JPH0310871B2 - - Google Patents
Info
- Publication number
- JPH0310871B2 JPH0310871B2 JP63299320A JP29932088A JPH0310871B2 JP H0310871 B2 JPH0310871 B2 JP H0310871B2 JP 63299320 A JP63299320 A JP 63299320A JP 29932088 A JP29932088 A JP 29932088A JP H0310871 B2 JPH0310871 B2 JP H0310871B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- furnace
- chamber
- housing
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007599 discharging Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 25
- 238000003780 insertion Methods 0.000 description 13
- 230000037431 insertion Effects 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 9
- 239000000843 powder Substances 0.000 description 9
- 238000005096 rolling process Methods 0.000 description 8
- 238000004804 winding Methods 0.000 description 8
- 238000000605 extraction Methods 0.000 description 7
- 230000001590 oxidative effect Effects 0.000 description 7
- 238000005098 hot rolling Methods 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- 238000009703 powder rolling Methods 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005056 compaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Tunnel Furnaces (AREA)
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、被加熱物を真空あるいは不活性ガス
等の非酸化雰囲気中で加熱するのに用いる真空炉
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a vacuum furnace used to heat an object to be heated in a vacuum or a non-oxidizing atmosphere such as an inert gas.
［従来の技術］
真空炉は金属あるいは非金属等の被加熱物を真
空雰囲気中で所定温度まで加熱するために使わ
れ、従来より各種の真空炉が知られている。ま
た、特公昭42−24983号公報や特開昭63−194805
号公報などに見られるように、所望の雰囲気中で
加熱された材料に圧廷等の処理を行なう設備も公
知である。[Prior Art] Vacuum furnaces are used to heat objects to be heated, such as metals or non-metals, to a predetermined temperature in a vacuum atmosphere, and various vacuum furnaces have been known. Also, Japanese Patent Publication No. 42-24983 and Japanese Patent Publication No. 63-194805
As seen in Japanese Patent Application Publication No. 2003-120016, equipment for performing treatments such as pressing on heated materials in a desired atmosphere is also known.
［発明が解決しようとする課題］
非酸化雰囲気中で高温に加熱された材料に各種
の処理を行なつたり、炉内の材料を炉の外部から
取扱うには、真空炉とは別体に構成された各種圧
延機や材料挿入室取、出室、巻取装置等のアタツ
チメント装置を選択的に真空炉に接続できるよう
にした方がはるかに多様な処理を行なうことが可
能である。[Problems to be Solved by the Invention] In order to perform various treatments on materials heated to high temperatures in a non-oxidizing atmosphere, or to handle materials inside the furnace from outside the furnace, it is necessary to configure the vacuum furnace separately. It would be possible to carry out much more diverse processing if the various rolling mills and attachment devices such as material loading, unloading, and winding devices could be selectively connected to the vacuum furnace.
しかしながら従来の真空炉は、単一的な機能し
かもちあわせていないため、非酸化雰囲気中で加
熱された各種の材料に多種・多様な処理を行なわ
せることができなかつた。このため、より多くの
処理を行なえるような真空炉の開発が望まれてい
た。 However, since conventional vacuum furnaces have only a single function, they have not been able to perform various treatments on various materials heated in a non-oxidizing atmosphere. For this reason, there has been a desire to develop a vacuum furnace that can perform more treatments.
従つて本発明の目的は、非酸化雰囲気中で加熱
された材料を所望のアタツチメント装置を使つて
多様な取扱いと処理を行なえるような真空炉を提
供することにある。 SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a vacuum furnace which allows a variety of handling and processing of materials heated in a non-oxidizing atmosphere using the desired attachment devices.
［課題を解決するための手段］
上記目的を果たすために開発された本発明の真
空炉は、内部に炉室を有した気密構造の真空炉ハ
ウジングと、上記炉室内に挿入される被加熱物を
所望の温度まで加熱可能に配設されたヒータと、
上記炉室の入口側と出口側にそれぞれ開閉自在に
設けられた遮熱シヤツタと、上記ハウジング内の
空気を排出するための真空排気手段と、上記ハウ
ジングの入口部と出口部にそれぞれ開閉可能に設
けられていてその閉時にハウジング内を気密にす
るゲートバルブと、上記ハウジングの入口側と出
口側にそれぞれ設けられていて気密構造のアタツ
チメント装置を接続可能な接続手段と、を具備し
ている。[Means for Solving the Problems] The vacuum furnace of the present invention developed to achieve the above object includes a vacuum furnace housing having an airtight structure having a furnace chamber therein, and an object to be heated inserted into the furnace chamber. a heater arranged to be able to heat up to a desired temperature;
Heat shield shutters are provided on the inlet and outlet sides of the furnace chamber so as to be openable and closable, respectively; a vacuum evacuation means for discharging the air in the housing; The present invention includes a gate valve that is provided to make the inside of the housing airtight when the gate valve is closed, and connection means that are provided on the inlet side and the outlet side of the housing, respectively, to which an attachment device having an airtight structure can be connected.
この真空炉の入口部と出口部にはそれぞれゲー
トバルブを介して気密構造のアタツチメント装置
が接続される。アタツチメント装置として、例え
ば各種の圧延機、材料挿入室、取出室、巻取装置
等が挙げられるが、必要に応じてこれら以外であ
つてもよい。アタツチメント装置にも前記排気手
段が接続される。 An airtight attachment device is connected to the inlet and outlet of the vacuum furnace through gate valves, respectively. Examples of attachment devices include various rolling mills, material insertion chambers, unloading chambers, winding devices, etc., but other attachment devices may be used as required. The exhaust means is also connected to the attachment device.
［作用］
上記真空炉に被加熱物を挿入する場合、入口側
のゲートバルブと遮熱シヤツタを開ける。この時
に炉室内の真空度を保つ必要があれば、入口側の
アタツチメント装置に被加熱物を収容したのち
に、このアタツチメント装置の内部を排気し、炉
室内と同等の真空度にしてからゲートバルブと遮
熱シヤツタを開くことにより、被加熱物を炉室に
挿入する。加熱後の被加熱物を炉内から取出す場
合、炉内と同等の真空度に保たれている出口側の
アタツチメント装置に被加熱物を収容したのち、
出口側ゲートバルブを閉じるとともにこのアタツ
チメント装置に空気をリークさせる。こうしてア
タツチメント装置の内部を大気圧にしてから被加
熱物の取出しを行なう。[Operation] When inserting an object to be heated into the vacuum furnace, open the gate valve and heat shield shutter on the inlet side. At this time, if it is necessary to maintain the degree of vacuum in the furnace chamber, first place the object to be heated in the attachment device on the inlet side, evacuate the inside of this attachment device, make the vacuum equal to that in the furnace chamber, and then open the gate valve. By opening the heat shield shutter, the object to be heated is inserted into the furnace chamber. When taking out the heated object from the furnace, the heated object is placed in an attachment device on the exit side that is maintained at the same degree of vacuum as the inside of the furnace, and then
Close the outlet gate valve and allow air to leak into this attachment device. The object to be heated is then taken out after the interior of the attachment device is brought to atmospheric pressure.
［実施例］
以下に本発明の第１実施例につき、第１図およ
び第２図を参照して説明する。[Example] A first example of the present invention will be described below with reference to FIGS. 1 and 2.
第１図に示された熱処理設備１は、図示中央部
に位置する真空炉２と、この真空炉２の入口側す
なわち材料（被加熱物）の搬入口側に、アタツチ
メント装置の一例としての材料挿入室３およびマ
ジツクハンド式の挿入側操作機構４を備えてい
る。更に真空炉２の出口側すなわち材料の搬出口
側に、アタツチメント装置の一例としての取出室
５およびマジツクハンド式の取出側操作機構６が
設けられている。これら操作機構４，６のロツド
４ａ，６ａは所定のストロークで前後方向に往復
移動できる。材料挿入室３の入口部と取出室５の
出口部には、それぞれ上記ロツド４ａ，６ａを移
動可能に貫通させた状態で気密を保つことの可能
なシール手段を有した気密構造の扉７，８が設け
られている。 The heat treatment equipment 1 shown in FIG. 1 includes a vacuum furnace 2 located in the center of the figure, and a material attachment device, which is an example of an attachment device, on the inlet side of the vacuum furnace 2, that is, on the material (material to be heated) entrance side. It is equipped with an insertion chamber 3 and a magic hand type insertion side operating mechanism 4. Furthermore, on the exit side of the vacuum furnace 2, that is, on the material delivery port side, there are provided a take-out chamber 5, which is an example of an attachment device, and a magic hand-type take-out side operating mechanism 6. The rods 4a, 6a of these operating mechanisms 4, 6 can reciprocate in the front and back direction with a predetermined stroke. At the entrance of the material insertion chamber 3 and the exit of the extraction chamber 5, there are doors 7 of an airtight structure, each having a sealing means capable of maintaining airtightness when the rods 4a and 6a are movably penetrated. 8 is provided.
真空炉２は気密構造のハウジング１０を備えて
いる。そしてこのハウジング１０に排気管１１が
接続され、排気管１１の排出側に油拡散ポンプ１
２やブースタポンプ１３、油回転ポンプ１４等か
らなる真空排気手段１５が設けられている。この
排気手段１５によつて得られる真空度は、一例と
して５×10-4〜５×10-5Torr前後である。この
排気手段１５は排気管１６，１７を介して材料挿
入室３および取出室５にも連通している。なお、
オプシヨンとしてハウジング１０の内部に不活性
ガスを供給できるようなガス供給手段を設けるよ
うにしてもよい。 The vacuum furnace 2 includes a housing 10 having an airtight structure. An exhaust pipe 11 is connected to this housing 10, and an oil diffusion pump 1 is connected to the discharge side of the exhaust pipe 11.
2, a booster pump 13, an oil rotary pump 14, etc., are provided. The degree of vacuum obtained by this exhaust means 15 is, for example, approximately 5×10 −4 to 5×10 −5 Torr. This exhaust means 15 also communicates with the material insertion chamber 3 and the extraction chamber 5 via exhaust pipes 16 and 17. In addition,
As an option, a gas supply means capable of supplying an inert gas to the inside of the housing 10 may be provided.
ハウジング１０の内部に炉室２０が設けられて
いるとともに、炉室２０内に挿入された被加熱物
と加熱可能なヒータ２１が配設されている。この
ヒータ２０は、一例としてモリブデン線などのよ
うに通電により発熱する高融点金属線を利用し、
被加熱物を1500℃前後あるいはそれ以上の温度ま
で加熱できるようにする。炉室２０の入口側と出
口側には、それぞれ遮熱用のシヤツタ２２，２３
が設けられている。このシヤツタ２２，２３は、
エアシリンダ等の往復動形シリンダ機構２５，２
６によつて上下方向に開閉できるようになつてい
る。 A furnace chamber 20 is provided inside the housing 10, and a heater 21 capable of heating an object to be heated inserted into the furnace chamber 20 is disposed. This heater 20 utilizes a high melting point metal wire, such as a molybdenum wire, which generates heat when energized, for example.
To be able to heat the object to be heated to a temperature of around 1500℃ or higher. Heat shielding shutters 22 and 23 are provided on the inlet and outlet sides of the furnace chamber 20, respectively.
is provided. These shutters 22 and 23 are
Reciprocating cylinder mechanism 25, 2 such as an air cylinder
6, it can be opened and closed in the vertical direction.
またハウジング１０の入口部３０と出口部３１
に、それぞれハウジング１０内の真空度を保つた
めのゲートバルブ３２，３３が設けられている。
これらゲートバルブ３２，３３は、それぞれエア
シリンダ等の往復動形シリンダ機構３４，３５に
よつて上下方向に開閉できるようになつている。
そして各ゲートバルブ３２，３３の端面側に、接
続手段としてのフランジ部４０，４１が設けられ
ている。入口側に位置するフランジ部４０は、前
述した材料挿入室３を着脱可能にしかも気密に接
続するために使われる。出口側に位置するフラン
ジ部４１は、材料取出室５ぽ着脱可能にしかも気
密に接続するために使われる。これらフランジ部
４０，４１は、相手側のフランジ面に対しボル
ト、ナツト等の締結具４２を用いて締結される。
従つて、真空炉２と材料挿入室３と取出室５と
は、必要に応じてそれぞれフランジ部４０，４１
のところで切離すことができる。真空炉２や取出
室５には材料を目視可能な適宜位置に覗き窓４３
が設けられている。 In addition, the inlet portion 30 and the outlet portion 31 of the housing 10
Gate valves 32 and 33 are provided respectively for maintaining the degree of vacuum within the housing 10.
These gate valves 32 and 33 can be opened and closed in the vertical direction by reciprocating cylinder mechanisms 34 and 35 such as air cylinders, respectively.
Flange portions 40 and 41 serving as connection means are provided on the end face side of each gate valve 32 and 33. The flange portion 40 located on the inlet side is used to removably and airtightly connect the material insertion chamber 3 described above. The flange portion 41 located on the outlet side is used to removably and airtightly connect the material extraction chamber 5. These flange parts 40, 41 are fastened to the flange surface of the other side using a fastener 42 such as a bolt or a nut.
Therefore, the vacuum furnace 2, the material insertion chamber 3, and the extraction chamber 5 are provided with flange portions 40 and 41, respectively, as necessary.
It can be separated at. A viewing window 43 is provided in the vacuum furnace 2 and the extraction chamber 5 at an appropriate position so that the material can be viewed visually.
is provided.
次に、上記構成の熱処理設備１の作用について
説明する。 Next, the operation of the heat treatment equipment 1 having the above configuration will be explained.
ハウジング１０の内部を排気手段１５によつて
前記真空度まで排気するとともに、ヒータ２１に
よつて炉室２０の温度を所定値まで上昇させる。
そして、ゲートバルブ３２，３３が閉じているこ
とを確認してから、材料挿入室３をリークさせて
空気を導入し、材料挿入室３内を大気圧にしてか
ら扉７を開ける。次に、操作機構４を使つて被加
熱物を材料挿入室３内に入れ、扉７を密閉すると
ともに排気手段１５によつて材料挿入室３内の空
気を排気する。そしてゲートバルブ３２と遮熱シ
ヤツタ２２を開け、操作機構４のロツド４ａを前
進させることにより、材料を炉室２０内に挿入す
る。ロツド４ａを後退させてからシヤツタ２２と
ゲートバルブ３２を閉じる。以上の一連の工程に
より、所望の真空度を保ちかつ炉室２０の温度を
下げることなく被加熱物の炉室２０内への挿入が
完了する。 The inside of the housing 10 is evacuated to the above vacuum level by the exhaust means 15, and the temperature of the furnace chamber 20 is raised to a predetermined value by the heater 21.
After confirming that the gate valves 32 and 33 are closed, the material insertion chamber 3 is leaked and air is introduced, and the inside of the material insertion chamber 3 is brought to atmospheric pressure before the door 7 is opened. Next, the object to be heated is put into the material insertion chamber 3 using the operating mechanism 4, the door 7 is sealed, and the air in the material insertion chamber 3 is exhausted by the exhaust means 15. Then, the material is inserted into the furnace chamber 20 by opening the gate valve 32 and the heat shield shutter 22 and advancing the rod 4a of the operating mechanism 4. After retracting the rod 4a, the shutter 22 and gate valve 32 are closed. Through the series of steps described above, the insertion of the object to be heated into the furnace chamber 20 is completed while maintaining the desired degree of vacuum and without lowering the temperature of the furnace chamber 20.
被加熱物を炉室２０内で所定の温度と時間に保
持したのち、遮熱シヤツタ２３とゲートバルブ３
３を開け、操作機構６によつて被加熱物を取出室
５に取出す。その後、ゲートバルブ３３を閉じる
とともに、取出室５をリークさせて大気圧にした
のち、扉８を開けて被加熱物を取出す。以上の工
程を経ることにより、所望の非酸化熱処理と被加
熱物の取出しを行なうことができる。なお、ハウ
ジング１０内に不活性ガスを注入することによ
り、不活性ガス雰囲気中での非酸化熱処理を行な
うようにしてもよい。 After the object to be heated is maintained at a predetermined temperature and time in the furnace chamber 20, the heat shield shutter 23 and the gate valve 3
3 is opened, and the object to be heated is taken out into the take-out chamber 5 using the operating mechanism 6. Thereafter, the gate valve 33 is closed and the extraction chamber 5 is made to leak to atmospheric pressure, and then the door 8 is opened and the object to be heated is taken out. By going through the above steps, desired non-oxidizing heat treatment and removal of the heated object can be performed. Note that the non-oxidizing heat treatment may be performed in an inert gas atmosphere by injecting an inert gas into the housing 10.
第３図は本発明の第２実施例を示し、この実施
例では真空炉２の出口側アタツチメント装置の一
例としての熱間圧延機５０を備えている。それ以
外の構成と作用効果は第１実施例で述べたものと
同様である。この熱間圧延機５０は、気密構造の
筐体５１の内部に圧延ロール５２，５３を有して
いる。そして筐体５１の入口部と出口部にそれぞ
れゲートバルブ３３，５５が設けられている。筐
体５１には図示しない排気管を介して前記排気手
段１５が接続されている。従つてゲートバルブ３
３，５５を閉じることにより、筐体５１の内部を
気密に保つことができる。またこの熱間圧延機５
０は、必要に応じてゲートバルブ３３，５５のと
ころで真空炉２と取出室５とを切離すことができ
る。 FIG. 3 shows a second embodiment of the present invention, which includes a hot rolling mill 50 as an example of an outlet side attachment device for the vacuum furnace 2. The other configurations and effects are the same as those described in the first embodiment. This hot rolling mill 50 has rolling rolls 52 and 53 inside a housing 51 having an airtight structure. Gate valves 33 and 55 are provided at the inlet and outlet of the housing 51, respectively. The exhaust means 15 is connected to the housing 51 via an exhaust pipe (not shown). Therefore, gate valve 3
By closing 3 and 55, the inside of the casing 51 can be kept airtight. In addition, this hot rolling mill 5
0, the vacuum furnace 2 and the extraction chamber 5 can be separated at the gate valves 33 and 55 as necessary.
また第４図には本発明の第３実施例を示してお
り、真空炉２の入口側にアタツチメント装置の一
例として粉末圧延機６０を備えているとともに、
真空炉２の出口側にアタツチメント装置の一例と
しての熱間圧廷機５０と巻取装置６１を備えてい
る。熱間圧延機５０の構成と作用は第２実施例と
同様である。粉末圧延機６０は、気密構造の筐体
６２を有する圧延機本体部６３と、気密構造の筐
体６４を有するシユータ室６５と、これら筐体６
２，６４間に設けられたゲートバルブ６６などを
備えて構成されている。圧廷機本体部６３の内部
には粉末を圧延するためのロール６７，６８と、
粉末を加熱するためのヒータ（図示せず）などが
設けられている。一方、巻取装置６１も気密構造
の筐体７０を有しており、この筐体７０内に巻取
ドラム７１やガイド７２などが収容されている。
各筐体５１，６２，６４，７０に前記排気手段１
５が接続されている。 Further, FIG. 4 shows a third embodiment of the present invention, in which a powder rolling mill 60 is provided as an example of an attachment device on the inlet side of the vacuum furnace 2, and
A hot compaction machine 50 and a winding device 61 are provided on the exit side of the vacuum furnace 2 as an example of an attachment device. The configuration and operation of the hot rolling mill 50 are similar to those in the second embodiment. The powder rolling mill 60 includes a rolling mill main body 63 having an airtight housing 62, a shutter chamber 65 having an airtight housing 64, and these housings 6.
It is configured to include a gate valve 66 provided between 2 and 64. Inside the compacting machine main body 63 are rolls 67 and 68 for rolling powder,
A heater (not shown) and the like are provided to heat the powder. On the other hand, the winding device 61 also has a housing 70 having an airtight structure, and a winding drum 71, a guide 72, and the like are housed within this housing 70.
The exhaust means 1 is provided in each housing 51, 62, 64, 70.
5 is connected.
上記構成の粉末圧延機６０を備えた第３実施例
においては、真空雰囲気中で所定温度まで加熱さ
れた粉末を連続的にロール６７，６８に供給する
とともに、この粉末を真空雰囲気中でロール６
７，６８により加圧して圧粉板を得る。この圧粉
板はゲートバルブ６６を経てシユータ室６５を通
り、更にゲートバルブ３２を経て炉室２０に導入
される。この炉室２０にて所定温度に加熱された
圧粉板は、圧延機５０に導入されて所望の厚みま
で熱間で圧延されたのち、ドラム７１に巻取られ
る。なお、短尺な圧粉板の熱処理と圧延を行なう
場合には巻取装置６１の代りに、前記第１実施例
で述べた取出室５および操作機構６を使うように
する。この第３実施例によれば、粉末の圧延から
加熱→圧延→巻取に至る一連の工程を、炉室２０
の温度を下げることなく真空雰囲気中あるいは不
活性ガス雰囲気中で連続的に行なうことができ
る。 In the third embodiment equipped with the powder rolling mill 60 having the above configuration, powder heated to a predetermined temperature in a vacuum atmosphere is continuously supplied to the rolls 67 and 68, and this powder is transferred to the rolls 67 and 68 in a vacuum atmosphere.
7 and 68 to obtain a powder plate. This powder plate passes through the gate valve 66, passes through the shutter chamber 65, and is further introduced into the furnace chamber 20 through the gate valve 32. The powder plate heated to a predetermined temperature in the furnace chamber 20 is introduced into the rolling mill 50, hot rolled to a desired thickness, and then wound onto a drum 71. When heat treating and rolling a short powder plate, the take-out chamber 5 and operating mechanism 6 described in the first embodiment are used instead of the winding device 61. According to this third embodiment, a series of steps from powder rolling to heating, rolling, and winding are carried out in the furnace chamber 20.
It can be carried out continuously in a vacuum atmosphere or an inert gas atmosphere without lowering the temperature.
［発明の効果］
本発明によれば、非酸化雰囲気中で加熱される
材料を各種の目的に応じて様々なアタツチメント
装置によつて取扱うことができるようになるた
め、この種の熱処理材の用途拡大や新素材の製造
を行なう上で大きな威力を発揮する。[Effects of the Invention] According to the present invention, materials that are heated in a non-oxidizing atmosphere can be handled by various attachment devices according to various purposes. It exerts great power in expanding and manufacturing new materials.
第１図は本発明の第１実施例を示す熱処理設備
の正面図、第２図は第１図に示された熱処理設備
の概念図、第３図は本発明の第２実施例を示す熱
処理設備の概念図、第４図は本発明の第３実施例
を示す熱処理設備の概念図である。
１……熱処理設備、２……真空炉、３……材料
挿入室、５……取出室、１０……ハウジング、１
５……排気手段、２０……炉室、２１……ヒー
タ、２２，２３……遮熱用のシヤツタ、３２，３
３……ゲートバルブ、４０，４１……フランジ
部、５０……熱間圧延機、５５……ゲートバル
ブ、６０……粉末圧廷機、６１……巻取装置、６
６……ゲートバルブ。
FIG. 1 is a front view of a heat treatment facility showing a first embodiment of the present invention, FIG. 2 is a conceptual diagram of the heat treatment facility shown in FIG. 1, and FIG. 3 is a heat treatment facility showing a second embodiment of the present invention. Conceptual Diagram of Equipment FIG. 4 is a conceptual diagram of heat treatment equipment showing a third embodiment of the present invention. 1... Heat treatment equipment, 2... Vacuum furnace, 3... Material insertion chamber, 5... Removal chamber, 10... Housing, 1
5... Exhaust means, 20... Furnace chamber, 21... Heater, 22, 23... Heat shielding shutter, 32, 3
3... Gate valve, 40, 41... Flange section, 50... Hot rolling machine, 55... Gate valve, 60... Powder compaction machine, 61... Winding device, 6
6...Gate valve.
Claims (1)
ングと、上記炉室内に挿入される被加熱物を所望
の温度まで加熱可能に配設されたヒータと、上記
炉室の入口側と出口側にそれぞれ開閉自在に設け
られた遮熱シヤツタと、上記ハウジング内の空気
を排出するための真空排気手段と、上記ハウジン
グの入口部と出口部にそれぞれ開閉可能に設けら
れていてその閉時にハウジング内を気密にするゲ
ートバルブと、上記ハウジングの入口側と出口側
にそれぞれ設けられていて気密構造のアタツチメ
ント装置を接続可能な接続手段と、を具備したこ
とを特徴とする真空炉。1 A vacuum furnace housing with an airtight structure having a furnace chamber inside, a heater disposed to be able to heat an object to be heated inserted into the furnace chamber to a desired temperature, and an inlet side and an outlet side of the furnace chamber. heat shielding shutters that can be opened and closed, respectively, a vacuum evacuation means for discharging the air inside the housing; 1. A vacuum furnace comprising: a gate valve that makes the vacuum airtight; and connecting means provided on the inlet and outlet sides of the housing to which an attachment device having an airtight structure can be connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29932088A JPH02146495A (en) | 1988-11-26 | 1988-11-26 | Vacuum furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29932088A JPH02146495A (en) | 1988-11-26 | 1988-11-26 | Vacuum furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02146495A JPH02146495A (en) | 1990-06-05 |
| JPH0310871B2 true JPH0310871B2 (en) | 1991-02-14 |
Family
ID=17871014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29932088A Granted JPH02146495A (en) | 1988-11-26 | 1988-11-26 | Vacuum furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146495A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5525712A (en) * | 1978-08-10 | 1980-02-23 | Shii Ai Heizu Inc | Vacuum furnace for continuous heat treatment |
| JPS559940B2 (en) * | 1975-08-27 | 1980-03-13 | ||
| JPS60184624A (en) * | 1984-03-02 | 1985-09-20 | Daido Steel Co Ltd | Vacuum heat-treating furnace |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS559940U (en) * | 1978-07-07 | 1980-01-22 |
-
1988
- 1988-11-26 JP JP29932088A patent/JPH02146495A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS559940B2 (en) * | 1975-08-27 | 1980-03-13 | ||
| JPS5525712A (en) * | 1978-08-10 | 1980-02-23 | Shii Ai Heizu Inc | Vacuum furnace for continuous heat treatment |
| JPS60184624A (en) * | 1984-03-02 | 1985-09-20 | Daido Steel Co Ltd | Vacuum heat-treating furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02146495A (en) | 1990-06-05 |
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