JPS6435175A - Semiconductor processing device - Google Patents
Semiconductor processing deviceInfo
- Publication number
- JPS6435175A JPS6435175A JP19321887A JP19321887A JPS6435175A JP S6435175 A JPS6435175 A JP S6435175A JP 19321887 A JP19321887 A JP 19321887A JP 19321887 A JP19321887 A JP 19321887A JP S6435175 A JPS6435175 A JP S6435175A
- Authority
- JP
- Japan
- Prior art keywords
- ring
- vacuum side
- gas
- processing device
- semiconductor processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gasket Seals (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19321887A JPS6435175A (en) | 1987-07-31 | 1987-07-31 | Semiconductor processing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19321887A JPS6435175A (en) | 1987-07-31 | 1987-07-31 | Semiconductor processing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6435175A true JPS6435175A (en) | 1989-02-06 |
Family
ID=16304275
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19321887A Pending JPS6435175A (en) | 1987-07-31 | 1987-07-31 | Semiconductor processing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6435175A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001060558A (ja) * | 1999-07-01 | 2001-03-06 | Applied Materials Inc | 高清浄度エピタキシャル堆積システムのための不活性バリア |
SG85213A1 (en) * | 1999-09-27 | 2001-12-19 | Greene Tweed Inc | Seal and protective shield |
JP2009500580A (ja) * | 2005-07-07 | 2009-01-08 | マットソン テクノロジー インコーポレイテッド | 腐食バリヤを備えたシール装置及び方法 |
WO2018131487A1 (ja) * | 2017-01-16 | 2018-07-19 | アイシン・エィ・ダブリュ株式会社 | シール構造およびそれを備えた変速機 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59190578A (ja) * | 1983-04-11 | 1984-10-29 | Eagle Ind Co Ltd | 密封装置 |
-
1987
- 1987-07-31 JP JP19321887A patent/JPS6435175A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59190578A (ja) * | 1983-04-11 | 1984-10-29 | Eagle Ind Co Ltd | 密封装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001060558A (ja) * | 1999-07-01 | 2001-03-06 | Applied Materials Inc | 高清浄度エピタキシャル堆積システムのための不活性バリア |
SG85213A1 (en) * | 1999-09-27 | 2001-12-19 | Greene Tweed Inc | Seal and protective shield |
JP2009500580A (ja) * | 2005-07-07 | 2009-01-08 | マットソン テクノロジー インコーポレイテッド | 腐食バリヤを備えたシール装置及び方法 |
WO2018131487A1 (ja) * | 2017-01-16 | 2018-07-19 | アイシン・エィ・ダブリュ株式会社 | シール構造およびそれを備えた変速機 |
US11162588B2 (en) | 2017-01-16 | 2021-11-02 | Aisin Aw Co., Ltd. | Seal structure and transmission including the same |
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