JPH0672808B2 - Radiation thermometer - Google Patents
Radiation thermometerInfo
- Publication number
- JPH0672808B2 JPH0672808B2 JP60223223A JP22322385A JPH0672808B2 JP H0672808 B2 JPH0672808 B2 JP H0672808B2 JP 60223223 A JP60223223 A JP 60223223A JP 22322385 A JP22322385 A JP 22322385A JP H0672808 B2 JPH0672808 B2 JP H0672808B2
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- bimorph diaphragm
- shutter spring
- bimorph
- shim
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005855 radiation Effects 0.000 title claims description 7
- 230000003287 optical effect Effects 0.000 claims description 30
- 238000005259 measurement Methods 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 3
- 230000004907 flux Effects 0.000 description 10
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
- G01J5/0805—Means for chopping radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0808—Convex mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0814—Particular reflectors, e.g. faceted or dichroic mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、測定対象からの赤外線を利用して測定対象の
温度を測定する放射温度計に関し、さらに詳しくはその
光学系に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a radiation thermometer for measuring the temperature of a measurement target by using infrared rays from the measurement target, and more particularly to an optical system thereof.
従来の技術 従来、10μm帯の赤外線を利用した低温域用放射温度計
の光学系には屈折型と反射型があるが、コストが低く、
屈折型光学系で問題になる分散の問題がないことから、
反射型光学系が多用されている。Conventional technology Conventionally, there are refraction type and reflection type in the optical system of the radiation thermometer for low temperature range using infrared rays of 10 μm band, but the cost is low,
Since there is no problem of dispersion, which is a problem in refractive optics,
Reflective optical systems are often used.
第6図図示のカセグレン型はその中でも一般的によく用
いられているものであるが、測定対象から凹面鏡(2)
への光束中に凸面鏡(4)があるために測定対象から凹
面鏡(2)に向かう光束の一部が凸面鏡(4)によって
遮光されてしまい、明るい光学系を得ることが困難であ
る。第6図において、(6)は測定対象からの赤外線を
受光する検知器で、(8)は測定域を限定するピンホー
ル(8a)を有するピンホール板、(10)は検知器(8)
への光入射を断続的に制御するようにモータ(M)によ
って駆動されるチョッパであり、(12)は計測の基準と
なる検知器(8)自体の温度を測定する感温素子であ
る。Among them, the Cassegrain type shown in FIG. 6 is generally used.
Since there is a convex mirror (4) in the light beam to the convex mirror (4), a part of the light beam traveling from the measurement object to the concave mirror (2) is blocked by the convex mirror (4), and it is difficult to obtain a bright optical system. In FIG. 6, (6) is a detector that receives infrared rays from the measurement object, (8) is a pinhole plate having a pinhole (8a) that limits the measurement area, and (10) is a detector (8).
The chopper is driven by a motor (M) so as to intermittently control the incidence of light on it, and (12) is a temperature sensitive element that measures the temperature of the detector (8) itself, which serves as a reference for measurement.
第7図は従来の反射型光学系の別の例を示し、この場合
はカセグレン型光学系のように測定対象からの光束を遮
光する凸面鏡はないものの、測定対象からの凹面鏡(1
4)への光束中におかれたチョッパ(16)が凹面鏡に代
わってその光束を大きくさえぎり、光学系を暗くすると
共にチョッパ(16)やチョッパを駆動するモータ(18)
を光束中に支持しなければならないので、構造的に複雑
になるという欠点がある。FIG. 7 shows another example of a conventional reflection type optical system. In this case, unlike the Cassegrain type optical system, there is no convex mirror for blocking the light flux from the measurement object, but a concave mirror (1
The chopper (16) placed in the light flux to 4) intercepts the light flux largely in place of the concave mirror, darkens the optical system, and drives the chopper (16) and the motor (18).
Has to be supported in the light flux, which has the disadvantage of being structurally complicated.
発明が解決しようとする問題点 本発明は上述のごとき従来の光学系の欠点を改善すべく
なされたものであり、その目的は、検知器への入射光を
制御するチョッパを用いつつも、構造が簡単であるとと
もに、明るい光学系を得ることができる放射温度計を提
供することにある。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention The present invention has been made to improve the drawbacks of the conventional optical system as described above, and an object thereof is to use a chopper for controlling the incident light to the detector while having a structure. It is an object to provide a radiation thermometer that is simple and can obtain a bright optical system.
目的を達成するための手段 上記目的を達成するために、本発明は、従来検知器への
入射光を制御するために用いられているチョッパとそれ
を駆動するモータに代わって、交流電圧を印加すること
で厚み方向に曲がり振動を発生するバイモルフ型圧電振
動板が用いられる。そのバイモルフ振動板は、弾性を有
する金属薄板からなるシム電極と、そのシム電極を両側
から挟むように支持する一対の外部電極から構成され、
一端には前記シム電極を加工して作られたシャッタばね
が設けられている。さらにバイモルフ振動板は、長さ方
向が光軸に垂直になり幅方向が光軸に平行になるように
配置され、シャッタばねと反対側の端を光学系の測定光
束外で支持される。Means for Achieving the Object In order to achieve the above object, the present invention applies an AC voltage instead of a chopper and a motor for driving the chopper, which are conventionally used to control incident light on a detector. As a result, a bimorph type piezoelectric vibrating plate is used which generates bending vibration in the thickness direction. The bimorph diaphragm is composed of a shim electrode made of a thin metal plate having elasticity and a pair of external electrodes that support the shim electrode so as to sandwich it from both sides.
A shutter spring made by processing the shim electrode is provided at one end. Further, the bimorph diaphragm is arranged such that the length direction is perpendicular to the optical axis and the width direction is parallel to the optical axis, and the end opposite to the shutter spring is supported outside the measurement light beam of the optical system.
作用 従って、本発明によれば、チョッパを構成するバイモル
フ振動板は、測定対象から凹面鏡への光束中にその厚み
をさらすだけであり、凹面鏡への光束をさえぎるものは
ほぼ検知器のみとなるので、光学系を格段に明るくする
ことができ、また構成を簡単にすることができる。Therefore, according to the present invention, the bimorph diaphragm that constitutes the chopper only exposes its thickness to the light flux from the measurement target to the concave mirror, and only the detector blocks the light flux to the concave mirror. The optical system can be made significantly brighter and the configuration can be simplified.
実施例 本発明の実施例を第1図ないし第3図に示す。ここで、
第2図は第1図中Aより見た図であり、第3図はBより
見た図である。第1図において、(20)は凹面鏡で、測
定対象からの赤外線はこれによって反射されて集束され
る。(22)はその集束位置におかれたピンホール板であ
り、測定領域を限定するピンホール(22a)を通過した
赤外線が検知器(24)によって検知される。Embodiment An embodiment of the present invention is shown in FIGS. here,
2 is a view seen from A in FIG. 1, and FIG. 3 is a view seen from B. In FIG. 1, reference numeral (20) is a concave mirror which reflects and focuses infrared rays from the object to be measured. Reference numeral (22) is a pinhole plate placed at the focusing position, and infrared rays that have passed through the pinhole (22a) that limits the measurement area are detected by the detector (24).
検知器(24)とピンホール板(22)とは共に検知器ホル
ダ(26)に組み付けられ、検知器ホルダ(26)は窓(28
a)をもつ支持部材(28)により保持されている。(3
0)は自己温度測定用の感温素子である。Both the detector (24) and the pinhole plate (22) are assembled in the detector holder (26), and the detector holder (26) is connected to the window (28
It is held by a support member (28) having a). (3
Reference numeral 0) is a temperature sensitive element for measuring the self temperature.
チョッパは一端にシャッタばね(32)が固着されたバイ
モルフ振動板(34)によて構成され、シャッタばね(3
2)はピンホール(22a)に対して近接した位置に配置さ
れている。ここで、バイモルフ振動板(34)は光学系の
光軸方向に幅方向が位置し、光軸に垂直な方向に長さ方
向が位置するように配置されている。そして、バイモル
フ振動板(34)の他端は、2つの固定部材(36)と(3
8)との間に2つのネジ(40)ではさみこむようにして
測定光束外において固定されている。ここで、バイモル
フ振動板(34)の変位量は振動板(34)の長さに依存す
るが、ピンホール(22a)を開閉する充分な変位量に相
当する振動板(34)の長さもこの配置によって容易に得
られ、合理的である。The chopper is composed of a bimorph diaphragm (34) having a shutter spring (32) fixed to one end thereof, and the shutter spring (3
2) is located close to the pinhole (22a). Here, the bimorph diaphragm (34) is arranged so that the width direction is located in the optical axis direction of the optical system and the length direction is located in a direction perpendicular to the optical axis. The other end of the bimorph diaphragm (34) has two fixing members (36) and (3
It is fixed to the outside of the measurement light flux by sandwiching it with two screws (40) between it and 8). Here, the displacement amount of the bimorph diaphragm (34) depends on the length of the diaphragm (34), and the length of the diaphragm (34) corresponding to the sufficient displacement amount for opening and closing the pinhole (22a) is also this. It is easily obtained and reasonable by the arrangement.
更に、固定部材(36)は2つのネジ(42)で支持部材
(28)に固定されている。そして、バイモルフ振動板
(34)へ供給される交流信号は、電極(34a)にはそれ
に接触する固定部材(36)(38)を介して、電極(34
b)には直接に、交流電極(E)から印加される。Further, the fixing member (36) is fixed to the supporting member (28) with two screws (42). Then, the AC signal supplied to the bimorph diaphragm (34) is applied to the electrode (34a) via the fixing members (36) (38) contacting the electrode (34a).
It is directly applied to the b) from the AC electrode (E).
ここで、バイモルフ振動板(34)に印加される電圧を低
く抑えるためには、バイモルフ振動板(34)に要求され
る振動が小さい方が望ましい。従って、シャッタばね
(32)はピンホール(22a)の中心に対して対称的に振
動することが望ましく、またピンホール(22a)に近接
して配置されていることが必要である。そのための調節
は、4つのネジ(40)(42)をゆるめてシャッタばね
(32)のピンホール(22a)に対する相対位置を調整す
ることによって行うことができる。Here, in order to keep the voltage applied to the bimorph diaphragm (34) low, it is desirable that the vibration required for the bimorph diaphragm (34) is small. Therefore, it is preferable that the shutter spring (32) vibrates symmetrically with respect to the center of the pinhole (22a), and it is necessary that the shutter spring (32) is arranged close to the pinhole (22a). Adjustment for that purpose can be performed by loosening the four screws (40) (42) and adjusting the relative position of the shutter spring (32) with respect to the pinhole (22a).
このようなチョッパの調節のために、第4図及び第5図
図示のように構成されている。第5図は第4図をCから
見た図である。第4図及び第5図において、シャッタば
ね(32)はバネ性のある金属薄板によって構成されてい
る。これによって、バイモルフ振動板(34)のシム材を
直接その金属薄板の上に加工することができる。また、
ピンホール板(22)の上には、ピンホール(22a)より
大きい開口部(44a)をもつ自己潤滑性のあるポリエチ
レン、テフロンなどからなるプラスチック薄板(44)
が、開口部(44a)がピンホール(22a)と同心になるよ
うに重ねて固着されている。そして、このプラスチック
板(44)に上記シャッタばね(32)が軽くふれるように
シャッタばね(32)の位置を調整する。For the adjustment of such a chopper, it is configured as shown in FIGS. 4 and 5. FIG. 5 is a view of FIG. 4 viewed from C. In FIGS. 4 and 5, the shutter spring (32) is made of a metal thin plate having a spring property. As a result, the shim material of the bimorph diaphragm (34) can be directly processed on the thin metal plate. Also,
On top of the pinhole plate (22) is a plastic thin plate (44) made of polyethylene, Teflon, etc. with self-lubricating properties that has an opening (44a) larger than the pinhole (22a).
However, the openings (44a) are overlapped and fixed so that they are concentric with the pinhole (22a). Then, the position of the shutter spring (32) is adjusted so that the shutter spring (32) is lightly touched with the plastic plate (44).
この調整は、固定部材(36)と(38)との間にバイモル
フ振動板(34)をはさんで行い、調整完了後にねじ(4
0)をしめることで固定する。このように構成すること
によって、シャッタばね(32)とピンホール(22a)と
の間隔は、その間に介在するプラスチック板(44)の厚
みで一定に保たれる。そして、シャッタばね(32)のバ
ネ性がごく弱いこととプラスチック板(44)の自己潤滑
性のために、接触によって生ずるまさつは問題にならな
い。固定部材(36)はねじ(46)(48)によって支持台
(50)に固定されており、シャッタばね(32)の光軸に
垂直なX−Y方向の調整は、この2つのねじ(46)(4
8)によって行なわれる。This adjustment is performed by sandwiching the bimorph diaphragm (34) between the fixing members (36) and (38), and after completing the adjustment, screw (4
Fix it by tightening (0). With this structure, the distance between the shutter spring (32) and the pinhole (22a) is kept constant by the thickness of the plastic plate (44) interposed therebetween. Further, since the shutter spring (32) has a very weak spring property and the plastic plate (44) is self-lubricating, the pressure generated by the contact does not matter. The fixing member (36) is fixed to the support base (50) by screws (46) and (48), and adjustment of the shutter spring (32) in the XY directions perpendicular to the optical axis is performed by these two screws (46). )(Four
8).
更に、本実施例によれば、シャッタばね(32)をピンホ
ール(22a)に対して一定の位置関係に調整するための
機構をもつ固定端支持部や、バイモルフ振動板への駆動
信号印加部が光学系の外に配置されているので、これら
が光束をさえぎることないので明るい光学系を得ること
ができるとともに、ピンホール(22a)に対するシャッ
タばね(32)の相対位置が調整もしやすいなどの利点を
もっている。Further, according to the present embodiment, the fixed end support portion having a mechanism for adjusting the shutter spring (32) to the pinhole (22a) in a fixed positional relationship, and the drive signal application portion for the bimorph diaphragm. Since they are located outside the optical system, they do not block the light flux, so a bright optical system can be obtained, and the relative position of the shutter spring (32) with respect to the pinhole (22a) is easy to adjust. Has an advantage.
発明の効果 以上詳述したように、本発明は、凹面鏡よりなる反射光
学系の結像面に配置され、測定範囲を限定する透過域を
通過した赤外線を検知する検知器と、一端に透過域に近
接して配置されたシャッタばねが形成され、光軸に垂直
な方向に長さ方向が位置し、光軸に平行な方向に幅方向
が位置するように配置され、他端が測定光束外で固定さ
れたバイモルフ振動板からなるチョッパとを有し、バイ
モルフ振動板へ交流信号を印加することによってシャッ
タばねを駆動して検知器への入射光を断続的に制御する
ように構成されていることを特徴とするものであり、こ
のように構成することによって、チョッパとしては測定
対象から凹面鏡へ向かう光束内にほぼバイモルフ振動板
の厚みのみがさらされるだけであり、該光束をさえぎる
のはほぼ検知器のみとなるので、従来の装置に比べて構
成が簡単で、かつ、測定光束をさえぎるものの少ない明
るい光学系を得ることができる。EFFECTS OF THE INVENTION As described in detail above, according to the present invention, a detector arranged on the image plane of a reflective optical system composed of a concave mirror for detecting infrared rays that has passed through a transmission region that limits a measurement range, and a transmission region at one end. A shutter spring is formed close to the optical axis, the length direction of which is perpendicular to the optical axis, and the width direction of which is parallel to the optical axis. And a chopper composed of a bimorph diaphragm fixed by the above, and is configured to intermittently control the incident light to the detector by driving the shutter spring by applying an AC signal to the bimorph diaphragm. With this configuration, as a chopper, only the thickness of the bimorph diaphragm is exposed to the light flux traveling from the object to be measured toward the concave mirror, and the chopper interrupts the light flux. Since only the blur detector is used, it is possible to obtain a bright optical system which has a simpler structure than the conventional device and has a small number of obstructions to the measurement light beam.
第1図は本発明実施例の放射温度計の光学系を示す断面
図、第2図は第1図をAから見た状態を示す正面図、第
3図は第1図をBから見た状態を示す背面図、第4図は
その要部を示す断面図、第5図は第4図をCから見た状
態を示す正面図、第6図及び第7図はそれぞれ従来の放
射温度計用光学系を示す断面図である。 (22a);透過域、(24);検知器、 (32);シャッタばね、 (34);バイモルフ振動板。FIG. 1 is a sectional view showing an optical system of a radiation thermometer according to an embodiment of the present invention, FIG. 2 is a front view showing a state in which FIG. 1 is seen from A, and FIG. 3 is seen from B in FIG. FIG. 4 is a front view showing a state in which FIG. 4 is viewed from C, and FIGS. 6 and 7 are conventional radiation thermometers, respectively. It is sectional drawing which shows the optical system for use. (22a); transmission region, (24); detector, (32); shutter spring, (34); bimorph diaphragm.
Claims (1)
る通過域を通過した赤外線を検知する検知手段と、 一端に前記検知手段への光を遮断するためのシャッタば
ねを有し、光軸に垂直な方向に長さ方向が位置し、光軸
に平行な方向に幅方向が位置するように配置され、他端
が測定光束外で固定されたバイモルフ振動板からなるチ
ョッパと、 前記バイモルフ振動板へ交流信号を印加することによっ
て前記赤外線の通過域を全開/閉鎖するよう前記シャッ
タばねを駆動し、前記検知手段へ断続的に光が入射する
よう制御する制御手段と、を有し、 前記バイモルフ振動板は、弾性を有する金属薄板からな
るシム電極と、そのシム電極を両側から挟むように支持
する一対の外部電極からなり、 前記シャッタばねは前記バイモルフ振動板の両側の外部
電極を取り除いたシム電極を加工して形成されている、 ことを特徴とする放射温度計。1. A reflection optical system including a concave mirror, a detection unit arranged on an image forming surface of the reflection optical system, for detecting infrared rays that have passed through a pass band that limits a measurement range, and one end of the detection unit. It has a shutter spring for blocking light, and is arranged so that its length direction is perpendicular to the optical axis and its width direction is parallel to the optical axis. A chopper composed of a fixed bimorph diaphragm, and by applying an AC signal to the bimorph diaphragm, drives the shutter spring so as to fully open / close the infrared pass band, and intermittently emits light to the detection means. The bimorph diaphragm includes a shim electrode made of a thin metal plate having elasticity and a pair of external electrodes supporting the shim electrode so as to sandwich the shim electrode from both sides. Jitter spring radiation thermometer, characterized in that, is formed by processing the shim electrodes by removing the external electrodes on both sides of the bimorph diaphragm.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60223223A JPH0672808B2 (en) | 1985-10-07 | 1985-10-07 | Radiation thermometer |
US07/241,815 US4914673A (en) | 1985-10-07 | 1988-09-02 | Radiation thermometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60223223A JPH0672808B2 (en) | 1985-10-07 | 1985-10-07 | Radiation thermometer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6282333A JPS6282333A (en) | 1987-04-15 |
JPH0672808B2 true JPH0672808B2 (en) | 1994-09-14 |
Family
ID=16794720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60223223A Expired - Fee Related JPH0672808B2 (en) | 1985-10-07 | 1985-10-07 | Radiation thermometer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0672808B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6477659B2 (en) * | 2016-10-19 | 2019-03-06 | トヨタ自動車株式会社 | Heat sink inspection method and heat sink manufacturing method |
-
1985
- 1985-10-07 JP JP60223223A patent/JPH0672808B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPS6282333A (en) | 1987-04-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7616881B2 (en) | Zoom flash with liquid crystal lens | |
US4965448A (en) | Internal calibration source for infrared radiation detector | |
KR20030065486A (en) | Method and apparatus for measuring wavefront aberrations | |
JPH1019768A (en) | Surface plasmon resonance sensor | |
KR930703627A (en) | Scene projector | |
JPS6353485B2 (en) | ||
US4914673A (en) | Radiation thermometer | |
US5270792A (en) | Dynamic lateral shearing interferometer | |
JPH0672808B2 (en) | Radiation thermometer | |
JP2003097911A (en) | Displacement measuring device and displacement measuring method using the same | |
JPH11109219A (en) | Focus detector and optical instrument | |
JPH0894438A (en) | Infrared sensor | |
JP3203727B2 (en) | Automatic ranging optical system | |
US20240219710A1 (en) | Optical scanning device | |
JP3462177B2 (en) | Device for detecting the position of a rotating object | |
JPS6041536Y2 (en) | optical scanning device | |
JPH09318440A (en) | Infrared ray detector | |
JP2001174687A (en) | Movable lens position detector | |
SU362217A1 (en) | OPTICAL MONITORING DEVICE | |
JPH03179416A (en) | Optical apparatus | |
JPS6247525A (en) | Radiation thermometer for fiber | |
KR930003372Y1 (en) | Mirror controlling apparatus for duel camera | |
JPS61134716A (en) | Focusing point detector | |
JP2024512918A (en) | Sensor-based control of optical devices with variable optical power or variable beam deflection | |
JP3274782B2 (en) | Reflective optical system |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |