JPH02146495A - Vacuum furnace - Google Patents
Vacuum furnaceInfo
- Publication number
- JPH02146495A JPH02146495A JP29932088A JP29932088A JPH02146495A JP H02146495 A JPH02146495 A JP H02146495A JP 29932088 A JP29932088 A JP 29932088A JP 29932088 A JP29932088 A JP 29932088A JP H02146495 A JPH02146495 A JP H02146495A
- Authority
- JP
- Japan
- Prior art keywords
- heated
- furnace
- vacuum
- housing
- substance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007599 discharging Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 26
- 238000010438 heat treatment Methods 0.000 abstract description 12
- 238000011282 treatment Methods 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract 6
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 238000003780 insertion Methods 0.000 description 14
- 230000037431 insertion Effects 0.000 description 14
- 238000005096 rolling process Methods 0.000 description 10
- 230000007246 mechanism Effects 0.000 description 9
- 239000000843 powder Substances 0.000 description 8
- 238000004804 winding Methods 0.000 description 8
- 230000001590 oxidative effect Effects 0.000 description 7
- 238000000605 extraction Methods 0.000 description 6
- 238000005098 hot rolling Methods 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 5
- 238000009703 powder rolling Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Tunnel Furnaces (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、被加熱物を真空あるいは不活性ガス等の非酸
化雰囲気中で加熱するのに用いる真空炉に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a vacuum furnace used to heat an object to be heated in a vacuum or a non-oxidizing atmosphere such as an inert gas.
［従来の技術］
真空炉は金属あるいは非金属等の被加熱物を真空雰囲気
中で所定温度まで加熱するために使われ、従来より各種
の真空炉が知られている。また、特公昭４２−２４９８
３号公報や特開昭０３−１９４８０５号公報などに見ら
れるように、所望の雰囲気中で加熱された材料に圧延等
の処理を行なう設備も公知である。[Prior Art] Vacuum furnaces are used to heat objects to be heated, such as metals or non-metals, to a predetermined temperature in a vacuum atmosphere, and various vacuum furnaces have been known. In addition, special public service No. 42-2498
As seen in Japanese Patent No. 3 and Japanese Unexamined Patent Publication No. 03-194805, there are also known facilities for performing rolling or other processes on heated materials in a desired atmosphere.
［発明が解決しようとする課題］
非酸化雰囲気中で高温に加熱された材料に各種の処理を
行なったり、炉内の材料を炉の外部から取扱うには、真
空炉とは別体に構成された各種圧延機や材料挿入室、取
出室１巻取装置等のアタッチメント装置を選択的に真空
炉に接続できるようにした方がはるかに多様な処理を行
なうことが可能である。[Problem to be solved by the invention] In order to perform various treatments on materials heated to high temperatures in a non-oxidizing atmosphere, or to handle materials inside the furnace from outside the furnace, a vacuum furnace must be constructed separately. It would be possible to perform much more diverse processing if attachment devices such as various rolling mills, material insertion chambers, unloading chambers, and one winding device could be selectively connected to the vacuum furnace.
しかしながら従来の真空炉は、単一的な機能しかもちあ
わせていないため、非酸化雰囲気中で加熱された各種の
材料に多種・多様な処理を行なわせることかできなかっ
た。このため、より多くの処理を行なえるような真空炉
の開発が望まれていた。However, since conventional vacuum furnaces have only a single function, they have been unable to perform a wide variety of treatments on various materials heated in a non-oxidizing atmosphere. For this reason, there has been a desire to develop a vacuum furnace that can perform more treatments.
従って本発明の目的は、非酸化雰囲気中で加熱された材
料を所望のアタッチメント装置を使って多様な取扱いと
処理を行なえるような真空炉を提供することにある。SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a vacuum furnace which allows a variety of handling and processing of heated materials in a non-oxidizing atmosphere using the desired attachment devices.
［課題を解決するための手段］
」二記目的を果たすために開発された本発明の真空炉は
、内部に炉室ををした気密構造の真空炉ハウジングと、
上記炉室内に挿入される被加熱物を所望の温度まで加熱
可能に配設されたヒータと、上記炉室の入口側と出口側
にそれぞれ開閉自在に設けられた遮熱シャッタと、上記
ハウジング内の空気を排出するための真空排気手段と、
上記ハウジングの入口部と出口部にそれぞれ開閉可能に
設けられていてその閉時にハウジング内を気密にするゲ
ートバルブと、上記ハウジングの入口側と出口側にそれ
ぞれ設けられていて気密構造のアタッチメント装置を接
続可能な接続手段と、を具備している。[Means for Solving the Problems] The vacuum furnace of the present invention developed to achieve the second object includes a vacuum furnace housing with an airtight structure having a furnace chamber inside;
A heater disposed to be able to heat an object to be heated inserted into the furnace chamber to a desired temperature, a heat shield shutter provided in the inlet and outlet sides of the furnace chamber so as to be openable and closable, and inside the housing. vacuum evacuation means for discharging the air;
A gate valve is provided at the inlet and outlet of the housing so as to be openable and closable, and makes the inside of the housing airtight when closed; and an attachment device is provided at the inlet and outlet of the housing and has an airtight structure. A connection means that can be connected is provided.
この真空炉の入口部と出口部にはそれぞれゲートバルブ
を介して気密構造のアタッチメント装置が接続される。An airtight attachment device is connected to the inlet and outlet of the vacuum furnace through gate valves, respectively.
アタッチメント装置として、例えば各種の圧延機、材料
挿入室、取出室２巻取装置等が挙げられるが、必要に応
じてこれら以外であってもよい。アタッチメント装置に
も前記排気手段が接続される。Examples of attachment devices include various rolling mills, material insertion chambers, take-out chambers, two winding devices, etc., but other devices may be used as required. The exhaust means is also connected to the attachment device.
［作用］
上記真空炉に被加熱物を挿入する場合、入口側のゲート
バルブと遮熱シャッタを開ける。この時に炉室内の真空
度を保つ必要があれば、入口側のアタッチメント装置に
被加熱物を収容したのちに、このアタッチメント装置の
内部を排気し、炉室内と同等の真空度にしてからゲート
バルブと遮熱シャッタを開くことにより、被加熱物を炉
室に挿入する。加熱後の被加熱物を炉内から取出す場合
、炉内と同等の真空度に保たれている出口側のアタッチ
メント装置に被加熱物を収容したのち、出口側ゲートバ
ルブを閉じるとともにこのアタッチメント装置に空気を
リークさせる。こうしてアタッチメント装置の内部を大
気圧にしてから被加熱物の取出しを行なう。[Operation] When inserting an object to be heated into the vacuum furnace, open the gate valve and heat shield shutter on the inlet side. At this time, if it is necessary to maintain the degree of vacuum in the furnace chamber, first place the object to be heated in the attachment device on the inlet side, evacuate the inside of this attachment device, make the vacuum equal to that in the furnace chamber, and then open the gate valve. By opening the heat shield shutter, the object to be heated is inserted into the furnace chamber. When taking out the heated object from the furnace, the object is placed in an attachment device on the outlet side that is kept at the same degree of vacuum as the inside of the furnace, and then the gate valve on the outlet side is closed and the object is removed from the attachment device. leak air. The object to be heated is then removed after the interior of the attachment device is brought to atmospheric pressure.
［実施例］
以下に本発明の第１実施例につき、第１図および第２図
を参照して説明する。[Example] A first example of the present invention will be described below with reference to FIGS. 1 and 2.
第１図に示された熱処理設備１は、図示中央部こ位置す
る真空炉２と、この真空炉２の入口側すなわち材料（被
加熱物）の搬入口側に、アタッチメント装置の一例とし
ての材料挿入室３およびマジックハンド式の挿入側操作
機構４を備えている。The heat treatment equipment 1 shown in FIG. 1 includes a vacuum furnace 2 located in the center of the figure, and a material attachment device, which is an example of an attachment device, on the inlet side of the vacuum furnace 2, that is, on the material (material to be heated) entrance side. It is equipped with an insertion chamber 3 and a magic hand type insertion side operating mechanism 4.
更に真空炉２の出口側すなわち材料の搬出口側に、アタ
ッチメント装置の一例としての取出室５およびマジック
ハンド式の取出側操作機構６が設けられている。これら
操作機構４．６のロッド４ａ。Furthermore, on the exit side of the vacuum furnace 2, that is, on the material delivery port side, a take-out chamber 5 and a magic hand-type take-out side operating mechanism 6 are provided as an example of an attachment device. Rod 4a of these operating mechanisms 4.6.
６ａは所定のストロークで前後方向に往復移動できる。6a can reciprocate back and forth with a predetermined stroke.
材料挿入室３の入口部と取出室５の出口部には、それぞ
れ上記ロッド４ａ、６ａを移動可能に貫通させた状聾で
気密を保つことの可能なシール手段を有した気密構造の
扉７，８が設けられている。At the entrance of the material insertion chamber 3 and the exit of the extraction chamber 5, there are doors 7 having an airtight structure, each having a sealing means capable of maintaining airtightness through which the rods 4a and 6a are movably penetrated. , 8 are provided.
真空炉２は気密構造のハウジング１０を備えている。そ
してこのハウジング１０に排気管１１が接続され、排気
管１１の排出側に浦拡散ポンプ１２やブースタポンプ１
３．油回転ポンプ１４等からなる真空排気手段１５が設
けられている。この排気手段１５によって得られる真空
度は、−例として５ Ｘ １０＝ 〜５ Ｘ １Ｏ−５
Ｔ ｏｒｒ前後である。この排気手段１５は排気管１６
．１７を介して材料挿入室３および取出室５にも連通し
ている。なお、オプションとしてハウジング１０の内部
に不活性ガスを供給できるようなガス供給手段を設ける
ようにしてもよい。The vacuum furnace 2 includes a housing 10 having an airtight structure. An exhaust pipe 11 is connected to this housing 10, and a ura diffusion pump 12 and a booster pump 1 are connected to the discharge side of the exhaust pipe 11.
3. A vacuum evacuation means 15 consisting of an oil rotary pump 14 or the like is provided. The degree of vacuum obtained by this evacuation means 15 is - for example, 5 x 10= ~ 5 x 1O-5
It is around Torr. This exhaust means 15 is an exhaust pipe 16
．． It also communicates with the material insertion chamber 3 and the extraction chamber 5 via 17. Note that, as an option, a gas supply means capable of supplying an inert gas to the inside of the housing 10 may be provided.
ハウジング１０の内部に炉室２０が設けられているとと
もに、炉室２０内に挿入された被加熱物を加熱可能なヒ
ータ２１が配設されている。このヒータ２１は、−例と
してモリブデン線などのように通電により発熱する高融
点金属線を利用し、被加熱物を１５００℃前後あるいは
それ以上の温度まで加熱できるようにする。炉室２０の
入口側と出口側には、それぞれ遮熱用のシャッタ２２．
２３が設けられている。このシャッタ２２．２３は、エ
アシリンダ等の往復動形シリンダ機構２５゜２６によっ
て上下方向に開閉できるようになっている。A furnace chamber 20 is provided inside the housing 10, and a heater 21 that can heat an object inserted into the furnace chamber 20 is provided. The heater 21 uses a high melting point metal wire, such as a molybdenum wire, which generates heat when energized, and can heat the object to a temperature of around 1500 DEG C. or higher. Heat shielding shutters 22 are provided on the inlet and outlet sides of the furnace chamber 20, respectively.
23 are provided. The shutters 22 and 23 can be opened and closed in the vertical direction by reciprocating cylinder mechanisms 25 and 26 such as air cylinders.
また、ハウジング１０の入口部３０と出口部３１に、そ
れぞれハウジング１０内の真空度を保つためのゲートバ
ルブ３２．３３が設けられている。これらゲートバルブ
３２．３３は、それぞれエアシリンダ等の往復動形シリ
ンダ機構３４゜３５によって上下方向に開閉できるよう
になっている。そして各ゲートバルブ３２．３３の端面
側に、接続手段としてのフランジ部４０．４１が設けら
れている。入口側に位置するフランジ部４０は、前述し
た材料挿入室３を着脱可能にしかも気密に接続するため
に使われる。出口側に位置するフランジ部４１は、材料
取出室５を着脱可能にしかも気密に接続するために使わ
れる。これらフランジ部４０．４１は、相手側のフラン
ジ面に対しボルト、ナツト等の締結具４２を用いて締結
される。従って、真空炉２と材料挿入室３と取出室５と
は、必要に応じてそれぞれフランジ部４０゜４１のとこ
ろで切離すことができる。真空炉２や取出室５には材料
を目視可能な適宜位置に覗き窓４３が設けられている。Furthermore, gate valves 32 and 33 are provided at the inlet portion 30 and outlet portion 31 of the housing 10, respectively, for maintaining the degree of vacuum within the housing 10. These gate valves 32 and 33 can be opened and closed in the vertical direction by reciprocating cylinder mechanisms 34 and 35 such as air cylinders. A flange portion 40.41 serving as a connection means is provided on the end face side of each gate valve 32.33. The flange portion 40 located on the inlet side is used to removably and airtightly connect the material insertion chamber 3 described above. The flange portion 41 located on the outlet side is used to connect the material extraction chamber 5 in a detachable and airtight manner. These flange portions 40, 41 are fastened to a mating flange surface using fasteners 42 such as bolts and nuts. Therefore, the vacuum furnace 2, the material insertion chamber 3, and the extraction chamber 5 can be separated at the flange portions 40 and 41, respectively, if necessary. A viewing window 43 is provided in the vacuum furnace 2 and the extraction chamber 5 at an appropriate position through which the material can be visually observed.
次に、上記構成の熱処理設備１の作用について説明する
。Next, the operation of the heat treatment equipment 1 having the above configuration will be explained.
ハウジング１０の内部を排気手段１５によって前記真空
度まで排気するとともに、ヒータ２１によって炉室２０
の温度を所定値まで上昇させる。The inside of the housing 10 is evacuated to the vacuum level by the exhaust means 15, and the furnace chamber 20 is evacuated by the heater 21.
temperature to a predetermined value.
そして、ゲートバルブ３２．３３が閉じていることを確
認してから、材料挿入室３をリークさせて空気を導入し
、材料挿入室３内を大気圧にしてから扉７を開ける。次
に、操作機構４を使って被加熱物を材料挿入室３内に入
れ、扉７を密閉するとともに排気手段１５によって材料
挿入室３内の空気を排気する。そしてゲートバルブ３２
と遮熱シャッタ２２を開け、操作機構４のロッド４ａを
前進させることにより、材料を炉室２０内に挿入する。After confirming that the gate valves 32 and 33 are closed, the material insertion chamber 3 is leaked and air is introduced, and the inside of the material insertion chamber 3 is brought to atmospheric pressure before the door 7 is opened. Next, the object to be heated is put into the material insertion chamber 3 using the operating mechanism 4, the door 7 is sealed, and the air inside the material insertion chamber 3 is exhausted by the exhaust means 15. and gate valve 32
The material is inserted into the furnace chamber 20 by opening the heat shielding shutter 22 and moving the rod 4a of the operating mechanism 4 forward.
ロッド４ａを後退させてからシャッタ２２とゲートバル
ブ３２を閉じる。以上の一連の工程により、所望の真空
度を保ちかつ炉室２０の温度を下げることなく被加熱物
の炉室２０内への挿入が完了する。After retracting the rod 4a, the shutter 22 and gate valve 32 are closed. Through the series of steps described above, the insertion of the object to be heated into the furnace chamber 20 is completed while maintaining the desired degree of vacuum and without lowering the temperature of the furnace chamber 20.
被加熱物を炉室２０内で所定の温度と時間に保持したの
ち、遮熱シャッタ２３とゲートバルブ３３を開け、操作
機構６によって被加熱物を取出室５に取出す。その後、
ゲートバルブ３３を閉じるとともに、取出室５をリーク
させて大気圧にしたのち、扉８を開けて被加熱物を取出
す。以上の工程を経ることにより、所望の非酸化熱処理
と被加熱物の取出しを行なうことができる。なお、ハウ
ジング１０内に不活性ガスを注入することにより、不活
性ガス雰囲気中での非酸化熱処理を行なうようにしても
よい＠
第３図は本発明の第２実施例を示し、この実施例では真
空炉２の出口側アタッチメント装置の一例としての熱間
圧延機５０を備えている。それ以外の構成と作用効果は
第１実施例で述べたものと同様である。この熱間圧延機
５０は、気密構造の筐体５１の内部に圧延ロール５２．
５３を有している。そして筐体５１の入口部と出口部に
それぞれゲートバルブ３３．５５が設けられている。筐
体５１には図示しない排気管を介して前記排気手段１５
が接続されている。従ってゲートバルブ３３５５を閉じ
ることにより、筐体５１の内部を気密に保つことができ
る。またこの熱間圧延機５０は、必要に応じてゲートバ
ルブ３３．５５のところで真空炉２と取出室５とを切離
すことができる。After the object to be heated is maintained at a predetermined temperature and time in the furnace chamber 20, the heat shielding shutter 23 and the gate valve 33 are opened, and the object to be heated is taken out to the removal chamber 5 by the operating mechanism 6. after that,
After closing the gate valve 33 and making the extraction chamber 5 leak to atmospheric pressure, the door 8 is opened and the object to be heated is taken out. By going through the above steps, desired non-oxidizing heat treatment and removal of the heated object can be performed. Note that non-oxidizing heat treatment may be performed in an inert gas atmosphere by injecting an inert gas into the housing 10. FIG. 3 shows a second embodiment of the present invention, and this embodiment A hot rolling mill 50 is provided as an example of an attachment device on the outlet side of the vacuum furnace 2. The other configurations and effects are the same as those described in the first embodiment. This hot rolling mill 50 has rolling rolls 52.
It has 53. Gate valves 33 and 55 are provided at the inlet and outlet of the housing 51, respectively. The exhaust means 15 is connected to the housing 51 through an exhaust pipe (not shown).
is connected. Therefore, by closing the gate valve 3355, the inside of the housing 51 can be kept airtight. Further, in this hot rolling mill 50, the vacuum furnace 2 and the take-out chamber 5 can be separated from each other at the gate valve 33.55, if necessary.
また第４図は本発明の第３実施例を示しており、真空炉
２の人口側にアタッチメント装置の一例としての粉末圧
延機６０を備えているとともに、真空炉２の出口側にア
タッチメント装置の一例としての熱間圧延機５０と巻取
装置６１を備えている。FIG. 4 shows a third embodiment of the present invention, in which a powder rolling mill 60 as an example of an attachment device is provided on the artificial side of the vacuum furnace 2, and an attachment device is provided on the outlet side of the vacuum furnace 2. A hot rolling mill 50 and a winding device 61 are provided as an example.
熱間圧延機５０の構成と作用は第２実施例と同様である
。粉末圧延機６０は、気密構造の筐体６２を有する圧延
機本体部６３と、気密構造の筺体６４を有するシュータ
室６５と、これら筐体６２゜６４間に設けられたゲート
バルブ６６などをＲえて構成されている。圧延機本体部
５３の内部には粉末を圧延するためのロール６７．６８
と、粉末を加熱するためのヒータ（図示せず）などが設
けられている。一方、巻取装置６１も気密構造の筐体７
０を有しており、この筐体７０内に巻取ドラム７１やガ
イド７２などが収容されている。各筐体５１，６２，６
４．７０に前記排気手段１５が接続されている。The configuration and operation of the hot rolling mill 50 are similar to those in the second embodiment. The powder rolling mill 60 includes a rolling mill main body 63 having an airtight housing 62, a shooter chamber 65 having an airtight housing 64, and a gate valve 66 provided between these housings 62 and 64. It is designed with a focus on Inside the rolling mill main body 53 are rolls 67 and 68 for rolling powder.
A heater (not shown) for heating the powder is provided. On the other hand, the winding device 61 also has an airtight housing 7.
0, and a winding drum 71, a guide 72, and the like are housed within this housing 70. Each housing 51, 62, 6
4.70 is connected to the exhaust means 15.
上記構成の粉末圧延機６０を備えた第３実施例こおいて
は、真空雰囲気中で所定温度まで加熱された粉末を連続
的にロール６７．６８に供給するとともに、この粉末を
真空雰囲気中でロール６７゜６８により加圧して圧粉板
を得る。この圧粉板はゲートバルブ６６を経てシュータ
室６５を通り、史にゲートバルブ３２を経て炉室２０に
導入される。この炉室２０にて所定温度に加熱された圧
粉板は、圧延機５０に導入されて所望の厚みまで熱間で
圧延されたのち、ドラム７１に巻取られる。In the third embodiment equipped with the powder rolling mill 60 having the above configuration, the powder heated to a predetermined temperature in a vacuum atmosphere is continuously supplied to the rolls 67 and 68, and the powder is heated to a predetermined temperature in a vacuum atmosphere. A powder plate is obtained by applying pressure with rolls 67° and 68°. This powder plate passes through the gate valve 66, passes through the shooter chamber 65, and is then introduced into the furnace chamber 20 through the gate valve 32. The powder plate heated to a predetermined temperature in the furnace chamber 20 is introduced into the rolling mill 50, hot rolled to a desired thickness, and then wound onto a drum 71.
なお、短尺な圧粉板の熱処理と圧延を行なう場合には巻
取装置６１の代りに、前記第１実施例で述べた取出室５
および操作機構６を使うようにする。Note that when heat treating and rolling a short powder plate, the take-up chamber 5 described in the first embodiment is used instead of the winding device 61.
and the operating mechanism 6.
この第３実施例によれば、粉末の圧延から加熱＝圧延−
巻取に至る一連の工程を、炉室２０の温度を下げること
なく真空雰囲気中あるいは不活性ガス雰囲気中で連続的
に行なうことができる。According to this third embodiment, from powder rolling to heating = rolling -
A series of steps leading to winding can be performed continuously in a vacuum atmosphere or an inert gas atmosphere without lowering the temperature of the furnace chamber 20.
［発明の効果］
本発明によれば、非酸化雰囲気中で加熱される材料を各
種の目的に応じて様々なアタッチメント装置によって取
扱うことができるようになるため、この種の熱処理材の
用途拡大や新素材の製造を行なう上で大きな威力を発揮
する。[Effects of the Invention] According to the present invention, materials that are heated in a non-oxidizing atmosphere can be handled with various attachment devices depending on various purposes. It exerts great power in manufacturing new materials.
第１図は本発明の第１実施例を示す熱処理設備の正面図
、第２図は第１図に示された熱処理設備の概念図、第３
図は本発明の第２実施例を示す熱処理設備の概念図、第
４図は本発明の第３実施例を示す熱処理設備の概念図で
ある。
１・・・熱処理設備、２・・・真空炉、３・・・材料挿
入室、５・・・取出室、１０・・・ハウジング、１５・
・・排気手段、２０・・・炉室、２１・・・ヒータ、２
２．２３・・・遮熱用のシャッタ、３２．３３・・・ゲ
ートバルブ、４０゜４１・・・フランジ部、５０・・・
熱間圧延機、５５・・・ゲートバルブ、６Ｑ・・・粉末
圧延機、５１・・・巻取装置、６６・・・ゲートバルブ
。
出願人代理人 弁理士 鈴江武彦FIG. 1 is a front view of a heat treatment facility showing a first embodiment of the present invention, FIG. 2 is a conceptual diagram of the heat treatment facility shown in FIG. 1, and FIG.
The figure is a conceptual diagram of a heat treatment facility showing a second embodiment of the present invention, and FIG. 4 is a conceptual diagram of a heat treatment facility showing a third embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Heat treatment equipment, 2... Vacuum furnace, 3... Material insertion chamber, 5... Removal chamber, 10... Housing, 15...
...Exhaust means, 20...Furnace chamber, 21...Heater, 2
2.23...Shutter for heat shielding, 32.33...Gate valve, 40°41...Flange part, 50...
Hot rolling mill, 55...gate valve, 6Q...powder rolling mill, 51...winding device, 66...gate valve. Applicant's agent Patent attorney Takehiko Suzue
Claims (1)
記炉室内に挿入される被加熱物を所望の温度まで加熱可
能に配設されたヒータと、上記炉室の入口側と出口側に
それぞれ開閉自在に設けられた遮熱シャッタと、上記ハ
ウジング内の空気を排出するための真空排気手段と、上
記ハウジングの入口部と出口部にそれぞれ開閉可能に設
けられていてその閉時にハウジング内を気密にするゲー
トバルブと、上記ハウジングの入口側と出口側にそれぞ
れ設けられていて気密構造のアタッチメント装置を接続
可能な接続手段と、を具備したことを特徴とする真空炉
。A vacuum furnace housing having an airtight structure and having a furnace chamber therein; a heater disposed to be able to heat the object to be heated inserted into the furnace chamber to a desired temperature; A heat insulating shutter that can be opened and closed, a vacuum evacuation means for discharging the air inside the housing, and a vacuum evacuation means that can be opened and closed at the inlet and outlet of the housing, and when closed, the inside of the housing is removed. A vacuum furnace comprising: a gate valve that is airtight; and connection means that are provided on the inlet side and the outlet side of the housing to which an attachment device having an airtight structure can be connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29932088A JPH02146495A (en) | 1988-11-26 | 1988-11-26 | Vacuum furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29932088A JPH02146495A (en) | 1988-11-26 | 1988-11-26 | Vacuum furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02146495A true JPH02146495A (en) | 1990-06-05 |
| JPH0310871B2 JPH0310871B2 (en) | 1991-02-14 |
Family
ID=17871014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29932088A Granted JPH02146495A (en) | 1988-11-26 | 1988-11-26 | Vacuum furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146495A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS559940U (en) * | 1978-07-07 | 1980-01-22 | ||
| JPS5525712A (en) * | 1978-08-10 | 1980-02-23 | Shii Ai Heizu Inc | Vacuum furnace for continuous heat treatment |
| JPS60184624A (en) * | 1984-03-02 | 1985-09-20 | Daido Steel Co Ltd | Vacuum heat-treating furnace |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5227013A (en) * | 1975-08-27 | 1977-03-01 | Japan Atom Energy Res Inst | High temperature corrosion resisting ni-base alloy |
-
1988
- 1988-11-26 JP JP29932088A patent/JPH02146495A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS559940U (en) * | 1978-07-07 | 1980-01-22 | ||
| JPS5525712A (en) * | 1978-08-10 | 1980-02-23 | Shii Ai Heizu Inc | Vacuum furnace for continuous heat treatment |
| JPS60184624A (en) * | 1984-03-02 | 1985-09-20 | Daido Steel Co Ltd | Vacuum heat-treating furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0310871B2 (en) | 1991-02-14 |
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