JPS61293742A - Stage feeding device - Google Patents

Stage feeding device

Info

Publication number
JPS61293742A
JPS61293742A JP13594585A JP13594585A JPS61293742A JP S61293742 A JPS61293742 A JP S61293742A JP 13594585 A JP13594585 A JP 13594585A JP 13594585 A JP13594585 A JP 13594585A JP S61293742 A JPS61293742 A JP S61293742A
Authority
JP
Japan
Prior art keywords
stage
piston
feed
piston rod
feed screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13594585A
Other languages
Japanese (ja)
Inventor
Noriyoshi Iwamoto
岩本　知徳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP13594585A priority Critical patent/JPS61293742A/en
Priority to DE19863620969 priority patent/DE3620969A1/en
Publication of JPS61293742A publication Critical patent/JPS61293742A/en
Priority to US07/271,365 priority patent/US4854444A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/03—Stationary work or tool supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/28—Means for securing sliding members in any desired position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/601—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair followed parallelly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0004—Braking devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B25J9/1015—Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means using additional, e.g. microadjustment of the end effector

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

PURPOSE:To provide precision feed regardless of stage attitude, i.e. vertical or horizontal, by using a fluid drive piston-cylinder assembly for coarse feeding and a feed screw device for fine feeding. CONSTITUTION:A piston-cylinder assembly 3 is installed within a stage 1, wherein the cylinder side of the assembly 3 is fexed with respect to the stage 1. The assembly 3 constitutes a coarse feeding means for the stage 1 and moves it relative to the piston rod 5 with a fluid supplied and exhausted through flexible tubes 6a, 6b. A clamping device 4 is installed on the stage 1 in such a way as surrounding a piston rod 5, and the stage 1 can be locked to the piston rod 5. A fork-shaped fine feeding rod 12 is coupled with the piston rod 5 at its tip through a joint with spherical surface 11, wherein the tip of each divergence of said rod 12 is fixed to a housing lock 13 having a fine feeding nut 8.

Description

【発明の詳細な説明】 ［発明の利用分野］ 本発明はステージ送り装置に関し、特にＬＳＩなどの半
導体製造装置における微細加工或いは検査用等の比較的
ストロークの長い精密位置決めに好適なステージ送り装
置に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a stage feeding device, and more particularly to a stage feeding device suitable for precision positioning with a relatively long stroke for microfabrication or inspection in semiconductor manufacturing equipment such as LSI. .

［従来技術］ 光、電子線またはＸ線などを利用した露光装置をはじめ
として、ＬＳＩなどの微細パターンの加工或いは検査を
行なう各種半導体製造装置では、被加工物であるウェハ
あるいは露光用のマスクまたはレクチルをステージに保
持させて直線送りにより精密に位置決めする。このよう
なステージ送り装置には、比較的長いストロークが要求
されるため、目標停止位置近辺まで高速送りをする位置
決め精度の低い粗動送りと、目標停止位置近くで粗位置
決めされたステージを目標停止位置に高精度で位置決め
する微動送りとの両機能を行なう送り機構が設けられる
のが一般的であり、従来は第４図に示すような２軸送り
ネジ方式のもの、或いは第５図に示すような１軸差動送
りネジ方式のものが主流であった。[Prior Art] In various semiconductor manufacturing equipment that processes or inspects fine patterns such as LSI, including exposure equipment that uses light, electron beams, or X-rays, a wafer as a workpiece or a mask or The reticle is held on a stage and positioned precisely by linear feed. This kind of stage feeding device requires a relatively long stroke, so there is a coarse feed with low positioning accuracy that performs high-speed feed to near the target stop position, and a coarse feed that moves the stage roughly positioned near the target stop position to a target stop. It is common to have a feed mechanism that performs both functions of fine movement feed for positioning with high precision, and conventionally a two-axis feed screw type as shown in Figure 4 or a two-axis feed screw type as shown in Figure 5 is used. The mainstream was a single-axis differential feed screw type.

第４図に示す２軸送りネジ方式では、ベース４０１上に
配置されたガイドレール４０２にガイドベアリング４０
３によってテーブル４０４を直線移動可能に支持し、ベ
ース４０１に軸受４０５によって支持された粗動送りネ
ジ４０６にテーブル４０４の送りナツト４０１を螺合さ
せ、送りネジ４０６を粗動送り用駆動モータ　４０８で
回転駆動するようにし、さらに前記テーブル４０４上に
別のガイドレール４０９を配置して、このガイドレール
４０９にガイドベアリング４１０によってステージ４１
１を直線移動可能に支持し、テーブル４０４に軸受４１
２によって支持された微動送りネジ４１３にステージ４
１１の送りナツト４１４を螺合させ、送りネジ４１３を
微動送り用駆動モータ４１５で回転駆動するようにして
、両送りネジ４０６と４１３による２重送りネジ構造で
ステージ４１１の粗・微動を行なわせるようにしである
。In the two-axis feed screw system shown in FIG. 4, a guide bearing 40 is attached to a guide rail 402 arranged on a base 401
3 supports the table 404 so as to be linearly movable, and screws the feed nut 401 of the table 404 onto a coarse feed screw 406 supported by a bearing 405 on the base 401. Further, another guide rail 409 is arranged on the table 404, and the stage 41 is mounted on this guide rail 409 by a guide bearing 410.
1 is supported linearly movably, and a bearing 41 is mounted on the table 404.
The stage 4 is mounted on the fine movement feed screw 413 supported by the stage 4.
No. 11 feed nuts 414 are screwed together, and the feed screw 413 is rotationally driven by the fine movement feed drive motor 415, so that coarse and fine movement of the stage 411 is performed by the double feed screw structure of both feed screws 406 and 413. That's how it is.

また第５図に示す１軸差動送りネジ方式では、ベース５
０１上に配置されたガイドレール５０２にガイドベアリ
ング５０３によってステージ５０４を直線移動可能に支
持し、ベース５０１に図示しない軸受によって支持きれ
た送り軸５０５に微小なリード差をもつ送りネジ部５０
６と５０７とを設け、一方の送りネジ部５０６にステー
ジ５０４の送りナツト５０８を螺合させると共に、他方
の送りネジ部５０７には、切換クラッチ装＠５０９によ
ってベース５０１または送り軸５０５のいずれかに対し
て選択的に固定可能な差動ナツト５１０を螺合させ、送
り軸５０５を駆動モータ５１１によって回転させるよう
になっており、切換クラッチ装Ｍ５０９により差動ナツ
ト５１０を送り軸５０５に固定するとクラッチ装置内で
ナツト５１０がベースに対して自由回転可能となるので
モータ　５１１の１回転につき送りネジ部５０６のネジ
のリード分だけステージ５０４の早送りができ、また切
換クラッチ５０９により差動ナツト５１０をベース５０
１に対して固定すると、モータの１回転につき送り軸５
０５自体が送りネジ部５０１のネジのリード分だけ逆方
向に送られるので、ステージ５０４をモータ５１１の１
回転につき両送りネジ部５０６と５０１のリード差に相
当する分だけ微小送りすることができる。In addition, in the single-axis differential feed screw system shown in Fig. 5, the base 5
A stage 504 is linearly movably supported by a guide bearing 503 on a guide rail 502 disposed on the base 501, and a feed screw portion 50 having a minute lead difference is attached to a feed shaft 505 fully supported by a bearing (not shown) on a base 501.
6 and 507, one feed screw part 506 is screwed with the feed nut 508 of the stage 504, and the other feed screw part 507 is connected to either the base 501 or the feed shaft 505 by a switching clutch device @509. A differential nut 510, which can be selectively fixed to Since the nut 510 can freely rotate with respect to the base within the clutch device, the stage 504 can be rapidly advanced by the lead of the screw of the feed screw portion 506 for each rotation of the motor 511, and the differential nut 510 can be rotated by the switching clutch 509. base 50
If fixed to 1, the feed axis will be 5 per rotation of the motor.
Since the stage 504 itself is sent in the opposite direction by the lead of the screw of the feed screw part 501, the stage 504 is
It is possible to minutely feed by an amount corresponding to the lead difference between the two feed screw portions 506 and 501 per rotation.

しかしながら、第４図および第５図に示す従来の装置で
は、送りネジの中心軸上にステージの重心がなく、換言
すれば力の作用線上にステージの用心がないので、ベー
スを竪形に配置して用いる場合にはガイドベアリングに
オーバーハング荷重がかかり、ガイドレールとガイドベ
アリングとの間にこじれが生じてベアリング寿命および
案内精度を損う欠点があるほか、ステージを真空雰囲気
中に配置する必要がある場合は、送りネジやガイドベア
リングの潤滑油の蒸発による焼付きや、モータを耐真空
用に構成しなければならないなどの問題点があり、この
ため特にベローズ等で真空シールしにくい複雑な構造の
送りネジ機構どモータを真空チャンバ外に配置して、チ
ャンバ内でガイドレールに支持案内されたステージに伝
達機構を介して送りネジの動きを伝えるようにするにし
ても、粗動および微動用の両送りネジ機構をチャンバ外
に配置しなければならないので、ステージの所要ストロ
ーク全長方以上の設置スペースがチャンバ外に必要とな
る。However, in the conventional apparatus shown in Figs. 4 and 5, the center of gravity of the stage is not on the central axis of the feed screw, in other words, the stage's center of gravity is not on the line of action of the force, so the base is arranged vertically. When used as a stage, an overhang load is applied to the guide bearing, which causes strain between the guide rail and the guide bearing, impairing the life of the bearing and guiding accuracy.In addition, the stage must be placed in a vacuum atmosphere. If the Structured feed screw mechanism Even if the motor is placed outside the vacuum chamber and the movement of the feed screw is transmitted via a transmission mechanism to the stage supported and guided by guide rails inside the chamber, coarse and fine movement can be achieved. Since both feed screw mechanisms for the stage must be placed outside the chamber, an installation space larger than the entire length of the required stroke of the stage is required outside the chamber.

［発明の目的］ 本発明の課題は、ステージの重心を力の作用線上に位置
させる構成をとり易くすると共に、ステージ内に粗動送
りストローク部を収納配置することができ、真空雰囲気
内で焼付きを起しやすい特に送りネジ機構を真空チャン
バ外に配置する場合に従来に比べてチャンバ外の突出部
分をコンパクトにすることのできる構造の簡単な精密位
置決め用のステージ送り装置を提供することにある。[Objective of the Invention] An object of the present invention is to facilitate the configuration in which the center of gravity of the stage is located on the line of action of force, to accommodate the coarse feed stroke section within the stage, and to perform baking in a vacuum atmosphere. To provide a stage feeding device for precision positioning with a simple structure that can make the protruding part outside the chamber more compact than the conventional one, especially when a feed screw mechanism that is prone to sticking is placed outside the vacuum chamber. be.

［発明の構成］ 本発明のステージ送り装置は粗動送り手段と微動送り手
段、およびクランプ手段とを媚えており、粗動送り手段
は、流体の給排によってステージを高速で比較的大きな
ストロークにわたり直線移動さゼるピストンシリンダア
ッセンブリによって構成され、クランプ手段は、このピ
ストンシリンダアッセンブリのピストンとシリンダとの
相対移動をロック可能な例えばピストンロッド緊締用の
電磁クランプ装置によって構成され、さらに微動送り手
段は、前記クランプ手段によりロックされた状態のピス
トンシリンダアッセンブリを介してステージを比較的低
速で所要ストロークにわたり直線移動させる送りネジ装
置によって構成されている。[Configuration of the Invention] The stage feeding device of the present invention includes coarse movement feeding means, fine movement feeding means, and clamping means, and the coarse movement feeding means moves the stage over a relatively large stroke at high speed by supplying and discharging fluid. The clamp means is constituted by an electromagnetic clamp device for tightening the piston rod, for example, which can lock the relative movement between the piston and cylinder of the piston cylinder assembly, and the fine movement feed means is constituted by a piston cylinder assembly that moves linearly. , a feed screw device that linearly moves the stage over a required stroke at a relatively low speed via the piston cylinder assembly locked by the clamping means.

ステージと送りネジ装置との間に介在するピストンシリ
ンダアッセンブリは、ひとつの態様ではそのピストンが
送りネジ装置に、そしてシリンダがステージに固定され
、別の態様ではその逆の構成となっている。A piston-cylinder assembly interposed between the stage and the lead screw device has the piston fixed to the lead screw device and the cylinder fixed to the stage in one embodiment, and vice versa in another embodiment.

クランプ手段は、粗動送り時にピストンとシリンダの相
対移動すなわちピストンシリンダアッセンブリの本来の
流体による作動を許容し、微動送り時にはピストンと、
シリンダとを相対的に固定状態にして、送りネジ装置に
よるステージ移動のための動きを単に伝達するだけとす
る。The clamping means allows relative movement between the piston and cylinder during coarse movement feeding, that is, operation by the original fluid of the piston cylinder assembly, and allows the piston and cylinder during fine movement feeding.
The cylinder is kept relatively fixed, and the movement for moving the stage by the feed screw device is simply transmitted.

［発明の作用］ 本発明のステージ送り装置では、粗動送り手段がピスト
ンシリンダアッセンブリによって構成されているので、
これをステージの重心を貫ぬく中心線位置にてステージ
内に配置しても構造の複雑化は問題にならず、また真空
チャンバ内に配置する場合も、ピストンロッドとクラン
プ手段およびガイドレールは単に棒状などの単純なもの
であるのでベローズによって真空シールできるから、殆
んどのストローク分を担う粗動送り手段をチャンバ内に
配置でき、チャンバ外には微動送り用の送りネジ装置だ
けを配置すればよいことになるのでそれだけチャンバ外
の装置配置がコンパクトになる。ざらに粗動送り用の７
クチユエータがピストンシリンダアッセンブリであるの
で送りネジ方式に比べて構造がシンプルとなり、最終停
止目標位置への位置決めは微動送り手段の送りネジ装置
で行なえるので、位置決め精度は高精度を望むことがで
きる。[Operation of the invention] In the stage feeding device of the invention, since the coarse movement feeding means is constituted by a piston cylinder assembly,
Even if this is placed inside the stage at a center line that penetrates the center of gravity of the stage, the structure will not become complicated, and even if it is placed inside a vacuum chamber, the piston rod, clamping means, and guide rail are simply Since it is a simple rod-shaped object, it can be vacuum-sealed with a bellows, so the coarse movement feed means that handles most of the stroke can be placed inside the chamber, and only the feed screw device for fine movement can be placed outside the chamber. As a result, the equipment arrangement outside the chamber can be made more compact. 7 for rough coarse feed
Since the actuator is a piston cylinder assembly, the structure is simpler than that of a feed screw system, and positioning to the final stop target position can be performed by the feed screw device of the fine movement feed means, so high positioning accuracy can be expected.

本発明の一層の理解のために好適な実施例を示せば以下
の通りである。Preferred embodiments for a better understanding of the present invention are as follows.

［実施例］ 第１図において、ステージ１はｙ軸方向へ直線移動され
るようにリニアガイドシャフト２ａ及び２ｂにより案内
支持されている。ステージ１内にはピストンシリンダア
ッセンブリ　３が配置され、該アッセンブリ　３のシリ
ンダ側がステージ１と固定関係にある。アッセンブリ　
３はステージ１の粗動送り手段を構成し、可撓デユープ
６ａ、　６ｂを介し゛て給排される流体によりそのピス
トンロッド５に対してステージ１を相対移動させる。ス
テージ１にはピストンロッド５を囲んでクランプ装置４
が取付けられており、アッセンブリ　３による粗動送り
の　゛粗位置決め停止以後のロック、すなわちステージ
１をピストンロッド５にロックすることができるように
なっている。ピストンロッド５の先端には、　　　　・
球面継手１１を介して二叉状の微動送りロッド１２が連
結されており、このロッド１２の二叉の先端は微動送す
ナット８を有するハウジングブロック１３に固定されて
いる。ナツト８は、軸受１０に支持され　　　　。[Example] In FIG. 1, a stage 1 is guided and supported by linear guide shafts 2a and 2b so as to be linearly moved in the y-axis direction. A piston cylinder assembly 3 is disposed within the stage 1, with the cylinder side of the assembly 3 being in fixed relationship with the stage 1. assembly
3 constitutes coarse movement feeding means for the stage 1, and moves the stage 1 relative to the piston rod 5 by means of fluid supplied and discharged via the flexible dupes 6a and 6b. The stage 1 includes a clamping device 4 surrounding the piston rod 5.
is attached so that the assembly 3 can lock the coarse movement after the coarse positioning and stop, that is, the stage 1 can be locked to the piston rod 5. At the tip of the piston rod 5,
A two-pronged fine-movement feed rod 12 is connected via a spherical joint 11, and the two-pronged tips of this rod 12 are fixed to a housing block 13 having a nut 8 for fine-movement. The nut 8 is supported by a bearing 10.

た微動送りネジ７に螺合しており、駆動モータ９による
ネジ１の回転によってハウジングブロック１３、そして
二叉［１ツド１２および継手１１を介してピストンロッ
ド５を微動させるようになされている。The piston rod 5 is screwed into a fine movement feed screw 7, and the rotation of the screw 1 by a drive motor 9 causes the piston rod 5 to be finely moved via the housing block 13, the two prongs 12, and the joint 11.

クランプ装置４の具体例が第２図に示されており、ピス
トンロッド５を取り巻いて嵌められた割溝付均圧ブツシ
ュ１６と、電磁ソレノイド装置１４と、この電磁ソレノ
イド装置１４の励磁によってプツシ１１６を縮径するよ
うに動作し、非励磁状態では弾性によりブツシュ１６の
縮径力を解放する弾性チャック１５とから成る電磁クラ
ンプ装置を構成している。このクランプ装置４において
、ソレノイド装置１４が非励磁状態テは、ピストンロッ
ド５はブツシュ１６内を自由に摺動可能であるが、ソレ
ノイド装置１４を励磁すると弾性チャック１５がブツシ
ュ１６を縮径するのでロッド５が緊締され、この場合、
チャック１５による縮径力は均圧ブツシュ１６により全
周はぼ均一な摩擦クランプ力となってピストンロッド５
を緊締するのでピストンロッド５の損傷が防止されるよ
うになっている。A specific example of the clamping device 4 is shown in FIG. 2, and includes a pressure equalizing bush 16 with a split groove fitted around the piston rod 5, an electromagnetic solenoid device 14, and a pusher 116 by energizing the electromagnetic solenoid device 14. The elastic chuck 15 operates to reduce the diameter of the bush 16 and releases the force of reducing the diameter of the bush 16 due to its elasticity in a non-excited state. In this clamping device 4, when the solenoid device 14 is in a non-energized state, the piston rod 5 can freely slide inside the bushing 16, but when the solenoid device 14 is energized, the elastic chuck 15 reduces the diameter of the bushing 16. Rod 5 is tightened, in this case
The diameter reducing force caused by the chuck 15 becomes an almost uniform frictional clamping force around the entire circumference by the pressure equalizing bush 16, and the piston rod 5
Since the piston rod 5 is tightened, damage to the piston rod 5 is prevented.

以上の構成をもつ第１図の実施例装置において、ステー
ジ１の粗動送りは、まずモータ９にサーボロックをかけ
、送りネジ１と回り止め機構付き送りナツト８とを相対
的に動かないようにロックしてから行なうのがひとつの
方法である。この場合、ピストンロッド５は固定位置に
止まったままであり、加圧流体く５〜７ｋｇ「／ｃＩｉ
）を可撓チューブ６ａ、　６ｂを介して給排することに
よりピストンシリンダアッセンブリ　３のシリンダ側、
すなわちステージ１の前後進を行ない、所要ストローク
の粗動送りを行なう。ステージ１が目標停止位置近辺の
所定粗位置精度的位置に到達したときにクランプ装置４
のソレノイド装２１４を励磁してステージ１の移動を止
め、これによりステージ１の粗位置決めが行なわれる。In the apparatus of the embodiment shown in FIG. 1 having the above configuration, coarse movement of the stage 1 is performed by first applying a servo lock to the motor 9 to prevent the feed screw 1 and the feed nut 8 with a rotation prevention mechanism from moving relative to each other. One method is to lock it to . In this case, the piston rod 5 remains in a fixed position, and the pressurized fluid 5-7 kg/cIi
) through the flexible tubes 6a and 6b, the cylinder side of the piston cylinder assembly 3,
That is, the stage 1 is moved forward and backward, and the coarse movement feed of the required stroke is performed. When the stage 1 reaches a predetermined rough position near the target stop position, the clamping device 4
The solenoid device 214 is energized to stop the movement of the stage 1, thereby performing rough positioning of the stage 1.

次いで微動送りを行なうが、この場合、クランプ装置４
はソレノイド装置１４を励磁したまま動作状態に置かれ
る。駆動モータ　９の回転により送りネジ７が所要回転
数だけ回転させられるが、このとき送りナツト８はハウ
ジングブロック１３に固定されているので、送りネジ７
が１回転するたびにハウジングブロック１３がネジ７の
リード分だけ送られ、この動きがロッド１２から継手１
１を介してピストンロッド５に伝達され、クランプ装置
４を介してステージ１が微動送りされることになる。Next, fine movement feed is performed, but in this case, the clamp device 4
is placed into operation with the solenoid device 14 energized. The rotation of the drive motor 9 causes the feed screw 7 to rotate by the required number of rotations, but at this time, since the feed nut 8 is fixed to the housing block 13, the feed screw 7
Each time the housing block 13 rotates once, the housing block 13 is advanced by the lead of the screw 7, and this movement moves from the rod 12 to the joint 1.
1 to the piston rod 5, and the stage 1 is finely moved via the clamp device 4.

第１図の例では、ピストンロッド５、二叉ロッド１２と
ハウジングブロック１３および送りナツト８を含む送り
ユニット、そして送りネジ７が全て同軸上に配置される
と共にこの同軸上にステージ１の重心が位置させられて
おり、さらにガイドシャフト２ａ、　２ｂを含めて前記
各同軸要素の中心軸が同一平面内に配置されている。す
なわち、力の作用線がステージ１の重心を貫ぬくように
なっているので、これを竪形配置にしたときにオーバー
ハング荷重によるガイドシャフトとそのベアリングに対
するこじりの発生を最小にできるようになっている。In the example shown in FIG. 1, the piston rod 5, the feed unit including the two-pronged rod 12, the housing block 13, and the feed nut 8, and the feed screw 7 are all arranged on the same axis, and the center of gravity of the stage 1 is placed on the same axis. Further, the central axes of each coaxial element including the guide shafts 2a and 2b are arranged in the same plane. In other words, since the line of action of the force passes through the center of gravity of stage 1, when this is arranged vertically, it is possible to minimize the occurrence of strain on the guide shaft and its bearings due to overhang loads. ing.

前記実施例装置を真空チャンバ内に配置する場合、例え
ばガイドシャフト２ａ、　２ｂのための潤滑油に蒸気圧
の低いものを使用し、ピストンシリンダアッセンブリ　
３のピストンロッドのすべり而を真空シール構造にして
、継手１１の部分から送りネジ側の機構をチャンバ外の
大気中に置き、ピストンロッド５からステージ１側の機
構をチャンバ内に配置することで低真空チャンバ内きの
ものとすることができる。この場合、粗動送りストロー
ク分の殆んどが真空チャンバ内に収納されるので、チャ
ンバ外装置が非常にコンパクトになる。When the apparatus of the embodiment is placed in a vacuum chamber, for example, a lubricating oil with low vapor pressure is used for the guide shafts 2a and 2b, and the piston cylinder assembly is
By making the slide of the piston rod 3 into a vacuum seal structure, placing the mechanism from the joint 11 to the feed screw side in the atmosphere outside the chamber, and placing the mechanism from the piston rod 5 to the stage 1 side inside the chamber. It can be in a low vacuum chamber. In this case, since most of the coarse feed stroke is accommodated within the vacuum chamber, the device outside the chamber becomes extremely compact.

またこれに加えてガイドシャフト２ａ、　２ｂ、クラン
プ装置４とピストンロッド５およびチューブ６ａ。In addition, the guide shafts 2a, 2b, the clamp device 4, the piston rod 5, and the tube 6a.

６ｂを、第３図に示すようにベローズ３１．３２および
Ｏリング３３．３４によって真空チャンバ３５内で真空
シールすることにより、潤滑油の蒸発を高度に防止する
ことが可能となり、従ってこれら真空シール要素の付加
によって高真空チャンバ向きのシステムとすることがで
きる。6b in the vacuum chamber 35 with bellows 31, 32 and O-rings 33, 34 as shown in FIG. 3, it is possible to prevent evaporation of lubricating oil to a high degree; By adding elements, the system can be made suitable for high vacuum chambers.

尚、前記実施例では粗動送り時に微動送り側をロックし
て作動させた例を述べたが、これは例えば粗動送り時に
微動用送りネジ７を連動させて送りナツト８を粗動送り
と同方向に送り、ステージ１とピストンロッド５との相
対的な動きを少なくした状態でクランプ装置４を動作さ
せるようにして、粗動送りの位置決め精度の向上とクラ
ンプ装置４の作動によるピストンロッド５の損傷防止と
を計っていもよい。Incidentally, in the above embodiment, an example was described in which the fine movement feed side was locked and operated during coarse movement feed, but this is also possible, for example, by interlocking the fine movement feed screw 7 during coarse movement feed and moving the feed nut 8 during coarse movement feed. The clamp device 4 is operated in a state where the stage 1 and the piston rod 5 are fed in the same direction, and the relative movement between the stage 1 and the piston rod 5 is reduced, thereby improving the positioning accuracy of the coarse feed and the piston rod 5 due to the operation of the clamp device 4. It may also be used to prevent damage to the equipment.

［発明の効果］ 以上に述べたように、本発明によれば、直線案内された
一軸方向に移動可能なステージにおいて、粗動送りに流
体駆動ピストンシリンダアッセンブリを、微動送りに送
りネジ装置を用いると共に、両者間の作動伝達にピスト
ンシリンダアッセンブリの作動をロック可能なクランプ
装置を用いているので、横、竪のステージ姿勢にかかわ
らず緒密な送りが可能であり、特に竪型配置のステージ
の場合に直線案内にかかるオーバーハング荷重を軽減可
能な構成がとり易いので、送り精度の向上とベアリング
寿命の延長を計ることかでき、また大気内と真空内との
両方の用途に適合可能な構成をとり得ると共に、特に真
空チャンバ内に配置する粗・微動ステージに適用する場
合に、粗動送りストローク分の殆んどをチャンバ内に収
容でき、チャンバ外には微動送り部分のみを配置すれば
よいので、チャンバ外装置がコンパクトになるものであ
る。[Effects of the Invention] As described above, according to the present invention, in a linearly guided stage movable in a uniaxial direction, a fluid-driven piston cylinder assembly is used for coarse movement feed, and a feed screw device is used for fine movement feed. In addition, since a clamp device that can lock the operation of the piston cylinder assembly is used to transmit the operation between the two, precise feeding is possible regardless of the horizontal or vertical stage position, especially when the stage is arranged vertically. In some cases, it is easy to adopt a configuration that can reduce the overhang load applied to the linear guide, so it is possible to improve feed accuracy and extend the bearing life, and the configuration is suitable for both atmospheric and vacuum applications. In addition, especially when applied to a coarse/fine movement stage placed inside a vacuum chamber, most of the coarse movement feed stroke can be accommodated within the chamber, and only the fine movement part can be placed outside the chamber. As a result, the device outside the chamber can be made compact.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の実施例を一部切欠いて示す斜視図、第
２図はクランパ装置の具体例を示す正面図、第３図は要
部の真空シールの例を示す部分断面図、第４図および第
５図はそれぞれ従来例を示す側面図である。 １：ステージ、２ａ、　２ｂニガイドシヤフト、３：ピ
ストンシリンダアッセンブリ、４：クランプ装置、５：
ピストンロッド、７：送りネジ、８：送りナツト、９：
駆動モータ、１１：球面継手、１２：微動送りロンド、
１３：ハウジングブロック、１４：電磁ソレノイド装置
、１５：弾性チャック、１６：均圧ブッシコ。FIG. 1 is a partially cutaway perspective view of an embodiment of the present invention, FIG. 2 is a front view of a specific example of a clamper device, FIG. 3 is a partial cross-sectional view of an example of vacuum sealing of essential parts, 4 and 5 are side views showing conventional examples, respectively. 1: Stage, 2a, 2b guide shaft, 3: Piston cylinder assembly, 4: Clamp device, 5:
Piston rod, 7: Feed screw, 8: Feed nut, 9:
Drive motor, 11: Spherical joint, 12: Fine feed rond,
13: housing block, 14: electromagnetic solenoid device, 15: elastic chuck, 16: pressure equalizing bushico.

Claims (1)

【特許請求の範囲】 １、微細加工用などのステージを精密送りするものにお
いて、流体の給排によつてステージを直線移動させるピ
ストンシリンダアッセンブリによつて構成された粗動送
り手段と、前記ピストンシリンダアッセンブリのピスト
ンとシリンダとの相対移動をロック可能なクランプ手段
と、ロック状態のピストンシリンダアッセンブリを介し
てステージを直線移動させる送りネジ装置によつて構成
された微動送り手段とを備えたことを特徴とするステー
ジ送り装置。 ２、ピストンシリンダアッセンブリのシリンダがステー
ジに固定され、該アッセンブリのピストンが送りネジ装
置によつて直線駆動可能になされた特許請求の範囲第１
項に記載のステージ送り装置。 ３、ピストンシリンダアッセンブリのピストンがステー
ジに固定され、該アッセンブリのシリンダが送りネジ装
置によつて直線駆動可能になされた特許請求の範囲第１
項に記載のステージ送り装置。 ４、クランプ手段が、励磁されたときにピストンシリン
ダアッセンブリのピストンロッドをシリンダに対して緊
締する電磁クランプ装置を含む特許請求の範囲第１項記
載のステージ送り装置。[Claims] 1. In an apparatus for precisely feeding a stage for fine machining, etc., a coarse movement feeding means constituted by a piston cylinder assembly that linearly moves the stage by supplying and discharging fluid, and the piston A clamp means capable of locking the relative movement between the piston and cylinder of the cylinder assembly, and a fine movement feed means constituted by a feed screw device that linearly moves the stage via the piston cylinder assembly in the locked state. Characteristic stage feed device. 2. Claim 1, wherein the cylinder of the piston-cylinder assembly is fixed to a stage, and the piston of the assembly is linearly driveable by a feed screw device.
The stage feeding device described in Section 1. 3. Claim 1, wherein the piston of the piston cylinder assembly is fixed to a stage, and the cylinder of the assembly is linearly driveable by a feed screw device.
The stage feeding device described in Section 1. 4. The stage feeding device according to claim 1, wherein the clamping means includes an electromagnetic clamping device that tightens the piston rod of the piston cylinder assembly against the cylinder when excited.
JP13594585A 1985-06-24 1985-06-24 Stage feeding device Pending JPS61293742A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP13594585A JPS61293742A (en) 1985-06-24 1985-06-24 Stage feeding device
DE19863620969 DE3620969A1 (en) 1985-06-24 1986-06-23 PRECISION FEED MECHANISM
US07/271,365 US4854444A (en) 1985-06-24 1988-11-14 Precise feeding mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13594585A JPS61293742A (en) 1985-06-24 1985-06-24 Stage feeding device

Publications (1)

Publication Number Publication Date
JPS61293742A true JPS61293742A (en) 1986-12-24

Family

ID=15163515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13594585A Pending JPS61293742A (en) 1985-06-24 1985-06-24 Stage feeding device

Country Status (1)

Country Link
JP (1) JPS61293742A (en)

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