SE7408231L - - Google Patents

Info

Publication number
SE7408231L
SE7408231L SE7408231A SE7408231A SE7408231L SE 7408231 L SE7408231 L SE 7408231L SE 7408231 A SE7408231 A SE 7408231A SE 7408231 A SE7408231 A SE 7408231A SE 7408231 L SE7408231 L SE 7408231L
Authority
SE
Sweden
Application number
SE7408231A
Other languages
Unknown language ( )
Inventor
W R Livesay
Original Assignee
Schonberg Herman
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US448283A external-priority patent/US3922546A/en
Application filed by Schonberg Herman filed Critical Schonberg Herman
Publication of SE7408231L publication Critical patent/SE7408231L/

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
SE7408231A 1974-03-05 1974-06-24 SE7408231L (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US448283A US3922546A (en) 1972-04-14 1974-03-05 Electron beam pattern generator

Publications (1)

Publication Number Publication Date
SE7408231L true SE7408231L (en) 1975-09-08

Family

ID=23779689

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7408231A SE7408231L (en) 1974-03-05 1974-06-24

Country Status (7)

Country Link
JP (1) JPS50120095A (en)
DE (1) DE2431496A1 (en)
FR (1) FR2263600A1 (en)
IT (1) IT1015575B (en)
NL (1) NL7408820A (en)
SE (1) SE7408231L (en)
ZA (1) ZA744165B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4084095A (en) * 1977-02-14 1978-04-11 Burroughs Corporation Electron beam column generator for the fabrication of semiconductor devices

Also Published As

Publication number Publication date
NL7408820A (en) 1975-09-09
ZA744165B (en) 1975-07-30
JPS50120095A (en) 1975-09-19
IT1015575B (en) 1977-05-20
FR2263600B3 (en) 1977-05-06
FR2263600A1 (en) 1975-10-03
DE2431496A1 (en) 1975-09-11

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