JPS62181435A - Washing apparatus - Google Patents
Washing apparatusInfo
- Publication number
- JPS62181435A JPS62181435A JP2550586A JP2550586A JPS62181435A JP S62181435 A JPS62181435 A JP S62181435A JP 2550586 A JP2550586 A JP 2550586A JP 2550586 A JP2550586 A JP 2550586A JP S62181435 A JPS62181435 A JP S62181435A
- Authority
- JP
- Japan
- Prior art keywords
- branch pipes
- cleaning
- water
- tanks
- branch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 title abstract description 9
- 238000004140 cleaning Methods 0.000 claims description 56
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 29
- 230000000694 effects Effects 0.000 abstract description 7
- 238000002360 preparation method Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 4
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 241000218691 Cupressaceae Species 0.000 description 1
- 241000257465 Echinoidea Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明け、シリコンウニへ等を洗浄する洗浄装置の改
良に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] This invention relates to an improvement in a cleaning device for cleaning silicon sea urchins and the like.
第６図は従来装置を示す図で、図において（１）は、水
を送る水道の本管、（２ａ）〜（２ｄ）は、この本管（
１）から分岐した複数個の洗浄分岐管、（３＆）〜（３
ｄ）はハイパｘ、Ｊ−ｆｒ７．ｕ備用１＋６＊’ｅ−ｒ
４ａ”ｌ 、／４ｄ）Ｈ−１ｂ浄用分岐管（２ａ）〜（
２ｄ）の通路を開閉する電磁バルブ、（６１Ｌ） 〜（
６ｄ） Ｖ！、準備用分岐管（３ａ） 〜（３ａ）の通
路を開閉する電磁バルブ、（１５ａ）〜（１５ｄ）は、
電磁バルブ（４ａ）〜（４ｄ）の吐出側に設けられた洗
浄用手動コック、（Ｉ６ａ） 〜（１６ｄ）は、電磁バ
ルブ（６ａ）〜（６ｄ）の吐出側に設けられた準備用手
動コック、（１０は、吐出口、（ｌｌａ） 〜（１１１
１）は洗浄槽、いけ、洗浄槽（１１＆）〜（１１ｄ）に
投入される洗浄かと、（至）は、洗浄かご０２内に整列
された多数のウェハである０
次に動作について説明する。電磁バルブ（４ａ）〜（４
ｄ）を開放すると共に、洗浄用手動コック（１’５ａ
）〜（１５ｄ）を開放すると、吐出口ａＯから洗浄槽（
Ｈａ）〜（ｌｌａ）内へ送水され続け、オーバーフロー
の状態が継続される。洗浄槽（ＩＩＩＬ）〜（ＸＸａ）
内には、多数のウェハ（至）を配列した洗浄かごａ２を
浸漬し、所定時間だけ維持する事により、洗浄が完了す
る。Figure 6 is a diagram showing a conventional device. In the figure, (1) is the water main pipe that sends water, and (2a) to (2d) are the main pipes (2a) to (2d).
Multiple cleaning branch pipes branched from 1), (3&) to (3
d) is Hyper x, J-fr7. u preparation 1+6*'e-r
4a"l, /4d) H-1b purification branch pipe (2a) ~ (
2d) Solenoid valve that opens and closes the passage (61L) ~ (
6d) V! , electromagnetic valves (15a) to (15d) that open and close the passages of the preparation branch pipes (3a) to (3a),
Manual cocks for cleaning provided on the discharge side of the electromagnetic valves (4a) to (4d), (I6a) to (16d) are manual cocks for preparation provided on the discharge side of the electromagnetic valves (6a) to (6d). , (10 is the discharge port, (lla) ~ (111
1) refers to the cleaning tank, which is the cleaning tank (11&) to (11d), and (to) refers to the large number of wafers arranged in the cleaning basket 02.The operation will now be described. Solenoid valve (4a) ~ (4
d) and open the cleaning manual cock (1'5a).
) to (15d), the cleaning tank (
Water continues to be fed into Ha) to (lla), and the overflow state continues. Cleaning tank (IIIL) ~ (XXa)
The cleaning basket a2 in which a large number of wafers are arranged is immersed in the wafer and maintained for a predetermined period of time to complete cleaning.
次に、洗浄かご０２を引き揚げた後、電磁バルブ（４ａ
）〜（４ｄ）を閉じると同時に、電磁バルブ（６ａ）〜
ｒ６ａ）、ｋ、ｍ 備ｍｓ 仙：ｌッｂ （１６ａ）〜
（１６ｄ）冬Ｕ ｔｐｌｒすると、洗浄時より少ない量
の水が洗浄槽に供給され、次？ウェハ０３の洗浄の為の
準備状態が維持される。通常、準備用分岐管（３ａ）〜
（３ｄ）は、洗浄用分岐管（２ａ）〜（２ｄ）より若干
細めの配管サイズであり、準備用手動コック（１６−）
〜（１６ｄ）け半開きとして少量を送水するようにして
いる。また、洗浄用手動コック（１５ａ）〜（Ｘ６ａ）
も、準備用手動コック（１６ｍ）〜（１６ｄ）も常時開
放まなは半開状態で、電磁バルブ（４−） 〜（４ｄ）
、 （６ａ） 〜（６ｄ）の開閉操作にたよっている
。Next, after lifting the cleaning basket 02, the solenoid valve (4a
) to (4d) and at the same time close the solenoid valves (6a) to
r6a), k, m beims sen: lb (16a)~
(16d) During winter U tplr, less water is supplied to the cleaning tank than during cleaning, and next time? The state of preparation for cleaning the wafer 03 is maintained. Usually, the branch pipe for preparation (3a) ~
(3d) is a pipe with a slightly smaller size than the cleaning branch pipes (2a) to (2d), and has a manual cock for preparation (16-).
- (16d) are left half-open to allow a small amount of water to flow through. In addition, manual cocks for cleaning (15a) to (X6a)
Also, the manual preparation cocks (16m) to (16d) are always open or half open, and the solenoid valves (4-) to (4d)
, (6a) to (6d).
なお、図中４檜の洗浄槽のうち、１Ｎのみ使用したり、
あるいけ、４槽すべて使用する等、使用状態はさまざま
である。このようにして洗浄作業が行なわれている。In addition, among the four cypress cleaning tanks in the figure, only 1N is used,
The conditions of use vary, with some using all four tanks. The cleaning work is performed in this way.
従来の洗浄装置は、以上のように構成されているので、
使用する槽が全槽でない場合は、使用しない槽の電磁バ
ルブを閉じているため、洗浄中の洗浄槽には、未使用槽
に注入されるべき水も流入し、必要量以上の水がオーバ
ーフローされ、極めて無駄に消費されているという問題
があった。なお、準備中の送水時も全く同様の事が言え
る。Conventional cleaning equipment is configured as described above, so
If not all of the tanks are used, the solenoid valves of the unused tanks are closed, so water that should be poured into the unused tanks also flows into the washing tank during cleaning, resulting in overflow of water in excess of the required amount. The problem was that it was being consumed extremely wastefully. The same thing can be said about water supply during preparation.
この発明は、上記のような問題点を解消する為になされ
たもので、多数の洗浄槽のうち、数個の洗浄槽のみを使
用する場合においても、洗浄必要水量を確保できると共
に不要な水を消費することなく、極めて節水効果が向上
する洗浄装置を得ることを目的とする。This invention was made to solve the above-mentioned problems. Even when only a few of the many cleaning tanks are used, the amount of water required for cleaning can be secured and unnecessary water can be removed. The purpose of the present invention is to provide a cleaning device that greatly improves the water saving effect without consuming water.
この発明に係る洗浄装置は、本管から分岐された複数個
の分岐管、この複数個の分岐管の夫々に設けられて夫々
の分岐管を開閉する電磁バルブ、上記複数個の分岐管に
おける上記電磁バルブの吐出側に設けられ、通路断面積
が上記複数個の分岐管毎に各々異なる複数個のオリフィ
ス、及び上記複数個の分岐管の吐出側に設置される洗浄
槽を備えたものである。The cleaning device according to the present invention includes a plurality of branch pipes branched from a main pipe, an electromagnetic valve provided in each of the plurality of branch pipes to open and close each branch pipe, and the above-mentioned in the plurality of branch pipes. A plurality of orifices are provided on the discharge side of the electromagnetic valve and each has a different passage cross-sectional area for each of the plurality of branch pipes, and a cleaning tank is provided on the discharge side of the plurality of branch pipes. .
この発明における洗浄装置は、洗浄作業をする場合と、
準備作業をする場合、及び、それらの各々において、洗
浄槽を何種使用するかに応じて、１！磁弁の開閉により
、流量が各々異なるオリフィスを有する分岐管が選択さ
れ、常に必要流量のみが、洗浄槽に注入される。The cleaning device according to the present invention can be used for cleaning work;
Depending on the preparatory work and how many types of cleaning tanks are used in each of them, 1! By opening and closing the magnetic valve, branch pipes having orifices with different flow rates are selected, and only the required flow rate is always injected into the cleaning tank.
以下、この発明の一実施例を、第１図〜第５図について
説明する。図において、（２）は本管（１）から分岐さ
れた洗浄用分岐管、Ｃ３）は同じく分岐された準備用分
岐管、（４−）〜（４ｄ）は洗浄用分岐管（２）をさら
に分岐しその各々の通路を開閉する複数個の電磁バルブ
、（５＆）〜（５ｄ）は電磁バルブ（４＆）〜（４ｄ）
の吐出側にバルブソケットα小等により取付けられ、通
路開口面積を絞る穴（６ｅ）を有しているオリフィスで
、たとえばオリフィス（５＆）はφ番、オリフィス（５
ｂ）はφ６、オリフィス（５Ｃ）はφ８、オリフィス（
５ｄ）はφ１０と各々穴（５ｅ）のサイズが異なってい
る。An embodiment of the present invention will be described below with reference to FIGS. 1 to 5. In the figure, (2) is a cleaning branch pipe branched from the main pipe (1), C3) is a preparation branch pipe that is also branched, and (4-) to (4d) are cleaning branch pipes (2). A plurality of electromagnetic valves (5&) to (5d) further branch out and open and close their respective passages, and electromagnetic valves (4&) to (4d)
It is an orifice that is attached to the discharge side of the valve socket α small, etc., and has a hole (6e) that narrows the passage opening area.For example, the orifice (5 &) is φ,
b) is φ6, orifice (5C) is φ8, orifice (
5d) has a hole (5e) different in size from φ10.
（８ａ）〜（８ｄ）は、洗浄槽への注水通路を開閉する
電磁弁、（６ａ）〜（６ｄ）は準備用分岐管（３）をさ
らに分岐し、その各々の通路を開閉する複数個の電磁パ
ル有するオリフィスで、たとえば、オリフィス（ハ）け
φ２、オリフィス（）ｂ）はφ３、オリフィス（）０）
けφ４、オリフィス（７ａ）けφ５と各々穴サイズが異
なっている。（９）は洗浄槽への注水通路を開閉する電
磁弁で、この吐出側は、洗浄槽（８ａ）〜（８ｄ）に至
る前に、洗浄用分岐管（２）の吐出口（１０と合流して
いる。(8a) to (8d) are solenoid valves that open and close the water injection passage to the cleaning tank, and (6a) to (6d) are multiple valves that further branch the preparation branch pipe (3) and open and close each passage. For example, orifice (c) has φ2, orifice ()b) has φ3, orifice ()0) has an electromagnetic pulse of
The hole sizes are different, φ4 for the hole and φ5 for the orifice (7a). (9) is a solenoid valve that opens and closes the water injection passage to the cleaning tank, and the discharge side of this valve is connected to the discharge port (10) of the cleaning branch pipe (2) before reaching the cleaning tanks (8a) to (8d). are doing.
上記のように構成されたものにおいては、第４図に示す
バルブ開閉一覧表でわかるように、洗浄作業のみか、送
水が洗浄時と比べて極端に少なくてよい準備作業のみか
、あるいは、それらの併用作業なのか、さらには、上記
の各場合において使用槽は何種なのか、といった、さま
ざまな作業状況に対応して、押ボタン操作による電磁バ
ルブの開閉のみで、必要最少限の水が各々の洗浄槽に注
水される。例えば、洗浄作業のみにおいて、洗浄槽（ｌ
ｌａ ）の１槽しか使用しない場合は、電磁バルブ（４
ａ）と（８＆）が開き、前述したφ４のオリフィス（５
＆）の穴から一槽分に対応した必要水量が洗浄槽へ注水
される。また、洗浄作業で４槽すべて使用する場合には
、電相バルブ（４ｄ）と（８ａ）（８ｂ）（８Ｃ）（８
ｄ）が開き、前述したφ１０のオリフィス（５ｄ）の穴
から４槽分に対応した必要水量が各々の洗浄槽へ注水す
ｔ−＋、るＯなお、各水洗槽全いかなる作業で何種使用
するかの指令は、第３図に示す押ボタン操作で可能であ
り、同図は、洗浄作業を洗浄！ （ｌｌａ）、 （ｌｌ
ｂ） 、準備作業を洗浄ｍ （１１０） （１１（１）
で行う場合を表している。また、押ボタンを押した数で
、どのオリフィスの電磁バルブを開閉するかについては
、電気的なシーケンスを容易に組む事ができる。With the above configuration, as shown in the valve opening/closing table shown in Figure 4, there is only cleaning work, preparatory work that requires extremely little water supply compared to cleaning, or both. In response to various work situations, such as whether the work is to be carried out in combination with water, and what type of tank is used in each of the above cases, it is possible to reduce the amount of water required by simply opening and closing a solenoid valve with a push button. Water is poured into each cleaning tank. For example, in cleaning work only, a cleaning tank (l
When using only one tank (la), use the solenoid valve (4).
a) and (8&) open, and the aforementioned φ4 orifice (5
The required amount of water for one tank is injected into the cleaning tank through the hole &). In addition, when using all four tanks for cleaning work, use the electric phase valve (4d) and (8a) (8b) (8C) (8
d) opens, and the required amount of water corresponding to the four tanks is injected into each washing tank from the aforementioned φ10 orifice (5d). Instructions for what to do can be done by operating the push button shown in Figure 3, which shows the cleaning operation. (lla), (lla)
b) Cleaning the preparation work (110) (11(1)
This represents the case where it is performed. Furthermore, an electrical sequence can be easily set up to determine which orifice's electromagnetic valve is opened or closed depending on the number of pushbuttons pressed.
第５図は、従来方式と本発明による各洗浄槽に注水され
る流量との比較を表わしたもので、Ａおよび０は、開放
槽数が少なくなる程、すなわち、使用槽が少なくなる程
流量が増大し、無駄な水が浪費されているのがわかる。Figure 5 shows a comparison of the flow rate of water injected into each cleaning tank according to the conventional method and the present invention. It can be seen that the amount of water is increasing and water is being wasted.
一方、ＢおよびＤは、開放槽数に無関係で、常に各種に
注水される流量は、必要最低限のみ一定している。これ
は、とりもなおさず、各作業と使用槽数に見合ったオリ
フィス経路を、を磁バルブのＲ閉で、選択させた事によ
るものに他ならない。On the other hand, B and D are unrelated to the number of open tanks, and the flow rate that is always injected into each type is constant only to the necessary minimum. This is due to the fact that the orifice path suitable for each work and the number of tanks used was selected by closing the magnetic valve R.
なお、上記実施例では、準備用分岐管側についてもふれ
たが、洗浄用分岐管側のみの構成でも良い。また、オリ
フィスの取付方法は、電磁バルブ（４）、 （６）にバ
ルブソケット０４）をねじ込んで取付けたが、パイプに
挿入する方式でも良い。In addition, in the above embodiment, the preparation branch pipe side was also mentioned, but the configuration may be made only on the cleaning branch pipe side. Furthermore, although the orifice was installed by screwing the valve socket 04) into the electromagnetic valves (4) and (6), it may also be installed by inserting it into the pipe.
以上のようにこの発明は、本管から分岐された複数個の
分岐管、この複数個の分岐管の夫々に設けられて夫々の
分岐管を開閉する電磁バルブ、上記複数個の分岐管にお
ける上記電磁バルブの吐出側に設けられ、通路断面積が
上記複数個の分岐管毎に各々異なる複数個のオリフィス
、及び上記複数個の分岐管の吐出側に設置される洗浄槽
を備えたので、さまざまな洗浄作業においても、各洗浄
槽には、必要最低限の流量しか注入されることはなく、
極めて合理的な節水効果が得られる効果がある。As described above, the present invention provides a plurality of branch pipes branched from a main pipe, an electromagnetic valve provided in each of the plurality of branch pipes to open and close each branch pipe, and an electromagnetic valve for opening and closing each branch pipe in the plurality of branch pipes. A plurality of orifices are provided on the discharge side of the electromagnetic valve and each of the plurality of branch pipes has a different passage cross-sectional area, and a cleaning tank is provided on the discharge side of the plurality of branch pipes. Even during heavy cleaning operations, only the minimum required flow rate is injected into each cleaning tank.
This has the effect of achieving extremely reasonable water conservation effects.
第１図は、この発明の一実施例を示す構成図、第２図は
、その要部断面図、第３図は、押ボタン構成図、第４図
は、さまざまな洗浄作業におけるバルブの開閉手順を示
す図、第５図は流量特性を示す特性図、第６図は、従来
装置の構成図である。
図において、（１）は本管、（２）は洗浄用分岐管、（
３）は準備用分岐管、（４＆）〜（４４） 、 （６ｊ
Ｌ）〜（６４） 、 （Ｂ＆）〜（ａｄ） 、 （９，
）〜（９ｄ）は電磁バルブ、（５＆）〜（５ｄ） 。
（−ｆ−’） 〜（７，１）はオリフィス、（１（Ｉ
ハ吐出口、（１１１け洗浄槽である。
なお、各図中同一符号は同−又は相当部分を示す。Fig. 1 is a block diagram showing an embodiment of the present invention, Fig. 2 is a cross-sectional view of its main parts, Fig. 3 is a push button block diagram, and Fig. 4 shows opening and closing of valves in various cleaning operations. FIG. 5 is a characteristic diagram showing the flow rate characteristics, and FIG. 6 is a diagram showing the configuration of a conventional device. In the figure, (1) is the main pipe, (2) is the cleaning branch pipe, (
3) is a branch pipe for preparation, (4 &) ~ (44), (6j
L)~(64), (B&)~(ad), (9,
) to (9d) are electromagnetic valves, (5&) to (5d). (-f-') ~ (7,1) is the orifice, (1(I
(111) A cleaning tank. In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (1)
管の夫々に設けられて夫々の分岐管を開閉する電磁バル
ブ、上記複数個の分岐管における上記電磁バルブの吐出
側に設けられ、通路断面積が上記複数個の分岐管毎に各
々異なる複数個のオリフィス、及び上記複数個の分岐管
の吐出側に設置される洗浄槽を備えた洗浄装置。A plurality of branch pipes branched from the main pipe, a solenoid valve provided in each of the plurality of branch pipes to open and close each branch pipe, and a solenoid valve provided on the discharge side of the solenoid valve in the plurality of branch pipes. A cleaning device comprising: a plurality of orifices having different passage cross-sectional areas for each of the plurality of branch pipes; and a cleaning tank installed on the discharge side of the plurality of branch pipes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2550586A JPS62181435A (en) | 1986-02-05 | 1986-02-05 | Washing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2550586A JPS62181435A (en) | 1986-02-05 | 1986-02-05 | Washing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62181435A true JPS62181435A (en) | 1987-08-08 |
Family
ID=12167923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2550586A Pending JPS62181435A (en) | 1986-02-05 | 1986-02-05 | Washing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62181435A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010502921A (en) * | 2006-09-08 | 2010-01-28 | ツェットエフ フリードリヒスハーフェン アクチエンゲゼルシャフト | Gear selector mechanism for motor vehicle transmission |
-
1986
- 1986-02-05 JP JP2550586A patent/JPS62181435A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010502921A (en) * | 2006-09-08 | 2010-01-28 | ツェットエフ フリードリヒスハーフェン アクチエンゲゼルシャフト | Gear selector mechanism for motor vehicle transmission |
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