JPS51131428A - Method of growing aluminum in gassphase - Google Patents
Method of growing aluminum in gassphaseInfo
- Publication number
- JPS51131428A JPS51131428A JP5466575A JP5466575A JPS51131428A JP S51131428 A JPS51131428 A JP S51131428A JP 5466575 A JP5466575 A JP 5466575A JP 5466575 A JP5466575 A JP 5466575A JP S51131428 A JPS51131428 A JP S51131428A
- Authority
- JP
- Japan
- Prior art keywords
- gassphase
- growing aluminum
- growing
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50054665A JPS5847464B2 (en) | 1975-05-12 | 1975-05-12 | Aluminum tree |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50054665A JPS5847464B2 (en) | 1975-05-12 | 1975-05-12 | Aluminum tree |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51131428A true JPS51131428A (en) | 1976-11-15 |
JPS5847464B2 JPS5847464B2 (en) | 1983-10-22 |
Family
ID=12977067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50054665A Expired JPS5847464B2 (en) | 1975-05-12 | 1975-05-12 | Aluminum tree |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5847464B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917246A (en) * | 1982-07-20 | 1984-01-28 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5976468A (en) * | 1982-10-25 | 1984-05-01 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
JPS61221367A (en) * | 1985-03-22 | 1986-10-01 | シエーリング・アクチエンゲゼルシヤフト | Production of conductive structure on non-conductive body |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0511964Y2 (en) * | 1988-05-17 | 1993-03-25 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS496168A (en) * | 1972-04-10 | 1974-01-19 | ||
JPS5046074A (en) * | 1973-08-28 | 1975-04-24 |
-
1975
- 1975-05-12 JP JP50054665A patent/JPS5847464B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS496168A (en) * | 1972-04-10 | 1974-01-19 | ||
JPS5046074A (en) * | 1973-08-28 | 1975-04-24 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917246A (en) * | 1982-07-20 | 1984-01-28 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5976468A (en) * | 1982-10-25 | 1984-05-01 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
JPS61221367A (en) * | 1985-03-22 | 1986-10-01 | シエーリング・アクチエンゲゼルシヤフト | Production of conductive structure on non-conductive body |
Also Published As
Publication number | Publication date |
---|---|
JPS5847464B2 (en) | 1983-10-22 |
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