KR20080081857A - 압전자기의 제조방법 - Google Patents
압전자기의 제조방법 Download PDFInfo
- Publication number
- KR20080081857A KR20080081857A KR20080020525A KR20080020525A KR20080081857A KR 20080081857 A KR20080081857 A KR 20080081857A KR 20080020525 A KR20080020525 A KR 20080020525A KR 20080020525 A KR20080020525 A KR 20080020525A KR 20080081857 A KR20080081857 A KR 20080081857A
- Authority
- KR
- South Korea
- Prior art keywords
- piezoelectric
- raw material
- layer
- piezoelectric layer
- piezoelectric element
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000000919 ceramic Substances 0.000 title abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 35
- 239000002994 raw material Substances 0.000 claims description 36
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 14
- 238000010304 firing Methods 0.000 claims description 9
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 239000002184 metal Substances 0.000 abstract description 7
- 230000005684 electric field Effects 0.000 abstract description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 26
- 239000000843 powder Substances 0.000 description 17
- 239000002245 particle Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 239000011574 phosphorus Substances 0.000 description 9
- 229910052698 phosphorus Inorganic materials 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 239000011230 binding agent Substances 0.000 description 7
- 239000007858 starting material Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 229910001252 Pd alloy Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000002003 electrode paste Substances 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
실시예 | P2O5 량(ppm) | 40 | 150 | 250 | 350 | 450 |
d31 특성(pC/N) | 225 | 220 | 210 | 200 | 170 | |
비교예 | P2O5 량(ppm) | - | 150 | 250 | 350 | 450 |
d31 특성(pC/N) | - | 210 | 190 | 170 | 145 |
Claims (1)
- TiO2 원료, ZrO2 원료 및 PbO 원료를 주성분으로서 포함하는 압전 재료를 소성하여 압전자기를 제작하는 압전자기의 제조방법으로서, TiO2 원료 및 ZrO2 원료에 포함되는 P2O5를 40ppm 이상 350ppm 이하의 범위로 압전 재료에 혼입시키는, 압전자기의 제조방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007056194A JP4670822B2 (ja) | 2007-03-06 | 2007-03-06 | 圧電磁器の製造方法 |
JPJP-P-2007-00056194 | 2007-03-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080081857A true KR20080081857A (ko) | 2008-09-10 |
KR100990629B1 KR100990629B1 (ko) | 2010-10-29 |
Family
ID=39834648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR20080020525A KR100990629B1 (ko) | 2007-03-06 | 2008-03-05 | 압전자기의 제조방법 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4670822B2 (ko) |
KR (1) | KR100990629B1 (ko) |
CN (1) | CN101260000B (ko) |
TW (1) | TW200900371A (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103650186B (zh) * | 2011-07-05 | 2017-02-08 | 佳能株式会社 | 压电材料 |
CN107651956B (zh) | 2011-07-05 | 2021-08-20 | 佳能株式会社 | 压电元件、多层压电元件、排液头、排液装置、超声波马达、光学装置和电子装置 |
JP5979992B2 (ja) | 2011-07-05 | 2016-08-31 | キヤノン株式会社 | 圧電材料 |
DE102014211465A1 (de) * | 2013-08-07 | 2015-02-12 | Pi Ceramic Gmbh Keramische Technologien Und Bauelemente | Bleifreier piezokeramischer Werkstoff auf Bismut-Natrium-Titanat (BNT)-Basis |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5542204A (en) * | 1978-09-13 | 1980-03-25 | Ngk Spark Plug Co Ltd | Production of lead titanate powder |
JP2003095737A (ja) | 2001-09-17 | 2003-04-03 | National Institute Of Advanced Industrial & Technology | 圧電磁器組成物 |
JP3958668B2 (ja) | 2002-10-17 | 2007-08-15 | Tdk株式会社 | 圧電磁器組成物、圧電素子および圧電素子の製造方法 |
JP4992192B2 (ja) | 2005-03-24 | 2012-08-08 | Tdk株式会社 | 圧電磁器の製造方法及び圧電素子 |
-
2007
- 2007-03-06 JP JP2007056194A patent/JP4670822B2/ja active Active
-
2008
- 2008-03-04 TW TW97107558A patent/TW200900371A/zh unknown
- 2008-03-05 KR KR20080020525A patent/KR100990629B1/ko active IP Right Grant
- 2008-03-06 CN CN2008100826887A patent/CN101260000B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
KR100990629B1 (ko) | 2010-10-29 |
JP2008214157A (ja) | 2008-09-18 |
JP4670822B2 (ja) | 2011-04-13 |
TW200900371A (en) | 2009-01-01 |
CN101260000B (zh) | 2012-01-04 |
CN101260000A (zh) | 2008-09-10 |
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