NL7018708A - - Google Patents
Info
- Publication number
- NL7018708A NL7018708A NL7018708A NL7018708A NL7018708A NL 7018708 A NL7018708 A NL 7018708A NL 7018708 A NL7018708 A NL 7018708A NL 7018708 A NL7018708 A NL 7018708A NL 7018708 A NL7018708 A NL 7018708A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N3/00—Scanning details of television systems; Combination thereof with generation of supply voltages
- H04N3/10—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical
- H04N3/16—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical by deflecting electron beam in cathode-ray tube, e.g. scanning corrections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/70—Arrangements for deflecting ray or beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
- H01J37/1475—Scanning means magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP44104540A JPS4922351B1 (nl) | 1969-12-25 | 1969-12-25 |
Publications (3)
Publication Number | Publication Date |
---|---|
NL7018708A true NL7018708A (nl) | 1971-06-29 |
NL166576B NL166576B (nl) | 1981-03-16 |
NL166576C NL166576C (nl) | 1981-08-17 |
Family
ID=14383310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7018708.A NL166576C (nl) | 1969-12-25 | 1970-12-23 | Afbuiginrichting voor de elektronenbundel in een elektronenmicroscoop. |
Country Status (5)
Country | Link |
---|---|
US (1) | US3749964A (nl) |
JP (1) | JPS4922351B1 (nl) |
DE (1) | DE2063598B2 (nl) |
GB (1) | GB1340209A (nl) |
NL (1) | NL166576C (nl) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4209698A (en) * | 1971-12-28 | 1980-06-24 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. | Transmission-type charged particle beam apparatus |
US3914608A (en) * | 1973-12-19 | 1975-10-21 | Westinghouse Electric Corp | Rapid exposure of micropatterns with a scanning electron microscope |
JPS55121259A (en) * | 1979-03-14 | 1980-09-18 | Hitachi Ltd | Elelctron microscope |
DE2937136A1 (de) * | 1979-09-13 | 1981-04-02 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und vorrichtung zur schnellen ablenkung eines korpuskularstrahls |
JPS57212754A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Electron-beam controller for electron microscope |
US4687936A (en) * | 1985-07-11 | 1987-08-18 | Varian Associates, Inc. | In-line beam scanning system |
JP2591548B2 (ja) * | 1991-07-26 | 1997-03-19 | 富士通株式会社 | 荷電粒子線露光装置及び荷電粒子線露光方法 |
ES2198619T3 (es) * | 1992-02-20 | 2004-02-01 | Deutsche Thomson-Brandt Gmbh | Unidad de desviacion para un tubo de imagen de un receptor de television. |
JP2002170764A (ja) * | 2000-12-04 | 2002-06-14 | Nikon Corp | 荷電粒子線露光装置、荷電粒子線露光装置の調整方法及び半導体デバイスの製造方法 |
JP5097512B2 (ja) * | 2006-11-21 | 2012-12-12 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム用軌道補正器、及び荷電粒子ビーム装置 |
DE102015210941B9 (de) | 2015-06-15 | 2019-09-19 | Carl Zeiss Microscopy Gmbh | Teilchenstrahlgerät und Verfahren zum Betrieb eines Teilchenstrahlgeräts |
WO2018042505A1 (ja) * | 2016-08-30 | 2018-03-08 | 株式会社 日立ハイテクノロジーズ | 電磁偏向器、及び荷電粒子線装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USB326594I5 (nl) * | 1960-07-08 | |||
DE1227272B (de) * | 1963-06-08 | 1966-10-20 | Telefunken Patent | Schaltungsanordnung zur Erzeugung eines Signals, z. B. eines Helltast-Ausloesesignals in Elektronenstrahlroehren, nach Ablauf eines Einstellvorganges |
US3427494A (en) * | 1965-10-28 | 1969-02-11 | Ibm | Corrected deflection circuit for cathode ray tube |
DE1299088C2 (de) * | 1966-06-10 | 1974-10-17 | Siemens AG, Berlin und München, 8000 München | Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop |
US3417284A (en) * | 1966-08-31 | 1968-12-17 | Sperry Rand Corp | Electromagnetic gross beam positioning system |
US3500114A (en) * | 1967-08-24 | 1970-03-10 | Sony Corp | Convergence system for a color picture tube |
US3540032A (en) * | 1968-01-12 | 1970-11-10 | Ibm | Display system using cathode ray tube deflection yoke non-linearity to obtain curved strokes |
US3480827A (en) * | 1969-01-14 | 1969-11-25 | Ibm | Flyback in double-yoke-drive cathode ray tubes |
-
1969
- 1969-12-25 JP JP44104540A patent/JPS4922351B1/ja active Pending
-
1970
- 1970-12-23 GB GB6128270A patent/GB1340209A/en not_active Expired
- 1970-12-23 NL NL7018708.A patent/NL166576C/nl not_active IP Right Cessation
- 1970-12-23 DE DE2063598A patent/DE2063598B2/de not_active Ceased
- 1970-12-28 US US00101613A patent/US3749964A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE2063598A1 (de) | 1971-07-08 |
JPS4922351B1 (nl) | 1974-06-07 |
DE2063598B2 (de) | 1974-09-05 |
NL166576B (nl) | 1981-03-16 |
GB1340209A (en) | 1973-12-12 |
NL166576C (nl) | 1981-08-17 |
US3749964A (en) | 1973-07-31 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
V4 | Discontinued because of reaching the maximum lifetime of a patent |