JPS5248471A - Ion implantation device - Google Patents
Ion implantation deviceInfo
- Publication number
- JPS5248471A JPS5248471A JP12464075A JP12464075A JPS5248471A JP S5248471 A JPS5248471 A JP S5248471A JP 12464075 A JP12464075 A JP 12464075A JP 12464075 A JP12464075 A JP 12464075A JP S5248471 A JPS5248471 A JP S5248471A
- Authority
- JP
- Japan
- Prior art keywords
- ion implantation
- implantation device
- implantation conditions
- holder
- automatically select
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50124640A JPS606086B2 (ja) | 1975-10-16 | 1975-10-16 | イオン注入装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50124640A JPS606086B2 (ja) | 1975-10-16 | 1975-10-16 | イオン注入装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5248471A true JPS5248471A (en) | 1977-04-18 |
JPS606086B2 JPS606086B2 (ja) | 1985-02-15 |
Family
ID=14890403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50124640A Expired JPS606086B2 (ja) | 1975-10-16 | 1975-10-16 | イオン注入装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS606086B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201765U (ja) * | 1987-05-21 | 1987-12-23 | ||
JPH0722453U (ja) * | 1993-09-28 | 1995-04-21 | 住友重機械工業株式会社 | 荷電粒子ビーム照射装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6376194U (ja) * | 1986-11-07 | 1988-05-20 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834352A (ja) * | 1971-09-07 | 1973-05-18 | ||
JPS4914102A (ja) * | 1972-05-16 | 1974-02-07 |
-
1975
- 1975-10-16 JP JP50124640A patent/JPS606086B2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834352A (ja) * | 1971-09-07 | 1973-05-18 | ||
JPS4914102A (ja) * | 1972-05-16 | 1974-02-07 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201765U (ja) * | 1987-05-21 | 1987-12-23 | ||
JPH0722453U (ja) * | 1993-09-28 | 1995-04-21 | 住友重機械工業株式会社 | 荷電粒子ビーム照射装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS606086B2 (ja) | 1985-02-15 |
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