JPS56147462A - Laser trimming method for resistor film - Google Patents

Laser trimming method for resistor film

Info

Publication number
JPS56147462A
JPS56147462A JP5066180A JP5066180A JPS56147462A JP S56147462 A JPS56147462 A JP S56147462A JP 5066180 A JP5066180 A JP 5066180A JP 5066180 A JP5066180 A JP 5066180A JP S56147462 A JPS56147462 A JP S56147462A
Authority
JP
Japan
Prior art keywords
resistor film
gap
trimming
edge
notch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5066180A
Other languages
Japanese (ja)
Inventor
Masatoshi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5066180A priority Critical patent/JPS56147462A/en
Publication of JPS56147462A publication Critical patent/JPS56147462A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/242—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by laser

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

PURPOSE:To perform laser trimming for a T-shaped resistor film having a gap at the trimming position so that a notch is formed extending from the gap bottom after accurately setting the position on the basis of a film edge which is approximately parallel with said gap. CONSTITUTION:When a minute current is made to flow between electrodes 12 and 13 in order to detect an edge 11b of a T-shaped resistor film, the current flows, by- passing a gap 14. A minute notch 17 is formed so that the resistance varies by a given exceedingly small amount and at this time, the edge 11b of the resistor film is detected from the position of the minute laser spot. Then, the position which is a given distance away from the resistor film edge 11b is scanned by means of a trimming laser spot to form a notch 15. By said method, a trimming cut is made at a given position of the T-shaped resistor film, and a resistor element of U-shaped conductor path having a uniform width or which is narrow on one side can be formed. Accordingly, yield improves.
JP5066180A 1980-04-17 1980-04-17 Laser trimming method for resistor film Pending JPS56147462A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5066180A JPS56147462A (en) 1980-04-17 1980-04-17 Laser trimming method for resistor film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5066180A JPS56147462A (en) 1980-04-17 1980-04-17 Laser trimming method for resistor film

Publications (1)

Publication Number Publication Date
JPS56147462A true JPS56147462A (en) 1981-11-16

Family

ID=12865128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5066180A Pending JPS56147462A (en) 1980-04-17 1980-04-17 Laser trimming method for resistor film

Country Status (1)

Country Link
JP (1) JPS56147462A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5669044A (en) * 1995-06-07 1997-09-16 Nashua Corporation Article and method for dispensing toner and the like

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5669044A (en) * 1995-06-07 1997-09-16 Nashua Corporation Article and method for dispensing toner and the like

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