JPS6490063A - Spin coating method - Google Patents

Spin coating method

Info

Publication number
JPS6490063A
JPS6490063A JP24945387A JP24945387A JPS6490063A JP S6490063 A JPS6490063 A JP S6490063A JP 24945387 A JP24945387 A JP 24945387A JP 24945387 A JP24945387 A JP 24945387A JP S6490063 A JPS6490063 A JP S6490063A
Authority
JP
Japan
Prior art keywords
substrate
coating
periphery
coating method
spin coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24945387A
Other languages
Japanese (ja)
Inventor
Tokusuke Matsukura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP24945387A priority Critical patent/JPS6490063A/en
Publication of JPS6490063A publication Critical patent/JPS6490063A/en
Pending legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To improve the uniformity of the thickness of a film formed on a substrate by coating by removing part of the surface of a coating soln. on the periphery of the substrate during the rotation of the substrate. CONSTITUTION:Part of the surface of a coating soln. 2 on the periphery of a substrate 1 is removed with a pallet 3 during the rotation of the substrate 1. The surface tension of the coating soln. 2 on the periphery of the substrate 1 is reduced and the unnecessary coating soln. 2 is easily released from the surface of the substrate 1. The amt. of the coating soln. stagnating on the periphery of the substrate is reduced and the uniformity of the thickness of a film formed on the substrate by coating is improved.
JP24945387A 1987-10-01 1987-10-01 Spin coating method Pending JPS6490063A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24945387A JPS6490063A (en) 1987-10-01 1987-10-01 Spin coating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24945387A JPS6490063A (en) 1987-10-01 1987-10-01 Spin coating method

Publications (1)

Publication Number Publication Date
JPS6490063A true JPS6490063A (en) 1989-04-05

Family

ID=17193186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24945387A Pending JPS6490063A (en) 1987-10-01 1987-10-01 Spin coating method

Country Status (1)

Country Link
JP (1) JPS6490063A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5175514A (en) * 1991-01-29 1992-12-29 Sanyo Electric Co., Ltd. Digital modulator and baseband signal generator for digital modulator
JP2013171937A (en) * 2012-02-20 2013-09-02 Disco Abrasive Syst Ltd Protective film coating device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254920A (en) * 1985-09-04 1987-03-10 Toshiba Corp Resist coating device
JPS62237966A (en) * 1986-04-09 1987-10-17 Pioneer Electronic Corp Apparatus for forming membrane

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254920A (en) * 1985-09-04 1987-03-10 Toshiba Corp Resist coating device
JPS62237966A (en) * 1986-04-09 1987-10-17 Pioneer Electronic Corp Apparatus for forming membrane

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5175514A (en) * 1991-01-29 1992-12-29 Sanyo Electric Co., Ltd. Digital modulator and baseband signal generator for digital modulator
JP2013171937A (en) * 2012-02-20 2013-09-02 Disco Abrasive Syst Ltd Protective film coating device

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