JP4954105B2 - Chemical solution reuse system - Google Patents

Chemical solution reuse system Download PDF

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JP4954105B2
JP4954105B2 JP2008016993A JP2008016993A JP4954105B2 JP 4954105 B2 JP4954105 B2 JP 4954105B2 JP 2008016993 A JP2008016993 A JP 2008016993A JP 2008016993 A JP2008016993 A JP 2008016993A JP 4954105 B2 JP4954105 B2 JP 4954105B2
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chemical solution
tank
temporary storage
chemical
storage container
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JP2009178611A (en
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芳明 升
英典 宮本
健司 吉澤
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Tokyo Ohka Kogyo Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a system for reusing a slightly contaminated liquid chemical. <P>SOLUTION: The system for reusing the liquid chemical is constituted of a first recovery tank 13 for venting air from a liquid chemical recovered on the route from storage tanks 1A, 1B to a slit nozzle 8 and from the liquid chemical recovered upon venting air from the slit nozzle 8, a second recovery tank 22 for venting air from the liquid chemical recovered from a dipping tank 19 in which the lower end of the slit nozzle 8 is dipped, temporary storage tanks 30A, 30B wherein the liquid chemical coming from the first recovery tank 13 and the second recovery tank 22 is collected, a densitometer 33 that detects the concentration of the liquid chemical collected in the temporary storage tanks 30A, 30B, and switching valves that connect a pipeline coming from the temporary storage tanks 30A, 30B to a waste liquid tank 18 if the concentration of the liquid chemical is not higher than a prescribed value and connect the pipeline to a chemical liquid feed pipe coming from the storage tank 1A if the concentration of the liquid chemical maintains the prescribed value. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

本発明は、ガラス基板などの被処理基板の表面に被膜などを形成する塗布液などの薬液を再利用するシステムに関する。   The present invention relates to a system for reusing a chemical solution such as a coating solution for forming a film on the surface of a substrate to be processed such as a glass substrate.

半導体用レジスト液等の薬液は、需要が年々高まっているが、一方で薬液の回収や再利用が課題となっている。薬液のうちホトレジストの上に盛り付けられる現像液については、その回収方法が特許文献１、２に提案されている。   The demand for chemicals such as resist solutions for semiconductors is increasing year by year, but on the other hand, recovery and reuse of chemicals is an issue. Patent Documents 1 and 2 propose a method of collecting a developing solution that is placed on a photoresist among chemical solutions.

特許文献１には、スリットノズルで基板上に現像液を液盛りした後、別のノズルで使用済みの現像液を回収し、回収した現像液を再生して利用することが開示されている。また、特許文献２には、基板上に現像液を液盛りした後、吸込みノズルが接続されたケースを基板の上に被せて使用済みの現像液を回収し、回収した現像液を再生して利用することが開示されている。
特開平８−４５８３２号公報 特開平１０−１２５４０号公報 Patent Document 1 discloses that after a developer is deposited on a substrate with a slit nozzle, a used developer is collected with another nozzle, and the collected developer is regenerated and used. Patent Document 2 discloses that after a developer is deposited on the substrate, a case to which a suction nozzle is connected is placed on the substrate to collect the used developer, and the collected developer is regenerated. Use is disclosed.
JP-A-8-45832 Japanese Patent Laid-Open No. 10-12540

現像液は膜自体を構成するものではないため、回収と再利用が比較的容易である。しかしながら、ホトレジスト液やＳＯＧ液或いはカラーフィルター液などの薬液は不純物の混入の問題があり、回収はできても再利用するまでには至っていない。   Since the developer does not constitute the film itself, it is relatively easy to collect and reuse. However, chemical solutions such as a photoresist solution, an SOG solution, and a color filter solution have a problem of contamination with impurities, and even though they can be recovered, they have not yet been reused.

上記課題を解決するため本発明は、貯留タンク内の薬液をポンプを介してスリットノズルに供給するとともに供給した薬液の一部を回収して再利用するシステムであって、このシステムは、前記貯留タンクからスリットノズルに至るまでの経路の途中から回収した薬液およびスリットノズルのエア抜きの際に回収した薬液を貯留する第１の回収タンクと、前記第１の回収タンクからの薬液が集められる一時貯留容器と、前記一時貯留容器から前記貯留タンクからの薬液供給配管に繋がる流路とを備える。
また、前記薬液の再利用システムは、スリットノズルの下端部が浸漬するディップ槽から回収した薬液を貯留する第２の回収タンクを更に備え、前記一時貯留容器は、前記第１及び第２の回収タンクからの薬液が集められる一時貯留容器である。 In order to solve the above-described problems, the present invention is a system for supplying a chemical solution in a storage tank to a slit nozzle through a pump and collecting a part of the supplied chemical solution for reuse. A first recovery tank for storing the chemical solution collected from the middle of the path from the tank to the slit nozzle and the chemical solution collected when the slit nozzle is vented, and a temporary collection time for the chemical solution from the first recovery tank A storage container, and a flow path that leads from the temporary storage container to a chemical solution supply pipe from the storage tank.
The chemical solution recycling system further includes a second recovery tank for storing the chemical solution recovered from the dip tank in which the lower end portion of the slit nozzle is immersed, and the temporary storage container includes the first and second recovery containers. It is a temporary storage container for collecting chemicals from the tank.

またさらに前記薬液の再利用システムは、前記一時貯留容器に集められた薬液の濃度を検出する濃度計と、廃液タンクとを更に備え、前記濃度計により測定される薬液の濃度が所定値以下の場合には一時貯留容器からの配管流路を前記廃液タンクに切り替え、薬液の濃度が所定値を維持している場合には一時貯留容器からの配管流路を前記貯留タンクからの薬液供給配管に繋がる流路に切り替えるバルブとを備える。   The chemical solution recycling system further includes a concentration meter for detecting the concentration of the chemical solution collected in the temporary storage container, and a waste liquid tank, and the concentration of the chemical solution measured by the concentration meter is a predetermined value or less. In this case, the pipe flow path from the temporary storage container is switched to the waste liquid tank, and when the concentration of the chemical liquid is maintained at a predetermined value, the pipe flow path from the temporary storage container is connected to the chemical liquid supply pipe from the storage tank. And a valve for switching to a connected flow path.


前記貯留タンクからスリットノズルに至るまでの経路の途中から回収した薬液とは、例えば、フィルタやポンプから回収される薬液が挙げられる。ポンプ内の圧を抜くエア抜き管内には空気とともに薬液も混じっている。これら第１の回収タンクに集められる薬液は閉鎖系の経路を構成し、汚れていないため、そのまま再利用することが可能である。
Examples of the chemical solution collected from the middle of the path from the storage tank to the slit nozzle include a chemical solution collected from a filter or a pump. In the air vent pipe for releasing the pressure in the pump, chemicals are mixed with air. The chemicals collected in these first collection tanks constitute a closed path and are not contaminated, and can be reused as they are.

またディップ槽から再利用のために回収する薬液としては、スリットノズルへの導入時の薬液、色替えの際にスリットノズルに供給される薬液及びノズルの分解清掃の際にスリットノズルに供給される薬液が挙げられる。   Also, as the chemical solution to be recovered from the dip tank for reuse, the chemical solution at the time of introduction to the slit nozzle, the chemical solution supplied to the slit nozzle at the time of color change, and supplied to the slit nozzle at the time of disassembly and cleaning of the nozzle Examples include chemicals.

また、前記第１及び第２の回収タンクは１つに限らず、複数に分割してもよい。例えば第１の回収タンクをフィルタからの薬液が導入されるタンクとポンプからの薬液が導入されるタンクに分けてもよい。   Further, the first and second collection tanks are not limited to one, and may be divided into a plurality. For example, the first recovery tank may be divided into a tank into which chemical liquid from a filter is introduced and a tank into which chemical liquid from a pump is introduced.

また、本発明に係る再利用システムは、前記一時貯留容器を２個設け、一方の一時貯留容器が満杯になったならば、第１および／または第２の回収タンクからの流路を他方の一時貯留容器に切り替え、且つ一方の一時貯留容器内の薬液は、濃度が所定値以下の場合には廃液タンクに送り、濃度が所定値を維持している場合には前記貯留タンクからの薬液供給配管に繋がる流路に送るようにすることが考えられる。   In the recycling system according to the present invention, two temporary storage containers are provided, and when one temporary storage container becomes full, the flow path from the first and / or second recovery tank is set to the other. Switch to the temporary storage container, and the chemical solution in one temporary storage container is sent to the waste liquid tank when the concentration is lower than the predetermined value, and when the concentration is maintained at the predetermined value, the chemical solution is supplied from the storage tank. It is conceivable to send it to a flow path connected to piping.

本発明によれば、従来汚染されていない薬液であっても回収はするが再利用されていなかったが、再利用が可能となったので、コストダウンが図れる。
また本発明によれば、濃度（汚染の度合い）に応じて回収した薬液を廃液タンクに送るか、再利用するかを自動的に選択することができる。 According to the present invention, a chemical solution that has not been contaminated can be recovered but not reused. However, since it can be reused, the cost can be reduced.
Further, according to the present invention, it is possible to automatically select whether the collected chemical solution is sent to the waste liquid tank or reused according to the concentration (degree of contamination).

以下に本発明を実施するための実施の形態を図面に基づいて説明する。図１は本発明に係る薬液の再利用システムの全体図である。尚、バルブについては主要なもののみを示した。   Embodiments for carrying out the present invention will be described below with reference to the drawings. FIG. 1 is an overall view of a chemical solution reuse system according to the present invention. Only the main valves are shown.

図中１Ａ、１Ｂは薬液貯留タンクであり、薬液貯留タンク１Ａ、１Ｂには加圧用の配管２ａ、２ｂが接続され、また薬液貯留タンク１Ａ、１Ｂからの薬液供給管３ａ、３ｂにはバルブＶ１、Ｖ２が設けられ、更に薬液供給管３ａ、３ｂが合流した薬液供給管３は供給用エアベントタンク４に接続され、この薬液供給管３にはバルブＶ３が設けられている。   In the figure, reference numerals 1A and 1B denote chemical storage tanks. Pressurizing pipes 2a and 2b are connected to the chemical storage tanks 1A and 1B, and a valve V1 is connected to the chemical supply pipes 3a and 3b from the chemical storage tanks 1A and 1B. V2 is provided, and the chemical solution supply pipe 3 joined by the chemical solution supply pipes 3a and 3b is connected to a supply air vent tank 4, and the chemical solution supply pipe 3 is provided with a valve V3.

エアベントタンク４の上面には大気ベント兼加圧用の配管５が接続され、必要に応じて底面にはドレイン管６が接続され、更にエアベントタンク４から薬液供給管７が導出され、この薬液供給管７の先端はスリットノズル８に接続されている。   An air vent / pressurizing pipe 5 is connected to the upper surface of the air vent tank 4, a drain pipe 6 is connected to the bottom surface as necessary, and a chemical liquid supply pipe 7 is led out from the air vent tank 4, and this chemical liquid supply pipe 7 is connected to the slit nozzle 8.

前記薬液供給管７の途中にはフィルタＦ１、ポンプＰ１、フィルタＦ２が設けられ、これらフィルタＦ１、ポンプＰ１、フィルタＦ２及びスリットノズル８から、それぞれエア抜き管９、１０、１１、１２が導出され、これらエア抜き管９、１０、１１、１２は第１の回収タンク１３に接続されている。この第１の回収タンク１３には大気ベント兼加圧用の配管１４が接続され、底面にはドレイン管１５が接続され、更に第１の回収タンク１３からは回収用配管１６が導出され、この回収用配管１６にはポンプＰ２及びバルブＶ４が設けられている。   A filter F1, a pump P1, and a filter F2 are provided in the middle of the chemical solution supply pipe 7, and air vent pipes 9, 10, 11, and 12 are led out from the filter F1, the pump P1, the filter F2, and the slit nozzle 8, respectively. These air vent pipes 9, 10, 11, 12 are connected to the first recovery tank 13. The first recovery tank 13 is connected to a piping 14 for atmospheric venting and pressurization, a drain pipe 15 is connected to the bottom surface, and a recovery piping 16 is led out from the first recovery tank 13. The service pipe 16 is provided with a pump P2 and a valve V4.

回収用配管１６のバルブＶ４よりも上流側部分からは廃棄用配管１７が分岐し、この廃棄用配管１７は廃液タンク１８に接続され、途中にはバルブＶ５が設けられている。   A waste pipe 17 branches from a portion of the recovery pipe 16 upstream of the valve V4. The waste pipe 17 is connected to a waste liquid tank 18, and a valve V5 is provided in the middle.

一方、スリットノズル８下端の吐出口の乾燥を防ぐディップ槽１９の底面にはドレイン管２０が接続され、このドレイン管２０にはオーバーフロー管２１が合流し、またドレイン管２０は第２の回収タンク２２に接続され、この第２の回収タンク２２からは回収用配管２３が導出され、この回収用配管２３にはポンプＰ３及びバルブＶ６、Ｖ７が設けられている。   On the other hand, a drain pipe 20 is connected to the bottom surface of the dip tank 19 which prevents the discharge port at the lower end of the slit nozzle 8 from being dried. An overflow pipe 21 is joined to the drain pipe 20, and the drain pipe 20 is connected to the second recovery tank. 22, a recovery pipe 23 is led out from the second recovery tank 22, and the recovery pipe 23 is provided with a pump P3 and valves V6 and V7.

前記回収用配管２３は一時貯留容器３０Ａに接続され、また前記回収用配管２３のポンプＰ３とバルブＶ６の間からは廃棄用配管２４が分岐し、この廃棄用配管２４は廃液タンク１８に接続され、途中にはバルブＶ８が設けられている。   The recovery pipe 23 is connected to the temporary storage container 30A, and a waste pipe 24 is branched from between the pump P3 and the valve V6 of the recovery pipe 23. The waste pipe 24 is connected to the waste liquid tank 18. In the middle, a valve V8 is provided.

また廃棄用配管２４のバルブＶ６とバルブＶ７の中間からは回収用配管２５が分岐し、この回収用配管２５は一時貯留容器３０Ｂに接続され、回収用配管２５にはバルブＶ９が設けられている。   Further, a recovery pipe 25 branches from the middle of the valve V6 and the valve V7 of the disposal pipe 24, and this recovery pipe 25 is connected to the temporary storage container 30B, and the recovery pipe 25 is provided with a valve V9. .

前記一時貯留容器３０Ａ、３０Ｂからは戻し用配管３１ａ、３１ｂが導出され、これら戻し用配管３１ａ、３１ｂにはバルブＶ１０、Ｖ１１が設けられ、また戻し用配管３１ａ、３１ｂが合流した戻し用配管３２は前記薬液供給管３に接続されている。   Return pipes 31a and 31b are led out from the temporary storage containers 30A and 30B. The return pipes 31a and 31b are provided with valves V10 and V11. The return pipes 31a and 31b are joined together. Is connected to the chemical solution supply pipe 3.

また、前記戻し用配管３２には濃度計３３、バルブＶ１２及びフィルタＦ３が設けられ、濃度計３３とバルブＶ１２との間からは前記廃液タンク１８に接続される廃棄用配管３４が分岐し、この廃棄用配管３４にはバルブＶ１３が設けられている。   The return pipe 32 is provided with a densitometer 33, a valve V12 and a filter F3, and a waste pipe 34 connected to the waste liquid tank 18 branches between the densitometer 33 and the valve V12. The disposal pipe 34 is provided with a valve V13.

以下に、上記の配管構成からなるシステムの主な運転パターンを図２乃至図５に基づいて説明する。尚、各パターンにおいて薬液が流れる配管を実線で示し、薬液が流れない配管等は点線で示した。   Below, the main operation pattern of the system which consists of said piping structure is demonstrated based on FIG. 2 thru | or FIG. In each pattern, the piping through which the chemical solution flows is indicated by a solid line, and the piping etc. through which the chemical solution does not flow is indicated by a dotted line.

図２は第１及び第２の回収タンクからの薬液を全て廃液タンクに送る運転パターンを示す図であり、この運転パターンでは、バルブＶ４を閉、バルブＶ５を開、バルブＶ６を閉、バルブＶ８を開とする。この状態では第１及び第２の回収タンク１３、２２に回収された薬液は全て廃液タンク１８に集められる。   FIG. 2 is a diagram showing an operation pattern in which all the chemicals from the first and second recovery tanks are sent to the waste liquid tank. In this operation pattern, the valve V4 is closed, the valve V5 is opened, the valve V6 is closed, and the valve V8 is used. Is open. In this state, all the chemicals recovered in the first and second recovery tanks 13 and 22 are collected in the waste liquid tank 18.

図３は第１及び第２の回収タンクからの薬液を一方の一時貯留容器に回収する運転パターンを示す図であり、この運転パターンでは、バルブＶ４を開、バルブＶ５を閉、バルブＶ６、Ｖ７を開、バルブＶ８を閉、バルブＶ９を閉とする。この状態では第１及び第２の回収タンク１３、２２に回収された薬液は全て一方の一時貯留容器３０Ａに回収される。   FIG. 3 is a diagram showing an operation pattern in which the chemical solution from the first and second recovery tanks is collected in one temporary storage container. In this operation pattern, the valve V4 is opened, the valve V5 is closed, and the valves V6, V7 are used. Is opened, the valve V8 is closed, and the valve V9 is closed. In this state, all the chemicals collected in the first and second collection tanks 13 and 22 are collected in one temporary storage container 30A.

図４は第１及び第２の回収タンクからの薬液を他方の一時貯留容器に回収する運転パターンを示す図であり、この運転パターンでは、バルブＶ４を開、バルブＶ５を閉、バルブＶ６を開、バルブＶ７を閉、バルブＶ８を閉、バルブＶ９を開とする。この状態では、第１及び第２の回収タンク１３、２２からの薬液は他方の一時貯留容器３０Ｂに回収される。   FIG. 4 is a diagram showing an operation pattern for recovering the chemical solution from the first and second recovery tanks to the other temporary storage container. In this operation pattern, the valve V4 is opened, the valve V5 is closed, and the valve V6 is opened. The valve V7 is closed, the valve V8 is closed, and the valve V9 is opened. In this state, the chemicals from the first and second collection tanks 13 and 22 are collected in the other temporary storage container 30B.

またこの運転パターンでは、一方の一時貯留容器３０Ａに回収された薬液の濃度を濃度計３３で測定する。なお、必要に応じて測定後の薬液は戻り管（図示せず）により一時貯留容器３０Ａに戻る構成としても良い。濃度が所定値に達していない場合には、バルブＶ１２を閉、バルブＶ１３を開とし、一方の一時貯留容器３０Ａに回収された薬液を廃液タンク１８に廃棄する。   In this operation pattern, the concentration meter 33 measures the concentration of the chemical solution collected in one temporary storage container 30A. In addition, it is good also as a structure which the chemical | medical solution after a measurement returns to 30 A of temporary storage containers with a return pipe (not shown) as needed. When the concentration does not reach the predetermined value, the valve V12 is closed and the valve V13 is opened, and the chemical liquid collected in one temporary storage container 30A is discarded in the waste liquid tank 18.

図５は、一方の一時貯留容器に回収した薬液を薬液供給管に送り込む運転パターンを示す図であり、一方の一時貯留容器３０Ａに回収した薬液の濃度が一定以上であれば、バルブＶ１２を開、バルブＶ１３を閉とし、一方の一時貯留容器３０Ａに回収された薬液を薬液供給管３に戻す。   FIG. 5 is a diagram showing an operation pattern in which the chemical liquid collected in one temporary storage container is sent to the chemical liquid supply pipe. If the concentration of the chemical liquid collected in one temporary storage container 30A is equal to or higher than a certain level, the valve V12 is opened. Then, the valve V13 is closed, and the chemical solution collected in one temporary storage container 30A is returned to the chemical solution supply pipe 3.

以上の運転パターンの他に、バルブを操作することで、別の運転パターンも可能になる。例えば、第１の回収タンク１３に回収される薬液は閉鎖系経路からの薬液であり、汚れている可能性が低い。そのため、第１の回収タンク１３に回収される薬液を第２の回収タンク２２に回収される薬液から区別し、それぞれを一時貯留容器３０Ａ、３０Ｂに分離して回収し、第１の回収タンク１３に回収される薬液については、濃度を調べることなくそのまま薬液供給管３に戻すパターンも考えられる。   In addition to the above operation patterns, other operation patterns are possible by operating the valve. For example, the chemical solution collected in the first collection tank 13 is a chemical solution from a closed system path, and is less likely to be dirty. Therefore, the chemical solution collected in the first collection tank 13 is distinguished from the chemical solution collected in the second collection tank 22, separated into the temporary storage containers 30 </ b> A and 30 </ b> B and collected, and the first collection tank 13. As for the chemical solution recovered in this manner, a pattern in which the chemical solution is directly returned to the chemical solution supply pipe 3 without examining the concentration is also conceivable.

本発明に係る薬液の再利用システムの全体図Overall view of a chemical solution recycling system according to the present invention 第１及び第２の回収タンクからの薬液を全て廃液タンクに送る運転パターンを示す図The figure which shows the driving | operation pattern which sends all the chemical | medical solutions from the 1st and 2nd collection tank to a waste liquid tank 第１及び第２の回収タンクからの薬液を一方の一時貯留容器に回収する運転パターンを示す図The figure which shows the driving | operation pattern which collect | recovers the chemical | medical solution from the 1st and 2nd collection tank to one temporary storage container. 第１及び第２の回収タンクからの薬液を他方の一時貯留容器に回収する運転パターンを示す図The figure which shows the driving | operation pattern which collect | recovers the chemical | medical solution from the 1st and 2nd collection tank to the other temporary storage container. 一方の一時貯留容器に回収した薬液を薬液供給管に送り込む運転パターンを示す図The figure which shows the driving | operation pattern which sends the chemical | medical solution collect | recovered to one temporary storage container to a chemical | medical solution supply pipe

符号の説明Explanation of symbols

１Ａ、１Ｂ…薬液貯留タンク、２ａ、２ｂ…加圧用の配管、３、３ａ、３ｂ…薬液供給管、４…供給用のエアベントタンク、５…大気ベント兼加圧用の配管、６…ドレイン管、７…薬液供給管、８…スリットノズル、９、１０、１１、１２…エア抜き管、１３…第１の回収タンク、１４…大気ベント兼加圧用の配管、１５…ドレイン管、１６…回収用配管、１７…廃棄用配管、１８…廃液タンク、１９…ディップ槽、２０…ドレイン管、２１…オーバーフロー管、２２…第２の回収タンク、２３…回収用配管、２４…廃棄用配管、２５…回収用配管、３０Ａ、３０Ｂ…一時貯留容器、３１ａ、３１ｂ…戻し用配管３１ａ、３１ｂ、３２…戻し用配管、３３…濃度計、３４…廃棄用配管、Ｆ１〜Ｆ３…フィルタ、Ｐ１〜Ｐ３…ポンプ、Ｖ１〜Ｖ１３…バルブ。 DESCRIPTION OF SYMBOLS 1A, 1B ... Chemical solution storage tank, 2a, 2b ... Pipe for pressurization, 3, 3a, 3b ... Chemical solution supply pipe, 4 ... Air vent tank for supply, 5 ... Pipe for atmosphere vent and pressurization, 6 ... Drain pipe, DESCRIPTION OF SYMBOLS 7 ... Chemical solution supply pipe, 8 ... Slit nozzle, 9, 10, 11, 12 ... Air vent pipe, 13 ... 1st collection tank, 14 ... Pipe for atmospheric vent and pressurization, 15 ... Drain pipe, 16 ... For collection Piping, 17 ... Waste piping, 18 ... Waste liquid tank, 19 ... Dip tank, 20 ... Drain pipe, 21 ... Overflow pipe, 22 ... Second recovery tank, 23 ... Recovery piping, 24 ... Waste piping, 25 ... Pipe for recovery, 30A, 30B ... Temporary storage container, 31a, 31b ... Pipe for return 31a, 31b, 32 ... Pipe for return, 33 ... Densitometer, 34 ... Pipe for disposal, F1-F3 ... Filter, P1-P3 ... Pump, V1-V 3 ... valve.

Claims (5)

貯留タンク内の薬液をポンプを介してスリットノズルに供給するとともに供給した薬液の一部を回収して再利用するシステムであって、このシステムは、前記貯留タンクからスリットノズルに至るまでの経路の途中から回収した薬液およびスリットノズルのエア抜きの際に回収した薬液を貯留する第１の回収タンクと、前記第１の回収タンクからの薬液が集められる一時貯留容器と、前記一時貯留容器から前記貯留タンクからの薬液供給配管に繋がる流路とを備えることを特徴とする薬液の再利用システム。 A system for supplying a chemical solution in a storage tank to a slit nozzle via a pump and for collecting and reusing a part of the supplied chemical solution, in which a path from the storage tank to the slit nozzle is The first recovery tank for storing the chemical liquid recovered from the middle and the chemical liquid recovered when the slit nozzle is vented, the temporary storage container for collecting the chemical liquid from the first recovery tank, and the temporary storage container A chemical solution reuse system comprising: a chemical solution supply pipe connected to a storage tank. 前記薬液の再利用システムは、スリットノズルの下端部が浸漬するディップ槽から回収した薬液を貯留する第２の回収タンクを更に備え、前記一時貯留容器は、前記第１及び第２の回収タンクからの薬液が集められる一時貯留容器であることを特徴とする請求項１記載の薬液の再利用システム。 The chemical solution recycling system further includes a second recovery tank for storing a chemical solution recovered from a dip tank in which a lower end portion of the slit nozzle is immersed, and the temporary storage container is provided from the first and second recovery tanks. The chemical solution reuse system according to claim 1, wherein the chemical solution is a temporary storage container in which the chemical solution is collected. 前記薬液の再利用システムは、前記一時貯留容器に集められた薬液の濃度を検出する濃度計と、廃液タンクとを更に備え、前記濃度計により測定される薬液の濃度が所定値以下の場合には一時貯留容器からの配管流路を前記廃液タンクに切り替え、薬液の濃度が所定値を維持している場合には一時貯留容器からの配管流路を前記貯留タンクからの薬液供給配管に繋がる流路に切り替えるバルブとを備えることを特徴とする請求項１または２記載の薬液の再利用システム。
The chemical solution reuse system further includes a concentration meter for detecting the concentration of the chemical solution collected in the temporary storage container and a waste liquid tank, and the concentration of the chemical solution measured by the concentration meter is equal to or lower than a predetermined value. Switch the pipe flow path from the temporary storage container to the waste liquid tank, and when the concentration of the chemical liquid is maintained at a predetermined value, the pipe flow path from the temporary storage container is connected to the chemical liquid supply pipe from the storage tank. The chemical solution reuse system according to claim 1, further comprising a valve that switches to a path.
前記薬液の再利用システムにおいて、前記一時貯留容器は２個設けられ、一方の一時貯留容器が満杯になったならば、第１および／または第２の回収タンクからの流路を他方の一時貯留容器に切り替え、且つ一方の一時貯留容器内の薬液は、濃度が所定値以下の場合には廃液タンクに送り、濃度が所定値を維持している場合には前記貯留タンクからの薬液供給配管に繋がる流路に送るようにしたことを特徴とする請求項１から３のいずれか１項に記載の薬液の再利用システム。 In the chemical liquid recycling system, two temporary storage containers are provided, and when one temporary storage container becomes full, the flow path from the first and / or second recovery tank is temporarily stored in the other. When the concentration is lower than the predetermined value, the chemical solution in one temporary storage container is sent to the waste liquid tank, and when the concentration is maintained at the predetermined value, the chemical solution is supplied to the chemical solution supply pipe from the storage tank. The chemical solution recycling system according to any one of claims 1 to 3, wherein the chemical solution recycling system is sent to a connected flow path. 前記薬液の再利用システムにおいて、前記薬液はホトレジスト液であることを特徴とする請求項１から４のいずれか１項に記載の薬液の再利用システム。




5. The chemical solution reuse system according to claim 1, wherein the chemical solution is a photoresist solution. 6.




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JP5453561B1 (en) * 2012-12-20 2014-03-26 東京エレクトロン株式会社 Liquid processing apparatus, liquid processing method, and storage medium for liquid processing
CN108983551A (en) * 2018-08-22 2018-12-11 南京中电熊猫液晶材料科技有限公司 Coating machine photo resistance recovery system

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JP2003275659A (en) * 2002-01-17 2003-09-30 Shibaura Mechatronics Corp Coating apparatus and defoaming method for coating apparatus
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CN110461481A (en) * 2018-02-07 2019-11-15 深圳市大疆百旺科技有限公司 It is a kind of for glue component and its gluing equipment of application
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