JPS6343975U - - Google Patents
Info
- Publication number
- JPS6343975U JPS6343975U JP13876286U JP13876286U JPS6343975U JP S6343975 U JPS6343975 U JP S6343975U JP 13876286 U JP13876286 U JP 13876286U JP 13876286 U JP13876286 U JP 13876286U JP S6343975 U JPS6343975 U JP S6343975U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- unit
- rail
- guide plate
- moves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Handcart (AREA)
- Special Conveying (AREA)
- Intermediate Stations On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13876286U JPH0423102Y2 (de) | 1986-09-09 | 1986-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13876286U JPH0423102Y2 (de) | 1986-09-09 | 1986-09-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6343975U true JPS6343975U (de) | 1988-03-24 |
| JPH0423102Y2 JPH0423102Y2 (de) | 1992-05-28 |
Family
ID=31044036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13876286U Expired JPH0423102Y2 (de) | 1986-09-09 | 1986-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0423102Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006339665A (ja) * | 2000-10-12 | 2006-12-14 | Ebara Corp | 半導体基板製造装置 |
-
1986
- 1986-09-09 JP JP13876286U patent/JPH0423102Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006339665A (ja) * | 2000-10-12 | 2006-12-14 | Ebara Corp | 半導体基板製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0423102Y2 (de) | 1992-05-28 |