JPS6445005A - Transparent conductive film - Google Patents
Transparent conductive filmInfo
- Publication number
- JPS6445005A JPS6445005A JP62200893A JP20089387A JPS6445005A JP S6445005 A JPS6445005 A JP S6445005A JP 62200893 A JP62200893 A JP 62200893A JP 20089387 A JP20089387 A JP 20089387A JP S6445005 A JPS6445005 A JP S6445005A
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- conductive film
- partial pressure
- outermost surface
- ito layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Insulated Conductors (AREA)
- Laminated Bodies (AREA)
Abstract
PURPOSE:To reduce film thickness for obtaining a desired sheet resistance by making oxidation degree of a transparent conductive film mainly including In oxide smaller at closer parts to an outermost surface. CONSTITUTION:A transparent conductive film 5 is applied by reactive sputtering in gas mixture of Ar and O2 on a substrate 1 of In including 10wt.% of Sn which is heated at 300 deg.C for a target. For this, sputtering is performed at a partial pressure of oxygen gas which gives the minimum specific resistance so as to form an ITO layer 2 first, and then the partial pressure of oxygen gas is reduced so as to form an ITO layer 3 of thickness of more than 100Angstrom and a small oxidation degree at the outermost surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62200893A JPS6445005A (en) | 1987-08-13 | 1987-08-13 | Transparent conductive film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62200893A JPS6445005A (en) | 1987-08-13 | 1987-08-13 | Transparent conductive film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6445005A true JPS6445005A (en) | 1989-02-17 |
Family
ID=16432006
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62200893A Pending JPS6445005A (en) | 1987-08-13 | 1987-08-13 | Transparent conductive film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6445005A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008262201A (en) * | 2007-04-11 | 2008-10-30 | Boe Hydis Technology Co Ltd | Color filter substrate for liquid crystal display and method of fabricating same |
-
1987
- 1987-08-13 JP JP62200893A patent/JPS6445005A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008262201A (en) * | 2007-04-11 | 2008-10-30 | Boe Hydis Technology Co Ltd | Color filter substrate for liquid crystal display and method of fabricating same |
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