KR100450027B1 - 고온 전처리부를 구비한 탄소나노튜브의 합성장치 - Google Patents
고온 전처리부를 구비한 탄소나노튜브의 합성장치 Download PDFInfo
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- KR100450027B1 KR100450027B1 KR10-2002-0031126A KR20020031126A KR100450027B1 KR 100450027 B1 KR100450027 B1 KR 100450027B1 KR 20020031126 A KR20020031126 A KR 20020031126A KR 100450027 B1 KR100450027 B1 KR 100450027B1
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- carbon nanotubes
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 58
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 58
- 238000003786 synthesis reaction Methods 0.000 title claims abstract description 28
- 230000015572 biosynthetic process Effects 0.000 title claims abstract description 19
- 238000002203 pretreatment Methods 0.000 title 1
- 238000006243 chemical reaction Methods 0.000 claims abstract description 43
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 37
- 239000002243 precursor Substances 0.000 claims abstract description 25
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 17
- 239000011593 sulfur Substances 0.000 claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- 238000000354 decomposition reaction Methods 0.000 claims abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 9
- 239000003054 catalyst Substances 0.000 claims abstract description 7
- 239000007795 chemical reaction product Substances 0.000 claims abstract description 7
- 239000002923 metal particle Substances 0.000 claims abstract description 4
- 239000011949 solid catalyst Substances 0.000 claims abstract description 4
- 238000007599 discharging Methods 0.000 claims abstract description 3
- 239000007789 gas Substances 0.000 claims description 33
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 claims description 14
- 239000000919 ceramic Substances 0.000 claims description 11
- 239000012685 metal catalyst precursor Substances 0.000 claims description 10
- 230000002194 synthesizing effect Effects 0.000 claims description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 239000000376 reactant Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000002356 single layer Substances 0.000 claims description 7
- 229930192474 thiophene Natural products 0.000 claims description 7
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 5
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 5
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 3
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 claims description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 2
- 239000005977 Ethylene Substances 0.000 claims description 2
- 239000001273 butane Substances 0.000 claims description 2
- ILZSSCVGGYJLOG-UHFFFAOYSA-N cobaltocene Chemical compound [Co+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 ILZSSCVGGYJLOG-UHFFFAOYSA-N 0.000 claims description 2
- KTWOOEGAPBSYNW-UHFFFAOYSA-N ferrocene Chemical group [Fe+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 KTWOOEGAPBSYNW-UHFFFAOYSA-N 0.000 claims description 2
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 claims description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000001294 propane Substances 0.000 claims description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 claims description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 claims description 2
- 239000002109 single walled nanotube Substances 0.000 abstract description 10
- 239000002048 multi walled nanotube Substances 0.000 abstract description 3
- 239000012071 phase Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000001069 Raman spectroscopy Methods 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000000635 electron micrograph Methods 0.000 description 3
- 239000007791 liquid phase Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 238000003746 solid phase reaction Methods 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005755 formation reaction Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000002071 nanotube Substances 0.000 description 2
- 150000002902 organometallic compounds Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000001308 synthesis method Methods 0.000 description 2
- 239000006200 vaporizer Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000001241 arc-discharge method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- -1 hydrogen hydrogen compound Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0006—Controlling or regulating processes
- B01J19/0013—Controlling the temperature of the process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Composite Materials (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (6)
- 액상 또는 고상의 촉매금속 전구체와 황 전구체를 기상의 상태로 변환시키는 기상부;기상의 탄화수소 화합물, 촉매금속 전구체 및 황 전구체를 공급하는 공급부;700 내지 1200 ℃로 설정되어 있어서 탄소나노튜브의 합성반응이 일어나는 반응부;상기 공급부에 인접하도록 상기 반응부내에 위치하고, 반응부보다 고온인 범위에서 1000 내지 1700℃로 설정되어 있어서, 공급된 탄화수소 화합물 등의 분해반응 및 나노금속입자의 생성반응이 일어나는 고온 전처리부; 및,반응 생성물을 배출시키기 위한 배출부;를 포함하는 것으로 구성되어있는 것을 특징으로 하는, 단층 탄소나노튜브 또는 직경 30 ㎚ 이하의 다층 탄소나노튜브의 합성장치.
- 제 1 항에 있어서, 상기 고온 전처리부의 설정 온도가 1100 내지 1600℃인 것을 특징으로 하는 합성장치.
- 제 1 항에 있어서, 상기 고온 전처리부는, 공급부와 반응부 사이의 통로를 형성하도록 내부가 관통되어있는 세라믹 보호부재, 상기 세라믹 보호부재 내부에 축 방향으로 장착되어있는 가열부재, 및 상기 가열부재에 연결되어있는 전기 공급부재로 구성되어있는 것을 특징으로 하는 합성장치.
- 제 1 항에 있어서, 장치에 공급되는 반응물(탄화수소 화합물 등)은, 기상 또는 액상의 탄화수소 화합물과 상기 탄화수소 화합물의 중량 대비 0.5 내지 20 중량%의 금속촉매 전구체 및 0.05 내지 5 중량%의 황 전구체인 것을 특징으로 하는 합성장치.
- 제 4 항에 있어서,상기 탄화수소 화합물은, 메탄, 에틸렌, 아세틸렌, 프로필렌, 에탄, 프로판, 부탄 가스, 또는 이들의 2 이상의 혼합물이고;상기 금속촉매 전구체는, 페로신(ferrocene), 코발트신(cobaltocene), 니켈로신(nikellocene) 철 펜타카르보닐(iron pentacarbonyl), 니켈 카르보닐(nickel carbonyl), 또는 이들의 2 이상의 혼합물이고;상기 황 전구체는 티오펜(thiophene)인 것을 특징으로 하는 합성장치.
- 제 1 항에 있어서, 반응부내에서의 대류를 막기 위하여 불활성 가스를 일정한 속도로 주입하기 위한 버퍼 가스 주입부를 더 포함하고 있는 것을 특징으로 하는 합성장치.
Priority Applications (1)
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KR10-2002-0031126A KR100450027B1 (ko) | 2002-06-03 | 2002-06-03 | 고온 전처리부를 구비한 탄소나노튜브의 합성장치 |
Applications Claiming Priority (1)
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KR10-2002-0031126A KR100450027B1 (ko) | 2002-06-03 | 2002-06-03 | 고온 전처리부를 구비한 탄소나노튜브의 합성장치 |
Publications (2)
Publication Number | Publication Date |
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KR20030093541A KR20030093541A (ko) | 2003-12-11 |
KR100450027B1 true KR100450027B1 (ko) | 2004-09-24 |
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Family Applications (1)
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KR10-2002-0031126A Expired - Lifetime KR100450027B1 (ko) | 2002-06-03 | 2002-06-03 | 고온 전처리부를 구비한 탄소나노튜브의 합성장치 |
Country Status (1)
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100828117B1 (ko) * | 2006-12-26 | 2008-05-08 | 세메스 주식회사 | 탄소나노튜브의 합성 장치 |
KR101415078B1 (ko) * | 2013-04-22 | 2014-07-04 | 숭실대학교산학협력단 | 탄소나노튜브 섬유제조 장치 |
KR101883034B1 (ko) * | 2015-07-24 | 2018-07-27 | 주식회사 엘지화학 | 탄소나노튜브섬유 제조방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010049297A (ko) * | 1999-06-18 | 2001-06-15 | 이철진 | 저온 열 화학기상증착 장치 및 이를 이용한탄소나노튜브의 저온 합성 방법 |
KR20010091389A (ko) * | 2000-03-15 | 2001-10-23 | 이영희 | 저압-dc-열화학증착법을 이용한 탄소나노튜브 수직배향증착 방법 |
KR20020026663A (ko) * | 2000-10-02 | 2002-04-12 | 이철진 | 탄소나노튜브 또는 탄소나노섬유 합성용 기상합성 장치 및이를 사용한 합성방법 |
-
2002
- 2002-06-03 KR KR10-2002-0031126A patent/KR100450027B1/ko not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010049297A (ko) * | 1999-06-18 | 2001-06-15 | 이철진 | 저온 열 화학기상증착 장치 및 이를 이용한탄소나노튜브의 저온 합성 방법 |
KR20010091389A (ko) * | 2000-03-15 | 2001-10-23 | 이영희 | 저압-dc-열화학증착법을 이용한 탄소나노튜브 수직배향증착 방법 |
KR20020026663A (ko) * | 2000-10-02 | 2002-04-12 | 이철진 | 탄소나노튜브 또는 탄소나노섬유 합성용 기상합성 장치 및이를 사용한 합성방법 |
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Publication number | Publication date |
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KR20030093541A (ko) | 2003-12-11 |
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