JPS6130269B2 - - Google Patents
Info
- Publication number
- JPS6130269B2 JPS6130269B2 JP50018967A JP1896775A JPS6130269B2 JP S6130269 B2 JPS6130269 B2 JP S6130269B2 JP 50018967 A JP50018967 A JP 50018967A JP 1896775 A JP1896775 A JP 1896775A JP S6130269 B2 JPS6130269 B2 JP S6130269B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- photoconductive
- substrate
- coating
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010410 layer Substances 0.000 claims description 83
- 238000000576 coating method Methods 0.000 claims description 54
- 239000010408 film Substances 0.000 claims description 48
- 239000000463 material Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 45
- 239000011248 coating agent Substances 0.000 claims description 43
- 239000010409 thin film Substances 0.000 claims description 26
- 239000012790 adhesive layer Substances 0.000 claims description 6
- 238000009501 film coating Methods 0.000 claims description 6
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 25
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 24
- 238000004544 sputter deposition Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 14
- 230000000694 effects Effects 0.000 description 11
- 238000000151 deposition Methods 0.000 description 9
- 229910003437 indium oxide Inorganic materials 0.000 description 9
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 8
- 239000012535 impurity Substances 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000005299 abrasion Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 230000001965 increasing effect Effects 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- UDWJTDBVEGNWAB-UHFFFAOYSA-N zinc indium(3+) sulfide Chemical compound [S-2].[Zn+2].[In+3] UDWJTDBVEGNWAB-UHFFFAOYSA-N 0.000 description 4
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 3
- 229910052793 cadmium Inorganic materials 0.000 description 3
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000002985 plastic film Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- -1 silver halide Chemical class 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- 239000011593 sulfur Substances 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- SKJCKYVIQGBWTN-UHFFFAOYSA-N (4-hydroxyphenyl) methanesulfonate Chemical compound CS(=O)(=O)OC1=CC=C(O)C=C1 SKJCKYVIQGBWTN-UHFFFAOYSA-N 0.000 description 2
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 2
- 239000005041 Mylar™ Substances 0.000 description 2
- 239000005083 Zinc sulfide Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 2
- 229910000043 hydrogen iodide Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- UKUVVAMSXXBMRX-UHFFFAOYSA-N 2,4,5-trithia-1,3-diarsabicyclo[1.1.1]pentane Chemical compound S1[As]2S[As]1S2 UKUVVAMSXXBMRX-UHFFFAOYSA-N 0.000 description 1
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229940007424 antimony trisulfide Drugs 0.000 description 1
- NVWBARWTDVQPJD-UHFFFAOYSA-N antimony(3+);trisulfide Chemical compound [S-2].[S-2].[S-2].[Sb+3].[Sb+3] NVWBARWTDVQPJD-UHFFFAOYSA-N 0.000 description 1
- 229940052288 arsenic trisulfide Drugs 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- CJOBVZJTOIVNNF-UHFFFAOYSA-N cadmium sulfide Chemical compound [Cd]=S CJOBVZJTOIVNNF-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229920002457 flexible plastic Polymers 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/10—Bases for charge-receiving or other layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/14—Inert intermediate or cover layers for charge-receiving layers
- G03G5/142—Inert intermediate layers
- G03G5/144—Inert intermediate layers comprising inorganic material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Photoreceptors In Electrophotography (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (13)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DK644874A DK644874A (da) | 1974-12-11 | 1974-12-11 | Fremgangsmade og apparat til frembringelse af billeder pa en elektrofotografisk film |
CA219,113A CA1055300A (en) | 1974-12-11 | 1975-01-31 | Electrophotographic film member with r.f. sputtered inorganic photoconductor |
AT88175A AT339728B (de) | 1974-12-11 | 1975-02-06 | Elektrophotographisches material |
NLAANVRAGE7501405,A NL173684C (nl) | 1974-12-11 | 1975-02-06 | Elektrofotografische film en werkwijze voor het vervaardigen daarvan. |
BE6044918A BE825385A (fr) | 1974-12-11 | 1975-02-10 | Elektrofotografisch filmdeel |
FR7504224A FR2301040A1 (fr) | 1974-12-11 | 1975-02-11 | Pellicule electrophotographique |
SE7501581A SE387752B (sv) | 1974-12-11 | 1975-02-12 | Elektrofotografiskt |
IL46628A IL46628A (en) | 1974-12-11 | 1975-02-13 | Electrophotographic film |
JP50018967A JPS6130269B2 (sv) | 1974-12-11 | 1975-02-17 | |
DE2507079A DE2507079C2 (de) | 1974-12-11 | 1975-02-19 | Elektrophotographisches Aufzeichnungsmaterial und Verfahren zu seiner Herstellung |
IT7548274A IT1029812B (it) | 1974-12-11 | 1975-02-20 | Organo di pellicola elettrofoto grafica |
CH304175A CH596585A5 (en) | 1974-12-11 | 1975-03-11 | Electrophotographic film with four successive layers |
DK392077A DK392077A (da) | 1974-12-11 | 1977-09-02 | Automatisk fremgangsmade og apparat til elektrofotografisk frembringelse af billeder |
Applications Claiming Priority (12)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DK644874A DK644874A (da) | 1974-12-11 | 1974-12-11 | Fremgangsmade og apparat til frembringelse af billeder pa en elektrofotografisk film |
CA219,113A CA1055300A (en) | 1974-12-11 | 1975-01-31 | Electrophotographic film member with r.f. sputtered inorganic photoconductor |
NLAANVRAGE7501405,A NL173684C (nl) | 1974-12-11 | 1975-02-06 | Elektrofotografische film en werkwijze voor het vervaardigen daarvan. |
AT88175A AT339728B (de) | 1974-12-11 | 1975-02-06 | Elektrophotographisches material |
BE6044918A BE825385A (fr) | 1974-12-11 | 1975-02-10 | Elektrofotografisch filmdeel |
FR7504224A FR2301040A1 (fr) | 1974-12-11 | 1975-02-11 | Pellicule electrophotographique |
SE7501581A SE387752B (sv) | 1974-12-11 | 1975-02-12 | Elektrofotografiskt |
IL46628A IL46628A (en) | 1974-12-11 | 1975-02-13 | Electrophotographic film |
JP50018967A JPS6130269B2 (sv) | 1974-12-11 | 1975-02-17 | |
DE2507079A DE2507079C2 (de) | 1974-12-11 | 1975-02-19 | Elektrophotographisches Aufzeichnungsmaterial und Verfahren zu seiner Herstellung |
IT7548274A IT1029812B (it) | 1974-12-11 | 1975-02-20 | Organo di pellicola elettrofoto grafica |
CH304175A CH596585A5 (en) | 1974-12-11 | 1975-03-11 | Electrophotographic film with four successive layers |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5194826A JPS5194826A (sv) | 1976-08-19 |
JPS6130269B2 true JPS6130269B2 (sv) | 1986-07-12 |
Family
ID=33304316
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50018967A Expired JPS6130269B2 (sv) | 1974-12-11 | 1975-02-17 |
Country Status (12)
Country | Link |
---|---|
JP (1) | JPS6130269B2 (sv) |
AT (1) | AT339728B (sv) |
BE (1) | BE825385A (sv) |
CA (1) | CA1055300A (sv) |
CH (1) | CH596585A5 (sv) |
DE (1) | DE2507079C2 (sv) |
DK (2) | DK644874A (sv) |
FR (1) | FR2301040A1 (sv) |
IL (1) | IL46628A (sv) |
IT (1) | IT1029812B (sv) |
NL (1) | NL173684C (sv) |
SE (1) | SE387752B (sv) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4155640A (en) * | 1977-05-12 | 1979-05-22 | Coulter Systems Corporation | High speed electrophotographic imaging system |
JPS5596958A (en) * | 1979-01-16 | 1980-07-23 | Coulter Systems Corp | Print cylinder |
DE3227294A1 (de) * | 1982-07-21 | 1984-01-26 | Siemens AG, 1000 Berlin und 8000 München | Roentgenelektrofotografisches aufzeichnungsmaterial und verfahren zur erzeugung eines elektrischen ladungsbildes |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4963440A (sv) * | 1972-06-08 | 1974-06-19 |
-
1974
- 1974-12-11 DK DK644874A patent/DK644874A/da not_active Application Discontinuation
-
1975
- 1975-01-31 CA CA219,113A patent/CA1055300A/en not_active Expired
- 1975-02-06 NL NLAANVRAGE7501405,A patent/NL173684C/xx active
- 1975-02-06 AT AT88175A patent/AT339728B/de not_active IP Right Cessation
- 1975-02-10 BE BE6044918A patent/BE825385A/xx not_active IP Right Cessation
- 1975-02-11 FR FR7504224A patent/FR2301040A1/fr active Granted
- 1975-02-12 SE SE7501581A patent/SE387752B/sv unknown
- 1975-02-13 IL IL46628A patent/IL46628A/xx unknown
- 1975-02-17 JP JP50018967A patent/JPS6130269B2/ja not_active Expired
- 1975-02-19 DE DE2507079A patent/DE2507079C2/de not_active Expired
- 1975-02-20 IT IT7548274A patent/IT1029812B/it active
- 1975-03-11 CH CH304175A patent/CH596585A5/fr not_active IP Right Cessation
-
1977
- 1977-09-02 DK DK392077A patent/DK392077A/da not_active Application Discontinuation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4963440A (sv) * | 1972-06-08 | 1974-06-19 |
Also Published As
Publication number | Publication date |
---|---|
AT339728B (de) | 1977-11-10 |
NL173684C (nl) | 1984-02-16 |
CH596585A5 (en) | 1978-03-15 |
DK392077A (da) | 1977-09-02 |
FR2301040B1 (sv) | 1980-06-06 |
IL46628A0 (en) | 1975-04-25 |
FR2301040A1 (fr) | 1976-09-10 |
NL173684B (nl) | 1983-09-16 |
DE2507079C2 (de) | 1982-04-29 |
SE7501581L (sv) | 1976-08-13 |
IT1029812B (it) | 1979-03-20 |
BE825385A (fr) | 1975-08-11 |
CA1055300A (en) | 1979-05-29 |
DE2507079A1 (de) | 1976-09-02 |
SE387752B (sv) | 1976-09-13 |
ATA88175A (de) | 1977-02-15 |
IL46628A (en) | 1978-07-31 |
DK644874A (da) | 1976-06-12 |
JPS5194826A (sv) | 1976-08-19 |
NL7501405A (nl) | 1976-08-10 |
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