JPH0331594A - Water-sealed pump with ejector - Google Patents
Water-sealed pump with ejectorInfo
- Publication number
- JPH0331594A JPH0331594A JP16499889A JP16499889A JPH0331594A JP H0331594 A JPH0331594 A JP H0331594A JP 16499889 A JP16499889 A JP 16499889A JP 16499889 A JP16499889 A JP 16499889A JP H0331594 A JPH0331594 A JP H0331594A
- Authority
- JP
- Japan
- Prior art keywords
- ejector
- mixing chamber
- water injection
- injection pump
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 43
- 238000002347 injection Methods 0.000 claims description 40
- 239000007924 injection Substances 0.000 claims description 40
- 238000012856 packing Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
Landscapes
- Jet Pumps And Other Pumps (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、容積形真空ポンプの一種として知られる水
射式ポンプの吸込側にエゼクタを接続することにより、
水射式ポンプ単独の特性より、より高い真空度を得るも
のとして使用され、例えば復水式蒸気タービンの復水器
の空気抽出装置↓こ用いられるようなエゼクタ付の水射
式ポンプに関する。[Detailed Description of the Invention] [Industrial Application Field] This invention provides a water injection pump known as a type of positive displacement vacuum pump, by connecting an ejector to the suction side of the water injection pump.
This invention relates to a water injection pump with an ejector, which is used to obtain a higher degree of vacuum due to the characteristics of a water injection pump alone, and is used, for example, in an air extractor of a condenser of a condensing steam turbine.
第２図は従来例のエゼクタ付の水射式ポンプの配管系統
図、第３図は第２図の特性曲線図、第４図は第２図のエ
ゼクタの断面図である。FIG. 2 is a piping system diagram of a conventional water injection pump with an ejector, FIG. 3 is a characteristic curve diagram of FIG. 2, and FIG. 4 is a sectional view of the ejector of FIG. 2.
これらの図において、水射式ポンプ１はケーシングの中
で偏心した羽根車が回転することにより、ケーシングの
内周に生じる水リングと羽根車の羽根の間の閉じた空間
の容積が変ることにより、図示しないボートプレートを
介して吸込側１ａから吐出側１ｂに空気を吸い出し真空
ポンプとして作動するものである。In these figures, the water injection pump 1 is constructed by rotating an eccentric impeller inside the casing, which changes the volume of the closed space between the water ring created on the inner periphery of the casing and the blades of the impeller. , operates as a vacuum pump by sucking out air from the suction side 1a to the discharge side 1b via a boat plate (not shown).
水射式ポンプ１の吐出側ｉｂには気水分離器２が、吸込
側１ａにはノズル３、ディフューザ４、混合室５からな
るエゼクタｌＯの吐出口６がそれぞれ接続される。ノズ
ル３は空気口１３と弁７を介して駆動空気８を吸い込み
、混合室５は吸気口９を介して例えば蒸気タービンの図
示しない復水器に接続される。エゼクタ１０を作動させ
ないで復水器から直接に水射式ポンプｌに接続させるた
めには弁１１を備えたバイパス管１２が設けられる。A steam/water separator 2 is connected to the discharge side ib of the water injection pump 1, and a discharge port 6 of an ejector 10 consisting of a nozzle 3, a diffuser 4, and a mixing chamber 5 is connected to the suction side 1a. The nozzle 3 sucks driving air 8 through an air port 13 and a valve 7, and the mixing chamber 5 is connected via an intake port 9 to a condenser (not shown) of a steam turbine, for example. In order to connect the condenser directly to the water injection pump l without operating the ejector 10, a bypass pipe 12 with a valve 11 is provided.
第３図には水射式ポンプ単独とエゼクタを組合せたもの
の特性曲線が例示しである。４０から７６０ｍｍＨＨの
圧力の間では吸込容量はかなり大きいが、絶対圧力３０
ｎ＋ｍＨｇ以下では吸込容量は急激に小さくなって行く
、それはポンプの中の蒸気の分圧は真空度が高（なるに
つれて大きくなり、吸い出すべき空気の部分が次第に小
さ（なってくるからである。水射式ポンプだけでは吸込
圧力が３０ｍｍＨｇ以下ではあまり有効でなく 、３０
ａ＋ｆｆｉ）１ｇ以下の吸込圧力にすることはなるべく
さけるべきである。それは高い真空度ではポンプの羽根
車の部分にキャビチーシランの危険が生じてくることも
あるがらである。したがって水射式ポンプだけを単独で
復水器の空気抽出ポンプとして真空度７３０＋ｗｍｌ（
ｇ以上の場合に用いるのはあまり適切ではない。FIG. 3 shows an example of the characteristic curve of a water injection pump alone and a combination of an ejector. The suction capacity is quite large between 40 and 760 mmHH pressure, but at an absolute pressure of 30
Below n+mHg, the suction capacity decreases rapidly, because the partial pressure of steam inside the pump increases as the degree of vacuum increases, and the portion of air that must be sucked out becomes gradually smaller.Water An injection type pump alone is not very effective when the suction pressure is less than 30 mmHg.
a+ffi) A suction pressure of 1 g or less should be avoided as much as possible. This is because, at high vacuum levels, there is a risk of cavity silane forming in the pump impeller. Therefore, the water injection pump alone can be used as an air extraction pump for the condenser at a vacuum level of 730+wml (
It is not very appropriate to use it in cases where it is larger than g.
普通の水射式ポンプだけを用いるのは前述のように適切
ではないが、これは大気圧で働く空気エゼクタｌＯとの
簡単な組合わせで、まったく根本的に改良することがで
きる。それは水射式ポンプｌの前段として吸込側にノズ
ル３が組込まれた形となる。The use of an ordinary water injection pump alone is, as mentioned above, not suitable, but this can be quite fundamentally improved by a simple combination with an air ejector IO operating at atmospheric pressure. It has a nozzle 3 built into the suction side as a front stage of a water injection pump l.
弁７を開けることにより、大気圧の空気はノズル３を通
って噴流となってディフューザ６へ流れ込み、このとき
吸気口９からくる混合気を加速して水射式ポンプ１へと
吸込む。このエゼクタ１゜での圧縮比は１：５位にまで
なる。っまり１０ｎ＋ｍＨｇで吸込まれた混合気は５０
ｍｏ＋Ｈｇにまで圧縮され、水射式ポンプの吸込圧力は
５０ｎ＋ｍＨｇとなる。By opening the valve 7, air at atmospheric pressure passes through the nozzle 3 and flows into the diffuser 6 as a jet, accelerating the air-fuel mixture coming from the intake port 9 and sucking it into the water injection pump 1. The compression ratio at this ejector of 1° is about 1:5. The air-fuel mixture sucked in at exactly 10n+mHg is 50
It is compressed to mo+Hg, and the suction pressure of the water injection pump becomes 50n+mHg.
水射式ポンプｌとエゼクタｌＯを組合わせた場合の性能
曲線が示されている。これは空気のみを吸込ませた場合
で作動水の温度１５℃の場合である。A performance curve for a combination of a water injection pump l and an ejector lO is shown. This is the case when only air is sucked in and the working water temperature is 15°C.
３０＋＋ｕｓＨｇ以上の吸込圧力では水射式ポンプのみ
でエゼクタ１０を作動させない方が有利であるが、３゜
ａｕ＋＋Ｈｇ以下になるとエゼクタｌＯを作動させる方
が有利になることが示されている。エゼクタ１ｏが作動
する時にはノズル３内は超音速とするのがよいとされて
いる。It has been shown that at suction pressures of 30++usHg or higher, it is advantageous to use only the water injection pump and not operate the ejector 10, but when the pressure is 3°au++Hg or lower, it is advantageous to operate the ejector 10. It is said that when the ejector 1o operates, the inside of the nozzle 3 should be at supersonic speed.
前記の従来の技術において、負荷、例えば復水器の圧力
が３０ａ＋ｍＨｇ以下の時にはエゼクタを作動させるこ
とにより、水射式ポンプ単独では実現できない性能が発
揮される。In the conventional technology described above, by operating the ejector when the load, for example the pressure of the condenser, is 30a+mHg or less, performance that cannot be achieved by a water injection pump alone is exhibited.
一方、復水器の吸込空気量を小さくして運転消費エネル
ギを節約したり、反対に吸込空気量を大きくして性能を
拡大して運転したりしたいことがある。その時、水射式
ポンプの回転数を変化させれば容易にポンプの特性を変
えられ、水射式ポンプは容積形であるから、前記の特性
曲線で圧力は変らず空気量のみが回転数にほぼ比例して
変化する。On the other hand, there may be cases where it is desired to reduce the amount of air taken into the condenser to save energy consumption, or conversely, to increase the amount of air taken into the condenser to increase performance. At that time, you can easily change the pump characteristics by changing the rotation speed of the water injection pump, and since the water injection pump is a positive displacement type, the pressure does not change in the characteristic curve above, only the air volume changes as the rotation speed. It changes almost proportionally.
ところがこのような特性の変更が水射式ポンプでは容易
であるが、可動部を持たないエゼクタではおよそ次のよ
うの現象を示し回転数の変化に対応できない。However, although it is easy to change such characteristics with a water injection pump, an ejector that does not have a moving part exhibits the following phenomenon and cannot respond to changes in rotational speed.
回転数を上げると、ノズルの空気量は超音速のままで一
定であるのでエゼクタの吐出圧は高真空になり、したが
って水射式ポンプのキャビテーシヨンが発生する。When the rotational speed is increased, the amount of air in the nozzle remains constant at supersonic speed, so the discharge pressure of the ejector becomes a high vacuum, which causes cavitation in the water injection pump.
回転数を下げると、水射式ポンプの吸込空気量が減少し
、エゼクタの吐出圧力を上昇させ、吸気口すなわち負荷
である復水器の真空度が大きく低下する。When the rotational speed is lowered, the amount of air sucked into the water injection pump is reduced, the discharge pressure of the ejector is increased, and the degree of vacuum in the condenser, which is the intake port or load, is significantly reduced.
この発明の目的は、水射式ポンプの回転数を制御してエ
ゼクタのノズルの空気量が変化してもエゼクタがこれに
容易に対応できるようなエゼクタ付の水射式ポンプを提
供することにある。An object of the present invention is to provide a water injection pump with an ejector that allows the ejector to easily respond to changes in the amount of air in the ejector nozzle by controlling the rotational speed of the water injection pump. be.
この発明のエゼクタ付の水射式ポンプは、駆動空気を吸
い込むノズルと、吐出口に連通ずるディフューザと、こ
のディフューザと前記ノズルの間の空間を囲み吸気口を
備えた混合室とからエゼクタを構成し、このエゼクタの
前記吐出口を水射式ポンプの吸込側に接続するエゼクタ
付の水射式ポンプにおいて、
前記混合室に設けた複数組の前記ノズルと前記ディフュ
ーザとの間に前記混合室の外部から回動操作可能な円形
断面の切替え栓を介装し、この切替え栓に通し穴とこの
通し穴の少くとも一端に切欠部とを設け、前記通し穴の
軸心と前記ノズルの軸心が一致する回動位置では前記切
欠部を介して前記通し穴が前記混合室と連通し、交差す
る回動位置では前記切替え栓が前記ノズルの端面と前記
ディフューザの端面とを閉じるものである。In the water injection pump with an ejector of the present invention, the ejector includes a nozzle that sucks driving air, a diffuser that communicates with the discharge port, and a mixing chamber that surrounds the space between the diffuser and the nozzle and is equipped with an intake port. In this water injection pump with an ejector that connects the discharge port of the ejector to the suction side of the water injection pump, there is a space between the plurality of sets of nozzles provided in the mixing chamber and the diffuser in the mixing chamber. A switching stopper with a circular cross section that can be rotated from the outside is provided, and the switching stopper is provided with a through hole and a notch at at least one end of the through hole, and the axis of the through hole and the axis of the nozzle are arranged. At a rotational position where they coincide, the through hole communicates with the mixing chamber via the notch, and at a rotational position where they intersect, the switching plug closes the end face of the nozzle and the end face of the diffuser.
複数組のエゼクタのノズルとディフューザとの間にそれ
ぞれ単独に回動操作ができる切替え栓を設けることによ
り、個々のエゼクタを作動させたり、停止させたりする
ことができ、エゼクタは全体として可変容量となる。By providing switching valves that can be independently rotated between the nozzles and diffusers of multiple sets of ejectors, each ejector can be activated or stopped, and the ejector as a whole has a variable capacity. Become.
水射式ポンプの回転数を制御して、吸込空気量が変化す
るのに対応してエゼクタの容量を調整できる。By controlling the rotational speed of the water injection pump, the capacity of the ejector can be adjusted in response to changes in the amount of intake air.
第１図は実施例のエゼクタの断面図であり、従来例と同
一符号を付けるものはおよそ同一機能を持つ。FIG. 1 is a sectional view of an ejector according to an embodiment, and parts having the same reference numerals as those in the conventional example have approximately the same functions.
図において、吸気口９を持つ混合室５には３組のノズル
３ａ、３ｂ、３ｃ、ディフューザ４ａ＋４ｂ、４ｃが組
付けられ、混合室５のノズル側にはパツキン２１ａを介
して空気口１３を持つケーシング２１が取付けられ、駆
動空気８を吸い込む。In the figure, three sets of nozzles 3a, 3b, 3c and diffusers 4a+4b, 4c are assembled in a mixing chamber 5 having an intake port 9, and an air port 13 is provided on the nozzle side of the mixing chamber 5 via a packing 21a. A casing 21 is attached and draws in driving air 8.
ディフューザ側にはパツキン２２ａを介して吐出口６を
持つケーシング２２が取付けられ、従来例に図示したエ
ルモボンプ１の吸込側１ａが接続できる。A casing 22 having a discharge port 6 is attached to the diffuser side via a gasket 22a, to which the suction side 1a of the Elmo Bomb 1 shown in the conventional example can be connected.
各ノズル３ａ、３ｂ、３ｃと各ディフューザ４ａ。Each nozzle 3a, 3b, 3c and each diffuser 4a.
４ｂ、４ｃの間には混合室５の外部から回動操作可能な
円柱状又は球状の切替え栓２３ａ、２３ｂ。Between 4b and 4c are cylindrical or spherical switching plugs 23a and 23b that can be rotated from the outside of the mixing chamber 5.
２３ｃが介装され、各切替え栓は通し穴２４ａ。23c is interposed, and each switching plug has a through hole 24a.
２４ｂ、２４ｃとこの通し穴の少くとも一端に切欠部２
５ａ 、 ２５ｂ 、 ２５ｃを設ける。24b, 24c and at least one end of this through hole.
5a, 25b, and 25c are provided.
切替え栓２３ａは通し穴２４ａがディフューザ４ａのテ
ーパの延長上の形状を持ち、切欠部２５ａは一端にしか
ない、切替え栓２３ｂは通し穴２４ｂが充分太く、切欠
部２５ｂは他端にしかない。切替え栓２３ｃは通し穴２
４ｃが同様に充分太く、両端に切欠部２５ｃを持つ。The switching plug 23a has a through hole 24a shaped as an extension of the taper of the diffuser 4a, and the notch 25a is only at one end, while the switching plug 23b has a sufficiently thick through hole 24b and the notch 25b is only at the other end. The switching plug 23c is through hole 2
4c is similarly thick enough and has notches 25c at both ends.
切替え栓は前記３種の１〜２種をどのように組合せても
よい。また図示の状態では切替え栓２３ａ。The switching stopper may be any combination of one or two of the above three types. Also, in the illustrated state, the switching plug 23a.
２３ｂは通し穴２４ａ、２４ｂの軸心がノズル３ａ＋３
ｂの軸心と一致して切欠部２５ａ、２５ｂが混合室５に
連通し、エゼクタが作動可能で吸気口９がら空気を矢印
のように吸い込む。切替え栓２３ｃはノズル３ｃ、ディ
フューザ４ｃを閉じこのエゼクタが作動しない状態とな
っている。23b, the axis of the through holes 24a and 24b is the nozzle 3a+3
The notches 25a and 25b communicate with the mixing chamber 5 in alignment with the axis b, and the ejector is operable to suck air through the intake port 9 in the direction of the arrow. The switching plug 23c closes the nozzle 3c and the diffuser 4c, and the ejector is in a non-operating state.
このような構造によれば、複数組のエゼクタのノズルと
ディフューザとの間にそれぞれ単独に回動操作ができる
切替え栓を設けることにより、個々のエゼクタを作動さ
せたり、停止させたりすることができ、エゼクタは全体
として可変容量となる。According to this structure, by providing switching plugs that can be independently rotated between the nozzles of the plurality of ejectors and the diffuser, each ejector can be activated or stopped. , the ejector as a whole has a variable capacity.
水射式ポンプの回転数を制御して、吸込空気量が変化す
るのに対応してエゼクタの容量を調整できる。By controlling the rotational speed of the water injection pump, the capacity of the ejector can be adjusted in response to changes in the amount of intake air.
この発明のエゼクタ付の水射式ポンプは、駆動空気を吸
い込むノズルと、吐出口に連通ずるディフューザと、こ
のディフューザと前記ノズルの間の空間を囲み吸気口を
備えた混合室とからエゼクタを構成し、このエゼクタの
前記吐出口を水射式ポンプの吸込側に接続するエゼクタ
付の水射式ポンプにおいて、
前記混合室に設けた複数組の前記ノズルと前記ディフュ
ーザとの間に前記混合室の外部から回動操作可能な円形
断面の切替え栓を介装し、この切替え栓に通し穴とこの
通し穴の少くとも一端に切欠部とを設け、前記通し穴の
軸心と前記ノズルの軸心が一致する回動位置では前記切
欠部を介して前記通し穴が前記混合室と連通し、交差す
る回動位置では前記切替え栓が前記ノズルの端面と前記
ディフューザの端面とを閉じるようにしたので、複数組
のエゼクタのそれぞれを切替え栓で作動可能にしたり停
止させたりして、全体としてエゼクタは可変容量形にな
ることになり、回転数を制御して容量調整の容易な水射
式ポンプと組合せてエゼクタ付の水射式ポンプの容量が
真空度と吸込空気量とにおいて可変できるという効果が
ある。In the water injection pump with an ejector of the present invention, the ejector includes a nozzle that sucks driving air, a diffuser that communicates with the discharge port, and a mixing chamber that surrounds the space between the diffuser and the nozzle and is equipped with an intake port. In this water injection pump with an ejector that connects the discharge port of the ejector to the suction side of the water injection pump, there is a space between the plurality of sets of nozzles provided in the mixing chamber and the diffuser in the mixing chamber. A switching stopper with a circular cross section that can be rotated from the outside is provided, and the switching stopper is provided with a through hole and a notch at at least one end of the through hole, and the axis of the through hole and the axis of the nozzle are arranged. At a rotational position where the through holes match, the through hole communicates with the mixing chamber through the notch, and at a rotational position where they intersect, the switching plug closes the end face of the nozzle and the end face of the diffuser. By enabling and stopping each of the multiple sets of ejectors using switching plugs, the ejector as a whole becomes a variable displacement type, and it can be used as a water injection pump that can easily adjust the volume by controlling the rotation speed. In combination, there is an effect that the capacity of the water injection pump with the ejector can be varied depending on the degree of vacuum and the amount of suction air.
第１図は実施例のエゼクタの断面図であり、第２図は従
来例のエゼクタ付の水射式ポンプの配管系統図、第３図
は第２図の特性曲線図、第４図は第２図のエゼクタの断
面図である。
１・・・水射式ポンプ、３．３ａ、３ｂ、３ｃ・・・ノ
ズル、４． ４ａ 、 ４ｂ 、 ４ｃ ＝ディフ
ューザ、５・・・混合室、６・・・吐出口、８・・・駆
動空気、９・・・吸気口、ｌＯ・・・エゼクタ、１３・
・・空気口、２３ａ。
２３ｂ、２３ｃ＝切替え栓、２４ａ、２４ｂ。
２４ｃ・・・通し穴、２５ａ 、２５ｂ 、２５．ｃ
−・・切欠第
図
第
図Fig. 1 is a sectional view of the ejector of the embodiment, Fig. 2 is a piping system diagram of a water injection pump with an ejector of the conventional example, Fig. 3 is a characteristic curve diagram of Fig. 2, and Fig. 4 is the FIG. 3 is a sectional view of the ejector of FIG. 2; 1... Water injection pump, 3.3a, 3b, 3c... Nozzle, 4. 4a, 4b, 4c = diffuser, 5...mixing chamber, 6...discharge port, 8...drive air, 9...intake port, lO...ejector, 13.
...Air vent, 23a. 23b, 23c = switching plug, 24a, 24b. 24c...Through hole, 25a, 25b, 25. c.
−・Notch diagram diagram
Claims (1)
ィフューザと、このディフューザと前記ノズルの間の空
間を囲み吸気口を備えた混合室とからエゼクタを構成し
、このエゼクタの前記吐出口を水射式ポンプの吸込側に
接続するエゼクタ付の水射式ポンプにおいて、 前記混合室に設けた複数組の前記ノズルと前記ディフュ
ーザとの間に前記混合室の外部から回動操作可能な円形
断面の切替え栓を介装し、この切替え栓に通し穴とこの
通し穴の少くとも一端に切欠部とを設け、前記通し穴の
軸心と前記ノズルの軸心が一致する回動位置では前記切
欠部を介して前記通し穴が前記混合室と連通し、交差す
る回動位置では前記切替え栓が前記ノズルの端面と前記
ディフューザの端面とを閉じることを特徴とするエゼク
タ付の水射式ポンプ。[Scope of Claims] 1) An ejector is constituted by a nozzle that sucks driving air, a diffuser that communicates with a discharge port, and a mixing chamber that surrounds a space between the diffuser and the nozzle and is equipped with an intake port, and the ejector In a water injection pump with an ejector, the discharge port of which is connected to the suction side of the water injection pump, a rotational pump is provided between the plurality of sets of nozzles provided in the mixing chamber and the diffuser from outside the mixing chamber. An operable switching plug with a circular cross section is provided, the switching plug is provided with a through hole and at least one end of the through hole is provided with a notch, and the axis of the through hole and the axis of the nozzle coincide with each other. In the moving position, the through hole communicates with the mixing chamber through the notch, and in the intersecting rotating position, the switching plug closes the end face of the nozzle and the end face of the diffuser. Water injection pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499889A JPH0331594A (en) | 1989-06-27 | 1989-06-27 | Water-sealed pump with ejector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499889A JPH0331594A (en) | 1989-06-27 | 1989-06-27 | Water-sealed pump with ejector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0331594A true JPH0331594A (en) | 1991-02-12 |
Family
ID=15803903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16499889A Pending JPH0331594A (en) | 1989-06-27 | 1989-06-27 | Water-sealed pump with ejector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0331594A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008083624A (en) * | 2006-09-29 | 2008-04-10 | Univ Waseda | Massaging skill evaluation system, massaging skill evaluating device, and massaging skill evaluation evaluating program |
| JP2011046556A (en) * | 2009-08-26 | 2011-03-10 | Shin Etsu Handotai Co Ltd | Manufacturing method and device for silicon single crystal |
-
1989
- 1989-06-27 JP JP16499889A patent/JPH0331594A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008083624A (en) * | 2006-09-29 | 2008-04-10 | Univ Waseda | Massaging skill evaluation system, massaging skill evaluating device, and massaging skill evaluation evaluating program |
| JP2011046556A (en) * | 2009-08-26 | 2011-03-10 | Shin Etsu Handotai Co Ltd | Manufacturing method and device for silicon single crystal |
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