JPS5748163A - Method and device for inspection of pattern - Google Patents

Abstract

PURPOSE:To decide with a high accuracy whether a pattern to be inspected is good or not, by setting in advance a well-arranged inspection standard for every character or symbol, and collating each character or symbol of the pattern to be inspected, with the inspection standard. CONSTITUTION:A character kind data memory table 11a for showing an array relation of a character or a symbol in a pattern to be inspected, and a position data memory table 11b for showing an existence position on television of each character or symbol are provided on a data memory 11 of a computer 10. Also, an inspection standard data is stored in advance in a memory 30. Television of the pattern to be inspected is inputted to a picture memory 42 through an image pickup device 4, and a character kind data and a position data relating to the first character to be inspected are read from the tables 11a, 11b, respectively. From the picture memory 42, the position co-ordinates shown by the position data are made a reference point, a partial video data designated by an inspection standard data corresponding to the character kind data is read out, and whether there is a defect or not in a character pattern to be inspected is decided. Said inspection is executed one after another as to all patterns to be inspected, and whether there is a defect or not is decided.