JPS6442387A - Carbon crucible for silicon single crystal pulling device - Google Patents

Carbon crucible for silicon single crystal pulling device

Info

Publication number
JPS6442387A
JPS6442387A JP19710687A JP19710687A JPS6442387A JP S6442387 A JPS6442387 A JP S6442387A JP 19710687 A JP19710687 A JP 19710687A JP 19710687 A JP19710687 A JP 19710687A JP S6442387 A JPS6442387 A JP S6442387A
Authority
JP
Japan
Prior art keywords
crucible
carbon
single crystal
silicon single
pulling device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19710687A
Other languages
English (en)
Other versions
JP2578126B2 (ja
Inventor
Masato Matsuda
Osamu Suzuki
Masayuki Saito
Hideyasu Matsuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP62197106A priority Critical patent/JP2578126B2/ja
Publication of JPS6442387A publication Critical patent/JPS6442387A/ja
Application granted granted Critical
Publication of JP2578126B2 publication Critical patent/JP2578126B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP62197106A 1987-08-06 1987-08-06 シリコン単結晶引上装置用カ−ボンルツボ Expired - Lifetime JP2578126B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62197106A JP2578126B2 (ja) 1987-08-06 1987-08-06 シリコン単結晶引上装置用カ−ボンルツボ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62197106A JP2578126B2 (ja) 1987-08-06 1987-08-06 シリコン単結晶引上装置用カ−ボンルツボ

Publications (2)

Publication Number Publication Date
JPS6442387A true JPS6442387A (en) 1989-02-14
JP2578126B2 JP2578126B2 (ja) 1997-02-05

Family

ID=16368830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62197106A Expired - Lifetime JP2578126B2 (ja) 1987-08-06 1987-08-06 シリコン単結晶引上装置用カ−ボンルツボ

Country Status (1)

Country Link
JP (1) JP2578126B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04160090A (ja) * 1990-10-25 1992-06-03 Komatsu Electron Metals Co Ltd 半導体単結晶引上装置の黒鉛ルツボ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04160090A (ja) * 1990-10-25 1992-06-03 Komatsu Electron Metals Co Ltd 半導体単結晶引上装置の黒鉛ルツボ

Also Published As

Publication number Publication date
JP2578126B2 (ja) 1997-02-05

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