Hereinafter, preferred embodiments of a test tray replacement apparatus according to the present invention will be described in detail with reference to the accompanying drawings.
Referring to FIGS. 2 to 7, the test tray replacing apparatus 1 according to the present invention is installed in the inline test handler 100. The inline test handler 100 includes a plurality of chamber units 110 and a conveyor unit 120 for conveying the test tray 200. The chamber unit 110 includes a plurality of chamber units 110 for testing semiconductor devices accommodated in the test tray 200.
The chamber units 110 connect the semiconductor devices accommodated in the test tray 200 to the test equipment 400, respectively. When the semiconductor device is connected to the test equipment 400, the test equipment 400 performs a test process for testing the semiconductor device.
The conveyor unit 120 carries the test tray 200 such that the test tray 200 having completed the loading process performs the test process through at least one of the chamber units 110. The conveyor unit 120 carries the test tray 200 through at least one of the chamber units 110 so that the unloading process is performed on the test tray 200 that has been tested. That is, the conveyor unit 120 connects the chamber units 110 in-line by conveying the test tray 200 along a conveyance path (MP, shown in FIG. 2).
Here, the inline test handler 100 performs the test process using the test tray 200, which is different depending on the semiconductor device. For example, when testing a first semiconductor device having a first size, the inline test handler 100 may use a first test tray 210 capable of housing the first semiconductor device. When testing a second semiconductor device having a second size smaller than the first size, the inline test handler 100 may use a second test tray 220 capable of housing the second semiconductor device . The inline test handler 100 uses a test tray 200 corresponding to the semiconductor device according to at least one of the size of the semiconductor device, the number of the semiconductor devices connected to the test equipment 400 at one time, and the type of the semiconductor device .
The test tray replacing apparatus 1 according to the present invention is configured such that when the semiconductor elements are changed in the inline test handler 100, 210 and the second test tray 220 corresponding to the semiconductor device after the change is supplied to the conveyor unit 120. That is, the test tray replacing apparatus 1 according to the present invention can replace the first test tray 210 with the second test tray 220.
Therefore, the test tray replacing apparatus 1 according to the present invention can achieve the following operational effects.
First, when the semiconductor device is changed, the test tray replacement apparatus 1 according to the present invention can replace the existing test tray 200 with the test tray 200 corresponding to the changed semiconductor element, Can be improved.
Second, the test tray replacing apparatus 1 according to the present invention can replace the existing test tray 200 with the test tray 200 for the changed semiconductor element even when the inline test handler 100 is not stopped. The operating rate of the inline test handler 100 can be increased. Therefore, the test tray replacing apparatus 1 according to the present invention can improve the productivity for the tested semiconductor devices by reducing the time taken until the semiconductor devices are classified according to the test results after the test.
The test tray replacing apparatus 1 according to the present invention includes a main body 2 installed on the conveyor unit 120, a first elevating unit 3 for raising and lowering the test tray 200, A carry-out unit 4 for taking out the test tray 200 from the main body 2 and a carry-in unit 5 for carrying the test tray 200 to the main body 2. [ When replacing the first test tray 210 with the second test tray 220, the test tray replacement apparatus 1 according to the present invention can operate as follows.
4, the first elevating unit 3 elevates the first test tray 210 located on the conveying path MP to the conveying position TP located on the conveying path, .
5, the carry-out unit 4 moves the first test tray 210 to the main body 2 by moving the first test tray 210 located at the transfer position TP, .
6, when the first test tray 210 is unloaded, the take-in unit 5 is moved to a second test tray 220 (shown in FIG. 5) different from the first test tray 210 The second test tray 220 is moved to the transfer position TP so that the second test tray 220 is supported by the first lift unit 3.
7, the first elevating unit 3 conveys the second test tray 220 to the conveying path MP so that the second test tray 220 is supported by the conveyor unit 120. Next, ).
Accordingly, the inline test handler 100 may perform a test process on the changed semiconductor device using the second test tray 220 carried by the conveyor unit 120. [
Accordingly, the test tray replacing apparatus 1 according to the present invention not only improves the responsiveness to the change of the semiconductor elements but also increases the operation rate of the inline test handler 100, Can be improved.
Hereinafter, the main body 2, the first lift unit 3, the take-out unit 4 and the take-in unit 5 will be described in detail with reference to the accompanying drawings.
Referring to FIGS. 2 to 7, the main body 2 is installed in the conveyor unit 120. The main body 2 may be coupled to the conveyor unit 120 so as to be positioned above the conveyor unit 120. The main body 2 supports the first lift unit 3, the take-out unit 4, and the take-in unit 5. The main body 2 may be installed in the conveyor unit 120 so as to be positioned between the chamber units 110. Although not shown, the main body 2 may be installed in the conveyor unit 120 so as to be positioned at the front end of the chamber unit 110 positioned at the foremost position among the chamber units 110. The main body 2 may be formed as a hollow rectangular parallelepiped, but the present invention is not limited thereto and may be formed in any other form as long as the test tray 200 can be positioned therein.
Referring to FIGS. 2 to 8, the first elevating unit 3 is coupled to the main body 2. The first elevating unit 3 raises the first test tray 210 located at the conveying path MP to the conveying position TP. Accordingly, the first test tray 210 is separated from the conveyor unit 120, thereby being switched from the main body 2 to a state capable of being carried out. The first elevating unit 3 may include a first elevating member 31 and a first elevating mechanism 32.
The first elevating member (31) is coupled to the main body (2) so as to be movable up and down. The first elevating member 31 may support a first test tray 210 which is carried out from the main body 2. [ The first test tray 210 is lifted from the conveying path MP to the conveying position TP while being supported by the first elevating member 31 and then is conveyed by the conveying unit 4 to the main body 2 As shown in FIG. The first elevating member 31 may support a second test tray 220 that is carried into the main body 2. [ The second test tray 220 is supported by the first elevating member 31 as it is carried into the main body 2 by the carry-in unit 5 and then is lifted up by the first elevating member 31 And can be supported on the conveyor unit 120 by descending from the conveying position TP to the conveying path MP.
The first elevating member 31 may include a first guide member 311. The first guide member 311 may guide the first test tray 210 so that the first test tray 210 moves linearly in the process of being taken out of the main body 2. [ The first guide member 311 may guide the second test tray 220 so that the second test tray 220 moves linearly while the second test tray 220 is being loaded into the main body 2. [ The first guide member 311 may be formed in a tongue-like shape as a whole. The first guide member 311 may be installed so that the conveyor unit 120 faces the direction perpendicular to the direction in which the test tray 200 is conveyed.
The first elevating mechanism 32 moves the first elevating member 31 up and down. The first elevating mechanism 32 is moved upward by elevating the first elevating member 31 while the first elevating member 31 supports the first test tray 210, ) To the transfer position (TP). The first elevating mechanism 32 moves the first elevating member 31 down while the first elevating member 31 supports the second test tray 220 so that the second test tray 220 ) To the conveying path (MP). When the test tray 200 is carried along the conveyance path MP so that the conveyor unit 120 passes through the test tray replacement apparatus 1 according to the present invention, The first elevating member 31 can be raised so as to avoid the test tray 200 carried along the conveying path MP. Accordingly, the conveyor unit 120 can continuously carry the test tray 200 along the conveying path MP without being disturbed by the first elevating member 31. [0050] FIG.
The first elevating mechanism 32 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a motor, a rack gear, and a pinion gear , A belt system using a motor, a pulley and a belt, a linear motor using a coil and a permanent magnet, and the like can be used to raise and lower the first elevating member 31. The first elevating mechanism 32 may be coupled to the main body 2. The first elevating member 31 may be coupled to the first elevating mechanism 32.
2 to 9, the first lift unit 3 may include a first stopper 33 (shown in FIG. 8).
The first stopper 33 is coupled to the first elevating member 31. Accordingly, the first stopper 33 can move up and down together with the first elevator mechanism 32 moving the first elevator unit 31 up and down. The first stopper 33 stops the first test tray 210 carried along the conveying path MP at a position where the first test tray 210 can be supported by the first elevating member 31. When the first test tray 210 is stopped by the first stopper 33, the first elevator mechanism 32 elevates the first elevator member 31 to lift the first test tray 210 To the transfer position TP. Accordingly, the test tray replacing apparatus 1 according to the present invention can improve the accuracy of the operation of raising the first test tray 210 to the transfer position TP.
The first stopper 33 may include a first stop member 331 (shown in Fig. 9) and a first moving means 332 (shown in Fig. 9).
The first stopping member 331 may be coupled to the first elevating member 31 at a position above the first guide member 311. When the first elevating mechanism 32 lowers the first elevating member 31, the first stopping member 331 is positioned on the conveying path MP. Accordingly, the first stopping member 331 can stop the first test tray 210 by supporting the first test tray 210 carried along the transport path MP. When the first test tray 210 is stopped by the first stop member 331, the first lift member 31 is lifted by the first lift mechanism 32, (210). The first stopping member 331 is coupled to the first moving means 332. The first stopping member 331 may be formed of a material having a predetermined elastic force. The first test tray 210 may be damaged or damaged during the contact of the first test tray 210 with the first stop member 331. Accordingly, It is possible to prevent breakage.
The first moving means 332 moves the first stopping member 331. The first moving means 332 moves the first stop member 331 from the first guide member 311 before the first test tray 210 enters the main body 2 The first stopping member 331 can be moved in the first direction. When the first moving means 332 is supported by the first elevating member 31 after the first test tray 210 is stopped, the first stopping member 331 moves to the first guide member 311 The first stopping member 331 can be moved in the second direction so as not to protrude from the second stopping member 331. [ And the second direction is a direction opposite to the first direction.
The first moving means 332 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, a pulley, The first stationary member 331 can be moved by using a belt method, a linear motor using a coil and a permanent magnet, or the like. The first moving means 332 may be coupled to the first elevating member 31.
Referring to FIGS. 2 to 12, the first lift unit 3 may include a first moving mechanism 34.
The first moving mechanism 34 moves the first elevating member 31 so that the first test tray 210 is supported by the first elevating member 31. [ As shown in FIG. 9, when the first test tray 210 is stopped by the first stopper 33, the first moving mechanism 34 moves the first guide member 311 may be moved toward the first test tray 210. Accordingly, the first guide member 311 is positioned below the first test tray 210. 12, the first guide member 311 is moved to the first test tray 210 as the first elevator mechanism 32 raises the first elevator member 31, And can be raised to the transfer position TP.
The first moving mechanism 34 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, a pulley, The first elevating member 31 can be moved using a belt system, a linear motor using a coil and a permanent magnet, or the like. The first moving mechanism (34) may be coupled to the first elevating member (31).
Referring to FIGS. 2 to 12, the test tray replacing apparatus 1 according to the present invention may further include a second lifting unit 6.
The second lifting unit (6) is coupled to the main body (2). The second lift unit 6 is coupled to the main body 2 at a position opposite to the first lift unit 3 with respect to the first test tray 210 supported by the first lift unit 3, . That is, the first test tray 210 is positioned between the second lift unit 6 and the first lift unit 3. The second lift unit 6 raises the first test tray 210 located at the transport path MP together with the first lift unit 3 to the transport position TP. Accordingly, the test tray replacing apparatus 1 according to the present invention stably raises the first test tray 210 to the transfer position TP while preventing the first test tray 210 from tilting, The first test tray 210 is separated from the conveyor unit 120 so that it can be taken out from the main body 2. The second elevating unit 6 may include a second elevating member 61, a second elevating mechanism 62, and a second moving mechanism 63.
The second elevating member (61) is coupled to the main body (2) so as to be movable up and down. The second lifting member 61 may support the first test tray 210 which is carried out from the main body 2. [ The first test tray 210 is moved from the conveying path MP to the conveying position TP while one side is supported by the first elevating member 31 and the other side is supported by the second elevating member 61. [ And can be taken out of the main body 2 by the carry-out unit 4. [ The second lifting member 61 may support a second test tray 220 that is carried into the main body 2. [ One side of the second test tray 220 is supported by the first lift member 31 and the other side of the second test tray 220 is supported by the second lift member 61 After the first elevating member 31 and the second elevating member 61 are lowered, they are supported by the conveyor unit 120 by descending from the conveying position TP to the conveying path MP .
The second elevating member 61 may include a second guide member 611 (shown in FIG. 9). The second guide member 611 may guide the first test tray 210 so that the first test tray 210 moves linearly while the first test tray 210 is taken out of the main body 2. [ The first test tray 210 is guided by the first guide member 311 and the other is guided by the second guide member 611 so that the first test tray 210 can be linearly moved out of the main body 2 have. The second guide member 611 may guide the second test tray 220 so that the second test tray 220 moves linearly while the second test tray 220 is being loaded into the main body 2. [ The second test tray 220 is guided by the first guide member 311 at one side and guided by the second guide member 611 at the other side so that the second test tray 220 can be linearly moved into the main body 2 have. The second guide member 611 may be formed in a tongue-like shape as a whole. The second guide member 611 may be installed such that the conveyor unit 120 faces the direction perpendicular to the direction in which the test tray 200 is conveyed.
The second elevating mechanism 62 moves the second elevating member 61 up and down. The second elevating mechanism 62 moves up the second elevating member 61 while the second elevating member 61 supports the first test tray 210 so that the first elevating member ) To the transfer position (TP). The second lift mechanism 62 moves the second lift member 61 downward while the second lift member 61 supports the second test tray 220 to move the second test tray 220 ) To the conveying path (MP). When the conveyor unit 120 carries the test tray 200 along the conveyance path MP so as to pass through the test tray replacement apparatus 1 according to the present invention, The second elevating member 61 can be raised to avoid the test tray 200 carried along the conveying path MP. Accordingly, the conveyor unit 120 can continuously carry the test tray 200 along the conveying path MP without being disturbed by the second elevating member 61. [0050]
The second elevating mechanism 62 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a motor, a rack gear, and a pinion gear , A belt system using a motor, a pulley and a belt, a linear motor using a coil and a permanent magnet, and the like can be used to raise and lower the second elevating member 61. The second elevating mechanism 62 may be coupled to the main body 2. The second elevating member 61 may be coupled to the second elevating mechanism 62.
The second moving mechanism 63 moves the second elevating member 61 so that the first test tray 210 is supported by the second elevating member 61. The second moving mechanism 63 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, a pulley, The second elevating member 61 can be moved using a belt system, a linear motor using a coil and a permanent magnet, or the like. The second moving mechanism (63) may be coupled to the second elevating member (61).
5 and 9 to 12, the second lifting unit 6 and the first lifting unit 3 operate as follows to move a first test tray (not shown) carried by the conveyor unit 120 210 can be switched out of the main body (2).
9, the second elevating mechanism 62 raises the second elevating member 61 so that the second elevating member 61 is positioned above the conveying path MP. The first elevating mechanism 31 lowers the first elevating member 31 so that the first stopping member 331 is positioned on the conveying path MP. When the first stopping member 331 is positioned on the transport path MP, the first moving means 332 moves the first stopping member 331 in the first direction. Accordingly, the first test tray 210 carried by the conveyor unit 120 (shown in FIG. 5) passes through the first stop member 331 after passing under the second lift member 61, And is stopped.
Next, as shown in FIG. 10, the second elevating mechanism 62 lowers the second elevating member 61. In this case, the second elevation member 61 and the first elevation member 31 are moved in the direction in which the gap between them is widened by the second moving mechanism 63 and the first moving mechanism 34 to be. This is because the second moving mechanism 63 and the first moving mechanism 34 can move the second guide member 611 so that the gap between the second guide member 611 and the first guide member 311 becomes wide, And moving the first guide member 311.
11, the second moving mechanism 63 and the first moving mechanism 34 move the second moving mechanism 61 in the direction of the arrow A so that the gap between the second moving mechanism 61 and the first moving mechanism The second elevation member 61 and the first elevation member 31 are moved. This is because the second moving mechanism 63 and the first moving mechanism 34 move the second guide member 611 so that the gap between the second guide member 611 and the first guide member 311 becomes narrow, And moving the first guide member 311. Accordingly, the second elevating member 61 and the first elevating member 31 are positioned below the first test tray 210.
Next, as shown in FIG. 12, the second elevating mechanism 62 raises the second elevating member 61. At the same time, the first elevating mechanism 32 raises the first elevating member 31. The first test tray 210 is raised to the transport position TP after one side is supported by the first lifting member 31 and the other side is supported by the second lifting member 61, The state of being able to be taken out from the main body 2 is switched.
5, the carry-out unit 4 moves the first test tray 210 so that the first test tray 210 positioned at the transfer position TP is taken out of the main body 2, . In this case, the first guide member 311 (shown in FIG. 12) and the second guide member 611 (shown in FIG. 12) are arranged such that the first test tray 210 moves in a straight line, The first test tray 210 can be guided out of the first test tray 210.
The test tray replacing apparatus 1 according to the present invention is configured such that the first test tray 210 carried by the conveyor unit 120 is switched from the main body 2 to a state capable of being taken out from the main body 2 The first test tray 210 can be taken out of the main body 2 afterwards.
6, 7, and 13 to 15, the second lift unit 6 and the first lift unit 3 operate as follows, and a second test tray 220 Can be switched to the conveying state by the conveyor unit (120).
6, the take-in unit 5 is moved to the second test tray 220 so that the second test tray 220 is supported by the first elevating member 31 and the second elevating member 61, (220) to the transfer position (TP). In this case, the first guide member 311 (shown in FIG. 13) and the second guide member 611 (shown in FIG. 13) are moved in a straight line in the second test tray 220, TP to guide the second test tray 220 to be positioned.
Next, as shown in FIG. 13, the second elevating mechanism 62 lowers the second elevating member 61. The second elevating mechanism 62 may lower the second elevating member 61 so that the second guide member 611 is positioned below the conveying path MP. At the same time, the first elevating mechanism 32 lowers the first elevating member 31. The first elevating mechanism 32 may lower the first elevating member 31 so that the first guide member 311 is positioned below the conveying path MP. Accordingly, the first test tray 220 is supported on one side and the other side of the conveyor unit 120 (shown in FIG. 6) as shown in FIG.
Next, as shown in FIG. 14, the second moving mechanism 63 and the first moving mechanism 34 are moved in a direction in which the second elevating member 61 and the first elevating member 31 are spaced apart from each other, The second elevation member 61 and the first elevation member 31 are moved. This is because the second moving mechanism 63 and the first moving mechanism 34 can move the second guide member 611 so that the gap between the second guide member 611 and the first guide member 311 becomes wide, And moving the first guide member 311.
Next, as shown in FIG. 15, the second elevating mechanism 62 raises the second elevating member 61. At the same time, the first elevating mechanism 32 raises the first elevating member 31. Accordingly, the second elevation member 61 and the first elevation member 31 are positioned on the upper side of the conveyance path MP. 6) is configured to allow the second test tray 220 to pass under the second lift member 61 or the first lift member 31 The tray 220 can be transported.
The test tray replacing apparatus 1 according to the present invention has a function of transferring the second test tray 210 corresponding to the changed semiconductor element to the main body 2, Can be switched to the conveying state by the conveyor unit (120).
2 to 5, the carry-out unit 4 carries out the function of taking out the first test tray 210 from the main body 2. The carry-out unit (4) can be coupled to the main body (2). The transfer unit 4 moves the first test tray 210 located at the transfer position TP to the first test tray 210 by moving the first test tray 210 in the carrying out direction Can be taken out from the main body (2). The carry-out unit 4 may include a first carry-out mechanism 41.
The first carrying-out mechanism (41) is coupled to the main body (2). The first unloading mechanism 41 may move the first test tray 210 located at the transfer position TP in the unloading direction (arrow E direction). As shown in FIG. 4, when the first elevator unit 3 raises the first test tray 210 to the transport position TP, the first carry-out mechanism 41, as shown in FIG. 5, The first test tray 210 supported by the first lifting unit 3 can be pushed out of the main body 2. The first carrying-out mechanism 41 may include a first carrying-out member 411 and a first operating mechanism 412.
The first carry-out member 411 is coupled to the first operating mechanism 412. The first carry-out member 411 is moved by the first operating mechanism 412 so as to push the first test tray 210 located at the transfer position TP to move in the take-out direction (arrow E direction) . The first carry-out member 411 may have a rectangular shape as a whole, but the present invention is not limited thereto. The first carry-out member 411 may be formed in a different shape as long as the first test tray 210 can be moved.
The first actuating mechanism 412 moves the first carry-out member 411. The first operating mechanism 412 is coupled to the main body 2 so as to be positioned outside the main body 2. When the first elevating unit 3 raises the first test tray 210 to the transporting position TP, the first operating mechanism 412 moves the first carry-out member 411 to the transporting position TP), the first test tray 210 can be moved in the unloading direction (the direction of the arrow E) by moving the first test tray 210 toward the first test tray 210 located in the second test tray 210. The first operating mechanism 412 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, a pulley, It is possible to move the first carry-out member 411 by using a belt method, a linear motor using a coil and a permanent magnet, or the like.
2, 3 and 5 to 7, the carry-in unit 5 carries the function of bringing the second test tray 220 into the main body 2. The carrying unit (5) can be coupled to the main body (2). The carry-in unit 5 moves the second test tray 220 to the main body 2 by moving the second test tray 220 in the loading direction (direction of the arrow I in FIG. 6) . The carrying direction (I-arrow direction) and the carrying-out direction (E-arrow direction) are directions opposite to each other. The loading unit 5 may include a loading member 51 and a loading mechanism 52.
The carrying member (51) is coupled to the carrying mechanism (52). The carrying member 51 may be moved by the carrying mechanism 52 to move the second test tray 220 in the loading direction (direction of arrow I). The carry member 51 may be formed in a rectangular shape as a whole, but the present invention is not limited thereto. The carry member 51 may be formed in a different shape as long as the second test tray 220 can be pushed and moved.
And the carrying mechanism 52 moves the carrying member 51. The loading mechanism (52) is coupled to the main body (2) so as to be located outside the main body (2). The loading mechanism 52 includes a cylinder system using a hydraulic cylinder or a pneumatic cylinder, a ball screw system using a motor and a ball screw, a gear system using a motor, a rack gear, and a pinion gear, a belt using a motor, a pulley, System, a linear motor using a coil and a permanent magnet, or the like, can be used to move the carrying member 51.
The loading mechanism (52) may lift the loading member (51). 5, before the first test tray 210 positioned at the transfer position TP is taken out of the main body 2, the carry-in mechanism 52 moves the carry- It is possible to raise the carry member 51 so as not to interfere with the first test tray 210. 6, when the part of the second test tray 220 is brought into the main body 2, the carrying mechanism 52 moves the carrying member 51 to the second test tray 220 The second test tray 220 can be moved to the transfer position TP by moving the carry member 51 after the carry member 51 is lowered so as to be in contact with the transfer member.
2 to 7, 16, and 17, the test tray replacement apparatus 1 according to the present invention may further include a transfer unit 7 (shown in FIG. 3).
The transfer unit (7) is coupled to the main body (2). The transfer unit 7 is provided with a main body 2 for supporting a bottom surface of a first test tray 210 which is carried out from the main body 2 and a bottom surface of a second test tray 220 which is carried into the main body 2, 2 to the outside of the body 2.
The transport unit 7 moves the first test tray 210 in the transport direction (arrow E direction). As shown in FIG. 5, the carry-out unit 4 moves the first test tray 210 located at the transfer position TP in the unloading direction (arrow E direction) A part of the first test tray 210 located on the outside of the main body 2 is supported by the conveying unit 7 when a part of the first test tray 210 is taken out of the main body 2. [ 16, when the first test tray 210 is partially supported by the transport unit 7, the transport unit 7 moves the first test tray 210 in the transport direction (arrow E) So that the first test tray 210 can be completely removed from the main body 2.
The transfer unit 7 moves the second test tray 220 in the loading direction (the direction of arrow I), as shown in FIG. When the transfer unit 7 moves the second test tray 220 in the loading direction (the direction of the arrow I), if a part of the second test tray 220 is carried into the main body 2, A part of the second test tray 220 is supported by the first lift unit 3. As shown in FIG. 6, when the part of the second test tray 220 is supported by the first lift unit 3, the carry unit 5 moves the second test tray 220 in the loading direction The second test tray 220 can be completely brought into the main body 2 by continuously moving the second test tray 220 in the direction indicated by the arrow I in FIG.
2 to 7, 16 and 17, the transfer unit 7 can include a lower rotation roller 71 (shown in Fig. 16) and a rotation mechanism 72 (shown in Fig. 16) have.
The lower rotating roller 71 is rotatably installed in the main body 2. The lower rotating roller 71 is rotatably supported on a lower surface of a first test tray 210 which is carried out from the main body 2 and a lower surface of a second test tray 220 which is carried into the main body 2, Can be coupled to the body (2) so as to be positioned outside the body (2).
The rotation mechanism 72 rotates the lower rotation roller 71. The rotation mechanism 72 may be installed in the main body 2 or the conveyor unit 120. 16, in a state in which the first test tray 210 is taken out of the main body 2 and supported by the lower rotating roller 71, the rotating mechanism 72 is rotated by the lower rotating roller 71 (The direction of the arrow E) by rotating the first test tray 210 in the first rotation direction. 17, in a state in which the second test tray 220 is supported by the lower rotating roller 71, the rotating mechanism 72 rotates the lower rotating roller 71 in the second rotating direction The second test tray 220 can be moved in the loading direction (direction of arrow I). And the second rotation direction is a rotation direction opposite to the first rotation direction.
The rotation mechanism 72 may include a motor that is directly coupled to the rotation shaft of the lower rotation roller 71 to rotate the lower rotation roller 71 about the rotation axis. The rotation mechanism 72 may further include connecting means for connecting the rotation shaft of the motor and the rotation shaft of the lower rotation roller 71 when the rotation shaft of the motor and the lower rotation roller 71 are spaced apart from each other by a predetermined distance . The connecting means may be a chain, a belt, a gear, or the like.
The conveying unit 7 may include a plurality of the lower rotating rollers 71. [ The lower rotating rollers 71 are installed to be spaced from each other in the unloading direction (arrow E direction). Accordingly, the test tray replacing apparatus 1 according to the present invention can increase the distance for moving the first test tray 210 in the unloading direction (arrow E direction). In addition, the test tray replacing apparatus 1 according to the present invention can increase the distance for moving the second test tray 220 in the loading direction (direction of arrow I). In this case, the transport unit 7 may include an interlocking mechanism 73.
The interlocking mechanism 73 connects the lower rotating rollers 71 to each other. Accordingly, when the rotating mechanism 72 rotates any one of the lower rotating rollers 71, the remaining lower rotating rollers 71 can rotate in conjunction with the interlocking mechanism 73. Therefore, the test tray replacing apparatus 1 according to the present invention can rotate the plurality of lower rotating rollers 71 by using the single rotating mechanism 72, so that the overall size can be reduced, The power energy consumed for transporting the test tray 210 and the second test tray 220 can be reduced. The interlocking mechanism 73 may be a belt, a chain, a gear, or the like.
16 and 17, the transport unit 7 may include an upper rotating roller 74 and a roller elevating mechanism 75.
The upper rotation roller (74) is rotatably installed in the main body (2). The upper rotation roller 74 may be coupled to the main body 2 at a position above the lower rotation roller 71. The upper rotating roller 74 is rotatably supported on the upper surface of the first test tray 210 which is carried out from the main body 2 and the upper surface of the second test tray 220 which is carried into the main body 2. [ Can be coupled to the body (2) so as to be positioned outside the body (2).
The roller elevating mechanism 75 moves the upper rotating roller 74 up and down. The upper roller 74 is coupled to the roller elevating mechanism 75. The roller elevating mechanism 75 may be coupled to the main body 2 such that the upper rotating roller 74 is positioned above the lower rotating roller 71. The roller elevating mechanism 75 may be coupled to the main body 2 so as to be positioned outside the main body 2.
The roller elevating mechanism 75 can raise the upper rotating roller 74 before the first test tray 210 located at the transfer position TP is taken out of the main body 2. [ If the first test tray 210 positioned at the transfer position TP is taken out of the main body 2 so as to be supported by the lower rotating roller 71, Can be brought into contact with the upper surface of the first test tray 210 supported by the lower rotation roller 71 by lowering the upper rotation roller 74.
Accordingly, the first test tray 210 moves in the unloading direction (arrow E direction) while passing between the upper rotating roller 74 and the lower rotating roller 71, It is possible to prevent the occurrence of the shaking in the process of moving to the second position. In this case, the upper rotating roller 74 is moved to the first test tray 210 as the first test tray 210 is moved in the unloading direction (arrow E direction) by the lower rotating roller 71 And can be rotated in a contacted state. Therefore, the test tray replacing apparatus 1 according to the present invention can stably move the first test tray 210 in the unloading direction (direction of the arrow E) It can be prevented from being damaged or damaged as it moves in contact with the upper rotating roller 74. [
The roller elevating mechanism 75 may raise the upper rotating roller 74 before the second test tray 220 is supported by the lower rotating roller 71. [ When the second test tray 220 is supported by the lower rotating roller 71, the roller elevating mechanism 75 moves the upper rotating roller 74 downward to lower the second rotating roller 71, And can be brought into contact with the upper surface of the test tray 220.
Accordingly, the second test tray 220 moves between the upper rotation roller 74 and the lower rotation roller 71 while moving in the loading direction (direction of the arrow I) It is possible to prevent the occurrence of the shaking in the process of moving to the second position. In this case, the upper rotating roller 74 is moved to the second test tray 220 as the second test tray 220 is moved in the loading direction (direction of arrow I) by the lower rotating roller 71 And can be rotated in a contacted state. Therefore, the test tray replacement apparatus 1 according to the present invention can stably move the second test tray 220 in the loading direction (the direction of the arrow I) It can be prevented from being damaged or damaged as it moves in contact with the upper rotating roller 74. [
The roller elevating mechanism 75 includes a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, a pulley and a belt The upper rotating roller 74 can be moved up and down using a belt motor, a linear motor using a coil, a permanent magnet, or the like.
2 to 18, the test tray replacing apparatus 1 according to the present invention may further include a storage unit 8.
The storage unit (8) is installed to be spaced apart from the conveyor unit (120). The storage unit (8) stores a first test tray (210) which is taken out from the main body (2). The storage unit (8) stores a second test tray (220) for carrying it into the main body (2). The test tray replacing apparatus 1 according to the present invention includes a step of removing the first test tray 210 from the main body 2 and a step of removing the second test tray 220 from the main body 2 The process of bringing in can be continuously performed. Accordingly, the test tray replacing apparatus 1 according to the present invention can quickly respond to the change of the semiconductor device by reducing the time taken to replace the first test tray 210 with the second test tray 220 have.
The storage unit 8 may include a storage member 81 and a discharge mechanism 82.
The storage member 81 may store the first test tray 210 and the second test tray 220. The storage member 81 may store a plurality of the second test trays 220 stacked vertically. To this end, the storage member 81 may include a plurality of support means vertically spaced apart from each other. The second test trays 220 may be respectively stored in the storage member 81 by being supported by the supporting means. The storage member 81 can be moved up and down by the drive mechanism 83. [ Accordingly, the second test tray 220, which is moved by the discharging mechanism 82, can be stacked up and down on the storage member 81. The driving mechanism 83 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a belt using a motor, a pulley, A linear motor using a coil, a permanent magnet, or the like can be used to move the storage member 81 up and down.
The storage member 81 may store the first test tray 210 by using a supporting means that becomes empty as the second test tray 220 is carried into the main body 2. [ Accordingly, the storage member 81 can store a plurality of the first test trays 210 stacked vertically. The drive mechanism 83 can raise and lower the storage member 81 so that the first test tray 210 transferred from the transfer unit 7 is stacked on the storage member 81 in a stacked manner.
The storage member 81 may be formed in a rectangular parallelepiped shape having an empty interior as a whole, but may be formed in any other shape as long as a plurality of support means can be installed so as to be vertically spaced apart.
The discharging mechanism 82 moves the second test tray 220 to the transport unit 7 so that the second test tray 220 stored in the storage member 81 is supported by the transport unit 7 . The discharge mechanism 82 may move the second test tray 220 to the transfer unit 7 by pushing the second test tray 220 in the loading direction (direction of arrow I). The transfer unit 5 transfers the second test tray 220 to the main body 2 so that the second test tray 220 moved by the discharge mechanism 82 is supported by the first lift unit 3, . The discharge mechanism 82 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a belt using a motor, a pulley, Method, a linear motor using a coil and a permanent magnet, etc., the second test tray 220 can be moved.
2 to 19, the carry-out unit 4 may include a second carry-out mechanism 42 (shown in FIG. 19).
The second unloading mechanism 42 moves the first test tray 210 supported by the transport unit 7 to the storage unit 8. The first test tray 210 can be stored in the storage member 81 by being moved into the storage member 81 by the second delivery mechanism 42. And the second unloading mechanism 42 may be coupled to the main body 2. The second delivery mechanism 42 may include a second delivery member 421 and a second delivery mechanism 422.
And the second carry-out member 421 is coupled to the second actuating mechanism 422. The second carry-out member 421 may be moved by the second operating mechanism 422 so as to push the first test tray 210 in the carrying out direction (arrow E direction). The second carry-out member 421 may be formed in a rectangular shape as a whole, but the present invention is not limited thereto. The second carry-out member 421 may be formed in a different shape as long as the first test tray 210 can be pushed and moved.
The second operating mechanism 422 moves the second carry-out member 421. The second actuating mechanism 422 is coupled to the main body 2 so as to be positioned outside the main body 2. The second operating mechanism 422 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear, and a pinion gear, It is possible to move the second carry-out member 421 by using a belt method, a linear motor using a coil and a permanent magnet, or the like.
The second actuating mechanism 422 may lift the second carry-out member 421. Before the first test tray 210 located at the transfer position TP is taken out of the main body 2, the second operating mechanism 422 moves the second carry-out member 421 to the first test It is possible to raise the second carry-out member 421 so as not to interfere with the tray 210. When the first test tray 210 is supported by the transport unit 7 and is moved by a predetermined distance, the second operation mechanism 422 moves the second carry-out member 421 to the first test tray 210, The first test tray 210 can be moved to the storage unit 8 by moving the second carry-out member 421 after the second carry-out member 421 is lowered to be in contact with the first test tray 210.
Hereinafter, preferred embodiments of the inline test handler according to the present invention will be described in detail with reference to the accompanying drawings.
2 to 25, an inline test handler 100 according to the present invention includes a plurality of chamber units 110 (shown in FIG. 20) in which a test process for semiconductor devices is performed, A sorting unit 130 (shown in Fig. 20) installed apart from the chamber units 110, and a conveyor unit 120 (shown in Fig. 20) And a replacement device 1 for replacing the first test tray 210 with the second test tray 220. The replacement apparatus 1 may be arranged in the first test tray (not shown) as at least one of the size of the semiconductor element, the number of semiconductor elements connected to the test apparatus 400 (shown in FIG. 21) 210 may be replaced with the second test tray 220. Since the replacement apparatus 1 is the same as that described above with reference to the test tray replacement apparatus 1 according to the present invention, a detailed description thereof will be omitted.
The sorting unit 130 performs a loading process and an unloading process for semiconductor devices. The loading process refers to a process of accommodating a semiconductor device to be tested in a test tray 200 (shown in FIG. 21). The unloading process refers to a process of separating the tested semiconductor devices from the test tray 200 and classifying them according to the test results. Each of the chamber units 110 performs the test process. A plurality of the chamber units 110 are installed along the conveyor unit 120. The conveyor unit 120 connects the sorting unit 130 and the chamber units 110 installed in a spaced relation to each other. Accordingly, the in-line test handler 100 according to the present invention can perform the loading process and the unloading process for the sorting unit 130 independently of the chamber units 11 have. Therefore, the inline test handler 100 according to the present invention can achieve the following operational effects.
First, since the inline test handler 100 according to the present invention can independently perform the test process for the loading process and the unloading process, the in-line test handler 100 can perform the test process independently of the chamber units 110 and the sorting unit 130 Even if one fails, the remaining device can continue to operate normally. Therefore, the inline test handler 100 according to the present invention prevents the entire system from stopping when any one of the chamber units 110 and the sorting unit 130 fails, .
Secondly, the inline test handler 100 according to the present invention can efficiently distribute the test tray 200 to the conveyor unit 120 in consideration of the time taken to perform each of the loading process, the unloading process, can do. Therefore, the inline test handler 100 according to the present invention can improve the equipment operation rate.
Thirdly, the inline test handler 100 according to the present invention can replace the existing test tray 200 with the test tray 200 corresponding to the changed semiconductor device when the semiconductor device is changed, It is possible to improve the responsiveness to the user.
Fourth, since the sorting unit 130 and the chamber units 110 are constituted by separate devices, the inline test handler 100 according to the present invention can reduce the number of mechanisms or devices installed in the sorting unit 130 . Accordingly, the inline test handler 100 according to the present invention can reduce the jam rate for the sorting unit 130. [ Accordingly, the inline test handler 100 according to the present invention increases the operation time of the sorting unit 130 by reducing the time required for the sorting unit 130 to stop as jamming occurs in the sorting unit 130 .
Hereinafter, the chamber unit 110, the conveyor unit 120, and the sorting unit 130 will be described in detail with reference to the accompanying drawings.
Referring to FIGS. 20 and 21, the chamber unit 110 performs the test process. The chamber unit 110 may perform the test process by connecting the semiconductor devices accommodated in the test tray 200 to the test equipment 400. The test equipment 400 tests the semiconductor device when the semiconductor device is electrically connected to the semiconductor device as the semiconductor device is connected thereto. The test tray 200 can accommodate a plurality of semiconductor elements. In this case, the chamber unit 110 may connect a plurality of semiconductor devices to the test equipment 400, and the test equipment 400 may test a plurality of semiconductor devices. The test equipment 400 may include a Hi-Fix Board.
The chamber unit 110 includes a first chamber 110a (shown in FIG. 21) in which the test process is performed. The test chamber 400 is installed in the first chamber 110a. The test equipment 400 is partially or wholly inserted into the first chamber 110a. The test equipment 400 includes test sockets (not shown) to which the semiconductor devices housed in the test tray 200 are connected. The test equipment 400 may include a number of test sockets that approximately match the number of semiconductor devices housed in the test tray 200. For example, the test tray 200 can accommodate 64, 128, 256, 512, etc. semiconductor elements. When the semiconductor devices housed in the test tray 200 are connected to the test sockets, the test equipment 400 can test the semiconductor devices connected to the test sockets. The first chamber 110a may be formed in a rectangular parallelepiped shape in which a portion where the test equipment 400 is inserted is opened.
The chamber unit 110 includes a contact unit 110b (shown in FIG. 21) for connecting the test tray 200 to the test equipment 400. The contact unit 110b is installed in the first chamber 110a. The contact unit 110b connects the semiconductor devices accommodated in the test tray 200 to the test equipment 400. The contact unit 110b may move the semiconductor devices accommodated in the test tray 200 toward the test equipment 400 and away from the test equipment 400. [ The semiconductor devices accommodated in the test tray 200 are moved to the test equipment 400 by moving the semiconductor devices housed in the test tray 200 toward the test equipment 400 Respectively. Accordingly, the test equipment 400 can test semiconductor devices. When the test for the semiconductor devices is completed, the contact unit 110b can move the semiconductor devices housed in the test tray 200 in a direction away from the test equipment 400. [
The test tray 200 is provided with carrier modules for accommodating semiconductor elements. The carrier modules may each contain at least one semiconductor element. The carrier modules are resiliently and movably coupled to the test tray 200 by springs (not shown), respectively. When the contact unit 110b pushes the semiconductor devices housed in the test tray 200 toward the test equipment 400, the carrier units can move toward the test equipment 400. When the contact unit 110b removes the pushing force of the semiconductor devices housed in the test tray 200, the carrier modules can move away from the test equipment 400 due to the restoring force of the springs. The test tray 200 may move together when the contact unit 110b moves the carrier modules and the semiconductor elements.
Although not shown, the contact unit 110b may include a plurality of contact sockets for contacting the semiconductor devices housed in the test tray 200. [ The contact sockets may contact the semiconductor devices housed in the test tray 200 to move the semiconductor devices, thereby connecting the semiconductor devices to the test equipment 400. The contact unit 110b may include a number of contact sockets that are approximately equal to the number of semiconductor elements received in the test tray 200. The contact unit 110b may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear, and a pinion gear, a belt using a motor, a pulley, Method, a linear motor using a coil and a permanent magnet, or the like.
20 to 25, the chamber unit 110 may be configured to allow the test equipment 400 (shown in FIG. 21) to test the semiconductor device in an environment of normal temperature, A second chamber 110c (shown in FIG. 21), and a third chamber 110d (shown in FIG. 21).
The second chamber 110c regulates the semiconductor elements accommodated in the test tray 200 to a first temperature. The test tray 200 located in the second chamber 110c is a chamber in which a semiconductor device to be tested by the sorting unit 130 is accommodated and is conveyed by the conveyor unit 120 And then transferred to the second chamber 110c. The first temperature is the temperature range that the semiconductor devices to be tested have when the semiconductor device to be tested is tested by the test equipment 400. The second chamber 110c includes at least one of an electrothermal heater and a liquefied nitrogen injection system to adjust the semiconductor device to be tested to the first temperature. When the semiconductor device to be tested is adjusted to the first temperature, the test tray 200 is transferred from the second chamber 110c to the first chamber 110a.
The third chamber 110d regulates the semiconductor devices accommodated in the test tray 200 to a second temperature. The test tray 200 located in the third chamber 110d is a semiconductor wafer in which the semiconductor devices tested through the testing process are accommodated and transferred from the first chamber 110a. The second temperature is a temperature range including room temperature or a temperature close thereto. The third chamber 110d includes at least one of an electrothermal heater and a liquefied nitrogen injection system to adjust the tested semiconductor device to the second temperature. When the tested semiconductor device is adjusted to the second temperature, the test tray 200 is transferred to the conveyor unit 120.
Although not shown, the chamber unit 110 may include a transfer means (not shown) for transferring the test tray 200. The conveying means can push or pull the test tray 200. The transferring means may transfer the test tray 200 containing the semiconductor elements to be tested from the second chamber 110c to the first chamber 110a. The transfer means may transfer the test tray 200 containing the tested semiconductor devices from the first chamber 110a to the third chamber 110d. The conveying means may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a belt type using a motor, a pulley and a belt, And a linear motor using a permanent magnet or the like can be used to transfer the test tray 200.
As shown in FIG. 22, the second chamber 110c, the first chamber 110a, and the third chamber 110d may be arranged in a horizontal direction in the chamber unit 110. FIG. In this case, the chamber unit 110 may include a plurality of first chambers 110a. A plurality of the first chambers 110a may be vertically stacked.
As shown in FIG. 23, the second chamber 110c, the first chamber 110a, and the third chamber 110d may be vertically stacked on the chamber unit 110. That is, the second chamber 110c, the first chamber 110a, and the third chamber 110d may be stacked vertically. The second chamber 110c may be disposed on the upper side of the first chamber 110a and the third chamber 110d may be disposed on the lower side of the first chamber 110a.
20 to 25, the chamber unit 110 may include a rotator 110e (shown in FIG. 22) for rotating the test tray 200 between a horizontal state and a vertical state.
The rotator 110e is installed in the chamber unit 110. The rotator 110e can rotate the test tray 200 in which the semiconductor device to be tested is housed from a horizontal state to a vertical state. Accordingly, the first chamber 110a can perform the test process on the test tray 200 that is vertically erected. Also, the sorting unit 130 may perform the loading process on the test tray 200 that is laid in a horizontal state. The rotator 110e can rotate the test tray 200 in which the tested semiconductor devices are housed from a vertical state to a horizontal state. Accordingly, the sorting unit 130 can perform the unloading process on the test tray 200 that is laid in a horizontal state.
The chamber unit 110 may include one rotator 110e, as shown in FIGS. 22 and 23. FIG. In this case, the rotator 110e may be installed between the second chamber 110c and the third chamber 110d. The test tray 200 in which the semiconductor device to be tested is accommodated can be rotated by the rotator 110e to be vertical and then transferred from the rotator 110e to the second chamber 110c by the transferring means have. The test tray 200 in which the tested semiconductor device is accommodated is conveyed from the third chamber 110d to the rotator 110e by the conveying means and then rotated by the rotator 110e to be horizontal have.
Although not shown, the chamber unit 110 includes a first rotator for rotating the test tray 200 in which semiconductor elements to be tested are accommodated, and a second rotator for rotating the test tray 200 in which the tested semiconductor elements are housed, . ≪ / RTI > The first rotator may be installed inside the second chamber 110c or outside the second chamber 110c. The second rotator may be installed inside the third chamber 110d or outside the third chamber 110d.
Although not shown, the chamber unit 110 may perform a test process on the test tray 200 in a horizontal state without the rotator 110e. In this case, the test process may be performed while the test tray 200 is transferred between the second chamber 110c, the first chamber 110a, and the third chamber 110d in a horizontal state.
Although not shown, the conveying unit may convey the test tray 200 supported by the conveyor unit 120 to the chamber unit 110. [ The conveying unit may convey the test tray 200 supported by the conveyor unit 120 to the first chamber 110a. When the chamber unit 110 includes the second chamber 110c, the conveying unit conveys the test tray 200 supported by the conveyor unit 120 to the second chamber 110c via the second chamber 110c. 1 chamber 110a. The conveying unit may convey the test tray 200 having completed the testing process to the conveyor unit 120. The conveying unit may transfer the test tray 200 from the first chamber 110a to the conveyor unit 120 after the test process is completed. If the chamber unit 110 includes the third chamber 110d, the transfer unit may transfer the test tray 200 from the first chamber 110a to the third chamber 110d, To the conveyor unit (120).
Referring to FIGS. 2 and 20, a plurality of the chamber units 110 are installed along the conveyor unit 120. The chamber units 110 are installed at a predetermined distance from each other along the conveyor unit 120. For example, the first chamber unit and the second chamber unit may be installed on the conveyor unit 120 at a predetermined distance from each other. The inline test handler 100 according to the present invention may include N (N is an integer greater than 2) chamber units 110. [
2 and 20, the conveyor unit 120 conveys the test tray 200 so that the test tray 200 is transferred between the sorting unit 130 and the chamber units 110. The conveyor unit 120 carries the test tray 200 such that the test tray 200 discharged from the sorting unit 130 is supplied to the chamber unit 110. The conveyor unit 120 conveys the test tray 200 such that the test tray 200 discharged from the chamber unit 110 is supplied to the sorting unit 130. The inline test handler 1 according to the present invention circulates the test tray 200 between the sorting unit 130 and the chamber units 110 installed apart from each other through the conveyor unit 120, The testing process, and the unloading process for the semiconductor devices accommodated in the semiconductor device 200.
Referring to FIG. 24, the conveyor unit 120 includes a conveyor 120a for conveying the test tray 200. FIG. The conveyor 120a may include a plurality of rotary members 120b spaced apart from each other by a predetermined distance. The conveyor 120a rotates the rotatable members 120b around respective rotation axes. The test tray 200 may be carried as the rotating members 120b rotate while being supported by the rotating members 120b. The conveyor 120a can rotate the rotary members 120b in a clockwise direction and a counterclockwise direction about respective rotation axes. Accordingly, the conveyor 120a can adjust the direction in which the test tray 200 is conveyed by adjusting the direction in which the rotating members 120b rotate. Each of the rotary members 120b may be formed in a cylindrical shape.
Although not shown, the conveyor 120a may include a power source for rotating the rotary members 120b around respective rotation axes. The power source may be a motor. The conveyor 120a may include connecting means for connecting the rotational axis of each of the power source and the rotary member 120b. The connecting means may be a pulley and a belt. The conveyor 120a may further include a circulation member (not shown) coupled to surround the rotation members 120b. The test tray 200 is supported by the circulation member. The circulation member can circulate the test tray 200 while the rotatable members 120b disposed therein rotate around the respective rotation axes.
The conveyor 120a includes an installation mechanism 120c for supporting the rotary members 120b. The mounting mechanism 120c supports the rotating members 120b such that the test tray 200 supported by the rotating members 120b is positioned on the conveying path MP (shown in FIG. 4).
The conveyor unit 120 may include a plurality of conveyors 120a. The conveyors 120a are installed adjacent to each other. A test tray 200 may be transported along the conveyors 120a and thereby be transferred between the chamber unit 110 (shown in FIG. 20) and the sorting unit 130 (shown in FIG. 20). The conveyor 120a can move the test tray 200 individually while operating individually. For example, while at least one of the conveyors 120a is stationary, another conveyor 120a may operate to convey the test tray 200. [ The conveyor unit 120 may include a number of conveyors 120a corresponding to the number of the chamber units 110. [
Referring to FIGS. 2 and 25, the sorting unit 130 performs the loading process and the unloading process. The sorting unit 130 is spaced apart from the chamber units 110. The sorting unit 130 may include a loading unit 131 (shown in FIG. 25) for performing the loading process.
The loading unit 131 transfers the semiconductor devices to be tested from the customer tray to the test tray 200. The loading unit 131 may include a loading stacker 1311 (shown in Fig. 25) and a loading picker 1312 (shown in Fig. 25).
The loading stacker 1311 supports the customer tray. The customer tray supported on the loading stacker 1311 contains semiconductor elements to be tested. The loading stacker 1311 may store a plurality of customer trays containing semiconductor elements to be tested. The customer trays can be stacked up and down and stored in the loading stacker 1311.
The loading picker 1312 may pick up a semiconductor device to be tested from a customer tray located in the loading stacker 1311 and store the semiconductor device in a test tray 200. When the semiconductor element to be tested is received in the test tray 200, the test tray 200 can be placed in the loading position 131a (shown in FIG. 25). The loading picker 1312 can transfer the semiconductor device to be tested while moving in the first axis direction (X axis direction) and the second axis direction (Y axis direction). The loading picker 1312 may be raised or lowered.
The loading unit 131 may further include a loading buffer 1313 (shown in FIG. 25) for temporarily storing semiconductor elements to be tested. In this case, the loading picker 1312 picks up the semiconductor device to be tested from the customer tray and transfers the picked up semiconductor device to the test tray 200 located at the loading position 131a via the loading buffer 1313. [ As shown in Fig. The loading picker 1312 includes a first loading picker 1312a (shown in FIG. 25) for transferring a semiconductor element to be tested from the customer tray to the loading buffer 1313, and a loading buffer 1313, (Shown in FIG. 25) that transports the test strip 200 from the test tray 200 to the test tray 200.
Although not shown, the loading unit 131 may include a loading and conveying means for conveying the test tray 200. The loading and conveying means may push or pull the test tray 200. The loading and conveying means may transfer the test tray 200 from which the loading process has been completed to the conveyor unit 120 from the loading position 131a. The loading transfer means may transfer the empty test tray 200 from the conveyor unit 120 to the loading position 131a.
Referring to FIGS. 2 and 25, the sorting unit 130 may include an unloading unit 132 (shown in FIG. 25) for performing the unloading process.
The unloading unit 132 separates the tested semiconductor device from the test tray 200 and transfers the separated semiconductor device to the customer tray. The unloading unit 132 may include an unloading stacker 1321 (shown in FIG. 25) and an unloading picker 1322 (shown in FIG. 25).
The unloading stacker 1321 supports the customer tray. The customer tray supported on the unloading stacker 1321 contains the tested semiconductor elements. The unloading stacker 1321 may store a plurality of customer trays containing the tested semiconductor elements. The customer trays can be stacked up and down and stored in the unloading stacker 1321.
The unloading picker 1322 picks up the tested semiconductor devices from the test tray 200 and stores them in a customer tray located in the unloading stacker 1321. When the tested semiconductor device is picked up from the test tray 200, the test tray 200 can be placed in the unloading position 132a (shown in FIG. 25). The unloading picker 1322 can store the tested semiconductor devices in a customer tray corresponding to the grade according to the test result. The unloading picker 1322 can transfer the tested semiconductor device while moving in the first axis direction (X axis direction) and the second axis direction (Y axis direction). The unloading picker 1322 may be raised or lowered. If the test tray 200 becomes empty as the unloading unit 132 separates all of the tested semiconductor devices from the test tray 200, the sorting unit 130 unloads the empty test tray 200 And can be transferred from the unit 132 to the loading unit 131.
The unloading unit 132 may further include an unloading buffer 1323 (shown in FIG. 25) for temporarily storing the tested semiconductor elements. In this case, the unloading picker 1322 picks up the tested semiconductor device from the test tray 200 located at the unloading position 132a, and then transfers the picked up semiconductor device to the unloading buffer 1323 And stored in the customer tray. The unloading picker 1322 includes a first unloading picker 1322a (shown in FIG. 25) for transferring the tested semiconductor device from the test tray 200 to the unloading buffer 1323, And a second unloading picker 1322b (shown in FIG. 25) for transferring the unloading buffer 1323 to the customer tray.
Although not shown, the unloading unit 132 may include unloading and conveying means for conveying the test tray 200. The unloading and conveying means can push or pull the test tray 200 to transport. The unloading and conveying means may transfer the test tray 200 from which the test process is completed to the unloading position 132a from the conveyor unit 120. [ The unloading and conveying means may convey the test tray 200 which is empty as the unloading process is completed, from the unloading position 132a to the conveyor unit 120. [ The unloading and conveying means may transfer the test tray 200 which becomes empty as the unloading process is completed, from the unloading position 132a to the loading position 131a.
Although not shown, the inline test handler 1 according to the present invention may include a plurality of sorting units 130. In this case, the sorting units 130 may be installed apart from each other along the conveyor unit 120. According to a modified embodiment of the present invention, the sorting unit 130 may be installed such that the loading unit 131 and the unloading unit 132 are spaced apart from each other. Accordingly, the inline test handler 1 according to the present invention can be implemented such that the loading process and the unloading process are performed independently of each other. Accordingly, since the loading process, the unloading process, and the testing process are performed independently of each other, the inline test handler 1 according to the present invention can minimize the influence of the working time on each process . The loading unit 131 and the unloading unit 132 may be installed apart from each other along the conveyor unit 120.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. It will be clear to those who have knowledge.
