JPS61293744A - Stage feeding device - Google Patents

Stage feeding device

Info

Publication number
JPS61293744A
JPS61293744A JP13594785A JP13594785A JPS61293744A JP S61293744 A JPS61293744 A JP S61293744A JP 13594785 A JP13594785 A JP 13594785A JP 13594785 A JP13594785 A JP 13594785A JP S61293744 A JPS61293744 A JP S61293744A
Authority
JP
Japan
Prior art keywords
stage
piston
cylinder
feed
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13594785A
Other languages
Japanese (ja)
Other versions
JPH069773B2 (en
Inventor
Kazunori Iwamoto
岩本　和徳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP13594785A priority Critical patent/JPH069773B2/en
Priority to DE19863620969 priority patent/DE3620969A1/en
Publication of JPS61293744A publication Critical patent/JPS61293744A/en
Priority to US07/271,365 priority patent/US4854444A/en
Publication of JPH069773B2 publication Critical patent/JPH069773B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/03—Stationary work or tool supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/28—Means for securing sliding members in any desired position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/601—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair followed parallelly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0004—Braking devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B25J9/1015—Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means using additional, e.g. microadjustment of the end effector

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

PURPOSE:To provide easy clamping after coarse location by furnishing a means to lock the relative motion of piston vs. cylinder in a piston-cylinder assembly for coarse feeding, wherein the lock is performed by the use of the generative force of a piezo element. CONSTITUTION:A clamping device 4 is installed at a stage 1 in such a way as surrounding a piston rod 5 to allow locking after stop of coarse location by coarse feeding by assembly 3, i.e. the stage 1 is locked to the piston rod 5. The clamping device 4 is composed of a tri-forked coil spring 16 fitted as winding the piston rod 5, a piezo element 14, a pressuring block 17 and a component force generating V-block 18, wherein they are housed in a housing 15. That is, the housing 15 is installed with relative mobility only in the radial direction of the cylinder of said assembly 3, and the piezo element 14 is borne by the housing 15 in contact therewith through a location adjusting screw 19.

Description

【発明の詳細な説明】 ［発明の利用分野］ 本発明はステージ送り装置に関し、特にＬＳＩなどの半
導体製造装置における微細加工或いは検査用等の比較的
ストロークの長い精密位置決めに好適なステージ送り装
置に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a stage feeding device, and more particularly to a stage feeding device suitable for precision positioning with a relatively long stroke for microfabrication or inspection in semiconductor manufacturing equipment such as LSI. .

［従来技術］ ・光、電子線またはＸ線などを利用した露光装置をはじ
めとして、ＬＳＩなどの微細パターンの加工或いは検査
を行なう各種半導体製造装置では、被加工物であるウェ
ハあるいは露光用のマスクまたはレクチルをステージに
保持させて直線送りにより精密に位置決めする。このよ
うなステージ送り装置には、比較的長いストロークが要
求されるため、目標停止位置近辺まで高速送りをする位
置決め精度の低い粗動送りと、目標停止位置近くで粗位
置決めされたステージを目標停止位置に高精度で位置決
めする微動送りとの両機能を行なう送り機構が設けられ
るのが一般的であり、従来は第４図に示すような２軸送
りネジ方式のもの、或いは第５図に示すような１軸差動
送りネジ方式のものが主流であった。[Prior art] - In various semiconductor manufacturing equipment that processes or inspects fine patterns such as LSI, including exposure equipment that uses light, electron beams, or X-rays, the wafer that is the workpiece or the mask for exposure Alternatively, hold the reticle on a stage and position it precisely by linear feed. This kind of stage feeding device requires a relatively long stroke, so there is a coarse feed with low positioning accuracy that performs high-speed feed to near the target stop position, and a coarse feed that moves the stage roughly positioned near the target stop position to a target stop. It is common to have a feed mechanism that performs both functions of fine movement feed for positioning with high precision, and conventionally a two-axis feed screw type as shown in Figure 4 or a two-axis feed screw type as shown in Figure 5 is used. The mainstream was a single-axis differential feed screw type.

第４図に示す２軸送りネジ方式では、ベース４０１上に
配置されたガイドレール４０２にガイドベアリング４０
３によってテーブル４０４を直線移動可能に支持し、ベ
ース４０１に軸受４０５によって支持された粗動送りネ
ジ４０６にテーブル４０４の送りナツト４０７を螺合さ
せ、送りネジ４０６を粗動送り用駆動モータ４０８で回
転駆動するようにし、さらに前記テーブル４０４上に別
のガイドレール４０９を配置して、このガイドレール４
０９にガイドベアリング４１０によってステージ４１１
を直線移動可能に支持し、テーブル４０４に軸受４１２
によって支持された微動送りネジ４１３にステージ４１
１の送りナツト４１４を螺合させ、送りネジ４１３を微
動送り用駆動モータ４１５で回転駆動するようにして、
両送りネジ４０６と４１３による２重送りネジ構造でス
テージ４１１の粗・微動を行なわせるようにしである。In the two-axis feed screw system shown in FIG. 4, a guide bearing 40 is attached to a guide rail 402 arranged on a base 401
3 supports a table 404 so as to be linearly movable, a feed nut 407 of the table 404 is screwed into a coarse feed screw 406 supported by a bearing 405 on the base 401, and the feed screw 406 is driven by a coarse feed drive motor 408. Further, another guide rail 409 is arranged on the table 404, and this guide rail 4
Stage 411 by guide bearing 410 in 09
A bearing 412 is attached to the table 404 so that it can move linearly.
The stage 41 is attached to the fine movement feed screw 413 supported by the
The feed nut 414 of No. 1 is screwed together, and the feed screw 413 is rotationally driven by a fine feed drive motor 415.
A double feed screw structure consisting of both feed screws 406 and 413 allows the stage 411 to be coarsely and finely moved.

また第５図に示す１軸差動送りネジ方式では、ベース５
０１上に配置されたガイドレール５０２にガイドベアリ
ング５０３によってステージ５０４を直線移動可能に支
持し、ベース５０１に図示しない軸受によって支持され
た送り軸５０５に微小なリード差をもつ送りネジ部５０
６と５０７とを設け、一方の送すネジ部５０６にステー
ジ５０４の送りナツト５０８を螺合させると共に、他方
の送りネジ部５０７には、切換クラッチ装置５０９によ
ってベース５０１または送り軸５０５のいずれかに対し
て選択的に固定可能な差動ナツト５１０を螺合させ、送
り軸５０５を駆動モータ５１１によって回転させるよう
になっており、切換クラッチ装置５０９により差動ナツ
ト５１０を送り軸５０５に固定するとクラッチ装置内で
ナツト５１０がベースに対して自由回転可能となるので
モータ　５１１の１回転につき送りネジ部５０６のネジ
のリード分だけステージ５０４の早送りができ、また切
換クラッチ５０９により差動ナツト５１０をベース５０
１に対して固定すると、モータの１回転につぎ送り軸５
０５自体が送りネジ部５０１のネジのリード分だけ逆方
向に送られるので、ステージ５０４をモータ　５１１の
１回転につき両送りネジ部５０６と５０７のリード差に
相当する分だけ微小送りすることができる。In addition, in the single-axis differential feed screw system shown in Fig. 5, the base 5
A stage 504 is linearly movably supported by a guide bearing 503 on a guide rail 502 disposed on the base 501, and a feed screw portion 50 having a minute lead difference is attached to a feed shaft 505 supported by a bearing (not shown) on a base 501.
6 and 507 are provided, and the feed nut 508 of the stage 504 is screwed into one feed screw portion 506, and the other feed screw portion 507 is connected to either the base 501 or the feed shaft 505 by a switching clutch device 509. A differential nut 510, which can be selectively fixed to Since the nut 510 can freely rotate with respect to the base within the clutch device, the stage 504 can be rapidly advanced by the lead of the screw of the feed screw portion 506 for each rotation of the motor 511, and the differential nut 510 can be rotated by the switching clutch 509. base 50
If it is fixed to 1, the feed shaft 5 will be
05 itself is sent in the opposite direction by the lead of the screw of the feed screw portion 501, so the stage 504 can be minutely fed by an amount corresponding to the lead difference between the two feed screw portions 506 and 507 per revolution of the motor 511. .

しかしながら、第４図および第５図に示す従来の装置で
は、送りネジの中心軸上にステージの重心がなく、換言
すれば力の作用線上にステージの重心がないので、ベー
スを竪形に配置して用いる場合にはガイドベアリングに
オーバーハング荷重がかかり、ガイドレールとガイドベ
アリングとの間にこじれが生じてベアリング寿命および
案内精度を損う欠点があるほか、ステージを真空雰囲気
中に配置する必要がある場合は、送りネジやガイドベア
リングの潤滑油の蒸発による焼付きや、モータを耐真空
用に構成しなければならないなどの問題点があり、この
ため特にベローズ等で真空シールしにくい複雑な構造の
送りネジ機構とモータを真空チャンバ外に配置して、チ
ャンバ内でガイドレールに支持案内されたステージに伝
達機構を介して送りネジの動きを伝えるようにするにし
ても、粗動および微動用の両送りネジ機構をチャンバ外
に配置しなければならないので、ステージの所要ストロ
ーク全長方以上の設置スペースがチャンバ外に必要とな
る。However, in the conventional apparatus shown in Figs. 4 and 5, the center of gravity of the stage is not on the central axis of the feed screw, or in other words, the center of gravity of the stage is not on the line of action of force, so the base is arranged vertically. When used as a stage, an overhang load is applied to the guide bearing, which causes strain between the guide rail and the guide bearing, impairing the life of the bearing and guiding accuracy.In addition, the stage must be placed in a vacuum atmosphere. If the Even if the structure's lead screw mechanism and motor are placed outside the vacuum chamber, and the movement of the lead screw is transmitted through a transmission mechanism to the stage supported and guided by guide rails inside the chamber, coarse and fine movements can be achieved. Since both feed screw mechanisms for the stage must be placed outside the chamber, an installation space larger than the entire length of the required stroke of the stage is required outside the chamber.

［発明の目的］ 本発明の課題は、ステージの重心を力の作用線上に位置
させる構成をとり易くすると共に、ステージ内に粗動送
りストローク部を収納配置することができ、真空雰囲気
内で焼付きを起しやすい特に送りネジ機構を真空チャン
バ外に配置する場合に従来に比べてチャンバ外の突出部
分をコンパクトにすることができ、さらに粗位置決め停
止時のクランプ力を増大すると同時にクランプ部をコン
パクトにすることのできる構造の簡単な精密位置決め用
のステージ送り装置を提供することにある。[Objective of the Invention] An object of the present invention is to facilitate the configuration in which the center of gravity of the stage is located on the line of action of force, to accommodate the coarse feed stroke section within the stage, and to perform baking in a vacuum atmosphere. Especially when placing the feed screw mechanism outside the vacuum chamber, which is prone to sticking, the protruding part outside the chamber can be made more compact than before, and the clamping force at the time of coarse positioning and stopping can be increased, while at the same time the clamping part can be An object of the present invention is to provide a stage feeding device for precision positioning that has a simple structure and can be made compact.

［発明の構成］ 本発明のステージ送り装置は粗動送り手段と微動送り手
段、およびクランプ手段とを備えており、粗動送り手段
は、流体の給排によってステージを高速で比較的大きな
ストロークにわたり直線移動させるピストンシリンダア
ッセンブリによって構成され、クランプ手段は、このピ
ストンシリンダアッセンブリのピストンとシリンダとの
相対移動をピエゾ素子の発生力によってロック可能な例
えばピストンロッドを周囲から緊締するピエゾ素子内蔵
クランプ機構によって構成され、さらに微動送り手段は
、前記クランプ手段によりロックされた状態のピストン
シリンダアッセンブリを介してステージを比較的低速で
所要ストロークにわたり直線移動させる送りネジ装置に
よって構成されている。[Structure of the Invention] The stage feeding device of the present invention includes a coarse movement feeding means, a fine movement feeding means, and a clamping means, and the coarse movement feeding means moves the stage at high speed over a relatively large stroke by supplying and discharging fluid. The clamping means is configured by a piston cylinder assembly that moves linearly, and the clamping means is configured by a piezo element built-in clamp mechanism that tightens the piston rod from the surroundings, which can lock the relative movement of the piston and cylinder of the piston cylinder assembly by the force generated by a piezo element. Further, the fine movement feed means is constituted by a feed screw device that linearly moves the stage over a required stroke at a relatively low speed via the piston cylinder assembly locked by the clamp means.

ステージと送りネジ装置との間に介在するピストンシリ
ンダアッセンブリは、ひとつの態様ではそのピストンが
送りネジ装置に、そしてシリンダがステージに固定され
、別の態様ではその逆の構成となっている。A piston-cylinder assembly interposed between the stage and the lead screw device has the piston fixed to the lead screw device and the cylinder fixed to the stage in one embodiment, and vice versa in another embodiment.

クランプ手段は、粗動送り時にピストンとシリンダの相
対移動すなわちピストンシリンダアッセンブリの本来の
流体による作動を許容し、微動送り時にはとニジ素子に
よる強力な緊締力によってピストンとシリンダとの軸方
向の相対移動を固定し、送りネジ装置によるステージ移
動のための動きを単に伝達するだけとする。この場合、
クランプの機構としては、クランプ時にクランプ手段自
体がシリンダの径方向に関してシリンダと相対移動可能
であってもよく、クランプの緊締力をピストンロッド中
心に向けて三方向以上の分力として作用させるようにし
てもよい。The clamping means allows the relative movement of the piston and cylinder during coarse movement feed, that is, the operation by the original fluid of the piston cylinder assembly, and allows the relative movement of the piston and cylinder in the axial direction by the strong clamping force of the needle element during fine movement feed. is fixed, and the movement for moving the stage by the feed screw device is simply transmitted. in this case,
As for the clamping mechanism, the clamping means itself may be movable relative to the cylinder in the radial direction of the cylinder when clamping, and the clamping force of the clamp is directed toward the center of the piston rod and acts as component forces in three or more directions. It's okay.

［発明の作用コ 本発明のステージ送り装置では、粗動送り手段がピスト
ンシリンダアッセンブリによって構成されているので、
これをステージの重心を貢ぬ（中心線位置にてステージ
内に配置しても構造の複雑化は問題にならず、また真空
チャンバ内に配置する場合も、ピストンロッドとクラン
プ手段およびガイドレールは単に棒状などの単純なもの
であるのでベローズによって真空シールできるから、殆
んどのストローク分を担う粗動送り手段をチャンバ内に
配置でき、チャンバ外には微動送り用の送りネジ装置だ
けを配置すればよいことになるのでそれだけチャンバ外
の装置配置がコンパクトになる。ざらに粗動送り用のア
クチュエータがピストンシリンダアッセンブリであるの
で送りネジ方式に比べて構造がシンプルとなり、最終停
止目標位置への位置決めは微動送り手段の送りネジ装置
で行なえるので、位置決め精度は高精度を望むことがで
きる。またクランプ手段はピエゾ素子の伸長による力を
ピストンロッドの緊締に利用するので小形軽量でも強力
であり、保持力発生のための消費エネルギーを少なくす
ることが可能である。[Operation of the Invention] In the stage feeding device of the present invention, since the coarse movement feeding means is constituted by a piston cylinder assembly,
This does not affect the center of gravity of the stage (even if it is placed inside the stage at the center line position, there is no problem of complicating the structure, and even if it is placed inside a vacuum chamber, the piston rod, clamping means, and guide rail are Since it is a simple rod-shaped device, it can be vacuum-sealed with a bellows, so the coarse feed means responsible for most of the stroke can be placed inside the chamber, and only the feed screw device for fine feed can be placed outside the chamber. This makes the equipment arrangement outside the chamber more compact.Since the actuator for coarse movement feed is a piston-cylinder assembly, the structure is simpler than the feed screw method, and it is easy to position to the final stop target position. Since this can be done by the feed screw device of the fine movement feed means, high positioning accuracy can be expected.Also, the clamp means uses the force generated by the expansion of the piezo element to tighten the piston rod, so it is small and lightweight but powerful. It is possible to reduce the energy consumption for generating holding force.

本発明の一層の理解のために好適な実施例を示寸ば以下
の通りである。Preferred embodiments for a better understanding of the invention are as follows.

［実施例］ 第１図において、ステージ１はｙ軸方向へ直線移動され
るようにリニアガイドシャフト２ａ及び２ｂにより案内
支持されている。ステージ１内にはピストンシリンダア
ッセンブリ　３が配置され、該アッセンブリ３のシリン
ダ側がステージ１と固定関係にある。アッセンブリ　３
はステージ１の粗動送り手段を構成し、可撓チューブ６
ａ、　６ｂを介して給排される流体によりそのピストン
ロッド５に対してステージ１を相対移動させる。ステー
ジ１にはピストンロッド５を囲んでクランプ装置４が取
付けられており、アッセンブリ　３による粗動送りの粗
位置決め停止以後のロック、すなわちステージ１をピス
トンロッド５にロックすることができるようになってい
る。ピストンロッド５の先端には、球面継手１１を介し
て二叉状の微動送りロッド１２が連結されており、この
ロッド１２の二叉の先端は微動送りナツト８を有するハ
ウジングブロック１３に固定されている。ナツト８は、
軸受１０に支持された微動送りネジ１に螺合しており、
駆動モータ９によるネジ１の回転によってハウジングブ
ロック′１３、そして二叉ロッド１２および継手１１を
介してピストンロッド５を微動させるようになされてい
る。[Embodiment] In FIG. 1, a stage 1 is guided and supported by linear guide shafts 2a and 2b so as to be linearly moved in the y-axis direction. A piston cylinder assembly 3 is disposed within the stage 1, with the cylinder side of the assembly 3 being in fixed relationship with the stage 1. Assembly 3
constitutes the coarse movement feeding means of the stage 1, and the flexible tube 6
The stage 1 is moved relative to the piston rod 5 by the fluid supplied and discharged through the piston rods a and 6b. A clamp device 4 is attached to the stage 1 so as to surround the piston rod 5, and it is possible to lock the stage 1 after the rough positioning of the coarse movement feed by the assembly 3 is stopped, that is, to lock the stage 1 to the piston rod 5. There is. A two-pronged fine-movement feed rod 12 is connected to the tip of the piston rod 5 via a spherical joint 11, and the two-pronged tips of this rod 12 are fixed to a housing block 13 having a fine-movement feed nut 8. There is. Natsuto 8 is
It is screwed into a fine movement feed screw 1 supported by a bearing 10,
Rotation of the screw 1 by the drive motor 9 causes the piston rod 5 to move slightly through the housing block '13, the forked rod 12, and the joint 11.

クランプ装＠４の具体例が第２図および第２Ａ図に示さ
れており、ピストンロッド５を取り巻い。An embodiment of the clamping device 4 is shown in FIGS. 2 and 2A, and surrounds the piston rod 5.

て嵌められた先端３ツ割り状の円筒バネ１６と、ピエゾ
索子１４と、このピエゾ素子１４に電圧を印加したとき
の該素子の伸長によって円筒バネ１６の三ツ割り部を縮
径するクランプ機構、すなわち加圧ブロック１７および
分力発生用Ｖブロック１８とをハウジング１５内に組込
んでなる。すなわちハウジング１５はアッセンブリ　３
のシリンダに対して例えば弾性機構によってシリンダ半
径方向にのみ相対移動可能に取付けられ、ピエゾ素子１
４は位置調整ネジ１９を介してハウジング１５に当接支
持されている。A cylindrical spring 16 having a three-split tip fitted therein, a piezo cord 14, and a clamp mechanism that reduces the diameter of the three-split portion of the cylindrical spring 16 by expanding the piezo element 14 when a voltage is applied to the piezo element 14. That is, the pressurizing block 17 and the component force generating V block 18 are assembled into the housing 15. That is, the housing 15 is an assembly 3
The piezo element 1 is mounted so that it can move relative to the cylinder only in the radial direction of the cylinder by an elastic mechanism, for example.
4 is abutted and supported by the housing 15 via a position adjustment screw 19.

このクランプ装置４において、ピエゾ素子１４が非付勢
状態では、ピストンロッド５は円筒バネ１６内を自由に
摺動可能であるが、ピエゾ素子１４に電圧を印加してこ
れを付勢すると該素子が数〜数十ミクロン伸び、これに
より加圧ブロック１１と■ブロック１８との間で円筒バ
ネ１６が三方向から押圧されて縮径するのでロッド５が
緊締され、この場合、ピエゾ素子１４の伸長による縮径
力は両ブロック１１゜１８により三方向からロッドの中
心へ向う摩擦クランプ力となってピストンロッド５を緊
締するのでピストンロッド５への求心力として作用し、
ハウジング１５が径方向に倣うことによりクランプ時の
ロッドのこしつがなく、クランプの再現性が向上し、且
つピストンロッド５の損傷が防止されるようになってい
る。ピエゾ素子は小形軽量で発生力も大きく、従ってク
ランプ装置４は非常にコンパクトでクランプ力の大きい
ものとすることができ５る。In this clamping device 4, when the piezo element 14 is in a non-energized state, the piston rod 5 can freely slide within the cylindrical spring 16, but when a voltage is applied to the piezo element 14 to energize it, the element expands by several to several tens of microns, and as a result, the cylindrical spring 16 is pressed from three directions between the pressure block 11 and the block 18 to contract in diameter, tightening the rod 5, and in this case, the piezo element 14 expands. The diameter reducing force caused by both blocks 11 and 18 becomes a frictional clamping force directed from three directions toward the center of the rod, tightening the piston rod 5, and thus acts as a centripetal force on the piston rod 5.
Since the housing 15 follows in the radial direction, the rod is not stiff during clamping, the reproducibility of clamping is improved, and damage to the piston rod 5 is prevented. The piezo element is small and lightweight and generates a large force, so the clamping device 4 can be very compact and have a large clamping force.

以上の構成をもつ第１図の実施例装置において、ステー
ジ１の粗動送りは、まずモータ９にサーボロックをかけ
、送りネジ７と回り止め機構付き送りナツト８とを相対
的に動かないようにロックしてから行なうのがひとつの
方法である。この場合、ピストンロッド５は固定位置に
止まったままであり、加圧流体く５〜７ｋｏｆ／ＣＩり
を可撓チューブ６ａ、　６ｂを介して給排することによ
りピストンシリンダアッセンブリ　３のシリンダ側、す
なわちステージ１の前後進を行ない、所要ストロークの
粗動送りを行なう。ステージ１が目標停止位置近辺の所
定粗位置精度内位置に到達したときにクランプ装置４の
ピエゾ素子１４に電圧を印加してステージ１の移動を止
め、これによりステージ１の相位８決めが行なわれる。In the apparatus of the embodiment shown in FIG. 1 having the above configuration, the coarse movement of the stage 1 is performed by first applying a servo lock to the motor 9 to prevent the feed screw 7 and the feed nut 8 with a detent mechanism from moving relative to each other. One method is to lock it to . In this case, the piston rod 5 remains at a fixed position, and the cylinder side of the piston cylinder assembly 3, that is, the stage 1 forward and backward movement and coarse movement feed of the required stroke. When the stage 1 reaches a position within a predetermined rough positional accuracy near the target stop position, a voltage is applied to the piezo element 14 of the clamp device 4 to stop the movement of the stage 1, thereby determining the phase of the stage 1. .

次いで微動送りを行なうが、この場合、クランプ装ａ４
はピエゾ素子１４に電圧を印加したまま動作状態に置か
れる。駆動モータ９の回転により送りネジ７が所要回転
数だけ回転させられるが、このとき送りナツト８はハウ
ジングブロック１３に固定されているので、送りネジ７
が１回転するたびにハウジングブロック１３がネジ７の
リード分だけ、送られ、この動きがロッド１２から継手
１１を介してピストンロッド５に伝達され、クランプ装
Ｈ４を介してステージ１が微動送りされることになる。Next, fine movement feed is performed, but in this case, the clamp device a4
is placed in an operating state with voltage applied to the piezo element 14. The rotation of the drive motor 9 causes the feed screw 7 to rotate by the required number of rotations, but at this time, since the feed nut 8 is fixed to the housing block 13, the feed screw 7
Each time the housing block 13 rotates once, the housing block 13 is fed by the lead of the screw 7, and this movement is transmitted from the rod 12 to the piston rod 5 via the joint 11, and the stage 1 is finely fed via the clamping device H4. That will happen.

第１図の例では、ピストンロッド５、二叉ロッド１２と
ハウジングブロック１３および送りナツト８を含む送り
ユニット、そして送りネジ７が全て同軸上に配置される
と共にこの同軸上にステージ１の重心が位置させられて
おり、さらにガイドシャフト２ａ、　２ｂを含めて前記
各同軸要素の中心軸が同一平面内に配置されている。す
なわち、力の作用線がステージ１の重心を貫ぬくように
なっているので、これを竪形配置にしたときにオーバー
ハング荷重によるガイドシャフトとそのベアリングに対
するこじりの発生を最小にできるようになっている。In the example shown in FIG. 1, the piston rod 5, the feed unit including the two-pronged rod 12, the housing block 13, and the feed nut 8, and the feed screw 7 are all arranged on the same axis, and the center of gravity of the stage 1 is placed on the same axis. Further, the central axes of each coaxial element including the guide shafts 2a and 2b are arranged in the same plane. In other words, since the line of action of the force passes through the center of gravity of stage 1, when this is arranged vertically, it is possible to minimize the occurrence of strain on the guide shaft and its bearings due to overhang loads. ing.

前記実施例装置を真空チャンバ内に配置する場合、例え
ばガイドシャフト２ａ、　２ｂのための潤滑油に蒸気圧
の低いものを使用し、ピストンシリンダアッセンブリ　
３のピストンロッドのすべり面を真空シールｍ造にして
、継手１１の部分から送りネジ側の機構をチャンバ外の
大気中に置き、ピストンロッド５からステージ１側の機
構をチャンバ内に配置することで低真空チャンバ向きの
ものとすることができる。この場合、粗動送リストロー
ク分の殆んどが真空チャンバ内に収納されるので、チャ
ンバ外装置が非常にコンパクトになる。When the apparatus of the embodiment is placed in a vacuum chamber, for example, a lubricating oil with low vapor pressure is used for the guide shafts 2a and 2b, and the piston cylinder assembly is
The sliding surface of the piston rod 3 is vacuum-sealed, the mechanism from the joint 11 to the feed screw side is placed in the atmosphere outside the chamber, and the mechanism from the piston rod 5 to the stage 1 side is placed inside the chamber. It can be suitable for low vacuum chambers. In this case, since most of the coarse feed restroke is accommodated within the vacuum chamber, the device outside the chamber becomes extremely compact.

またこれに加えてガイドシャフト２ａ、　２ｂ、クラン
プ装置４とピストンロッド５およびチューブ６ａ。In addition, the guide shafts 2a, 2b, the clamp device 4, the piston rod 5, and the tube 6a.

６ｂを、第３図に示すようにベローズ３１．３２および
Ｏリング３３．３４によって真空チャンバ３５内で真空
シールすることにより、潤滑油の蒸発を高度に防止する
ことが可能となり、従ってこれら真空シール要素の付加
によって高真空チャンバ向きのシステムとすることがで
きる。6b in the vacuum chamber 35 with bellows 31, 32 and O-rings 33, 34 as shown in FIG. 3, it is possible to prevent evaporation of lubricating oil to a high degree; By adding elements, the system can be made suitable for high vacuum chambers.

尚、前記実施例では粗動送り時に微動送り側をロックし
て作動させた例を述べたが、これは例えば粗動送り時に
微動用送りネジ７を連動させて送りナツト８を粗動送り
と同方向に送り、ステージ１とピストンロッド５との相
対的な動きを少なくした状態でクランプ装置４を動作さ
せるようにして、粗動送りの位置決め精度の向上とクラ
ンプ装置４の作動によるピストンロッド５の損傷防止と
を計っていもよい。Incidentally, in the above embodiment, an example was described in which the fine movement feed side was locked and operated during coarse movement feed, but this is also possible, for example, by interlocking the fine movement feed screw 7 during coarse movement feed and moving the feed nut 8 during coarse movement feed. The clamp device 4 is operated in a state where the stage 1 and the piston rod 5 are fed in the same direction, and the relative movement between the stage 1 and the piston rod 5 is reduced, thereby improving the positioning accuracy of the coarse feed and the piston rod 5 due to the operation of the clamp device 4. It may also be used to prevent damage to the

［発明の効果］ 以上に述べたように、本発明によれば、直線案内された
一軸方向に移動可能なステージにおいて、粗動送りに流
体駆動ピストンシリンダアッセンブリを、微動送りに送
りネジ装置を用いると共に、両者間の作動伝達にピスト
ンシリンダアッセンブリの作動をピエゾ素子の伸長によ
ってロック可能なクランプ装置を用いているので、粗位
置決めのクランプが小形軽量のクランプ装置で強力に行
なえると共に位置決め精度も向上でき、また横、竪のス
テージ姿勢にかかわらず精密な送りが可能であり、特に
竪型配置のステージの場合に直線案内にかかるオーバー
ハング荷重を軽減可能な構成がとり易いので、送り精度
の向上とベアリング寿命の延長を計ることができ、また
大気内と真空内との両方の用途に適合可能な構成をとり
得ると共に、特に真空チャンバ内に配置する粗・微動ス
テージに適用する場合に、粗動送りストローク分の殆ん
どをチャンバ内に収容でき、チャンバ外には微動送り部
分のみを配置すればよいので、チャンバ外装置がコンパ
クトになるものである。[Effects of the Invention] As described above, according to the present invention, in a linearly guided stage movable in a uniaxial direction, a fluid-driven piston cylinder assembly is used for coarse movement feed, and a feed screw device is used for fine movement feed. In addition, a clamp device that can lock the operation of the piston cylinder assembly by expanding the piezo element is used to transmit the operation between the two, so coarse positioning can be performed powerfully with a small and lightweight clamp device, and positioning accuracy is also improved. In addition, precise feeding is possible regardless of horizontal or vertical stage posture, and especially in the case of a vertically arranged stage, it is easy to create a configuration that can reduce the overhang load on the linear guide, improving feeding accuracy. In addition, it can be configured to be suitable for both atmospheric and vacuum applications, and is especially suitable for coarse and fine movement stages placed in vacuum chambers. Most of the dynamic feed stroke can be accommodated within the chamber, and only the fine movement feed portion needs to be placed outside the chamber, so the device outside the chamber can be made compact.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の実施例を一部切欠いて示す斜視図、第
２図はクランプ装置の具体例を示す正面図、第２Ａ図は
クランプ装置の要部の部分を示す斜視図、第３図は要部
の真空シールの例を示す部分断面図、第４図および第５
図はそれぞれ従来例を示す側面図である。 １：ステージ、２ａ、　２ｂ：ガイドシャフト、３：ピ
ストンシリンダアッセンブリ、４：クランプ装置、５：
ピストンロッド、７：送りネジ、８：送りナツト、９：
駆動モータ、１１：球面継手、１２：微動送りロッド、
１３：ハウジングブロック、１４：ピエゾ素子、１６：
先端三ツ割り円筒バネ、１７：加圧ブロック、１８：分
力発生用■ブロック。 第２図FIG. 1 is a partially cutaway perspective view of an embodiment of the present invention, FIG. 2 is a front view of a specific example of the clamp device, FIG. 2A is a perspective view of the main parts of the clamp device, and FIG. The figure is a partial sectional view showing an example of vacuum sealing of the main part, Figures 4 and 5.
Each figure is a side view showing a conventional example. 1: Stage, 2a, 2b: Guide shaft, 3: Piston cylinder assembly, 4: Clamp device, 5:
Piston rod, 7: Feed screw, 8: Feed nut, 9:
Drive motor, 11: Spherical joint, 12: Fine movement feed rod,
13: Housing block, 14: Piezo element, 16:
Three-split cylindrical spring at the tip, 17: Pressure block, 18: ■Block for generating component force. Figure 2

Claims (1)

【特許請求の範囲】 １、微細加工用などのステージを精密送りするものにお
いて、流体の給排によつてステージを直線移動させるピ
ストンシリンダアッセンブリによって構成された粗動送
り手段と、前記ピストンシリンダアッセンブリのピスト
ンとシリンダとの相対移動をピエゾ素子の発生力によつ
てロック可能なクランプ手段と、ロック状態のピストン
シリンダアッセンブリを介してステージを直線移動させ
る送りネジ装置によつて構成された微動送り手段とを備
えたことを特徴とするステージ送り装置。 ２、ピストンシリンダアッセンブリのシリンダがステー
ジに固定され、該アッセンブリのピストンが送りネジ装
置によつて直線駆動可能になされた特許請求の範囲第１
項に記載のステージ送り装置。 ３、ピストンシリンダアッセンブリのピストンがステー
ジに固定され、該アッセンブリのシリンダが送りネジ装
置によつて直線駆動可能になされた特許請求の範囲第１
項に記載のステージ送り装置。 ４、クランプ手段が、電圧の印加によつて伸長するピエ
ゾ素子と、該ピエゾ素子の伸長によつてピストンシリン
ダアッセンブリのピストンロッドをシリンダに対し軸方
向移動に関して緊締するクランプ機構とを含む特許請求
の範囲第１項記載のステージ送り装置。 ５、クランプ機構がシンリダの径方向に関してシリンダ
と相対移動可能であり、ピストンロッドに対する緊締力
を該ロッドの中心軸と交叉する作用線上にて少なくとも
三方向から作用させる分力発生手段を含む特許請求の範
囲第４項に記載のステージ送り装置。[Claims] 1. In an apparatus for precisely feeding a stage for fine machining, etc., there is provided a coarse movement feeding means constituted by a piston cylinder assembly that linearly moves the stage by supplying and discharging fluid, and the piston cylinder assembly. A fine movement feed means constituted by a clamp means capable of locking the relative movement between the piston and the cylinder by the force generated by a piezo element, and a feed screw device that moves the stage linearly via the piston cylinder assembly in the locked state. A stage feeding device characterized by comprising: 2. Claim 1, wherein the cylinder of the piston-cylinder assembly is fixed to a stage, and the piston of the assembly is linearly driveable by a feed screw device.
The stage feeding device described in Section 1. 3. Claim 1, wherein the piston of the piston cylinder assembly is fixed to a stage, and the cylinder of the assembly is linearly driveable by a feed screw device.
The stage feeding device described in Section 1. 4. The clamping means includes a piezo element that expands upon application of a voltage, and a clamp mechanism that tightens the piston rod of the piston cylinder assembly relative to the cylinder with respect to axial movement by the expansion of the piezo element. The stage feeding device according to scope 1. 5. A claim in which the clamping mechanism is movable relative to the cylinder in the radial direction of the cylinder, and includes force generating means for applying a clamping force to the piston rod from at least three directions on a line of action intersecting the central axis of the rod. The stage feeding device according to item 4.
JP13594785A 1985-06-24 1985-06-24 Stage feeding device Expired - Lifetime JPH069773B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP13594785A JPH069773B2 (en) 1985-06-24 1985-06-24 Stage feeding device
DE19863620969 DE3620969A1 (en) 1985-06-24 1986-06-23 PRECISION FEED MECHANISM
US07/271,365 US4854444A (en) 1985-06-24 1988-11-14 Precise feeding mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13594785A JPH069773B2 (en) 1985-06-24 1985-06-24 Stage feeding device

Publications (2)

Publication Number Publication Date
JPS61293744A true JPS61293744A (en) 1986-12-24
JPH069773B2 JPH069773B2 (en) 1994-02-09

Family

ID=15163560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13594785A Expired - Lifetime JPH069773B2 (en) 1985-06-24 1985-06-24 Stage feeding device

Country Status (1)

Country Link
JP (1) JPH069773B2 (en)

Also Published As

Publication number Publication date
JPH069773B2 (en) 1994-02-09

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