KR101248545B1 - 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관 - Google Patents
탄소나노튜브 합성장치의 믹싱편이 구비된 반응관 Download PDFInfo
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 106
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 65
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 64
- 238000002156 mixing Methods 0.000 title claims abstract description 62
- 238000004519 manufacturing process Methods 0.000 title description 6
- 239000003054 catalyst Substances 0.000 claims abstract description 43
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 32
- 238000003786 synthesis reaction Methods 0.000 claims abstract description 32
- 238000000034 method Methods 0.000 claims abstract description 22
- 238000007740 vapor deposition Methods 0.000 claims abstract description 11
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 230000002194 synthesizing effect Effects 0.000 claims description 6
- 229910001026 inconel Inorganic materials 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 abstract description 3
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 230000033001 locomotion Effects 0.000 description 5
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 5
- 239000010439 graphite Substances 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000002048 multi walled nanotube Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000002079 double walled nanotube Substances 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000001182 laser chemical vapour deposition Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002109 single walled nanotube Substances 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
- B82B3/0004—Apparatus specially adapted for the manufacture or treatment of nanostructural devices or systems or methods for manufacturing the same
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/28—Moving reactors, e.g. rotary drums
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
- B82B3/0009—Forming specific nanostructures
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Organic Chemistry (AREA)
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- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
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Abstract
본 발명은, 발열체에 의해 열을 전달받으며 회전하는 반응관 내부에 촉매제 및 가스를 주입하여 탄소나노튜브를 생성하는 열화학 기상 증착법에 의한 탄소나노튜브 생성장치의 반응관에 있어서, 상기 반응관의 내주면에는 단턱을 형성하는 적어도 하나의 믹싱편이 부착된 반응관을 개시한다.
Description
도 2는 본 발명에 따른 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관의 일실시예에 의한 반응관의 내부를 보인 측면도,
도 3은 본 발명에 따른 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관의 일실시예에 의한 반응관의 회전시 반응관 내부의 촉매의 움직임을 나타낸 도면,
도 4는 본 발명에 따른 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관을 사용하는 탄소나노튜브 합성장치의 요부만을 나타낸 개략적인 구성도,
도 5는 본 발명에 따른 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관의 다른 실시예에 의한 믹싱편을 개략적으로 나타낸 도면,
도 6은 본 발명에 따른 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관의 또 다른 실시예에 의한 믹싱편을 개략적으로 나타낸 도면.
Claims (11)
- 발열체에 의해 열을 전달받으며 회전하는 반응관 내부에 촉매제 및 가스를 주입하여 탄소나노튜브를 생성하는 열화학 기상 증착법에 의한 탄소나노튜브 생성장치의 반응관에 있어서,
상기 반응관의 내주면에는 단턱을 형성하는 적어도 하나의 믹싱편 일단을 부착하되, 믹싱편의 타단이 상기 반응관의 중심 방향을 향하고,상기 믹싱편의 길이는
상기 반응관의 반경보다 작게 형성되고, 상기 믹싱편은 적어도 하나의 열(列)을 이루며 상기 촉매제 및 상기 가스가 유입되어 유출되는 상기 반응관의 길이방향으로 형성된 것을 특징으로 하는 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관.
- 삭제
- 삭제
- 삭제
- 제1항에 있어서, 상기 믹싱편은,
상기 반응관의 내주면에 지그재그 방향으로 다수 개가 부착되어 형성된 것을 특징으로 하는 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관.
- 제1항 또는 제5항에 있어서, 상기 믹싱편은,
소정 길이로 일정간격 이격되어 형성된 것을 특징으로 하는 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관.
- 삭제
- 제1항 또는 제5항에 있어서, 상기 믹싱편은,
상기 반응관이 회전하는 방향으로 경사지게 형성된 것을 특징으로 하는 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관.
- 제1항 또는 제5항에 있어서, 상기 반응관은,
재질이 인코넬 및 스테인리스 중 어느 하나인 것을 특징으로 하는 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관.
- 제1항 또는 제5항에 있어서, 상기 반응관은,
원형의 튜브 형상인 것을 특징으로 하는 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관.
- 제1항 또는 제5항에 있어서, 상기 믹싱편에는,
적어도 하나의 홀이 형성된 것을 특징으로 하는 탄소나노튜브 합성장치의 믹싱편이 구비된 반응관.
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WO2018117423A3 (ko) * | 2016-12-22 | 2018-08-16 | 전자부품연구원 | 나노 분말의 건식 표면 처리 장치 |
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KR20070050291A (ko) * | 2005-11-10 | 2007-05-15 | 세메스 주식회사 | 탄소나노튜브 합성 장치 |
KR20090075006A (ko) * | 2008-01-03 | 2009-07-08 | 세메스 주식회사 | 촉매 공급 장치 및 탄소나노튜브 생성 시스템 및 방법 |
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KR20070050291A (ko) * | 2005-11-10 | 2007-05-15 | 세메스 주식회사 | 탄소나노튜브 합성 장치 |
KR20090075006A (ko) * | 2008-01-03 | 2009-07-08 | 세메스 주식회사 | 촉매 공급 장치 및 탄소나노튜브 생성 시스템 및 방법 |
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WO2018117423A3 (ko) * | 2016-12-22 | 2018-08-16 | 전자부품연구원 | 나노 분말의 건식 표면 처리 장치 |
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