JPS61264108A - Production of pulverous powder by laser beam - Google Patents

Production of pulverous powder by laser beam

Info

Publication number
JPS61264108A
JPS61264108A JP60105329A JP10532985A JPS61264108A JP S61264108 A JPS61264108 A JP S61264108A JP 60105329 A JP60105329 A JP 60105329A JP 10532985 A JP10532985 A JP 10532985A JP S61264108 A JPS61264108 A JP S61264108A
Authority
JP
Japan
Prior art keywords
powder
wire
fine powder
gas
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60105329A
Other languages
Japanese (ja)
Other versions
JPH0362763B2 (en
Inventor
Munehide Katsumura
宗英 勝村
Akihiro Uchiumi
内海 明博
Kazuhiko Sugasaka
菅坡 和彦
Jun Matsuda
純 松田
Shigeyuki Nagata
永田 重幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60105329A priority Critical patent/JPS61264108A/en
Publication of JPS61264108A publication Critical patent/JPS61264108A/en
Publication of JPH0362763B2 publication Critical patent/JPH0362763B2/ja
Granted legal-status Critical Current

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Landscapes

  • Laser Beam Processing (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)

Abstract

PURPOSE:To produce pulverous powder which has various forms of structure and is excellent in practicability by a simple method by irradiating an inorg. wire with the condensed laser beam to melt the wire and blowing various gases to the molten part of the wire thereby forming the pulverous particles. CONSTITUTION:The laser beam 1 is converged by a condenser lens 2 and the metallic wire which is stock for forming the pulverous powder is fed from a wire feed nozzle 3 to the converged part thereto so that the wire is heated and melted. The high pressure gas is blown from the tip of a gas nozzle 4 to the molten metal to pulverize the molten part of the metallic wire, by which the pulverous powder is obtd. The kind of the gas to be blown to the wire is properly selected according to the kind of the pulverous powder to be produced.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、各種ガスを用いてレーザ光線で溶融させた
ワイヤから、酸化物粒子、窒化物粒子、金属粒子及び複
合wi織粒子を製造するレーザによる微粉末の製造法に
関する。本発明の製造法による各種微粉末は溶射材料と
して使われるのみならず、粉体粉末関連分野の素材原料
として用いることができる。
[Detailed Description of the Invention] [Industrial Application Field] This invention produces oxide particles, nitride particles, metal particles, and composite Wi-woven particles from wires melted with laser beams using various gases. This invention relates to a method for producing fine powder using a laser. Various fine powders produced by the production method of the present invention can be used not only as thermal spray materials but also as raw materials in powder-related fields.

[従来の技術] 一般に粉体粉末冶金を中心とする各種工業分野において
使用される粉末の大きさは数ミクロンから数十ミクロン
のものが主流となっているが、近年高機能化、高性能化
等へのニーズに応えるものとして超微粉末が注目され始
めた。超微粉末とは通常サブミクロン以下の大きさの粉
末のことを指している。粉末の粒径が小さくなるに従っ
て粉末を構成している全原子数に対する表面原子数の比
が大きくなって、表面エネルギが無視できないほど大き
くなる。このため元の素材にはない新しい特性が得られ
るので、新素材開発のうちの一つのテーマとして研究応
用開発が盛んに行われている。
[Prior art] Generally, the size of powder used in various industrial fields centered on powder metallurgy is from several microns to several tens of microns, but in recent years, the size of powder has become more sophisticated and high-performance. Ultrafine powders have begun to attract attention as a solution to meet the needs of Ultrafine powder usually refers to powder with a size of submicron or smaller. As the particle size of the powder becomes smaller, the ratio of the number of surface atoms to the total number of atoms constituting the powder increases, and the surface energy becomes so large that it cannot be ignored. Because of this, new properties not found in the original material can be obtained, so research and application development is actively being carried out as one of the themes in the development of new materials.

従来、各種の微粉末製造法が開発されているが、超微粉
末を含めた微粉末の製造は粗粒子の粉砕或いはイオン、
原子からの核形成と成長によるという原理によってなさ
れており、反応に要する時間が長い、また製造プロセス
が複雑でその能率が低いという欠点があった。したがっ
て、簡便かつ効率的な微粉末の製造法の開発は今後の重
要な研究開発課題である。
Conventionally, various methods for producing fine powders have been developed, but production of fine powders including ultrafine powders involves pulverization of coarse particles, ions,
This process is based on the principle of nucleation and growth from atoms, and has the drawbacks of a long reaction time, and a complex manufacturing process with low efficiency. Therefore, the development of a simple and efficient method for producing fine powder is an important future research and development topic.

[発明の目的コ 本発明は、かかる実情に鑑みなされたものであり、その
目的とするところは、種々の組織形態をもつ実用的に優
れた微粉末の簡便な製造法を提供することにある。
[Purpose of the Invention] The present invention was made in view of the above circumstances, and its purpose is to provide a simple method for producing practically excellent fine powders having various structural forms. .

[発明の構成コ この目的を達成するために本発明者等は種々の組織形態
をもつ微粒子を得るのに適した製造法について鋭意研究
を重ねた結果、製造条件のうち最も重要である素材の高
温化が、高エネルギ密度ビームであるレーザビームを用
いることにより可能であり、かつ雰囲気を調整すること
によって、レーザで高温に加熱され活性化された金属の
化学反応を促進することができ、その目的を達しうろこ
とを見出し、この知見に基づいて本発明を完成するに至
った。
[Structure of the Invention] In order to achieve this objective, the present inventors have conducted intensive research on manufacturing methods suitable for obtaining fine particles with various structural forms, and as a result, they have determined that the most important manufacturing conditions are the materials. It is possible to increase the temperature by using a laser beam, which is a high energy density beam, and by adjusting the atmosphere, it is possible to promote the chemical reaction of the metal that has been heated to a high temperature and activated by the laser. The inventors found that the object could be achieved, and based on this knowledge, they completed the present invention.

すなわち、本発明の要旨は、レーザ光線を集光レンズで
収れんし、連続送給する上記金属ワイヤを溶融するとと
もに、上記ワイヤに向って吹きつけられるガスの圧力で
微粉化すること、あるいは、同時に、レーザ光線の収れ
ん部に微粉末を供給してこれを加熱して、上記ワイヤに
向って吹きつけられるガスの作用で、加熱された微粉末
を上記金属ワイヤの溶融金属で被覆すること、並びに、
上記の溶融金属もしくは加熱された微粉末を雰囲気調整
により非金属化あるいは還元することによって各種の組
織形態をもつ微粒子を製造することを特徴とするレーザ
による微粉末の製造法に存する。
That is, the gist of the present invention is to converge a laser beam with a condensing lens, melt the metal wire that is continuously fed, and pulverize it by the pressure of a gas blown toward the wire, or at the same time. , supplying fine powder to the convergence part of the laser beam and heating it, and coating the heated fine powder with the molten metal of the metal wire under the action of a gas blown toward the wire; ,
The present invention resides in a method for producing fine powder using a laser, characterized in that fine particles having various structural forms are produced by non-metallizing or reducing the above-mentioned molten metal or heated fine powder by adjusting the atmosphere.

[発明の実施例] 本発明について、図面を参照して説明する。[Embodiments of the invention] The present invention will be explained with reference to the drawings.

第1図は、本発明のレーザによる微粉末の製造法の概略
図である。レーザビーム■を集光レンズ■で収れんさせ
、その収れん部にワイヤ送給ノズル■から微粉末生成用
素材としての金属ワイヤを送給して加熱・溶融させ、そ
の溶融部に、ガスノズル■先端から高圧ガスを吹き付け
て、上記金属ワイヤ溶融部を微粒子化させ、微粉末を得
ようとするものである。ガスノズル■からのガス流はレ
ーザビームと同軸方向に噴出させる必要はなく、ワイヤ
送給ノズル■と同様に横方向■′から噴出させてもよい
。酸化物微粉末を製造する場合は、酸化反応が他の反応
に先行するので、高圧ガスとして酸素を用いるだけでも
よい。純金属及び合金の微粉末製造の場合は、高圧ガス
、雰囲気ガス共に不活性ガス又は還元性ガスを用いる。
FIG. 1 is a schematic diagram of a method for producing fine powder using a laser according to the present invention. The laser beam ■ is converged by a condensing lens ■, and a metal wire as a material for producing fine powder is fed to the convergent part from a wire feed nozzle ■ to heat and melt it, and a gas nozzle ■ is passed from the tip of the laser beam to the molten part. The purpose is to blow high-pressure gas to turn the molten metal wire into fine particles, thereby obtaining fine powder. The gas flow from the gas nozzle (2) does not need to be ejected coaxially with the laser beam, and may be ejected from the lateral direction (2') similarly to the wire feed nozzle (2). When producing oxide fine powder, the oxidation reaction precedes other reactions, so it is sufficient to simply use oxygen as the high pressure gas. In the case of manufacturing fine powder of pure metals and alloys, inert gas or reducing gas is used for both high pressure gas and atmospheric gas.

また、窒化物微粉末製造の場合は両者共窒素ガスを用い
る。
Further, in the case of manufacturing nitride fine powder, nitrogen gas is used in both cases.

第2図は微粉末製造条件の一例で、ガス圧、ワイヤ送給
速度、レーザ出力の関係を示したものである。各レーザ
出力の曲線の左上領域が微粉末製造可能領域を示す。こ
の領域内の一条件:レーザ出力3kW、ワイヤ送給速度
3a+/win 、高圧ガス圧力4 kg/ex/で作
成した微粉末は3〜6μmの球状であった。また、上記
各種高圧ガス中にセラミックス等の粉末を混入させて、
噴出することにより、上記ワイヤ成分との複合粉末を製
造することができる。第3図に製造される複合粉末の断
面の模式図を示す。複合粉末の形態としては、(a)の
ように内部は非金属又は金属間化合物で、外周部は金属
の場合、あるいは(b)のように内部は金属で外周部が
非金属または金属間化合物の場合がある。勿論、雰囲気
ガスの圧力を大気圧より高くすることによって、酸化も
しくは窒化の反応はより活性化される。
FIG. 2 is an example of fine powder manufacturing conditions, and shows the relationship among gas pressure, wire feeding speed, and laser output. The upper left region of each laser output curve indicates the region in which fine powder production is possible. The fine powder produced under one condition within this range: laser output of 3 kW, wire feeding speed of 3 a+/win, and high pressure gas pressure of 4 kg/ex/ had a spherical shape of 3 to 6 μm. In addition, by mixing powders such as ceramics into the various high-pressure gases mentioned above,
By ejecting, a composite powder with the above-mentioned wire component can be manufactured. FIG. 3 shows a schematic cross-sectional view of the composite powder produced. The composite powder may have a non-metallic or intermetallic compound inside and a metal outer periphery, as in (a), or a metal interior and a nonmetallic or intermetallic outer periphery, as shown in (b). There are cases where Of course, by increasing the pressure of the atmospheric gas higher than atmospheric pressure, the oxidation or nitridation reaction becomes more active.

[発明の効果コ このように、本発明のレーザによる微粉末の製造法によ
れば、各種素材のワイヤを使って、簡便に微粉末を製造
することができる。また、本発明の製造法によれば、現
在その製造法が困難とされている複合微粒子の製造をも
容易にすることができる。
[Effects of the Invention] As described above, according to the method for producing fine powder using a laser according to the present invention, fine powder can be easily produced using wires made of various materials. Further, according to the manufacturing method of the present invention, it is possible to easily manufacture composite fine particles, which is currently difficult to manufacture.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明のレーザによる微粉末の製造法につい
ての概略説明図である。 図面において、■はレーザビーム、■は集光レンズ、■
はワイヤ送給ノズル、■はガスノズル、■は高圧ガス入
口、■は微粉末送給入口、■はレンズ保護ガス入口であ
る。 第2図は、微粉末製造条件の一例で、ガス圧、ワイヤ送
給速度、レーザ出力の関係を示したものである。 第3図は、粒子形態を示したものである。 特許出願人  工業技術院長  等々力 達ffi司 74ぎ迭冷違戊 n圓 1頁の続き 1発 明 者  永 1)  重 幸  高松市花ノ宮
町2丁目試験所内
FIG. 1 is a schematic explanatory diagram of a method for producing fine powder using a laser according to the present invention. In the drawing, ■ is the laser beam, ■ is the condensing lens, and ■ is the laser beam.
is a wire feeding nozzle, ■ is a gas nozzle, ■ is a high-pressure gas inlet, ■ is a fine powder feeding inlet, and ■ is a lens protective gas inlet. FIG. 2 is an example of fine powder manufacturing conditions, and shows the relationship among gas pressure, wire feeding speed, and laser output. FIG. 3 shows the particle morphology. Patent Applicant: Director of the Agency of Industrial Science and Technology Tatsu Todoroki 74-Gi-Rei-Dai-N-en Continuation of page 1 Inventor: Ei 1) Shigeyuki, Takamatsu City, Hananomiya-cho 2-chome Test Laboratory

Claims (5)

【特許請求の範囲】[Claims] (1)レーザ光線を集光レンズで収れんし、連続送給す
る無機系ワイヤに照射し、上記ワイヤを溶融するととも
に、上記ワイヤへ吹きつけられる各種ガスの圧力で上記
ワイヤの溶融部を噴霧化しながら細粒化することを特徴
とするレーザによる微粉末の製造法。
(1) A laser beam is focused by a condensing lens and irradiated onto a continuously fed inorganic wire to melt the wire, and the melted portion of the wire is atomized by the pressure of various gases blown onto the wire. A method for producing fine powder using a laser, which is characterized by making the particles finer.
(2)上記ワイヤへ吹きつけるガスの種類は、製造する
微粉末の種類により、例えば純金属及び合金粉末の場合
は不活性ガス、又は酸化物粉末の場合は酸化性ガス、窒
化物粉末の場合は窒化性ガス等の反応性ガスを使用する
ことを特徴とする特許請求の範囲第1項記載のレーザに
よる微粉末の製造法。
(2) The type of gas to be blown onto the wire depends on the type of fine powder to be manufactured. For example, inert gas for pure metal and alloy powder, oxidizing gas for oxide powder, and oxidizing gas for nitride powder. A method for producing fine powder using a laser according to claim 1, wherein a reactive gas such as a nitriding gas is used.
(3)微粉末用素材として、ワイヤ及び粉末のそれぞれ
もしくは両者を複数用いることにより、合金たは化合物
の微粉末もしくは複合粉末を製造することを特徴とする
特許請求範囲第1項記載のレーザによる微粉末の製造法
(3) By using the laser according to claim 1, which is characterized in that a fine powder or a composite powder of an alloy or compound is produced by using a plurality of each or both of a wire and a powder as a raw material for the fine powder. Manufacturing method of fine powder.
(4)上記各種ガスによる、酸化、窒化等の反応を制御
することにより酸化物、窒化物又は金属間化合物等と金
属との同心球状複合粉末を製造することを特徴とする特
許請求の範囲第1項記載のレーザによる微粉末製造法。
(4) A concentric spherical composite powder of oxides, nitrides, intermetallic compounds, etc. and metals is produced by controlling reactions such as oxidation and nitridation using the various gases mentioned above. A method for producing fine powder using a laser according to item 1.
(5)還元性ガスを用いて、酸化物粉末あるいは窒化物
粉末の表層部を還元することにより、金属コーティング
されたセラミックス粉末を製造することを特徴とするレ
ーザによる微粉末の製造法。
(5) A method for producing fine powder using a laser, characterized in that metal-coated ceramic powder is produced by reducing the surface layer of oxide powder or nitride powder using a reducing gas.
JP60105329A 1985-05-17 1985-05-17 Production of pulverous powder by laser beam Granted JPS61264108A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60105329A JPS61264108A (en) 1985-05-17 1985-05-17 Production of pulverous powder by laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60105329A JPS61264108A (en) 1985-05-17 1985-05-17 Production of pulverous powder by laser beam

Publications (2)

Publication Number Publication Date
JPS61264108A true JPS61264108A (en) 1986-11-22
JPH0362763B2 JPH0362763B2 (en) 1991-09-27

Family

ID=14404682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60105329A Granted JPS61264108A (en) 1985-05-17 1985-05-17 Production of pulverous powder by laser beam

Country Status (1)

Country Link
JP (1) JPS61264108A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0328304A (en) * 1989-06-23 1991-02-06 Tokin Corp Apparatus for manufacturing metal or alloy powder
CN107803509A (en) * 2017-09-28 2018-03-16 兰州理工大学 Vaccum weightlessness method ball manufacture device and its operating method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5156762A (en) * 1974-09-20 1976-05-18 Caterpillar Tractor Co KAIRYOSARETASHUGOTAIZAIRYONO SEIZOHOHOOYOBI SOCHI

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5156762A (en) * 1974-09-20 1976-05-18 Caterpillar Tractor Co KAIRYOSARETASHUGOTAIZAIRYONO SEIZOHOHOOYOBI SOCHI

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0328304A (en) * 1989-06-23 1991-02-06 Tokin Corp Apparatus for manufacturing metal or alloy powder
CN107803509A (en) * 2017-09-28 2018-03-16 兰州理工大学 Vaccum weightlessness method ball manufacture device and its operating method
CN107803509B (en) * 2017-09-28 2019-12-31 兰州理工大学 Ball manufacturing device by vacuum weightlessness method and operation method thereof

Also Published As

Publication number Publication date
JPH0362763B2 (en) 1991-09-27

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