JPH01308948A - Defect detection light receiving apparatus - Google Patents
Defect detection light receiving apparatusInfo
- Publication number
- JPH01308948A JPH01308948A JP13973388A JP13973388A JPH01308948A JP H01308948 A JPH01308948 A JP H01308948A JP 13973388 A JP13973388 A JP 13973388A JP 13973388 A JP13973388 A JP 13973388A JP H01308948 A JPH01308948 A JP H01308948A
- Authority
- JP
- Japan
- Prior art keywords
- light
- photoconductor
- light guide
- reflected
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 24
- 230000007547 defect Effects 0.000 title claims description 25
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000004020 conductor Substances 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 230000008859 change Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、被検材例えば金属板、鋼片、ペーパー等の欠
陥を光学的に検出する欠陥検出受光装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a defect detection light-receiving device that optically detects defects in materials to be inspected, such as metal plates, steel pieces, paper, and the like.
（従来の技術）
従来光学的手段による表面疵検出装置は、光源より発生
した光、例えば、レーザー光を、回転ミラーで反射し、
走行する被検材例えば鋼板表面を巾方向に走査し、鋼板
表面走査点より反射光を得、この反射光を幅の広い光電
変換器で直接受けるか、あるいは集光用のレンズ等にて
一点に集光して光電変換器で電気信号に変換し、その電
気信号の変化より、１１板表面の欠陥を検出するように
構成されている。(Prior Art) Conventional surface flaw detection devices using optical means reflect light emitted from a light source, such as laser light, with a rotating mirror.
The surface of a moving object, such as a steel plate, is scanned in the width direction, reflected light is obtained from a scanning point on the steel plate surface, and this reflected light is directly received by a wide photoelectric converter or focused at a single point using a condensing lens, etc. It is configured to condense light into an electrical signal using a photoelectric converter, and detect defects on the surface of the 11th board based on changes in the electrical signal.
直接受光型の広幅光電変換器としては、例えば特開昭５
４−１１８８９１号公報に示されろようなアレイ状の光
電変換素子を、主反射光をはさんで被検材の幅方向に２
列に設けたものがある。As a direct light-receiving wide-width photoelectric converter, for example, JP-A-5
An array of photoelectric conversion elements as shown in 4-118891 is arranged two times in the width direction of the material to be tested with the main reflected light in between.
There are some set up in rows.
これは主反射光を間にはさんで光電変換素子を配置して
いるので、疵等の欠陥により生じた回折パターンに相当
する光のみが検出され、検出精度を確保するという作用
効果があるが、他方では光電変換素子を２列にわたって
設けなければならず、装置の構造が複雑化する恐れがあ
る。Since the photoelectric conversion elements are arranged with the main reflected light in between, only the light corresponding to the diffraction pattern caused by defects such as scratches is detected, which has the effect of ensuring detection accuracy. On the other hand, it is necessary to provide two rows of photoelectric conversion elements, which may complicate the structure of the device.
また、広幅光電変換器として、例えば２００ｍ程度の長
さの細長いホトダイオードや、２０Ｉ程度の長さのホト
ダイオードをすき間なく並べて、７００ｍ程度の幅広い
受光器を構成したものもある。Further, as wide-width photoelectric converters, for example, elongated photodiodes with a length of about 200 m or photodiodes with a length of about 20 I are lined up closely to form a wide photoreceiver with a width of about 700 m.
ところで、近年例えば鋼板等の贋造においては２その製
造ライン速度はますます高速化されている。Incidentally, in recent years, for example, the production line speed for counterfeiting steel plates and the like has become faster and faster.
また、需要家の品質に対する要求も厳格化の一途をたど
り、表面欠陥についても、ますます小さなもの、軽微な
ものを検出するニーズが出てきている。In addition, customers' quality requirements are becoming increasingly strict, and there is a need to detect smaller and more minor surface defects.
軽微な欠陥を検出するためには、走査光点の寸法を小さ
くする必要があるが、小さな光点で、高速走行する検査
材を、全面的に探傷するためには、走査速度を上げる必
要があり、ますます、受光器の応答周波数帯域を広げな
ければならない。In order to detect minor defects, it is necessary to reduce the size of the scanning light spot, but in order to fully detect defects on the inspection material that is traveling at high speed with a small light spot, it is necessary to increase the scanning speed. Yes, it is necessary to increasingly widen the response frequency band of the photoreceiver.
このためもはや、従来の細長いホトダイオードでは、そ
の長さ方向の検出能力が一様でないから、欠陥検出を精
度よく行うことが困難である。一方、小型のホトダイオ
ードを多数個配置した場合には、この検出信号を広帯域
増ｌＪ器で増巾したのち加算するか、集光型で光電子増
倍管を使うかしかなく、いずれも装置が非常に高価なも
のになる。For this reason, it is no longer possible to accurately detect defects with conventional elongated photodiodes because their detection ability in the length direction is not uniform. On the other hand, when a large number of small photodiodes are arranged, the only options are to amplify this detection signal with a broadband amplifier and then add it, or to use a light-concentrating photomultiplier tube, both of which require very large equipment. becomes expensive.
他方、集光型の場合には、光電子増倍管がもっばら使用
される。これはホトダイオード等に較べて、感度、周波
数帯域ともに一桁以上すぐれているためである。On the other hand, in the case of the condensing type, photomultiplier tubes are mostly used. This is because they are superior in sensitivity and frequency band by more than an order of magnitude compared to photodiodes and the like.
しかしながら、集光型の場合は、レンズや、放物面鏡を
使って集光するため、２〜３の欠点が出てくる。すなわ
ち、走行する被検材は、上下に振動しており、また耳波
や中伸びという形状欠陥を有し、これにより走査光点の
反射光は、上下方向の平行移動及び反射方向の変化を生
じ、これが検出器への入射光量の変化と、検出感度の変
化を引き起すことになる。However, in the case of the condensing type, a lens or a parabolic mirror is used to condense the light, so there are a few drawbacks. In other words, the moving object to be inspected vibrates vertically and has shape defects such as ear waves and elongation, which causes the reflected light from the scanning light spot to undergo parallel movement in the vertical direction and change in the reflection direction. This causes a change in the amount of light incident on the detector and a change in detection sensitivity.
上下振動の対策として、サポートロールを設けたり、ロ
ール上にて検査することにより、検出精度の劣化をある
程度軽減できるが、形状の影響については改善が難しく
、特にローテンションで通板される場合は避けがたい。As a countermeasure against vertical vibration, it is possible to reduce the deterioration of detection accuracy to some extent by installing support rolls or inspecting on rolls, but it is difficult to improve the effect of shape, especially when threading under low tension. Unavoidable.
この影響を幾分でも減らすためには、光点と受光器のな
す立体角を大きくすればよいが１反面、凹凸を呈する欠
陥の検出感度が低下する。In order to reduce this effect to some extent, the solid angle formed between the light spot and the light receiver may be increased, but on the other hand, the detection sensitivity of defects exhibiting unevenness is reduced.
斯かることから、被検対象によって若干変わるものの例
えば特開昭５８−２０４３５０号公報に示されているよ
うに１０〜２０６に狭い方の立体角とされる。また、光
電子増倍管には受光面積にも限界があり。For this reason, the solid angle is set to a narrower solid angle of 10 to 206, as shown in, for example, Japanese Patent Application Laid-Open No. 58-204350, although it varies slightly depending on the subject to be examined. Additionally, photomultiplier tubes have a limited light-receiving area.
最大直径１５０ｍ＋φ程度である。これらのことが検出
装置の受光器の寸法を制約する。The maximum diameter is about 150m+φ. These things constrain the dimensions of the receiver of the detection device.
（発明が解決しようとする課題）
ところで集光するためには、被検材とレンズ、レンズと
受光器の距離をそれぞれ焦点距離に設定するのが一般的
であるが、レンズの開口数Ｆを余す小さくできず、０．
５程度が限界である。従って工業的にはレンズの径３０
０■、焦点距離１５０ｎｗｎ程度が限界であり、１台の
受光器当りの検査中は、せいぜい２５０ ｍｍ程度に制
限される。(Problem to be solved by the invention) By the way, in order to condense light, it is common to set the distances between the specimen and the lens and the distances between the lens and the light receiver as focal lengths. I couldn't make it any smaller, so 0.
The limit is about 5. Therefore, industrially, the lens diameter is 30
The maximum focal length is about 150 nwn, and during inspection of one photoreceiver, the focal length is limited to about 250 mm at most.
このように、従来の欠陥検出装置では広幅な被検材の欠
陥検出を高精度で行なうには、多数の受光器を設置する
必要があり、コスト高を招いていた。As described above, in order to accurately detect defects in a wide range of materials to be inspected with conventional defect detection devices, it is necessary to install a large number of light receivers, leading to increased costs.
本発明は、被検材の欠陥を光学的に検出するさいに被検
材で反射された走査光を受光する受光器の能力を飛躇的
に高めるとともに、高感度でしがも受光幅が広い欠陥検
出受光装置を提供することを目的とする。The present invention dramatically increases the ability of a light receiver to receive the scanning light reflected by the material to be inspected when optically detecting defects in the material to be inspected, and also has high sensitivity and a wide light receiving width. The purpose of the present invention is to provide a wide range of defect detection light receiving devices.
（問題点を解決するための手段）
本発明の要旨は、円柱光導体の端部に受光素子を設け、
円周面より入射する光を内面の多重反射にて端まで導き
光電変換する受光器において：被検材からの反射光が入
射する側の円柱光導体の前面にスリットを設け、前記ス
リットを経て入射された反射光が反射する円柱光導体後
部に該円柱光導体軸方向と直交する向きに線状度を設け
るとともに、円柱光導体の後方に反射板を設けたことで
ある。さらに他の要旨は、前記円柱光導体後部を平担面
とし、該平担面に円柱光導体軸方向と直交する向きの線
状度を設けた円柱光導体を備えたことである。(Means for solving the problem) The gist of the present invention is to provide a light receiving element at the end of a cylindrical light guide,
In a light receiver that guides light incident from the circumferential surface to the end by multiple reflections on the inner surface and converts it into photoelectricity: A slit is provided in the front surface of the cylindrical light guide on the side where the reflected light from the test material enters, and the light passes through the slit. The rear part of the cylindrical light guide on which the incident reflected light is reflected is provided with linearity in a direction perpendicular to the axial direction of the cylindrical light guide, and a reflection plate is provided at the rear of the cylindrical light guide. Still another feature is that the cylindrical light guide is provided with a rear portion of the cylindrical light guide having a flat surface, and a linearity in a direction perpendicular to the axial direction of the cylindrical light guide on the flat surface.
以下、本発明の一実施例を図面を参照して詳細に説明す
る。Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.
第１図は、実施例の欠陥検出受光装置を備える表面欠陥
検出装置の全体構成を示す。FIG. 1 shows the overall configuration of a surface defect detection device including a defect detection light receiving device according to an embodiment.
１は被検材５例えば鋼板であり、矢印Ａの方向に高速で
走行している。２はレーザー光源であり。Reference numeral 1 indicates a material 5 to be inspected, for example, a steel plate, which is traveling at high speed in the direction of arrow A. 2 is a laser light source.
３はレーザー光点の形状を、鋼板面においてライン方向
に例えば１〜５ｍ、巾方向０．３〜１ｆｆｆｆ程度に成
形するためのレンズや、シリンドリカルレンズよりなる
光学系である。Reference numeral 3 denotes an optical system consisting of a lens or a cylindrical lens for shaping the shape of the laser beam spot to, for example, 1 to 5 m in the line direction and 0.3 to 1 ffff in the width direction on the surface of the steel plate.
４は折返しミラーであり、５はレーザー光を走査するた
めの回転多面鏡である。６はレーザー光が扇状に走査さ
れている様子を示している。4 is a folding mirror, and 5 is a rotating polygon mirror for scanning laser light. 6 shows how the laser beam is scanned in a fan shape.
７はスリットで１円柱光導体８の前面に設けられており
、該スリット孔７−１は円柱光導体８の直径より狭く開
口され、被検材１で反射された走査レーザー光の中で欠
陥に基づかない散乱反射が円柱光導体８に入射するのを
防ぎ、受光能を高める。A slit 7 is provided on the front surface of the cylindrical light guide 8, and the slit hole 7-1 is opened narrower than the diameter of the cylindrical light guide 8 to detect defects in the scanning laser beam reflected by the test material 1. This prevents scattered reflections that are not based on the light from entering the cylindrical light guide 8, and improves the light receiving ability.
円柱光導体８は、スリット７を経て円周面より入射され
た被検材１からの反射レーザー光を、その内面で多重反
射して、端部に設けた受光素子９に出射するものである
。ところで該円柱光導体８後部つまり、スリットの反対
側に線状度８−１が設けられている。該線状度８−１は
円柱光導体８軸方向と直交する向きに刻設され、極微小
で例えば光の波長と同等もしくはそれより若干大きいが
。The cylindrical light guide 8 multiple-reflects the reflected laser light from the specimen 1 that is incident from the circumferential surface through the slit 7 on its inner surface, and emits the reflected laser light to the light receiving element 9 provided at the end. . By the way, a linearity 8-1 is provided at the rear of the cylindrical light guide 8, that is, on the opposite side of the slit. The linearity 8-1 is carved in a direction perpendicular to the axial direction of the cylindrical light guide 8, and is extremely small, for example, equal to or slightly larger than the wavelength of light.
小さい程度の深さであることが好ましく、サンドペーパ
ー、ブラシ、レーザー、エツチング等の手段を利用して
形成される。The depth is preferably small and is formed using means such as sandpaper, brush, laser, etching, etc.
該線状度８−１は、円柱光導体８に反射された反射レー
ザー光を、線状度８−１の直角方向にのみ扇状に散乱す
る作用があり、受光能を高める。The linearity 8-1 has the effect of scattering the reflected laser light reflected by the cylindrical light guide 8 in a fan shape only in the direction perpendicular to the linearity 8-1, thereby increasing the light receiving ability.
１０は反射板であり、この実施例では曲面形状に形成し
たミラーであって、前記円柱光導体８の後方に設けられ
ている。Reference numeral 10 denotes a reflecting plate, which in this embodiment is a mirror formed into a curved surface, and is provided at the rear of the cylindrical light guide 8.
ところで、被検材１に照射され、被検面で反射されたレ
ーザー光はスリット７を経て円柱光導体８に入射するが
、該反射レーザー光は円柱光導体８の後部に設けられた
線状度８−１の直角方向にのみ散乱する１゜
つまり、レーザ光は円柱光導体８の軸を通る平面上に均
一に散乱し、内面で多重反射しながら、受光素子９に到
達し検出される。Incidentally, the laser beam irradiated onto the test material 1 and reflected by the test surface passes through the slit 7 and enters the cylindrical light guide 8. The laser beam is scattered only in the right angle direction of 8-1 degrees.In other words, the laser light is uniformly scattered on a plane passing through the axis of the cylindrical light guide 8, and is reflected multiple times on the inner surface before reaching the light receiving element 9 and being detected. .
一部透過した光は、円柱光導体８の後面に設けた反射板
１０により１円柱光導体８に再び入射される。The partially transmitted light enters the cylindrical light guide 8 again by a reflecting plate 10 provided on the rear surface of the cylindrical light guide 8.
従って、被検材１で反射されたレーザー光は、円柱光導
体８の端部に設けた受光素子９に極めて高率で入射され
、検出能が非常に優れる。また、円柱光導体８は、その
長さ方向すべてが優れた受光能を有するので、受光幅が
大となる格別の作用効果が得られる。Therefore, the laser beam reflected by the specimen 1 is incident on the light receiving element 9 provided at the end of the cylindrical light guide 8 at an extremely high rate, resulting in extremely excellent detection performance. Further, since the cylindrical light guide 8 has excellent light receiving ability in all its length directions, a special effect of increasing the light receiving width can be obtained.
両方の受光素子９で検出された後の信号処理には、公知
の装置が用いられる。即ち、受光素子９（例えば光電子
増倍管）から入力されろ信号は、加算器１１で加算され
、次いで微小電圧信号を増巾したり、フィルターリング
処理するアナログ処理回路１２を通り、ディジタル処理
回路１３に印加される。ディジタル処理回路１３は、入
力されるアナログ電圧信号をＡ／Ｄ変換し、画素毎のピ
ーク値を求め、フレームメモリーに記憶して、２次元化
し画像処理を行い、特徴パラメータを算出する。前記デ
ィジタル処理回路１３が求めた特徴パラメータは、計算
機１４によって欠陥の疵形態や、疵種類、疵の程度の判
定などが行なわれ１判定された結果は表示及び記録され
る。A known device is used for signal processing after detection by both light receiving elements 9. That is, signals input from the light receiving element 9 (for example, a photomultiplier tube) are added by an adder 11, and then passed through an analog processing circuit 12 that amplifies and filters the minute voltage signal, and then is sent to a digital processing circuit. 13. The digital processing circuit 13 A/D converts the input analog voltage signal, obtains a peak value for each pixel, stores it in a frame memory, performs two-dimensional image processing, and calculates characteristic parameters. The characteristic parameters determined by the digital processing circuit 13 are subjected to determination of the flaw type, flaw type, degree of flaw, etc. by the computer 14, and the results of the determination are displayed and recorded.
次に１つの変形例を説明する。第４図に示す実施例にお
いては、前述の円柱光導体８に代えて、円柱光導体８の
後部を平担面８−２とし、該平担面８−２は前方のスリ
ットとほぼ平行になるように設けるとともに、線状度８
−１が刻設されている。この線状度８−１は、前記実施
例と同様に円柱光導体の軸方向と直交する向きに形成さ
れている。Next, one modification will be explained. In the embodiment shown in FIG. 4, instead of the cylindrical light guide 8 described above, the rear part of the cylindrical light guide 8 has a flat surface 8-2, and the flat surface 8-2 is approximately parallel to the front slit. In addition, the linearity is 8
-1 is engraved. This linearity 8-1 is formed in a direction perpendicular to the axial direction of the cylindrical light guide as in the previous embodiment.
このように円柱光導体８を構成することにより、スリッ
ト７を経て入射される反射レーザー光は、平担面８−２
と線状度８−１の作用により、第５図に示すように円柱
光導体８端部方向への反射伝達がロスなく行なわれる。By configuring the cylindrical light guide 8 in this way, the reflected laser light incident through the slit 7 is directed to the flat surface 8-2.
Due to the effects of the linearity 8-1 and the linearity 8-1, reflection and transmission toward the end of the cylindrical light guide 8 is performed without loss, as shown in FIG.
また線状度８−１の形成は平担面８−２上になされるの
で、その刻設が容易にしうるという利点もある。Further, since the linearity 8-1 is formed on the flat surface 8-2, there is an advantage that it can be easily carved.
なお、１０は反射板である。Note that 10 is a reflecting plate.
（発明の効果）
本発明による欠陥検出受光装置では受光機能が非常に優
れ、感度は光導体のみの場合の１０倍程度となり、かつ
高い機能を奏する受光装置の長さが、従来に比へで格段
に大きくなり、−装置あたりの検査幅が極めて広くなる
ので、欠陥検出装置の低コスト化が達成される。(Effects of the Invention) The defect detection light receiving device according to the present invention has an extremely excellent light receiving function, the sensitivity is about 10 times that of a light guide only, and the length of the light receiving device that exhibits high functionality is longer than that of the conventional one. Since the defect detection device becomes much larger and the inspection width per device becomes extremely wide, the cost of the defect detection device can be reduced.
第１図は、本発明の一実施例を示すブロック図、第２図
は、本発明の一実施例におけろ受光部の断面図、第３図
は、本発明の一実施例において作用を説明するための光
路図、第４図は１本発明の他の実施例における受光部の
断面図、第５図は、本発明の他の実施例において作用を
説明するための光路図である。
１：被検材 ２：レーザー光源３：レーザ
ー光点 ４：折返しミラー５：回転多面鏡
６：レーザー光７：スリツト ７−１ニスリ
ット孔８：円柱光導体 ８−１：線状度
８−２：平担面 ９：受光素子１０：反射
板 １１：加算器１２：アナログ処理回路
１３：ディジタル回路 １４：計算機東２図
声４区
東５図FIG. 1 is a block diagram showing an embodiment of the present invention, FIG. 2 is a sectional view of a light receiving section in an embodiment of the present invention, and FIG. 3 is a block diagram showing an embodiment of the present invention. FIG. 4 is a sectional view of a light receiving section in another embodiment of the present invention, and FIG. 5 is an optical path diagram for explaining the operation in another embodiment of the present invention. 1: Test material 2: Laser light source 3: Laser light spot 4: Reflection mirror 5: Rotating polygon mirror
6: Laser light 7: Slit 7-1 Nislit hole 8: Cylindrical light guide 8-1: Linearity 8-2: Flat surface 9: Light receiving element 10: Reflector plate 11: Adder 12: Analog processing circuit 13: Digital circuit 14: Computer East 2, Voice 4, East 5
Claims (2)
入射する光を内面の多重反射にて端まで導き光電変換す
る欠陥検出受光装置において： 被検材からの反射光が入射する側の円柱光導体の前面に
スリットを設け、前記スリットを経て入射された反射光
が反射する円柱光導体後部に該円柱光導体軸方向と直交
する向きに線状痕を設けるとともに、円柱光導体の後方
に反射板を設けたことを特徴とする欠陥検出受光装置。(1) In a defect detection light-receiving device in which a light-receiving element is provided at the end of a cylindrical light guide, light incident from the circumferential surface is guided to the end by multiple reflections on the inner surface and photoelectrically converted: Reflected light from the inspected material is incident. A slit is provided in the front surface of the cylindrical light guide on the side where the cylindrical light guide is exposed, and a linear mark is provided in the rear part of the cylindrical light guide where the reflected light incident through the slit is reflected, in a direction perpendicular to the axial direction of the cylindrical light guide. A defect detection light-receiving device characterized in that a reflector is provided behind a conductor.
入射する光を内面の多重反射にて端まで導き光電変換す
る欠陥検出受光装置において： 被検材からの反射光が入射する側の円柱光導体の前面に
スリットを設け、前記スリットを経て入射された反射光
が反射する円柱光導体後部を平担面とするとともにも、
該平担面に円柱光導体軸方向と直交する向きに線状痕を
設け、円柱光導体の後方に反射板を設けたことを特徴と
する欠陥検出受光装置。(2) In a defect detection light-receiving device that has a light-receiving element at the end of a cylindrical light guide and guides light incident from the circumferential surface to the end through multiple reflections on the inner surface and converts it into electricity: Reflected light from the material to be inspected is incident. A slit is provided on the front surface of the cylindrical light guide on the side where the light is to be exposed, and the rear part of the cylindrical light guide on which the reflected light incident through the slit is reflected is made a flat surface.
A defect detection light receiving device characterized in that a linear mark is provided on the flat surface in a direction perpendicular to the axial direction of the cylindrical light guide, and a reflecting plate is provided at the rear of the cylindrical light guide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13973388A JPH01308948A (en) | 1988-06-07 | 1988-06-07 | Defect detection light receiving apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13973388A JPH01308948A (en) | 1988-06-07 | 1988-06-07 | Defect detection light receiving apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01308948A true JPH01308948A (en) | 1989-12-13 |
Family
ID=15252114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13973388A Pending JPH01308948A (en) | 1988-06-07 | 1988-06-07 | Defect detection light receiving apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01308948A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103529052A (en) * | 2012-07-04 | 2014-01-22 | 富士胶片株式会社 | Surface inspection apparatus and method, and solution casting method and equipment |
-
1988
- 1988-06-07 JP JP13973388A patent/JPH01308948A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103529052A (en) * | 2012-07-04 | 2014-01-22 | 富士胶片株式会社 | Surface inspection apparatus and method, and solution casting method and equipment |
| JP2014013186A (en) * | 2012-07-04 | 2014-01-23 | Fujifilm Corp | Surface inspection device and method of flow casting support, and solution film forming method and equipment |
| CN103529052B (en) * | 2012-07-04 | 2018-04-06 | 富士胶片株式会社 | Surface examining device and method, solution film-forming method and equipment |
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