JPS51131428A - Method of growing aluminum in gassphase - Google Patents

Method of growing aluminum in gassphase

Info

Publication number
JPS51131428A
JPS51131428A JP5466575A JP5466575A JPS51131428A JP S51131428 A JPS51131428 A JP S51131428A JP 5466575 A JP5466575 A JP 5466575A JP 5466575 A JP5466575 A JP 5466575A JP S51131428 A JPS51131428 A JP S51131428A
Authority
JP
Japan
Prior art keywords
gassphase
growing aluminum
growing
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5466575A
Other languages
Japanese (ja)
Other versions
JPS5847464B2 (en
Inventor
Hiroo Sasaki
Toshiyasu Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50054665A priority Critical patent/JPS5847464B2/en
Publication of JPS51131428A publication Critical patent/JPS51131428A/en
Publication of JPS5847464B2 publication Critical patent/JPS5847464B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP50054665A 1975-05-12 1975-05-12 Aluminum tree Expired JPS5847464B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50054665A JPS5847464B2 (en) 1975-05-12 1975-05-12 Aluminum tree

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50054665A JPS5847464B2 (en) 1975-05-12 1975-05-12 Aluminum tree

Publications (2)

Publication Number Publication Date
JPS51131428A true JPS51131428A (en) 1976-11-15
JPS5847464B2 JPS5847464B2 (en) 1983-10-22

Family

ID=12977067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50054665A Expired JPS5847464B2 (en) 1975-05-12 1975-05-12 Aluminum tree

Country Status (1)

Country Link
JP (1) JPS5847464B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917246A (en) * 1982-07-20 1984-01-28 Fujitsu Ltd Manufacture of semiconductor device
JPS5976468A (en) * 1982-10-25 1984-05-01 Semiconductor Energy Lab Co Ltd Semiconductor device
JPS61221367A (en) * 1985-03-22 1986-10-01 シエーリング・アクチエンゲゼルシヤフト Production of conductive structure on non-conductive body

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0511964Y2 (en) * 1988-05-17 1993-03-25

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496168A (en) * 1972-04-10 1974-01-19
JPS5046074A (en) * 1973-08-28 1975-04-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496168A (en) * 1972-04-10 1974-01-19
JPS5046074A (en) * 1973-08-28 1975-04-24

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917246A (en) * 1982-07-20 1984-01-28 Fujitsu Ltd Manufacture of semiconductor device
JPS5976468A (en) * 1982-10-25 1984-05-01 Semiconductor Energy Lab Co Ltd Semiconductor device
JPS61221367A (en) * 1985-03-22 1986-10-01 シエーリング・アクチエンゲゼルシヤフト Production of conductive structure on non-conductive body

Also Published As

Publication number Publication date
JPS5847464B2 (en) 1983-10-22

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