JP5465880B2 - 検査データと組み合わせて設計データを使用するための方法及びシステム - Google Patents
検査データと組み合わせて設計データを使用するための方法及びシステム Download PDFInfo
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- JP5465880B2 JP5465880B2 JP2008541507A JP2008541507A JP5465880B2 JP 5465880 B2 JP5465880 B2 JP 5465880B2 JP 2008541507 A JP2008541507 A JP 2008541507A JP 2008541507 A JP2008541507 A JP 2008541507A JP 5465880 B2 JP5465880 B2 JP 5465880B2
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Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
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US73794705P | 2005-11-18 | 2005-11-18 | |
US73829005P | 2005-11-18 | 2005-11-18 | |
US60/737,947 | 2005-11-18 | ||
US60/738,290 | 2005-11-18 | ||
US11/561,735 | 2006-11-20 | ||
PCT/US2006/061113 WO2007120280A2 (en) | 2005-11-18 | 2006-11-20 | Methods and systems for utilizing design data in combination with inspection data |
US11/561,659 US7570796B2 (en) | 2005-11-18 | 2006-11-20 | Methods and systems for utilizing design data in combination with inspection data |
US11/561,659 | 2006-11-20 | ||
US11/561,735 US7676077B2 (en) | 2005-11-18 | 2006-11-20 | Methods and systems for utilizing design data in combination with inspection data |
Related Child Applications (1)
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JP2012111262A Division JP5466264B2 (ja) | 2005-11-18 | 2012-05-15 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
Publications (3)
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JP2009516832A JP2009516832A (ja) | 2009-04-23 |
JP2009516832A5 JP2009516832A5 (ko) | 2010-01-14 |
JP5465880B2 true JP5465880B2 (ja) | 2014-04-09 |
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JP2008541507A Active JP5465880B2 (ja) | 2005-11-18 | 2006-11-20 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
JP2012111262A Active JP5466264B2 (ja) | 2005-11-18 | 2012-05-15 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
JP2013134798A Active JP5932723B2 (ja) | 2005-11-18 | 2013-06-27 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
JP2013134802A Active JP5763712B2 (ja) | 2005-11-18 | 2013-06-27 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
JP2014077804A Active JP6023116B2 (ja) | 2005-11-18 | 2014-04-04 | 検査データと組み合わせて設計データを使用するための方法 |
JP2014255556A Active JP5869657B2 (ja) | 2005-11-18 | 2014-12-17 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
JP2014255558A Active JP5965467B2 (ja) | 2005-11-18 | 2014-12-17 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
JP2015184061A Active JP6312642B2 (ja) | 2005-11-18 | 2015-09-17 | 検査データと組み合わせて設計データを使用するための方法 |
JP2015184050A Active JP6312641B2 (ja) | 2005-11-18 | 2015-09-17 | 検査データと組み合わせて設計データを使用するための方法 |
JP2016033027A Active JP6127170B2 (ja) | 2005-11-18 | 2016-02-24 | ウェハ上で検出された欠陥をビン範囲に従って分けるように構成されたシステム |
JP2016033030A Active JP6364036B2 (ja) | 2005-11-18 | 2016-02-24 | 検査データと組み合わせて設計データを使用するための方法 |
JP2016033028A Active JP6360845B2 (ja) | 2005-11-18 | 2016-02-24 | 検査データと組み合わせて設計データを使用するための方法 |
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JP2012111262A Active JP5466264B2 (ja) | 2005-11-18 | 2012-05-15 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
JP2013134798A Active JP5932723B2 (ja) | 2005-11-18 | 2013-06-27 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
JP2013134802A Active JP5763712B2 (ja) | 2005-11-18 | 2013-06-27 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
JP2014077804A Active JP6023116B2 (ja) | 2005-11-18 | 2014-04-04 | 検査データと組み合わせて設計データを使用するための方法 |
JP2014255556A Active JP5869657B2 (ja) | 2005-11-18 | 2014-12-17 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
JP2014255558A Active JP5965467B2 (ja) | 2005-11-18 | 2014-12-17 | 検査データと組み合わせて設計データを使用するための方法及びシステム |
JP2015184061A Active JP6312642B2 (ja) | 2005-11-18 | 2015-09-17 | 検査データと組み合わせて設計データを使用するための方法 |
JP2015184050A Active JP6312641B2 (ja) | 2005-11-18 | 2015-09-17 | 検査データと組み合わせて設計データを使用するための方法 |
JP2016033027A Active JP6127170B2 (ja) | 2005-11-18 | 2016-02-24 | ウェハ上で検出された欠陥をビン範囲に従って分けるように構成されたシステム |
JP2016033030A Active JP6364036B2 (ja) | 2005-11-18 | 2016-02-24 | 検査データと組み合わせて設計データを使用するための方法 |
JP2016033028A Active JP6360845B2 (ja) | 2005-11-18 | 2016-02-24 | 検査データと組み合わせて設計データを使用するための方法 |
Country Status (5)
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EP (1) | EP1955225A4 (ko) |
JP (12) | JP5465880B2 (ko) |
KR (11) | KR101285967B1 (ko) |
IL (14) | IL191527A (ko) |
WO (2) | WO2007120280A2 (ko) |
Families Citing this family (89)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9002497B2 (en) * | 2003-07-03 | 2015-04-07 | Kla-Tencor Technologies Corp. | Methods and systems for inspection of wafers and reticles using designer intent data |
KR101285967B1 (ko) * | 2005-11-18 | 2013-07-12 | 케이엘에이-텐코 코포레이션 | 검사 데이터와 조합하여 설계 데이터를 활용하는 방법 및시스템 |
WO2009020885A1 (en) * | 2007-08-03 | 2009-02-12 | Flir Systems, Inc. | Wireless remote detector systems and methods |
US9710903B2 (en) | 2008-06-11 | 2017-07-18 | Kla-Tencor Corp. | System and method for detecting design and process defects on a wafer using process monitoring features |
WO2010014609A2 (en) * | 2008-07-28 | 2010-02-04 | Kla-Tencor Corporation | Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer |
WO2011004534A1 (ja) * | 2009-07-09 | 2011-01-13 | 株式会社 日立ハイテクノロジーズ | 半導体欠陥分類方法,半導体欠陥分類装置,半導体欠陥分類プログラム |
US8594823B2 (en) * | 2009-07-17 | 2013-11-26 | KLA—Tencor Corporation | Scanner performance comparison and matching using design and defect data |
WO2011152303A1 (ja) * | 2010-05-31 | 2011-12-08 | 株式会社日立ハイテクノロジーズ | 自動収差補正法を備えた荷電粒子線装置 |
EP2447889A1 (en) * | 2010-10-29 | 2012-05-02 | Siemens Aktiengesellschaft | Method for modeling a defect management in a manufacturing process and for handling the defect during the production process based on said modeled defect management |
TWI574136B (zh) * | 2012-02-03 | 2017-03-11 | 應用材料以色列公司 | 基於設計之缺陷分類之方法及系統 |
US8718353B2 (en) * | 2012-03-08 | 2014-05-06 | Kla-Tencor Corporation | Reticle defect inspection with systematic defect filter |
JP5943722B2 (ja) | 2012-06-08 | 2016-07-05 | 三菱重工業株式会社 | 欠陥判定装置、放射線撮像システム、及び欠陥判定方法 |
JP6092602B2 (ja) * | 2012-12-04 | 2017-03-08 | 株式会社安永 | 欠陥検査装置及び欠陥検査方法 |
US9202763B2 (en) | 2013-01-16 | 2015-12-01 | Kabushiki Kaisha Toshiba | Defect pattern evaluation method, defect pattern evaluation apparatus, and recording media |
JP6152281B2 (ja) * | 2013-02-25 | 2017-06-21 | 株式会社ニューフレアテクノロジー | パターン検査方法及びパターン検査装置 |
US10114368B2 (en) * | 2013-07-22 | 2018-10-30 | Applied Materials Israel Ltd. | Closed-loop automatic defect inspection and classification |
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KR101285967B1 (ko) * | 2005-11-18 | 2013-07-12 | 케이엘에이-텐코 코포레이션 | 검사 데이터와 조합하여 설계 데이터를 활용하는 방법 및시스템 |
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