JPS6217766Y2 - - Google Patents
Info
- Publication number
- JPS6217766Y2 JPS6217766Y2 JP1983016964U JP1696483U JPS6217766Y2 JP S6217766 Y2 JPS6217766 Y2 JP S6217766Y2 JP 1983016964 U JP1983016964 U JP 1983016964U JP 1696483 U JP1696483 U JP 1696483U JP S6217766 Y2 JPS6217766 Y2 JP S6217766Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- fiber
- fibers
- coating
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000835 fiber Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 23
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 239000013307 optical fiber Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims 4
- 239000011248 coating agent Substances 0.000 claims 3
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 5
- 238000005253 cladding Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Description
【考案の詳細な説明】
この考案はシングルモードフアイバ用分岐素子
に係り、詳しくのべると、溝加工された基板の該
溝に沿つて固定された半円状の断面形状を有する
２本のフアイバを、それぞれの基板に設けた位置
合わせ用凹部および凸部を嵌合することにより円
形状に接合した構造よりなる分岐素子に関するも
のである。[Detailed description of the invention] This invention relates to a branching element for a single mode fiber, and in detail, two fibers having a semicircular cross section are fixed along the grooves of a grooved substrate. , relates to a branching element having a structure in which alignment recesses and projections provided on respective substrates are fitted together to form a circular shape.
従来のシングルモードフアイバ用分岐素子とし
ては、フアイバ１Ａの出射光をレンズ２Ａで視準
し、ハーフミラー３でビームを分割したのちレン
ズ２Ｂで集光し、フアイバ１Ｂに結合する第１図
に示すような構造のもの、あるいは第２図の如き
基板４上にＹ型の分岐導波路５を作り、フアイバ
１Ａの伝搬光をこのＹ型の分岐導波路５上で２分
割し、フアイバ１Ｂに結合させる構造のものなど
が知られている。 As shown in Fig. 1, a conventional branching element for a single mode fiber collimates the emitted light from the fiber 1A with a lens 2A, splits the beam with a half mirror 3, condenses the beam with a lens 2B, and couples it to the fiber 1B. A Y-shaped branching waveguide 5 is made on the substrate 4 as shown in FIG. There are known structures that allow
ところが、第１図の如き構造の分岐素子では、
シングルモードフアイバはコア径が約10μｍであ
るため、入力フアイバと出力フアイバ間で高精度
の光軸調整が必要となり、製作が非常に困難であ
る。 However, in the branch element with the structure shown in Fig. 1,
Single-mode fibers have a core diameter of about 10 μm, so they require highly accurate optical axis alignment between the input and output fibers, making them extremely difficult to manufacture.
またレンズ、ハーフミラー等の個別の光学部品
を組立てるため全体のサイズが大型になりすぎる
という欠点がある。 Furthermore, since individual optical parts such as lenses and half mirrors are assembled, the overall size becomes too large.
一方、第２図の構造の分岐素子では、一般に基
板上の導波路の断面形状は、矩形または半円形で
あるのに、光フアイバは円形断面であるため、そ
の結合部でモード変換ロスが発生し、さらに一般
に基板材料とフアイバ材料が異なるため結合部で
フレネルロスが発生するという欠点があつた。 On the other hand, in the branching element with the structure shown in Figure 2, the cross-sectional shape of the waveguide on the substrate is generally rectangular or semicircular, but since the optical fiber has a circular cross-section, mode conversion loss occurs at the coupling part. However, since the substrate material and the fiber material are generally different, Fresnel loss occurs at the joint.
本考案者らは上記のような従来の分岐素子の欠
点に鑑みて検討の結果、この考案に至つたもので
ある。 The inventors of the present invention came up with this idea as a result of their studies in view of the above-mentioned drawbacks of conventional branching elements.
この考案のシングルモードフアイバ用分岐素子
の説明に先立つてシングルモードフアイバ用カプ
ラの基本構造およびカプリングの原理を説明す
る。 Prior to explaining the branch element for single mode fiber of this invention, the basic structure of the coupler for single mode fiber and the principle of coupling will be explained.
第３図に示す２本のフアイバ１，２のコアを互
いに近接させ、エバネツセント波による分布結合
を利用してカプリングを実現する。 The cores of the two fibers 1 and 2 shown in FIG. 3 are brought close to each other, and coupling is realized using distributed coupling by evanescent waves.
こゝでフアイバ１を入力フアイバ、フアイバ
１，２を出力フアイバとすると、各フアイバの出
力強度P1，P2は、
P1＝P0cos2KZ P2＝P0sin2KZ
（但し、P0…入力パワー、Ｋ…結合係数）とな
る。 Here, if fiber 1 is the input fiber and fibers 1 and 2 are the output fibers, the output intensities P 1 and P 2 of each fiber are P 1 = P 0 cos 2 KZ P 2 = P 0 sin 2 KZ (However, P0 ...input power, K...coupling coefficient).
ところが一般のシングルモードフアイバはコア
径10μｍ、クラツド径100μｍ、△ｎ0.2％
であるため、この状態で近接させると、コア間距
離100μｍ、つまりＫ値が小さくなり、例えば
3dBカプラを実現するためのＺが非常に大きくな
る（数ｍ〜数Ｋｍ）。 However, a general single mode fiber has a core diameter of 10 μm, a cladding diameter of 100 μm, and a Δn of 0.2%.
Therefore, if they are brought close to each other in this state, the distance between the cores will be 100 μm, that is, the K value will be small, for example.
Z to realize a 3dB coupler becomes very large (several meters to several kilometers).
とこでＺ数mmにするためには、クラツド径
コア径にしてコア間距離を数μｍのオーダにする
必要がある。 However, in order to make Z several mm, it is necessary to set the clad diameter to the core diameter and the distance between the cores to be on the order of several μm.
この考案では既存のシングルモードフアイバを
利用して結合長数mmオーダのカプラを実現する
構造を提供せんとするものである。 This idea aims to provide a structure that realizes a coupler with a coupling length on the order of several mm by using existing single-mode fibers.
以下この考案の一実施例を第４図および第５図
に基づいて説明する。 An embodiment of this invention will be described below with reference to FIGS. 4 and 5.
まず２枚の基板１１に第４図ａ、第５図ａに示
すような溝１２を作り、該溝１２に夫々クラツド
材を被覆したフアイバ１３を固定する。そして一
方の基板即ち第５図ａの方の基板１１には位置合
わせ用の溝１４を加工しておく。 First, grooves 12 as shown in FIGS. 4a and 5a are formed in two substrates 11, and fibers 13 coated with a cladding material are fixed to each groove 12. Then, grooves 14 for positioning are machined in one of the substrates, that is, the substrate 11 shown in FIG. 5A.
次に双方ともに基板１１上に膜１５を形成して
フアイバ１３をモールドする（第４図ｂ、第５図
ｂ）。 Next, a film 15 is formed on both substrates 11 and fibers 13 are molded (FIGS. 4b and 5b).
次いで、エツチングによつて第４図ｃ、第５図
ｃのように半円状のフアイバ１６の形状とする
が、この時一方のみ、例えば第４図のみは基板１
１上に位置合わせ用の凸部１７を残すようにエツ
チングを行う。 Next, by etching, a semicircular fiber 16 is formed as shown in FIGS. 4c and 5c, but at this time, only one side, for example, only FIG.
Etching is performed so as to leave a convex portion 17 for positioning on the surface of the substrate 1.
そして最後に位置合わせ用凸部１７を有する第
４図ｃの基板１１上に第５図ｃの基板１１をその
凹溝１４を凸部１７に嵌合するようにして貼り合
わせ、第６図の如き形状の分岐素子を得るもので
ある。 Finally, the substrate 11 shown in FIG. 5 c is pasted onto the substrate 11 shown in FIG. A branching element having such a shape is obtained.
このような分岐素子を得るに当つて、基板１１
の素材としては、Si、GaAsなどが用いられ、フ
アイバのクラツド材としては、SiO2または屈折
率を下げる目的で硼素、フツ素などのドーパント
を添加したSiO2が用いられる。 In obtaining such a branching element, the substrate 11
Si, GaAs, etc. are used as the material for the fiber, and SiO 2 or SiO 2 doped with dopants such as boron and fluorine for the purpose of lowering the refractive index is used as the fiber cladding material.
また第４図ｂ、第５図ｂに示す基板１１上に形
成する膜１５の材料としては、フアイバのクラツ
ド材と同程度のエツチング度合を有するものがよ
く、例えばSiO2などが好ましく、またこの膜１
５の形成方法としては、CVD、スパツタリング
などが用いられる。 Furthermore, the material of the film 15 formed on the substrate 11 shown in FIGS. 4b and 5b is preferably a material having a degree of etching comparable to that of the fiber cladding material, such as SiO 2 . Membrane 1
CVD, sputtering, etc. are used as a method for forming 5.
次にフアイバ１３を固定するために基板１１に
設けられる溝１２の加工方法としては、エツチン
グ、機械加工が用いられる。 Next, etching and machining are used to form the grooves 12 provided in the substrate 11 in order to fix the fibers 13.
かくして得られるこの考案の分岐素子は、フア
イバ以外のコンポーネントを用いていないので小
型のカプラを実現できること、フアイバを固定し
た基板上に凸部と凹部を設けて２本のフアイバの
位置合わせをしているのでその操作が簡単容易で
あること、従来の分岐素子のような結合部がない
のでモード変換ロスおよびフレネルロスなどが殆
んど生じないなどの効果を有するものであり、こ
のようなこの考案の分岐素子はシングルモードフ
アイバ伝送ネツトワークを構成するコンポーネン
ト、光フアイバジヤイロ、光フアイバハイドロン
フオンなどの光フアイバおよび光分岐部を含む光
学計測装置、光学情報処理装置などに広く利用す
ることができるのである。 The thus obtained branching element of this invention does not use any components other than the fibers, so it is possible to realize a small coupler, and the two fibers are aligned by providing a convex part and a concave part on the substrate to which the fibers are fixed. This invention has the following advantages: the operation is simple and easy, and since there is no coupling part like in conventional branching elements, there is almost no mode conversion loss or Fresnel loss. Branching elements can be widely used in components constituting single-mode fiber transmission networks, optical measurement devices, optical information processing devices, etc. that include optical fibers and optical branching units such as optical fiber coils and optical fiber hydrophons. .
第１図および第２図は従来の分岐素子の構造を
示す説明図、第３図はシングルモードフアイバ用
カプラの基本構造を示す説明図、第４図乃至第６
図はこの考案の分岐素子の構成を示す工程図であ
る。
１１……基板、１２……溝、１３……フアイ
バ、１４……溝、１５……膜、１６……半円状フ
アイバ、１７……位置合わせ用凸部。
FIGS. 1 and 2 are explanatory diagrams showing the structure of a conventional branching element, FIG. 3 is an explanatory diagram showing the basic structure of a single mode fiber coupler, and FIGS.
The figure is a process diagram showing the configuration of the branching element of this invention. DESCRIPTION OF SYMBOLS 11...Substrate, 12...Groove, 13...Fiber, 14...Groove, 15...Membrane, 16...Semicircular fiber, 17...Protrusion for positioning.
Claims (1)
せ凹部を形成した基板との２枚の基板の各溝に沿
つてSiO2でクラツドされた光フアイバのほぼ半
分を嵌合し、基板上にSiO2等の被膜を形成した
後、被膜およびフアイバの突出部分を除去するエ
ツチング工程において、位置合わせ凹部のない基
板の被膜は位置合わせ凹部に嵌合する部分を除く
他の被膜およびフアイバ突出部分を除去して、被
膜による位置合わせ凸部を形成し、両基板の位置
合わせ凹部と凸部を嵌合接着してなる分岐素子。 Approximately half of the optical fiber clad with SiO 2 is fitted along each groove of two substrates, a grooved substrate and a grooved substrate with alignment recesses formed, and SiO 2 is placed on the substrate. After forming the No. 2 coating, in the etching process that removes the coating and the protruding portions of the fiber, the coating of the substrate without alignment recesses is removed except for the portion that fits into the alignment recess, and other coatings and the protruding portions of the fibers are removed. A branch element is formed by forming a positioning convex part with a film, and fitting and bonding the positioning concave part and the convex part of both substrates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1696483U JPS59123818U (en) | 1983-02-07 | 1983-02-07 | Branch element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1696483U JPS59123818U (en) | 1983-02-07 | 1983-02-07 | Branch element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59123818U JPS59123818U (en) | 1984-08-21 |
| JPS6217766Y2 true JPS6217766Y2 (en) | 1987-05-08 |
Family
ID=30148211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1696483U Granted JPS59123818U (en) | 1983-02-07 | 1983-02-07 | Branch element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59123818U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5346745A (en) * | 1976-10-09 | 1978-04-26 | Ritsuo Hasumi | Light directional coupler |
| JPS55157708A (en) * | 1979-05-28 | 1980-12-08 | Fujitsu Ltd | Connector of optical fiber |
| JPS56154709A (en) * | 1980-04-11 | 1981-11-30 | Univ Leland Stanford Junior | Fiber optical directional coupler |
-
1983
- 1983-02-07 JP JP1696483U patent/JPS59123818U/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5346745A (en) * | 1976-10-09 | 1978-04-26 | Ritsuo Hasumi | Light directional coupler |
| JPS55157708A (en) * | 1979-05-28 | 1980-12-08 | Fujitsu Ltd | Connector of optical fiber |
| JPS56154709A (en) * | 1980-04-11 | 1981-11-30 | Univ Leland Stanford Junior | Fiber optical directional coupler |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59123818U (en) | 1984-08-21 |
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