JPS6332678U - - Google Patents
Info
- Publication number
- JPS6332678U JPS6332678U JP12554686U JP12554686U JPS6332678U JP S6332678 U JPS6332678 U JP S6332678U JP 12554686 U JP12554686 U JP 12554686U JP 12554686 U JP12554686 U JP 12554686U JP S6332678 U JPS6332678 U JP S6332678U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- liquid
- spin coating
- coating device
- spinner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 4
- 238000004528 spin coating Methods 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000009987 spinning Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図はこの考案スピン塗布装置の一実施例の
要部を示す平面図、第２図は同側面図、第３図は
同装置による基板上の薬液滴下の軌跡図、第４図
はこの考案の他の実施例におけるノズルの揺動機
構を示す平面図である。
１１……基板、１２……ノズル、１２ａ……滴
下部、１３……チヤツク、１４……軌跡。
Fig. 1 is a plan view showing the essential parts of one embodiment of this invented spin coating device, Fig. 2 is a side view of the same, Fig. 3 is a trajectory of the droplet of the chemical liquid on the substrate by the same device, and Fig. 4 is a diagram of this device. FIG. 7 is a plan view showing a nozzle swinging mechanism in another embodiment of the invention. DESCRIPTION OF SYMBOLS 11...Substrate, 12...Nozzle, 12a...Dripping part, 13...Chuck, 14...Trajectory.
Claims (1)
、該基板上に感光剤等の液体を滴下し、上記基板
をスピンさせて液体を基板上に均一にコートする
スピン塗布装置において、 上記液体の滴下部を回転基板の径方向に可動に
したことを特徴とするスピン塗布装置。[Claims for Utility Model Registration] A spinner that includes a means for supporting and spinning a substrate, drops a liquid such as a photosensitive agent onto the substrate, and spins the substrate to uniformly coat the liquid on the substrate. A spin coating device, characterized in that the liquid dropping portion is movable in the radial direction of the rotating substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12554686U JPS6332678U (en) | 1986-08-19 | 1986-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12554686U JPS6332678U (en) | 1986-08-19 | 1986-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6332678U true JPS6332678U (en) | 1988-03-02 |
Family
ID=31018536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12554686U Pending JPS6332678U (en) | 1986-08-19 | 1986-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6332678U (en) |
-
1986
- 1986-08-19 JP JP12554686U patent/JPS6332678U/ja active Pending
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