JPH0672301B2 - Differential pressure seal device - Google Patents
Differential pressure seal deviceInfo
- Publication number
- JPH0672301B2 JPH0672301B2 JP19449987A JP19449987A JPH0672301B2 JP H0672301 B2 JPH0672301 B2 JP H0672301B2 JP 19449987 A JP19449987 A JP 19449987A JP 19449987 A JP19449987 A JP 19449987A JP H0672301 B2 JPH0672301 B2 JP H0672301B2
- Authority
- JP
- Japan
- Prior art keywords
- roll
- differential pressure
- guide roll
- long
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 長尺薄帯たとえば冷延ないし熱延鋼帯のような長尺材を
連続的に送給する間に、真空蒸着、イオンプレーティン
グ、スパッタリングなどのいわゆるドライプレーティン
グ法によって表面被覆を施す際には、複数の、圧力差の
ある空間領域相互（以下差圧室と呼ぶ）によって、ドラ
イプレーティング領域に至る間に、順次真空度をあげ、
ついで下げていく、エア・トウ・エア（Air-to-Air）方
式が用いられ、このような差圧室相互間における圧力差
を維持しつつ長尺材の連続的な通過を誘導する、差圧シ
ールを必要とし、ここに適切な差圧シールを有利に実現
することがきる、差圧シール装置を提案しようとするも
のである。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) Elongated thin strips such as cold-rolled or hot-rolled steel strips are continuously fed while vacuum vapor deposition, ion plating, sputtering. When applying a surface coating by a so-called dry plating method such as, a plurality of space regions having a pressure difference between each other (hereinafter referred to as a differential pressure chamber) sequentially increase the degree of vacuum until reaching the dry plating region,
Then, the air-to-air method is used, which lowers the pressure difference between the differential pressure chambers while maintaining the pressure difference between the differential pressure chambers. An object of the present invention is to propose a differential pressure seal device which requires a pressure seal and can appropriately realize an appropriate differential pressure seal.
（従来の技術） エア・トウ・エア方式に関してすでに数多の提案を見る
ことができ、たとえば米国特許第2384500号、同2972330
号、同2996410号明細書をはじめ、三菱重工技報Vol.21
（1984）No.6のp1〜７などのように、近年来の精密工作
技術の進歩と相まって、実用化が進められつつある。こ
れらのシール法のうちの、とくに最後に引用した文献に
は、通板の向きにわずか軸心をずらせた一対のロール間
に挟んで長尺材を各ロール周面に沿わせるようにしてシ
ール面積を拡大することが、また最近に至って特開昭62
−13572号公報では、一対の通板ロールに、長尺材を囲
うシールバーとアダプタとを組合せて、その囲いの内部
にて差圧を維持する試みが提案されているが、何れにあ
っても、一対のロール間に長尺材を挟圧して通板するの
で、被処理物は、その表、裏面で曲げ応力、圧縮応力が
働き、さらには大きな張力も受ける。(Prior Art) A number of proposals can be seen regarding the air-to-air method, for example, US Pat. Nos. 2384500 and 2972330.
No., 2996410 specification, Mitsubishi Heavy Industries Technical Report Vol.21
(1984) No. 6, p1 to 7, etc., are being put to practical use in combination with recent advances in precision machining technology. Among these sealing methods, in the last cited reference, the long material is placed between a pair of rolls with their axes slightly offset in the direction of the strip, and the long material is placed along the circumference of each roll. Increasing the area has also been recently implemented in JP-A-62-62.
In Japanese Patent No. 13572, there is proposed an attempt to maintain a differential pressure inside the enclosure by combining a pair of threading rolls with a seal bar and an adapter that enclose the long material. In addition, since the long material is sandwiched between the pair of rolls and is passed through the plate, the object to be processed is subjected to bending stress and compressive stress on its front and back surfaces, and is also subjected to a large tension.
このような張力や局部的な面圧の作用は、製品の品質に
悪影響を及ぼし、例えば一方向性珪素鋼板にエア・トウ
・エア方式を適用した際に磁気特性の劣化を起こすこと
がわかった。It has been found that such a tension or local action of surface pressure adversely affects the quality of the product and causes deterioration of magnetic properties when the air-to-air method is applied to, for example, a grain-oriented silicon steel sheet. .
また、このような問題に加えて、通板中の振動による板
割れなども発生し易いことが指摘された。In addition to such a problem, it was pointed out that plate cracking due to vibration during passing of the plate is likely to occur.
（発明が解決しようとする問題点） 長尺薄帯のエア・トウ・エア方式による処理に適合し
て、製品品質の劣化や板割れなどを生じるうれいなし
に、有効な差圧シールを実現することができる、差圧シ
ール装置を提案することがこの発明の目的である。(Problems to be solved by the invention) Achieving an effective differential pressure seal without complacent that causes deterioration of product quality and plate cracking, etc. by adapting to treatment of long thin strips by air-to-air method. It is an object of the present invention to propose a differential pressure sealing device which can be.
（問題点を解決するための手段） この発明は、圧力差のある空間領域相互間にわたり該圧
力差を維持しつつ長尺薄帯の連続的な通過を誘導する差
圧シールにおいて、上記空間領域相互間の境界にて長尺
薄帯の巻きがけ案内を司る単一のガイドロールを備え、
このガイドロールに、その外周をほぼ半周にわたって取
り囲み、長尺薄帯の巻きがけ域を除いて該ガイドロール
の外周面に対してのみ極く微小なすき間を形成する凹円
弧状シール面と長尺薄帯の巻きがけ域にて該長尺薄帯の
背面並びに両側縁に対して極く微小なすき間を直接形成
する第２の凹円弧状シール面を有するシーリングアタッ
チメントを配置してなり、該シーリングアタッチメント
は、第２の凹円弧状シール面に、長尺薄帯の断面寸法よ
りもやや大きいがガイドロールのロール幅よりも狭い幅
にて開口し、ガイドロールに巻きがけられた長尺薄帯を
圧力差のある空間領域へ誘導する細長い通路を備える、
ことを特徴とする差圧シール装置であり、ここで上記単
一のガイドロールは、ロール外周面に多数の小孔を有す
る中空ロールからなり、該中空ロールの内部には、中空
ロールの内周に面した吸引口を有し、巻がけ域における
長尺薄帯をロール外周面に吸引密着させる円筒部材を備
えたものであるのが望ましい。(Means for Solving the Problems) The present invention provides a differential pressure seal for inducing continuous passage of a long ribbon while maintaining the pressure difference between the space regions having the pressure difference. Equipped with a single guide roll that controls the winding of long strips at the boundary between them,
This guide roll has a concave arc-shaped sealing surface that surrounds the outer periphery of the guide roll for almost half the circumference and forms a very small gap only on the outer peripheral surface of the guide roll except for the winding area of the long strip and the long length. A sealing attachment having a second concave arc-shaped sealing surface that directly forms extremely small gaps on the back surface and both side edges of the long thin strip in the winding area of the thin strip, and the sealing is provided. The attachment is opened on the second concave arc-shaped sealing surface with a width slightly larger than the cross-sectional dimension of the long ribbon but narrower than the roll width of the guide roll, and the long ribbon wound around the guide roll. An elongate passage that guides the space to a space area with a pressure difference,
A differential pressure sealing device characterized in that the single guide roll comprises a hollow roll having a large number of small holes on the outer peripheral surface of the roll, and the inside of the hollow roll has an inner periphery of the hollow roll. It is desirable to have a cylindrical member that has a suction port facing to and that suctions and adheres the long thin strip in the winding area to the outer peripheral surface of the roll.
さて第１図にこの発明による差圧シール装置を適用した
事例を示し、図中１は長尺薄帯、２はガイドロール、３
はシーリングアタッチメントであって、４は第１差圧
室、５は第２差圧室、６は第３差圧室で、これらの圧力
差のある空間領域相互間にわたって該圧力差を維持しつ
つ長尺薄帯１を大気圧p0下から添数字の順の圧力ｐに真
空度を高めるが、ここで差圧の値が最も高いp0−p1の空
間領域相互間に、この発明の差圧シール装置を用いた場
合について、先ず説明する。FIG. 1 shows an example in which the differential pressure sealing device according to the present invention is applied, in which 1 is a long thin strip, 2 is a guide roll, and 3 is a guide roll.
Is a sealing attachment, 4 is a first differential pressure chamber, 5 is a second differential pressure chamber, and 6 is a third differential pressure chamber, while maintaining the pressure difference between the space regions having the pressure difference. The vacuum degree of the long thin strip 1 is increased from the atmospheric pressure p 0 to the pressure p in the order of the subscripts. Here, between the spatial regions of p 0 −p 1 where the differential pressure value is the highest, The case of using the differential pressure seal device will be described first.
該領域相互間の境界に相当する差圧室ケーシング７の入
側にて、ガイドロール２を軸受け支持し、このガイドロ
ール２の外周に長尺薄帯１を予め設定された巻付き接触
角θにて、巻きがけする。The guide roll 2 is supported by the inlet side of the differential pressure chamber casing 7 corresponding to the boundary between the regions, and the long thin strip 1 is provided on the outer circumference of the guide roll 2 at a preset winding contact angle θ. Then, I roll it up.
シーリングアタッチメント３は、ガイドロール２の外周
をほぼ半周にわたって取囲み、長尺薄帯１の巻きがけ域
を除いてガイドロール２の外周面に対してのみ極く微小
なすき間δ１を形成する凹円弧状シール面s1と、巻きが
け域にて長尺薄帯１の背面並びに両側縁に対してやはり
極く微小なすき間δ２とδ３，δ３′を直接形成する第
２の凹円弧状シール面s2及び第２の凹円弧状シール面s2
にて長尺薄帯１の断面寸法よりもやや大きいがガイドロ
ール２のロール幅よりも狭い幅にて開口しガイドロール
２に巻きがけられた長尺薄帯１を圧力差のある空間領域
へ誘導する細長い通路ｔとをそなえる。その外観を第２
図（ａ）に、またガイドロール２に面する凹円弧状シー
ル面s1，s2をわかり易く第２図（ｂ）にそれぞれ図解し
た。The sealing attachment 3 surrounds the outer circumference of the guide roll 2 for almost half the circumference, and forms a very small gap δ 1 only on the outer peripheral surface of the guide roll 2 except for the winding area of the long thin strip 1. The arcuate sealing surface s 1 and the second concave circle that directly forms very small gaps δ 2 and δ 3 , δ 3 ′ on the back surface and both side edges of the long thin strip 1 in the winding area. Arc-shaped sealing surface s 2 and second concave arc-shaped sealing surface s 2
At a width slightly larger than the cross-sectional dimension of the long thin strip 1 but narrower than the roll width of the guide roll 2, the long thin strip 1 wound around the guide roll 2 is moved to a space region having a pressure difference. It has an elongated passage t for guiding. The appearance is second
The concave arc-shaped sealing surfaces s 1 and s 2 facing the guide roll 2 are illustrated in FIG. 2 (a) for easy understanding, respectively.
なお、上掲第２図（ａ）（ｂ）については一体構造にな
るシーリングアタッチメント３の例を示したが各構成部
材の接合部におけるシールを確実にできるものであれば
分割構造であっても一向にかまわない。2 (a) and 2 (b) above show an example of the sealing attachment 3 having an integral structure, but it may have a divided structure as long as it can reliably seal the joint portion of each component. I don't care.
第１図に示した例で、差圧室4,5間及び5,6間の差圧（p1
−p2），（p2−p3）は、上述の（p0−p1）に比しはるか
に小さいこともあって、軸心を通板方向にずらせたロー
ル対8,9によるロールシールを用いた場合を示してい
る。In the example shown in FIG. 1, the differential pressure between the differential pressure chambers 4,5 and 5 and 6 (p 1
-P 2), (p 2 -p 3) is partly much smaller that than the above-mentioned (p 0 -p 1), the roll by the roll pair 8,9 which has shifted the axis in the sheet passing direction The case where a seal is used is shown.
また第３図に、この発明による差圧シール装置のとくに
単一のガイドロール２を、ロール外周面に多数の小孔2a
を有する中空ロールとして、この中空ロール内部に、複
数の吸引口10aを有する固定式の円柱部材10を組込んだ
好適例を示した。上記円柱部材10の吸引口10aは、該部
材10を保持する固定支持軸11に設けた吸引口11aと連通
していて、真空ポンプ（図示省略）の作動により、長尺
薄帯１の通板中、該薄帯１を巻きがけ域においてロール
２の外面に吸引密着させる構造になる。Further, in FIG. 3, a single guide roll 2 of the differential pressure seal device according to the present invention is shown in FIG.
As a hollow roll having the above, a preferred example is shown in which a fixed columnar member 10 having a plurality of suction ports 10a is incorporated inside the hollow roll. The suction port 10a of the columnar member 10 communicates with the suction port 11a provided in the fixed support shaft 11 that holds the member 10, and the passage of the long thin strip 1 by the operation of a vacuum pump (not shown). In the structure, the ribbon 1 is sucked and adhered to the outer surface of the roll 2 in the winding area.
（作用） 長尺薄帯１は大気圧p0から第１差圧室４内の圧力p1に至
るとくに高い差圧の下に送り進められ、このとき凹円弧
状シール面s1及びs2において極く微小なすき間δ１，δ
２，δ３及びδ３′をへだてるにすぎないので有効な差
圧シールが成就されるだけでなく、長尺薄帯１は単一の
ガイドロール２に巻きがけされるようになっているの
で、強い面圧は受けることがない。(Operation) The long thin strip 1 is advanced under a particularly high differential pressure from the atmospheric pressure p 0 to the pressure p 1 in the first differential pressure chamber 4, and at this time, the concave arc-shaped sealing surfaces s 1 and s 2 Very small gaps δ 1 , δ at
Not only is an effective differential pressure seal fulfilled because only 2 δ 3 and δ 3 ′ are bent, the long ribbon 1 is wound on a single guide roll 2. Therefore, it does not receive strong surface pressure.
ここで長尺薄帯１をガイドロール２に巻きがけして通板
させる際、単に巻きがけするのみでは該薄帯１の巻付き
接触角θや張力によっては製品品質が異なることがあ
り、このため巻付き接触角θについては15°〜120°の
範囲に、また張力は0.1〜2.0kg/mm2の範囲に設定するの
が望ましい。Here, when the long thin strip 1 is wound around the guide roll 2 and passed through, the product quality may vary depending on the winding contact angle θ and the tension of the thin strip 1 simply by rolling. Therefore, it is desirable to set the wrapping contact angle θ in the range of 15 ° to 120 ° and the tension in the range of 0.1 to 2.0 kg / mm 2 .
以下、その理由を、とくに下記の条件にて製造した珪素
鋼板に、上記の装置を適用したイオンプレーティング処
理にてTiNの被膜（厚さ0.8μｍ）を形成させた実験例に
基づいて説明する。Hereinafter, the reason will be described based on an experimental example in which a TiN film (thickness 0.8 μm) is formed on a silicon steel sheet manufactured under the following conditions by ion plating treatment using the above apparatus. .
実験に用いた珪素鋼板は、表−１に示す成分組成になる
珪素鋼スラブを、1340℃で４時間加熱後、熱間圧延して
厚さ2.0mmの熱延板に仕上げ、その後950℃で３分間の中
間焼鈍を挟んで２回の冷間圧延を施して厚さ0.23mmの最
終冷延板とし、その後830℃の湿水素中で脱炭１次再結
晶焼鈍を施した後、鋼板表面上にMgO（35％）、Al2O
3（60％）、TiO2（４％）、SrSO4（１％）よりなる焼鈍
分離剤をスラリー塗布してから、850℃で５時間の２次
再結晶焼鈍後、1180℃で８時間乾水素中にて鈍化焼鈍を
施し、その後鋼板表面の酸化物を酸洗により除去した上
で電解研磨により中心線平均粗さRa:0.1μｍに仕上げた
ものを用いた。The silicon steel sheet used in the experiment is a silicon steel slab having the composition shown in Table-1, heated at 1340 ° C for 4 hours, hot-rolled to a hot rolled sheet with a thickness of 2.0 mm, and then at 950 ° C. The final cold-rolled sheet with a thickness of 0.23 mm is cold-rolled twice with intermediate annealing for 3 minutes, and then decarburized primary recrystallization annealing is performed in wet hydrogen at 830 ° C. MgO (35%), Al 2 O on top
Annealing agent consisting of 3 (60%), TiO 2 (4%) and SrSO 4 (1%) was applied as a slurry, followed by secondary recrystallization annealing at 850 ° C for 5 hours and then drying at 1180 ° C for 8 hours. The alloy was annealed in hydrogen, then the oxides on the surface of the steel sheet were removed by pickling, and then electrolytic polishing was performed to finish the center line average roughness Ra: 0.1 μm.
第４図は、巻付き接触角θ及び張力を種々変化させた場
合の磁気特性に及ぼす影響を調査したグラフであるが、
ガイドロール２の巻付き接触角θが15°以上、望ましく
は60°以上でありかつ、張力が0.1〜2.0kg/mm2、望まし
くは0.2〜0.5kg/mm2の範囲において良好な磁気特性を示
すのは明らかである。これに反し、巻付き接触角θが小
さく、かつ鋼板の張力が0.1kg/mm2未満では、差圧室へ
導入する際の鋼板の振動によって磁気特性が劣化した
り、板割れなどが発生し、また張力が2.0kg/mm2を越え
た場合についても磁気特性が劣化した。 FIG. 4 is a graph in which the influence on the magnetic characteristics when the winding contact angle θ and the tension are variously changed is investigated.
Good magnetic properties are obtained when the winding contact angle θ of the guide roll 2 is 15 ° or more, preferably 60 ° or more and the tension is 0.1 to 2.0 kg / mm 2 , preferably 0.2 to 0.5 kg / mm 2. It is clear to show. On the contrary, when the winding contact angle θ is small and the tension of the steel sheet is less than 0.1 kg / mm 2 , the vibration of the steel sheet when it is introduced into the differential pressure chamber deteriorates the magnetic properties and causes the cracking of the sheet. Also, the magnetic properties deteriorated when the tension exceeded 2.0 kg / mm 2 .
なお、巻付き接触角θは120°を超える場合には例えば
第１図から明らかなように上下のシーリングアタッチメ
ント３とロールとのシール長さが異なり、隙間を通して
の空気流の大きさが非対称的になりそれにより鋼板のパ
タツキによる板割れがはげしくなるため120°以内に設
定するのが望ましい。When the wrapping contact angle θ exceeds 120 °, for example, as apparent from FIG. 1, the sealing lengths of the upper and lower sealing attachments 3 and the rolls are different, and the magnitude of the air flow through the gap is asymmetric. Therefore, it is desirable to set it within 120 ° because plate cracking due to the fluttering of the steel plate becomes more severe.
長尺薄帯１の巻付き接触角θおよび張力の好適範囲は上
述した通りであるが、その設定値が上記範囲の下限近傍
にあると、やはり通板時に薄帯１に振動等が発生するう
れいがある。このような場合は、上掲第３図に示したよ
うにガイドロール２の巻きがけ域で長尺薄帯１を、ロー
ル外周面に吸引密着させることで有利に防止できる。The preferable ranges of the contact angle θ and the tension of the long thin strip 1 are as described above. However, when the set values are near the lower limit of the above range, the thin strip 1 also vibrates when it is threaded. I'm happy. In such a case, as shown in FIG. 3 above, it can be advantageously prevented by suction-adhering the long thin strip 1 to the outer peripheral surface of the roll in the winding area of the guide roll 2.
なお、ガイドロール２の外周面に設ける小孔10aのサイ
ズは、0.1φ〜2.0φmm程度が好適であり、また長尺薄帯
１をロール外面に吸引密着させる吸引力は円柱部材10に
設けた吸引口10aの径（ａ）と、ガイドロール２の内周
面から円柱部材10までに至る間にて形成されるすき間
（ｂ）（第３図参照）の差によって決るが、（ａ）＞＞
（ｂ）のように設定すれば、巻きがけ域以外の穴から吸
引される空気は無視できる。また、ガイドロール２の巻
きがけ域の長尺薄帯１を確実に吸引させるために、円柱
部材10の表面にシール部材12を設けるのはさらに好適で
ある。The size of the small holes 10a provided on the outer peripheral surface of the guide roll 2 is preferably about 0.1φ to 2.0φmm, and the columnar member 10 is provided with a suction force for suction-adhering the long thin strip 1 to the outer surface of the roll. It depends on the difference between the diameter (a) of the suction port 10a and the gap (b) (see FIG. 3) formed between the inner peripheral surface of the guide roll 2 and the columnar member 10, but (a)>>
If set as in (b), the air sucked from the holes other than the winding area can be ignored. Further, it is more preferable to provide the seal member 12 on the surface of the columnar member 10 in order to surely suck the long thin strip 1 in the winding region of the guide roll 2.
なお第１図において図示したδ２，δ１については長尺
薄帯幅が変わった場合に過大となっても多少は、許容せ
ざるを得ないが、このような場合においては気密性を有
しロール軸方向に移動可能な補助板を設置して薄帯幅の
変化があっても常に微小なすき間とすることもできる。Regarding δ 2 and δ 1 shown in FIG. 1 , even if it becomes excessive when the length of the long thin ribbon changes, there is some allowance, but in such a case, airtightness is obtained. However, it is also possible to install an auxiliary plate that is movable in the roll axis direction so that even if there is a change in the width of the ribbon, a minute gap can always be created.
ここに一対のロールによるロールシールにて狭圧された
長尺薄帯の品質劣化の事例を、一方向性珪素鋼板の仕上
焼鈍後、その表面酸化物を除去した上で電解研磨により
中心線平均粗さRa:0.1μｍに鏡面仕上げした場合のロー
ルシールによる面圧に依存した鉄損劣化度について第５
図に示したように、面圧の増加、それもとくに100kg/cm
2をこえることきには、鉄損の劣化が著しいのに反して
この発明によると、このような面圧を発生するうれいの
ない単一のガイドロールに、上記のようなシーリングア
タッチメントの工夫によって、確実な差圧シールが成就
される。A case of quality deterioration of a long thin strip, which was narrowed by a roll seal with a pair of rolls, was taken as a center line average by electrolytic polishing after finishing annealing of a unidirectional silicon steel sheet and removing its surface oxide. Roughness Ra: Deterioration of iron loss depending on surface pressure due to roll seal when mirror finished to 0.1 μm No. 5
As shown in the figure, the increase in surface pressure, especially 100kg / cm
When it exceeds 2 , on the contrary to the remarkable deterioration of the iron loss, according to the present invention, the single guide roll without the joy that generates such a surface pressure, by devising the sealing attachment as described above, A reliable differential pressure seal is achieved.
この発明の差圧シール装置は、上記のように一方向性珪
素鋼板に適用される仕上焼鈍後の酸化物除去、ないしは
さらにRa≦0.4μｍの鏡面仕上を経て、ドライプレーテ
ィングでもって、Ti,Zr,V,Nb,Ta,Cr,Mo,Co,Ni,Mn,Al,B
およびSiの窒化物及び／又は炭化物並びにAl,Ni,Cu,W,S
i及びZnの酸化物のうち少なくとも１種を、それらの地
鉄との混合相を介した張力皮膜の形成による一方向性珪
素鋼板の有利な鉄損低減（特開昭62−1820号、同62−18
22号公報など参照）を図るとき、極めて有用であって、
とくにこのドライプレーティングを1000℃〜1100℃の高
温状態で施すことにより、鋼板両面における弾性張力の
有効な利用によって有利に超鉄損化を可能ならしめる
（特開昭62−30302号公報参照）場合にももちろん適用
できる。The differential pressure seal device of the present invention is, as described above, subjected to oxide removal after finish annealing applied to a unidirectional silicon steel sheet, or further, to a mirror finish of Ra ≦ 0.4 μm, by dry plating to obtain Ti, Zr. , V, Nb, Ta, Cr, Mo, Co, Ni, Mn, Al, B
And Si nitrides and / or carbides and Al, Ni, Cu, W, S
Advantageous iron loss reduction of unidirectional silicon steel sheet by forming a tension film by mixing at least one of oxides of i and Zn with the mixed phase with base iron (JP-A-62-1820). 62-18
22), it is extremely useful when
In particular, by applying this dry plating at a high temperature of 1000 ° C to 1100 ° C, it is possible to effectively use the elastic tension on both sides of the steel sheet to make the ultra-iron loss advantageous (see JP-A-62-30302). Of course, it can also be applied.
（実施例） 第６図には、第１図について述べた差圧シールを２回く
り返すことによって、p0からp1さらにp1からp2への高差
圧を、より有利に達成し得る例を示し、また第７図は、
この発明による差圧シール装置の２組みを、ガイドロー
ル2,2″の接近した対向配置（ただし両ロールにより狭
圧しない）することによって、すでに述べた差圧シール
の２回くり返しで、シール効果をより高めた例を示す。(Example) In FIG. 6, by repeating the differential pressure seal described in FIG. 1 twice, a high differential pressure from p 0 to p 1 and from p 1 to p 2 can be achieved more advantageously. Figure 7 shows an example of how to obtain
By arranging the two sets of the differential pressure seal device according to the present invention so that the guide rolls 2 and 2 ″ closely face each other (however, the pressure is not narrowed by both rolls), the sealing effect can be obtained by repeating the differential pressure seal described above twice. Here is an example in which
さらに第８図にて、やはり差圧シール装置の２組みを、
ガイドロール2,2″の離間対向配置にて、それらの間に
スリット15を挿入してやはり差圧シールを２回くり返し
シール効果を高める場合を示した。Furthermore, referring to FIG. 8, two sets of differential pressure seal devices are
The case where the guide rolls 2 and 2 ″ are spaced apart from each other and a slit 15 is inserted between them to repeat the differential pressure seal twice to enhance the sealing effect is shown.
以上何れの場合も、微小すき間を0.01〜0.5mm程度とす
ることによって、この発明の差圧シール装置は、たとえ
ば長尺薄帯の幅300〜1200mm、厚み0.1〜1.2mmのとき、
それに隣接する低い方の差圧室圧力に対する倍率にて1.
5〜20倍程度の差圧を維持することができた。In any of the above cases, by setting the minute gap to about 0.01 to 0.5 mm, the differential pressure sealing device of the present invention has, for example, a width 300 to 1200 mm of a long thin strip and a thickness of 0.1 to 1.2 mm,
At the magnification to the pressure of the lower differential pressure chamber adjacent to it, 1.
It was possible to maintain a differential pressure of about 5 to 20 times.
なお、微小すき間を上記の範囲において微小調整するに
は、例えばシーリングアタッチメント３を全体的又はそ
の一部、とくに長尺薄帯の巻きがけ域に面する部位を上
下に移動可能としておき、これらを適宜変位させるか、
シーリングアタッチメント３のシール面に対してこれに
近接又は離隔するようにガイドロール２を変位させれば
よい。In order to finely adjust the minute gap in the above range, for example, the sealing attachment 3 may be moved in whole or a part thereof, in particular, a portion facing the winding area of the long thin strip may be moved up and down. Displace appropriately,
The guide roll 2 may be displaced so as to approach or separate from the sealing surface of the sealing attachment 3.
また第９図にてガイドロール２のジャーナルに隣接した
端面にかぶさってそこにも差圧シールを付加的に行い、
装置側面における差圧シールを向上させる場合の例を、
また第10図、第11図にて、ガイドロール２のジャーナル
に隣接した端面に段差あるいは凹部を設け、この段差や
凹部に沿う形状を有したシーリングアタッチメント３を
組込んで、やはりそこにも差圧シールを付加的に行い、
装置の側面における差圧シールをより一層向上させた例
をそれぞれ示す。なお、第10図に示した例で、差圧室4,
5間及び5,6間の差圧（P2−P3）は（P0−P1）に比しはる
かに小さいこともあって、第１図で示したと同様に軸心
を通板方向にずらせたロール対8,9によるロールシール
（ただし各ロールにより狭圧しない）を用いた場合を示
している。Further, in FIG. 9, an end face adjacent to the journal of the guide roll 2 is covered and a differential pressure seal is additionally provided there as well.
An example of improving the differential pressure seal on the side of the device,
Further, in FIG. 10 and FIG. 11, a step or a recess is provided on the end surface adjacent to the journal of the guide roll 2, and a sealing attachment 3 having a shape along the step or the recess is incorporated, and also there is a difference. Additional pressure sealing,
An example in which the differential pressure seal on the side surface of the device is further improved is shown below. In the example shown in FIG. 10, the differential pressure chamber 4,
The differential pressure (P 2 −P 3 ) between 5 and 5 and 6 is much smaller than (P 0 −P 1 ), so that the axis is the same as that shown in FIG. The figure shows the case where a roll seal composed of offset roll pairs 8 and 9 is used (however, the pressure is not narrowed by each roll).
さらに第12図に、上掲第10図に示した差圧シールを６回
繰返すことによって、P0からP5への高差圧をより有利に
達成し得る場合の例を示した。Further, FIG. 12 shows an example in which a high differential pressure from P 0 to P 5 can be more advantageously achieved by repeating the differential pressure seal shown in FIG. 10 above 6 times.
次に第１図に示した差圧シール装置を組込んだPVD設備
を適用して、珪素鋼板にイオンプレーティング処理を施
してTiN（0.8μｍ）の被膜を形成し、得られた製品の磁
気特性を調査した。Next, applying PVD equipment incorporating the differential pressure sealing device shown in Fig. 1, ion plating treatment was applied to the silicon steel sheet to form a TiN (0.8 µm) coating, and the magnetic properties of the obtained product The characteristics were investigated.
その結果を通板時の各条件とともに表−２に示す。The results are shown in Table 2 together with the respective conditions during striping.
なお上記珪素鋼板は、表−３に示す成分組成になる珪素
鋼スラブを、1440℃で３時間加熱後、熱間圧延して厚さ
1.8mmの熱延板とし、その後1050℃の中間焼鈍を挟んで
２回の冷間圧延を施し厚さ0.23mmの最終冷延板とし、そ
の後、850℃の湿水素中にて脱炭焼鈍を施してから鋼板
表面上にMgO（35％）、Al2O3（65％）の焼鈍分離剤をス
ラリー塗布した後、850℃から1050℃まで15℃/hrで昇温
して２次再結晶させた後、1200℃で８時間乾水素中で鈍
化処理を施した。その後鋼板表面上の酸化物を酸洗によ
り除去した上で、電解研摩により中心線平均粗さRa:0.1
μｍに仕上げたものを用いた。 In addition, the silicon steel sheet has a thickness obtained by heating a silicon steel slab having the composition shown in Table 3 at 1440 ° C. for 3 hours and hot rolling.
1.8mm hot rolled sheet, then cold rolled twice with 1050 ° C intermediate annealing sandwiched to give a final cold rolled sheet with a thickness of 0.23mm, and then decarburized and annealed in 850 ° C wet hydrogen. After applying, an annealing separating agent of MgO (35%) and Al 2 O 3 (65%) is applied to the surface of the steel sheet by slurry, and then the temperature is raised from 850 to 1050 ° C at 15 ° C / hr to perform secondary recrystallization. After that, it was subjected to a blunting treatment in dry hydrogen at 1200 ° C. for 8 hours. After removing the oxide on the surface of the steel sheet by pickling, the center line average roughness Ra : 0.1 by electrolytic polishing.
The one finished to μm was used.
（発明の効果） この発明の差圧シール装置は、単一のガイドロールにア
タッチメントを併用するのみで、長尺薄帯に局部面圧を
生じさせることなく、高い差圧シールが成就されて製品
の品質が面圧の作用によって劣化するうれいをなくすこ
とができ、また通板中における被処理物の振動を有利に
防止することも可能でとくに超鉄損一方向製珪素鋼板に
対しドライプレーティング皮膜の形成を行うときに用い
て好適なばかりでなく、局部面圧が製品の品質に影響し
易い、軟鋼などに対しても適用し得るのはいうまでもな
い。 (Effects of the Invention) The differential pressure seal device of the present invention achieves a high differential pressure seal without using a single guide roll together with an attachment and producing a local surface pressure on a long strip. It is possible to eliminate the discomfort that the quality of the steel deteriorates due to the effect of surface pressure, and it is possible to advantageously prevent the vibration of the object to be processed during the passing of the plate. It is needless to say that not only is it suitable for use when forming a film, but it can also be applied to mild steel, etc., where local surface pressure tends to affect product quality.
【図面の簡単な説明】 第１図はこの発明に従う差圧シール装置の構成を示す模
式図、 第２図（ａ），（ｂ）は要部の外観図、 第３図（ａ），（ｂ）及び（ｃ）は要部の断面および外
観を示す図、 第４図はロールの巻付き接触角度θと張力の関係を示す
グラフ、 第５図は面圧と一方向性珪素鋼板の鉄損劣下度の相関グ
ラフであり、 第６図〜第８図はこの発明の実施例を示す模式図、 第９図は別例の要部分解斜視図、 第10図〜第12図はこの発明の他の実施例を示す模式図で
ある。 １…長尺薄帯、２…ガイドロール 2a…小孔、３…アタッチメント ４、5,6…差圧室、７…差圧ケーシング 8,9…ロール、10…吸引ロール 10a…吸引口、11…固定支持軸 11a…吸引口、12…シール部材 13…軸受、14…プーリー s1…凹円弧状シール面 s2…第２の凹円弧シール面 ｔ…通路BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram showing the structure of a differential pressure sealing device according to the present invention, FIGS. 2 (a) and 2 (b) are external views of the main parts, and FIGS. b) and (c) are views showing the cross section and appearance of the main part, FIG. 4 is a graph showing the relationship between the winding contact angle θ of the roll and the tension, and FIG. 5 is the surface pressure and the iron of the unidirectional silicon steel sheet. FIG. 6 is a correlation graph of the degree of loss and deterioration, FIG. 6 to FIG. 8 are schematic diagrams showing an embodiment of the present invention, FIG. 9 is an exploded perspective view of a main part of another example, and FIG. 10 to FIG. It is a schematic diagram which shows the other Example of invention. 1 ... Long ribbon, 2 ... Guide roll 2a ... Small hole, 3 ... Attachment 4,5,6 ... Differential pressure chamber, 7 ... Differential pressure casing 8,9 ... Roll, 10 ... Suction roll 10a ... Suction port, 11 ... stationary support shaft 11a ... suction port, 12 ... sealing member 13 ... bearing, 14 ... pulley s 1 ... concave arcuate sealing surface s 2 ... second recessed circular sealing surface t ... passage
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭61−12867（ＪＰ，Ａ) 特開 昭60−234964（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP 61-12867 (JP, A) JP 60-234964 (JP, A)
Claims (2)
圧力差を維持しつつ長尺薄帯の連続的な通過を誘導する
差圧シール装置において、 上記空間領域相互間の境界にて長尺薄帯の巻きがけ案内
を司る単一のガイドロールを備え、このガイドロール
に、その外周をほぼ半周にわたって取り囲み、長尺薄帯
の巻きがけ域を除いて該ガイドロールの外周面において
のみ極く微小なすき間を形成する凹円弧状シール面と長
尺薄帯の巻きがけ域にて該長尺薄帯の背面並びにその両
側縁に対して極く微小なすき間を直接形成する第２の凹
円弧状シール面を有するシーリングアタッチメントを配
置してなり、該シーリングアタッチメントは、第２の凹
円弧状シール面に、長尺薄帯の断面寸法よりもやや大き
いがガイドロールのロール幅よりも狭い幅にて開口し、
ガイドロールに巻きがけられた長尺薄帯を圧力差のある
空間領域へ誘導する細長い通路を備える、ことを特徴と
する差圧シール装置。1. A differential pressure seal device for inducing continuous passage of a long ribbon while maintaining the pressure difference between the space regions having a pressure difference. It is equipped with a single guide roll for guiding the winding of the thin ribbon, and the guide roll is surrounded by the outer circumference for almost half the circumference, and only the outer peripheral surface of the guide roll is excluded except for the winding region of the long ribbon. A concave arc-shaped sealing surface that forms a minute gap and a second concave that directly forms a very minute gap on the back surface of the long ribbon and both side edges thereof in the winding area of the long ribbon. A sealing attachment having an arc-shaped sealing surface is arranged, and the sealing attachment has a width on the second concave arc-shaped sealing surface that is slightly larger than the cross-sectional dimension of the long ribbon but narrower than the roll width of the guide roll. Open at Speak
A differential pressure sealing device comprising an elongated passage for guiding a long strip wound around a guide roll to a space region having a pressure difference.
数の小孔を有する中空ロールからなり、該中空ロールの
内部には、中空ロールの内周に面した吸引口を有し、巻
きがけ域における長尺薄帯をロール外周面に吸引密着さ
せる円柱部材を備えたものである特許請求の範囲第１項
記載の差圧シール装置。2. A single guide roll comprises a hollow roll having a large number of small holes on the outer peripheral surface of the roll, and the hollow roll has a suction port facing the inner periphery of the hollow roll and is wound. The differential pressure sealing device according to claim 1, further comprising a columnar member for suction-adhering the long thin strip in the cliff region to the outer peripheral surface of the roll.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19449987A JPH0672301B2 (en) | 1987-05-20 | 1987-08-05 | Differential pressure seal device |
| DE19883851087 DE3851087T2 (en) | 1987-05-20 | 1988-05-18 | Differential pressure sealing apparatus and method. |
| EP19880107959 EP0291952B1 (en) | 1987-05-20 | 1988-05-18 | Differential pressure sealing apparatus and method |
| US07/590,503 US5192585A (en) | 1987-05-20 | 1990-09-26 | Differential pressure sealing apparatus and method |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-121016 | 1987-05-20 | ||
| JP12101687 | 1987-05-20 | ||
| JP19449987A JPH0672301B2 (en) | 1987-05-20 | 1987-08-05 | Differential pressure seal device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6465265A JPS6465265A (en) | 1989-03-10 |
| JPH0672301B2 true JPH0672301B2 (en) | 1994-09-14 |
Family
ID=26458487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19449987A Expired - Fee Related JPH0672301B2 (en) | 1987-05-20 | 1987-08-05 | Differential pressure seal device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0672301B2 (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100706025B1 (en) * | 2001-07-18 | 2007-04-11 | 고려용접봉 주식회사 | Pail pack for welding wire |
| DE102006022841A1 (en) | 2006-03-30 | 2007-10-04 | Sidergas Spa | Holder for a welding wire coil comprises fingers and a base element with an upper side and a lower side |
| US7690593B2 (en) | 2007-07-09 | 2010-04-06 | Lincoln Global, Inc. | Welding wire guide ring |
| JP5280224B2 (en) * | 2009-01-27 | 2013-09-04 | 日立造船株式会社 | Vacuum deposition system |
| JP5325031B2 (en) * | 2009-06-25 | 2013-10-23 | 日立造船株式会社 | Vacuum film forming apparatus and vacuum film forming method |
| US8127923B2 (en) | 2009-11-13 | 2012-03-06 | Sidergas Spa | Container for welding wire |
| WO2011078626A2 (en) * | 2009-12-24 | 2011-06-30 | Posco | Strip passing apparatus, apparatus for treating surface of strip with the same, and method for treating surface of strip |
| US9260269B2 (en) | 2011-11-22 | 2016-02-16 | Lincoln Global, Inc. | Wire retaining ring for a welding system |
| US10343231B2 (en) | 2014-05-28 | 2019-07-09 | Awds Technologies Srl | Wire feeding system |
| US10010962B1 (en) | 2014-09-09 | 2018-07-03 | Awds Technologies Srl | Module and system for controlling and recording welding data, and welding wire feeder |
| US10350696B2 (en) | 2015-04-06 | 2019-07-16 | Awds Technologies Srl | Wire feed system and method of controlling feed of welding wire |
| US9950857B1 (en) | 2016-10-17 | 2018-04-24 | Sidergas Spa | Welding wire container |
| US11278981B2 (en) | 2020-01-20 | 2022-03-22 | Awds Technologies Srl | Device for imparting a torsional force onto a wire |
| CN116770258A (en) * | 2021-07-29 | 2023-09-19 | 苏州道一至诚纳米材料技术有限公司 | Double-sided reciprocating film plating device |
-
1987
- 1987-08-05 JP JP19449987A patent/JPH0672301B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6465265A (en) | 1989-03-10 |
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