09-10 2020-06-17 Res & Innovation Uk Lens assembly for super-resolution microscopy
DE102018126527A1 (de) * 2018-10-24 2020-04-30 Carl Zeiss Microscopy Gmbh Vorrichtung und Verfahren zum Aufbringen eines flüssigen Immersionsmittels in einen Spalt zwischen einem Mikroskopobjektiv und einer zu mikroskopierenden Probe
DE102018126526A1 (de) * 2018-10-24 2020-04-30 Carl Zeiss Microscopy Gmbh Immersionsmittelaufbringung mittels einer Strahldüse
DE102020111717A1 (de) * 2020-04-29 2021-11-04 Carl Zeiss Microscopy Gmbh Schutzvorrichtung und verfahren zum schützen von mikroskopkomponenten vor flüssigkeitskontakt
US11754782B2 (en) * 2021-05-06 2023-09-12 Stmicroelectronics (Research & Development) Limited Mechanically held polymer lenses for photonics device maintaining placement reference to die

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JP2765427B2 (ja) 1993-04-13 1998-06-18 日本電気株式会社 半導体集積回路内部相互配線の検査方法および装置
JPH0718806A (ja) 1993-07-02 1995-01-20 Sekisui Chem Co Ltd 屋外用ステップ構造
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JPH113534A (ja) 1997-04-14 1999-01-06 Toray Ind Inc 光記録装置および光記録媒体
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JPH11305135A (ja) 1998-04-24 1999-11-05 Hitachi Maxell Ltd 光学式観察装置
US6441359B1 (en) 1998-10-20 2002-08-27 The Board Of Trustees Of The Leland Stanford Junior University Near field optical scanning system employing microfabricated solid immersion lens
JP4250794B2 (ja) * 1998-10-28 2009-04-08 ソニー株式会社 距離変化検知方法及び装置、フォーカス制御方法及び装置、並びに全反射光検出方法
JP2000171611A (ja) 1998-12-04 2000-06-23 Minolta Co Ltd 固浸レンズ及び光ヘッド
US6594204B1 (en) * 1999-03-31 2003-07-15 Sony Corporation Lens holder, method for manufacturing lens holder, metal die for producing lens holder and objective lens device
US6687058B1 (en) 1999-06-21 2004-02-03 The Trustees Of Boston University Numerical aperature increasing lens (nail) techniques for high-resolution sub-surface imaging
JP3906607B2 (ja) * 1999-07-08 2007-04-18 ソニー株式会社 記録及び／又は再生装置、及び記録及び／又は再生方法
JP2001023230A (ja) 1999-07-12 2001-01-26 Nikon Corp 光ヘッド及び光記録再生装置
JP2001034998A (ja) 1999-07-26 2001-02-09 Minolta Co Ltd 光ヘッド及びその製造方法
JP2001189359A (ja) 2000-01-04 2001-07-10 Toshiba Corp パターン検査装置
JP3602465B2 (ja) 2000-10-10 2004-12-15 Ｎｅｃエレクトロニクス株式会社 半導体装置、半導体装置の評価解析方法及び半導体装置の加工装置
US20020089758A1 (en) * 2001-01-05 2002-07-11 Nikon Corporation Optical component thickness adjustment method, optical component, and position adjustment method for optical component
JP2002236087A (ja) 2001-02-08 2002-08-23 Minolta Co Ltd 光学系調整方法、並びにその光学系調整方法を利用した光記録再生装置、顕微鏡装置及び加工装置
JP2003181672A (ja) * 2001-10-09 2003-07-02 Fujikura Ltd レーザ加工方法
US6621275B2 (en) 2001-11-28 2003-09-16 Optonics Inc. Time resolved non-invasive diagnostics system
US6594086B1 (en) 2002-01-16 2003-07-15 Optonics, Inc. (A Credence Company) Bi-convex solid immersion lens
JP2003260581A (ja) 2002-03-08 2003-09-16 Fujikura Ltd レーザ加工方法およびレーザ加工装置
JP2003298888A (ja) * 2002-04-02 2003-10-17 Konica Corp 撮像装置の製造方法

Also Published As

Publication number Publication date
EP1679535A1 (en) 2006-07-12
KR101117831B1 (ko) 2012-03-19
EP1679535A4 (en) 2010-01-06
US20050094293A1 (en) 2005-05-05
CN1875306A (zh) 2006-12-06
CN100380153C (zh) 2008-04-09
JPWO2005043210A1 (ja) 2007-11-29
TWI370243B (en) 2012-08-11
WO2005043210A1 (ja) 2005-05-12
JP4495086B2 (ja) 2010-06-30
KR20060095569A (ko) 2006-08-31
US7576928B2 (en) 2009-08-18

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees