JPS6435175A - Semiconductor processing device - Google Patents

Semiconductor processing device

Info

Publication number
JPS6435175A
JPS6435175A JP19321887A JP19321887A JPS6435175A JP S6435175 A JPS6435175 A JP S6435175A JP 19321887 A JP19321887 A JP 19321887A JP 19321887 A JP19321887 A JP 19321887A JP S6435175 A JPS6435175 A JP S6435175A
Authority
JP
Japan
Prior art keywords
ring
vacuum side
gas
processing device
semiconductor processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19321887A
Other languages
English (en)
Inventor
Kenji Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP19321887A priority Critical patent/JPS6435175A/ja
Publication of JPS6435175A publication Critical patent/JPS6435175A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gasket Seals (AREA)
  • Drying Of Semiconductors (AREA)
JP19321887A 1987-07-31 1987-07-31 Semiconductor processing device Pending JPS6435175A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19321887A JPS6435175A (en) 1987-07-31 1987-07-31 Semiconductor processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19321887A JPS6435175A (en) 1987-07-31 1987-07-31 Semiconductor processing device

Publications (1)

Publication Number Publication Date
JPS6435175A true JPS6435175A (en) 1989-02-06

Family

ID=16304275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19321887A Pending JPS6435175A (en) 1987-07-31 1987-07-31 Semiconductor processing device

Country Status (1)

Country Link
JP (1) JPS6435175A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001060558A (ja) * 1999-07-01 2001-03-06 Applied Materials Inc 高清浄度エピタキシャル堆積システムのための不活性バリア
SG85213A1 (en) * 1999-09-27 2001-12-19 Greene Tweed Inc Seal and protective shield
JP2009500580A (ja) * 2005-07-07 2009-01-08 マットソン テクノロジー インコーポレイテッド 腐食バリヤを備えたシール装置及び方法
WO2018131487A1 (ja) * 2017-01-16 2018-07-19 アイシン・エィ・ダブリュ株式会社 シール構造およびそれを備えた変速機

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190578A (ja) * 1983-04-11 1984-10-29 Eagle Ind Co Ltd 密封装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190578A (ja) * 1983-04-11 1984-10-29 Eagle Ind Co Ltd 密封装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001060558A (ja) * 1999-07-01 2001-03-06 Applied Materials Inc 高清浄度エピタキシャル堆積システムのための不活性バリア
SG85213A1 (en) * 1999-09-27 2001-12-19 Greene Tweed Inc Seal and protective shield
JP2009500580A (ja) * 2005-07-07 2009-01-08 マットソン テクノロジー インコーポレイテッド 腐食バリヤを備えたシール装置及び方法
WO2018131487A1 (ja) * 2017-01-16 2018-07-19 アイシン・エィ・ダブリュ株式会社 シール構造およびそれを備えた変速機
US11162588B2 (en) 2017-01-16 2021-11-02 Aisin Aw Co., Ltd. Seal structure and transmission including the same

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