JP4771268B1 - Negative pressure device - Google Patents

Negative pressure device Download PDF

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JP4771268B1
JP4771268B1 JP2011071311A JP2011071311A JP4771268B1 JP 4771268 B1 JP4771268 B1 JP 4771268B1 JP 2011071311 A JP2011071311 A JP 2011071311A JP 2011071311 A JP2011071311 A JP 2011071311A JP 4771268 B1 JP4771268 B1 JP 4771268B1
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negative pressure
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pressure acting
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hollow interior
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JP2012207534A (en
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徳雄 緑
英一 高原
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徳雄 緑
英一 高原
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Abstract

【課題】簡単な構成で連続的又は断続的に対象物の負圧処理を行えるとともに、対象物を作用液に接触させることなく取り出せる負圧作用装置を提供する。
【解決手段】作用液を貯留する貯液槽１２と、下端開口２４を貯液槽１２内の作用液Ｌ中に浸して配置された中空の縦長管１４と、縦長管１４の上端に連通接続し、対象物Ｆが入れられる負圧の作用空間３０が内部に形成された負圧作用部１６と、負圧作用部１６に設置され作用液に対象物Ｆを接触させない状態で投入口３２側から排出口３４側に向けて対象物Ｆを搬送する搬送装置１８と、負圧作用部１６の負圧を保持させた状態で外気側ＥＸから負圧作用部１６内に対象物Ｆを投入する負圧保持機能付き投入装置２０と、負圧作用部１６の負圧を保持させた状態で外気側ＥＸに取り出す負圧保持機能付き排出装置２２と、を備えた負圧作用装置１０から構成される。
【選択図】図１An object of the present invention is to provide a negative pressure operating device that can perform negative pressure processing of an object continuously or intermittently with a simple configuration and can take out the object without contacting the working fluid.
A liquid storage tank for storing a working liquid, a hollow vertical pipe disposed by immersing a lower end opening in a working liquid in the liquid storage tank, and an upper end of the vertical pipe are connected in communication. The negative pressure working section 16 in which the negative pressure working space 30 into which the target F is put is formed, and the inlet 32 side in a state where the target F is not brought into contact with the working fluid installed in the negative pressure working section 16. The object F is thrown into the negative pressure acting part 16 from the outside air EX in a state where the negative pressure acting part 16 is held and the transport device 18 that conveys the object F toward the discharge port 34 side from the outside. The negative pressure operation device 10 includes a charging device 20 with a negative pressure holding function and a discharge device 22 with a negative pressure holding function that takes out to the outside side EX while holding the negative pressure of the negative pressure operation unit 16. The
[Selection] Figure 1

Description

本発明は、対象物を負圧処理するのに利用される負圧作用装置に関する。   The present invention relates to a negative pressure acting device used for negative pressure processing of an object.

大気圧より低い負圧、真空を利用する技術は、食品、医薬品、金属材料、電子部品や半導体、化学製品の製造や加工、保存、乾燥処理等、広い分野で利用されている。従来、真空や負圧を形成する装置としては、処理対象の密封容器内の空気を強制的に排気して圧力を下げる真空ポンプや、特許文献１に開示された吸引装置等が知られている。特許文献１の吸引装置は、高所に設置された密閉式の真空タンク１ａに水を満杯にし、その下側排水口から配管を貯水槽２へ通ずることで、真空タンク１ａ内は貯水槽２との水位差により負圧となるものであった。そして、特許文献１添付図面の図４に示すように、真空タンク１ａを下水処理設備１２等の目的の負圧処理装置に接続して、真空タンク１ａの負圧を汚水の処理に利用していた。なお、番号は特許文献１記載のものである。   Technologies using negative pressure and vacuum lower than atmospheric pressure are used in a wide range of fields such as food, pharmaceuticals, metal materials, electronic components and semiconductors, and manufacturing, processing, storage, and drying of chemical products. Conventionally, as a device for forming a vacuum or a negative pressure, a vacuum pump that forcibly exhausts air in a sealed container to be processed to lower the pressure, a suction device disclosed in Patent Document 1, and the like are known. . The suction device of Patent Document 1 is filled with water in a sealed vacuum tank 1a installed at a high place, and pipes are connected to a water storage tank 2 from a lower drainage port thereof. Negative pressure due to the difference in water level. Then, as shown in FIG. 4 of the accompanying drawings of Patent Document 1, the vacuum tank 1a is connected to a target negative pressure treatment device such as a sewage treatment facility 12, and the negative pressure of the vacuum tank 1a is used for the treatment of sewage. It was. The numbers are those described in Patent Document 1.

また、本出願人らは、特許文献２において連続的に対象物の負圧処理を行える負圧作用装置を提案した。特許文献２の負圧作用装置は、上方を開放し内部に作用液Ｌが溜められた貯液槽と、上端を閉鎖し下端を開口して縦長く形成された中空管からなり、下端開口を貯液槽内の作用液中に浸して配置され、管内作用液と貯液槽内の作用液に対する大気圧とのバランスにより上部に負圧空間を形成させた負圧形成管と、複数の対象物を順次連続的に搬送し負圧形成管の下端開口から負圧形成管内の上部に形成させた負圧空間まで上下往復移動させつつ負圧形成管外へ搬出する連続搬送機構と、を備えたものであった。   In addition, the present applicants proposed a negative pressure device capable of continuously processing a negative pressure of an object in Patent Document 2. The negative pressure operating device of Patent Document 2 is composed of a liquid storage tank in which the upper side is opened and the working liquid L is stored inside, and a hollow tube formed in a vertically long shape with the upper end closed and the lower end opened. A negative pressure forming tube that is arranged so as to be immersed in the working liquid in the liquid storage tank, and in which a negative pressure space is formed in the upper part by balancing the working liquid in the pipe and the atmospheric pressure with respect to the working liquid in the liquid storage tank, A continuous conveyance mechanism that sequentially conveys an object and carries it out of the negative pressure forming pipe while reciprocating up and down from a lower end opening of the negative pressure forming pipe to a negative pressure space formed in an upper portion of the negative pressure forming pipe; It was a preparation.

特開２００５−３４４６９８号公報JP-A-2005-344698 特許第４６４０５２７号公報Japanese Patent No. 4640527

従来では、目的の対象物を負圧処理する際には、真空ポンプや吸引装置を処理目的の負圧処理装置に接続して使用するものであり、真空ポンプ等に接続された密封容器内に対象物を入れ、該容器を気密密封した状態で真空ポンプ等を介して排気して負圧を形成することにより対象物を所望の負圧処理した後、密封容器を大気圧に戻して対象物を取り出すといったバッチ処理を行っていた。したがって、多くの対象物を負圧処理する場合には、密封容器への対象物の出し入れや負圧形成、大気圧への復帰等の繰り返し行われる作業が煩雑であるとともに、負圧形成に大幅に時間がかかり効率性に劣る問題があった。また、特許文献１の吸引装置はそれ自体で大型に構成されているが、対象物に負圧作用させるための密封容器等を別個に設ける必要があるので設置スペースの利用効率も悪かった。一方、特許文献２の負圧作用装置では、連続搬送機構によって連続的に対象物を処理できる点で優れている。連続搬送機構は負圧形成管の作用液中を通って上部に形成させた負圧空間まで上下往復移動させるものであることから、負圧処理済みの対象物も作用液中を長距離間すなわち長時間かけて通過させるものであった。しかしながら、対象物の種類によっては、負圧作用した後に作用液に濡らさない状態で取り出したい場合があったり、該対象物を作用液に短時間だけ浸けて負圧作用処理させたい場合があった。従って、この種の対象物に対応して負圧作用を行える新しい負圧作用装置を開発した。   Conventionally, when a target object is subjected to negative pressure processing, a vacuum pump or a suction device is connected to the negative pressure processing device for processing purpose, and the target object is placed in a sealed container connected to the vacuum pump or the like. An object is put in, and the container is hermetically sealed and evacuated through a vacuum pump or the like to form a negative pressure so that the object is subjected to a desired negative pressure. The batch processing such as taking out was performed. Therefore, when many objects are subjected to negative pressure treatment, repeated operations such as putting in and out of the sealed container, forming negative pressure, returning to atmospheric pressure, etc. are complicated and greatly reduce negative pressure. There was a problem that it took a long time and the efficiency was inferior. Moreover, although the suction device of patent document 1 itself is comprised large sized, since it is necessary to provide the sealed container etc. for making an object act on a negative pressure separately, the utilization efficiency of installation space was also bad. On the other hand, the negative pressure device of Patent Document 2 is excellent in that the object can be processed continuously by the continuous conveyance mechanism. Since the continuous transport mechanism moves back and forth up and down to the negative pressure space formed in the upper part through the working fluid of the negative pressure forming tube, the negative pressure-treated object also moves in the working fluid for a long distance, that is, It was intended to pass over a long time. However, depending on the type of the object, there is a case where it is desired to take out the liquid without being wetted with the working liquid after acting under a negative pressure, or there is a case where it is desired to immerse the object in the working liquid for a short time to perform a negative pressure action treatment. . Therefore, a new negative pressure action device that can perform negative pressure action corresponding to this kind of object has been developed.

本発明は上記従来の課題に鑑みてなされたものであり、その一つの目的は、簡単な構成で連続的又は断続的に対象物の負圧処理を行えるとともに、負圧作用済みの対象物を作用液に接触させることなく、或いは所定の短時間だけ作用液に接触させて、円滑に取り出せる負圧作用装置を提供することにある。   The present invention has been made in view of the above-described conventional problems, and one object of the present invention is to perform negative pressure treatment of an object continuously or intermittently with a simple configuration and to remove an object subjected to negative pressure action. An object of the present invention is to provide a negative pressure acting device that can be smoothly taken out without being brought into contact with the working fluid or by being brought into contact with the working fluid for a predetermined short time.

上記課題を解決するために本発明は、液面を大気に接触させた状態で作用液を貯留する貯液槽１２と、下端開口２４を貯液槽１２内の作用液Ｌ中に浸して配置された中空の縦長管１４と、縦長管１４の上端に連通接続して貯液槽１２から所定高さ位置に設けられ、対象物Ｆが入れられる負圧の作用空間３０が内部に形成された負圧作用部１６であって、縦長管１４の下端開口２４を閉鎖した状態で該縦長管１４とは別経路（３６）で貯液槽１２から作用液を負圧作用部１６内及び縦長管１４内に充填させた後、縦長管１４の下端開口２４を開放し、作用空間３０に負圧を形成保持させる負圧作用部１６と、負圧作用部１６の作用空間３０に設置され、該作用空間３０の負圧を形成保持する作用液に対象物Ｆを接触させない状態、又は短時間だけ接触させた状態で、作用空間３０への投入口３２側から排出口３４側に向けて対象物Ｆを搬送する搬送装置１８と、負圧作用部１６の投入口３２側に設けられ、負圧作用部１６の負圧を保持させた状態で外気側ＥＸから負圧作用部１６内に対象物Ｆを投入する負圧保持機能付き投入装置２０と、負圧作用部１６の排出口３２側に設けられ、負圧作用部１６の負圧を保持させた状態で、かつ負圧作用部１６内の負圧作用済みの対象物Ｆを作用液とは接触させない状態で外気側ＥＸに取り出す負圧保持機能付き排出装置２２と、を備えたことを特徴とする負圧作用装置１０から構成される。   In order to solve the above-described problems, the present invention arranges the liquid storage tank 12 for storing the working liquid in a state where the liquid level is in contact with the atmosphere and the lower end opening 24 immersed in the working liquid L in the liquid storage tank 12. The hollow vertical tube 14 is connected to the upper end of the vertical tube 14 and is provided at a predetermined height position from the liquid storage tank 12, and a negative pressure working space 30 into which the object F is placed is formed inside. It is the negative pressure action part 16, Comprising: In the state which closed the lower end opening 24 of the vertical elongate pipe 14, it is a path | route (36) different from this vertical elongate pipe 14, and a working liquid is carried out from the liquid storage tank 12 in the negative pressure action part 16 14, the lower end opening 24 of the vertically long tube 14 is opened, a negative pressure acting part 16 for forming and maintaining a negative pressure in the working space 30, and a working space 30 of the negative pressure acting part 16 are installed, The state in which the object F is not brought into contact with the working fluid that forms and holds the negative pressure in the working space 30, or for a short time. In the state of contact, a negative pressure is provided on the transport device 18 for transporting the object F from the input port 32 side to the discharge port 34 side to the working space 30 and the input port 32 side of the negative pressure operating unit 16. On the side of the discharge port 32 of the negative pressure application unit 16, the charging device 20 with a negative pressure holding function that inputs the object F into the negative pressure application unit 16 from the outside air EX while holding the negative pressure of the operation unit 16. Negative pressure provided to the outside air EX in a state where the negative pressure of the negative pressure acting part 16 is maintained and the object F in the negative pressure acting part 16 that has been subjected to the negative pressure action is not brought into contact with the working fluid. And a discharge device 22 with a holding function.

また、投入装置２０と排出装置２２は、対象物Ｆが入れられる中空内部を形成したケース５０、８２を備え、ケース５０、８２の中空内部への液体の充填と排出を行わせることにより負圧作用部１６の負圧を保持する液体利用の負圧保持機構６４を有することとしてもよい。   In addition, the charging device 20 and the discharging device 22 include cases 50 and 82 that form hollow interiors in which the object F is to be placed. By filling and discharging liquid into the hollow interiors of the cases 50 and 82, negative pressure is obtained. It is good also as having the negative pressure holding mechanism 64 of the liquid using which the negative pressure of the action part 16 is hold | maintained.

また、投入装置２０と排出装置２２は、ケース５０、８０の中空内部を、外気側ＥＸ及び負圧作用部１６とは気密閉鎖した態様と、外気側と連通した態様と、負圧作用部と連通した態様と、に切り換え可能に設けられ、該中空内部５２を外気側及び負圧作用部とは閉鎖した態様で作用液を充填した後、負圧作用部１６と連通して作用液を排出することにより、負圧形成部１６の負圧を保持させることとしてもよい。   Further, the charging device 20 and the discharging device 22 include a mode in which the hollow interiors of the cases 50 and 80 are hermetically sealed with the outside air side EX and the negative pressure acting unit 16, a mode in communication with the outside air side, a negative pressure acting unit, After being filled with the working fluid in a manner in which the hollow interior 52 is closed from the outside air side and the negative pressure acting part, the working liquid is communicated with the negative pressure acting part 16 and discharged. Thus, the negative pressure of the negative pressure forming unit 16 may be held.

また、投入装置２０と排出装置２２はそれぞれ、対象物Ｆが入れられる中空内部５２を形成したケース５０と、閉時には中空内部５２と負圧作用部１６、又は中空内部５２と外気側ＥＸを気密閉鎖するとともに、開時には対象物Ｆが通過可能に中空内部５２と負圧作用部１６、又は中空内部５２と外気側ＥＸとを連通させる複数の開閉扉５４、５５、５６、５７と、中空内部５２と負圧作用部１６とを連通させる際に中空内部５２に負圧を形成する状態と、中空内部５２と外気側ＥＸとを連通させる際に中空内部５２を大気圧とする状態とを選択的に切り換える負圧切換機構５８と、を有することとしてもよい。   In addition, the charging device 20 and the discharging device 22 are airtightly connected to the case 50 in which the hollow interior 52 into which the object F is inserted is formed, and when closed, the hollow interior 52 and the negative pressure acting portion 16 or the hollow interior 52 and the outside air EX are sealed. A plurality of open / close doors 54, 55, 56, 57 for closing and closing the hollow interior 52 and the negative pressure acting portion 16 or allowing the hollow interior 52 and the outside air side EX to communicate with each other so that the object F can pass therethrough. The state in which a negative pressure is formed in the hollow interior 52 when the 52 and the negative pressure acting part 16 are communicated, and the state in which the hollow interior 52 is set to the atmospheric pressure when the hollow interior 52 and the outside air side EX are communicated are selected. It is good also as having the negative pressure switching mechanism 58 switched automatically.

また、投入装置２０と排出装置２２は、貯液槽１２から所定の高さ位置に設置され、負圧切換機構５８は、中空内部５２に貯液槽１２内の作用液を充填させるための経路に介設された給液弁６０、６１と、中空内部５２から空気を排気する排気弁６２、６３と、開時に中空内部５２の作用液を負圧作用部１６に排出させるように設けられた負圧作用部側の開閉扉５６、５７と、を含み、給液弁６０、６１及び排気弁６２、６３を開放して充填経路３６を介して中空内部５２に作用液を充填した後、給液弁６０、６１及び排気弁６２、６３を閉鎖し、負圧作用部側の開閉扉５６、５７のみを開くことにより、中空内部５２に負圧を形成することとしてもよい。   The charging device 20 and the discharging device 22 are installed at a predetermined height from the liquid storage tank 12, and the negative pressure switching mechanism 58 is a path for filling the hollow interior 52 with the working liquid in the liquid storage tank 12. The liquid supply valves 60, 61 interposed in the exhaust gas, the exhaust valves 62, 63 for exhausting air from the hollow interior 52, and the working fluid in the hollow interior 52 are discharged to the negative pressure acting portion 16 when opened. And opening and closing doors 56 and 57 on the negative pressure acting part side, and after opening the liquid supply valves 60 and 61 and the exhaust valves 62 and 63 to fill the hollow interior 52 with the working liquid via the filling path 36, The liquid valves 60 and 61 and the exhaust valves 62 and 63 may be closed, and only the open / close doors 56 and 57 on the negative pressure acting part side may be opened to form a negative pressure in the hollow interior 52.

また、負圧作用部１６に負圧を形成するための機構は負圧作用部１６内に貯液槽１２内の作用液を充填させる経路３６に設けられたポンプ４４を含み、該経路３６はポンプ４４の下流側で分岐され投入装置２０と排出装置２２とにそれぞれ給液弁６０、６１を介して接続されたこととしてもよい。   The mechanism for forming a negative pressure in the negative pressure acting part 16 includes a pump 44 provided in a path 36 for filling the negative pressure acting part 16 with the working liquid in the liquid storage tank 12, and the path 36 is It may be branched on the downstream side of the pump 44 and connected to the charging device 20 and the discharging device 22 via liquid supply valves 60 and 61, respectively.

また、投入装置２０及び／又は排出装置２２には、対象物Ｆを搬送し、負圧作用部１６内の搬送装置１８と受け渡しする移送装置６８が設置されたこととしてもよい。   In addition, the feeding device 20 and / or the discharging device 22 may be provided with a transfer device 68 that transports the object F and delivers it to and from the transport device 18 in the negative pressure operation unit 16.

また、投入装置２０と排出装置２２はそれぞれ、円筒状周壁の外気側に臨む一部分と負圧形成部１６に臨む一部分に対象物が通過する開口８８、８９が設けられた円筒状ケース８０と、円筒状ケース中心に軸支された回転軸８６からケース内壁に向けて突出しケース内部を外気側及び負圧作用部とは気密閉鎖された閉鎖空間と外気側に臨む空間と負圧作用部に臨む空間とに分割して水密気密状態を保持して仕切る複数の羽根８４を含む回転扉８２と、を含み、複数の羽根８４で仕切られた閉鎖空間に作用液を充填させた状態で回転扉８２を回転軸８６周りに回転させることにより負圧作用部１６の負圧を保持させることとしてもよい。   Further, the charging device 20 and the discharging device 22 are respectively a cylindrical case 80 provided with openings 88 and 89 through which a target passes through a part facing the outside air side of the cylindrical peripheral wall and a part facing the negative pressure forming part 16; It protrudes from the rotating shaft 86 pivotally supported at the center of the cylindrical case toward the inner wall of the case, and the inside of the case faces the outside air side and the negative pressure acting part, the closed space that is hermetically sealed, the space facing the outside air side, and the negative pressure acting part. A revolving door 82 including a plurality of blades 84 that are divided into spaces and maintain and partition in a watertight and airtight state. The revolving door 82 is filled with a working liquid in a closed space partitioned by the plurality of blades 84. It is good also as holding the negative pressure of the negative pressure action part 16 by rotating around the rotating shaft 86.

本発明の負圧作用装置によれば、液面を大気に接触させた状態で作用液を貯留する貯液槽と、下端開口を貯液槽内の作用液中に浸して配置された中空の縦長管と、縦長管の上端に連通接続して貯液槽から所定高さ位置に設けられ、対象物が入れられる負圧の作用空間が内部に形成された負圧作用部であって、縦長管の下端開口を閉鎖した状態で該縦長管とは別経路で貯液槽から作用液を負圧作用部内及び縦長管内に充填させた後、縦長管の下端開口を開放し、作用空間に負圧を形成保持させる負圧作用部と、負圧作用部の作用空間に設置され、該作用空間の負圧を形成保持する作用液に対象物を接触させない状態、又は短時間だけ接触させた状態で、作用空間への投入口側から排出口側に向けて対象物を搬送する搬送装置と、負圧作用部の投入口側に設けられ、負圧作用部の負圧を保持させた状態で外気側から負圧作用部内に対象物を投入する負圧保持機能付き投入装置と、負圧作用部の排出口側に設けられ、負圧作用部の負圧を保持させた状態で、かつ負圧作用部内の負圧作用済みの対象物を作用液とは接触させない状態で外気側に取り出す負圧保持機能付き排出装置と、を備えた構成であるから、連続的又は断続的に対象物を負圧作用部で負圧処理することができ、高い処理効率を実現して、大量の対象物を負圧作用させるのに有利である。さらに、負圧作用中及び外側へ排出する際に対象物を作用液に接触させることがないので、負圧作用済みの対象物を扱いやすく、対象物の乾燥処理や解凍等に適用するのに優れる。また、対象物を所定の短時間だけ作用液に接触させて、作用液による含浸や洗浄等を行うこともでき、負圧作用の実用性を向上しうる。   According to the negative pressure working device of the present invention, a liquid storage tank that stores the working liquid in a state where the liquid level is in contact with the atmosphere, and a hollow that is disposed by immersing the lower end opening in the working liquid in the liquid storage tank. A negative pressure acting part that is connected to the upper end of the vertical pipe and is connected to the upper end of the vertical pipe at a predetermined height position from the liquid storage tank and in which a negative pressure working space into which an object is placed is formed. After the lower end opening of the pipe is closed, the working fluid is filled in the negative pressure acting part and the vertical pipe from the liquid storage tank through a path different from the vertical pipe, and then the lower end opening of the vertical pipe is opened to make the working space negative. A negative pressure acting part that forms and holds pressure, and a state in which the object is not in contact with the working liquid that forms and holds the negative pressure in the working space, or a state in which the object is contacted for a short time In the working space, the conveying device for conveying the object from the inlet side to the outlet side and the negative pressure acting part A charging device with a negative pressure holding function, which is provided on the mouth side and holds the negative pressure of the negative pressure acting part into the negative pressure acting part from the outside air side, and on the outlet side of the negative pressure acting part Discharge device with a negative pressure holding function that is provided and takes out a negative pressure acting target in the negative pressure acting portion to the outside air in a state in which the negative pressure acting portion is held without contacting the working fluid. Therefore, it is possible to perform negative pressure processing on a target object continuously or intermittently in a negative pressure operation part, and to achieve high processing efficiency and to apply a large amount of target object to negative pressure. Is advantageous. Furthermore, since the target object is not brought into contact with the working fluid during the negative pressure action and when discharged to the outside, it is easy to handle the target object that has been subjected to the negative pressure action, and it can be applied to drying and thawing of the target object. Excellent. Further, impregnation with the working liquid and washing can be performed by bringing the target object into contact with the working liquid for a predetermined short time, and the practicality of the negative pressure action can be improved.

また、投入装置と排出装置は、対象物が入れられる中空内部を形成したケースを備え、ケースの中空内部への液体の充填と排出を行わせることにより負圧作用部の負圧を保持する液体利用の負圧保持機構を有する構成とすることにより、簡単な構成で負圧保持機能を実現できると同時に、例えば、作用液等の液体をケース内に充填、排出するだけの簡単な操作又は制御でケース内に負圧作用部と同等な負圧を形成して負圧を保持できる。   In addition, the charging device and the discharging device include a case in which a hollow interior into which an object is to be placed is formed, and a liquid that holds the negative pressure of the negative pressure acting portion by filling and discharging the liquid into the hollow interior of the case By adopting a configuration having a negative pressure holding mechanism to be used, a negative pressure holding function can be realized with a simple configuration, and at the same time, for example, simple operation or control by simply filling and discharging a liquid such as a working liquid in the case Thus, a negative pressure equivalent to the negative pressure acting portion can be formed in the case to hold the negative pressure.

また、投入装置と排出装置は、ケースの中空内部を、外気側及び負圧作用部とは気密閉鎖した態様と、外気側と連通した態様と、負圧作用部と連通した態様と、に切り換え可能に設けられ、該中空内部を外気側及び負圧作用部とは閉鎖した態様で作用液を充填した後、負圧作用部と連通して作用液を排出することにより、負圧形成部の負圧を保持させる構成とすることにより、簡単な構成で負圧保持機能を実現できると同時に、ケースの態様を切換えながら作用液をケース内に充填、排出するだけの簡単な操作又は制御で負圧を保持できる。   Further, the charging device and the discharging device are switched between a mode in which the hollow interior of the case is hermetically sealed with the outside air side and the negative pressure acting part, a mode communicating with the outside air side, and a mode communicating with the negative pressure acting part. After filling the hollow interior with the working liquid in such a manner that the hollow interior is closed to the outside air side and the negative pressure acting part, the working liquid is discharged in communication with the negative pressure acting part, so that the negative pressure forming part By adopting a configuration that holds negative pressure, the negative pressure holding function can be realized with a simple configuration, and at the same time, the negative pressure can be obtained by simple operation or control that simply fills and discharges the working fluid into the case while switching the case mode. The pressure can be maintained.

また、投入装置と排出装置はそれぞれ、対象物が入れられる中空内部を形成したケースと、閉時には中空内部と負圧作用部、又は中空内部と外気側を気密閉鎖するとともに、開時には対象物が通過可能に中空内部と負圧作用部、又は中空内部と外気側とを連通させる複数の開閉扉と、中空内部と負圧作用部とを連通させる際に中空内部に負圧を形成する状態と、中空内部と外気側とを連通させる際に中空内部を大気圧とする状態とを選択的に切り換える負圧切換機構と、を有する構成とすることにより、投入装置及び排出装置の負圧保持機能を簡単な構成で具体的に実現できる。   In addition, each of the charging device and the discharging device has a case in which a hollow interior into which an object is put is formed, and when closed, the hollow interior and the negative pressure acting part, or the hollow interior and the outside air side are hermetically sealed, and when opened, the object is not sealed. A state in which a negative pressure is formed in the hollow interior when the hollow interior and the negative pressure acting portion are communicated with a plurality of opening / closing doors that allow the hollow interior and the negative pressure acting portion to communicate with each other so as to pass through. A negative pressure switching mechanism for selectively switching between a state in which the hollow interior is brought to atmospheric pressure when the hollow interior communicates with the outside air side, and a negative pressure holding function of the charging device and the discharging device Can be specifically realized with a simple configuration.

また、投入装置と排出装置は、貯液槽から所定の高さ位置に設置され、負圧切換機構は、中空内部に貯液槽内の作用液を充填させるための経路に介設された給液弁と、中空内部から空気を排気する排気弁と、開時に中空内部の作用液を負圧作用部に排出させるように設けられた負圧作用部側の開閉扉と、を含み、給液弁及び排気弁を開放して充填経路を介して中空内部に作用液を充填した後、給液弁及び排気弁を閉鎖し、負圧作用部側の開閉扉のみを開くことにより、中空内部に負圧を形成する構成とすることにより、投入装置及び排出装置の中空内部の負圧形成を、負圧作用部の負圧形成と略同じ原理で、かつ多くの部材を共通化して実現でき、簡単な構成で、低コストで製造できる。   In addition, the charging device and the discharging device are installed at a predetermined height from the liquid storage tank, and the negative pressure switching mechanism is provided in a supply path for filling the working liquid in the liquid storage tank into the hollow interior. A liquid valve, an exhaust valve for exhausting air from the inside of the hollow, and an opening / closing door on the side of the negative pressure acting part provided to discharge the working liquid inside the hollow to the negative pressure acting part when opened, After opening the valve and exhaust valve and filling the hollow interior with working fluid via the filling path, close the liquid supply valve and exhaust valve, and open only the open / close door on the negative pressure action side to open the hollow interior. By forming a negative pressure, the negative pressure formation inside the hollow of the input device and the discharge device can be realized by using substantially the same principle as the negative pressure formation of the negative pressure acting part, and by sharing many members, It can be manufactured at a low cost with a simple configuration.

また、負圧作用部に負圧を形成するための機構は負圧作用部内に貯液槽内の作用液を充填させる経路に設けられたポンプを含み、該経路はポンプの下流側で分岐され投入装置と排出装置とにそれぞれ給液弁を介して接続された構成とすることにより、負圧作用装置、投入装置及び排出装置に負圧を形成させる機構を構成する部材を共通化して、少ない部材点数で簡単な構成で製造できるとともに、低コストで製造できる。   The mechanism for forming the negative pressure in the negative pressure acting part includes a pump provided in a path for filling the negative pressure acting part with the working liquid in the liquid storage tank, and the path is branched downstream of the pump. By adopting a configuration in which the charging device and the discharging device are connected to each other via a liquid supply valve, the number of members constituting the negative pressure operating device, the mechanism for forming the negative pressure in the charging device and the discharging device are made common, and there are few It can be manufactured with a simple configuration by the number of members, and can be manufactured at low cost.

また、投入装置及び／又は排出装置には、対象物を搬送し、負圧作用部内の搬送装置と受け渡しする移送装置が設置された構成とすることにより、負圧を保持した状態でスムーズに対象物を負圧作用部へ投入、又は負圧作用部から排出することができる。   In addition, the feeding device and / or the discharging device are configured to include a transfer device that conveys the object and transfers it to and from the conveying device in the negative pressure operation unit, so that the object can be smoothly maintained while maintaining the negative pressure. An object can be thrown into or discharged from the negative pressure acting part.

また、投入装置と排出装置はそれぞれ、円筒状周壁の外気側に臨む一部分と負圧形成部に臨む一部分に対象物が通過する開口が設けられた円筒状ケースと、円筒状ケース中心に軸支された回転軸からケース内壁に向けて突出しケース内部を外気側及び負圧作用部とは気密閉鎖された閉鎖空間と外気側に臨む空間と負圧作用部に臨む空間とに分割して水密気密状態を保持して仕切る複数の羽根を含む回転扉と、を含み、複数の羽根で仕切られた閉鎖空間に作用液を充填させた状態で回転扉を回転軸周りに回転させることにより負圧作用部の負圧を保持させる構成とすることにより、投入装置及び排出装置の負圧保持機能を簡単な構成で具体的に実現できる。   In addition, each of the charging device and the discharging device has a cylindrical case in which an opening through which an object passes is provided in a part facing the outside air side of the cylindrical peripheral wall and a part facing the negative pressure forming part, and a shaft support in the center of the cylindrical case. It projects from the rotating shaft toward the inner wall of the case, and the inside of the case is divided into a closed space where the outside air side and negative pressure acting part are hermetically sealed, a space facing the outside air side, and a space facing the negative pressure acting part, and is watertight and airtight. A revolving door including a plurality of blades that maintain and partition the state, and a negative pressure action is obtained by rotating the revolving door around a rotation axis in a state where a closed space partitioned by the plurality of blades is filled with a working liquid. By adopting a configuration that holds the negative pressure of the section, the negative pressure holding function of the input device and the discharge device can be specifically realized with a simple configuration.

本発明の第１の実施形態に係る負圧作用装置の概略説明図である。It is a schematic explanatory drawing of the negative pressure action apparatus which concerns on the 1st Embodiment of this invention. 図１の負圧作用装置の概略フローチャートである。It is a schematic flowchart of the negative pressure action apparatus of FIG. 図１の負圧作用装置の負圧作用部に負圧を形成する際のフローチャートである。It is a flowchart at the time of forming a negative pressure in the negative pressure action part of the negative pressure action apparatus of FIG. 図１の負圧作用装置の投入装置を介して対象物を負圧作用部へ投入する際のフローチャートである。It is a flowchart at the time of throwing a target object into a negative pressure action part via the throwing-in apparatus of the negative pressure action apparatus of FIG. 図１の負圧作用装置の排出装置を介して対象物を負圧作用部から排出する際のフローチャートである。It is a flowchart at the time of discharging | emitting an object from a negative pressure action part via the discharge device of the negative pressure action apparatus of FIG. 本発明の第２の実施形態に係る負圧作用装置の概略説明図である。It is a schematic explanatory drawing of the negative pressure action apparatus which concerns on the 2nd Embodiment of this invention. 図６の負圧作用装置の投入装置を介して対象物を負圧作用部へ投入する際のフローチャートである。It is a flowchart at the time of throwing a target object into a negative pressure action part via the throwing-in apparatus of the negative pressure action apparatus of FIG. 図６の負圧作用装置の排出装置を介して対象物を負圧作用部から排出する際のフローチャートである。It is a flowchart at the time of discharging | emitting an object from a negative pressure action part via the discharge device of the negative pressure action apparatus of FIG. 本発明の第３の実施形態に係る負圧作用装置の概略説明図である。It is a schematic explanatory drawing of the negative pressure action apparatus which concerns on the 3rd Embodiment of this invention.

以下添付図面を参照しつつ本発明の負圧作用装置の実施形態について説明する。本発明に係る負圧作用装置は、負圧作用部に負圧を形成保持し、例えば、食品、医薬品、機械部品等の対象物を効率的に負圧処理する負圧処理装置である。図１ないし図５は、本発明の負圧作用装置の第１の実施形態を示している。図１に示すように、本実施形態において、負圧作用装置１０は、作用液Ｌを貯留する貯液槽１２と、中空の縦長管１４と、縦長管１４の上端に接続された負圧作用部１６と、負圧作用部１６に設置された搬送装置１８と、負圧作用部１６への対象物Ｆの投入装置２０と、負圧作用部１６からの対象物Ｆの排出装置２２と、を備えている。なお、本実施形態では、負圧作用装置１０で負圧作用させる対象物Ｆは、例えば、食品等の固形物又は固形状物を適用した場合で説明する。   Embodiments of the negative pressure device of the present invention will be described below with reference to the accompanying drawings. The negative pressure operation device according to the present invention is a negative pressure processing device that forms and holds a negative pressure in the negative pressure operation portion and efficiently performs negative pressure processing on an object such as a food, a medicine, or a machine part. 1 to 5 show a first embodiment of the negative pressure acting device of the present invention. As shown in FIG. 1, in this embodiment, the negative pressure device 10 includes a liquid storage tank 12 that stores the working fluid L, a hollow vertical tube 14, and a negative pressure operation that is connected to the upper end of the vertical tube 14. Unit 16, conveying device 18 installed in negative pressure acting unit 16, device 20 for feeding object F into negative pressure acting unit 16, device 22 for discharging object F from negative pressure acting unit 16, It has. In the present embodiment, the object F to be subjected to negative pressure by the negative pressure operating device 10 will be described, for example, in the case where a solid or solid object such as food is applied.

図１に示すように、貯液槽１２は、液面Ｌａｆを大気に接触させて所定量の作用液Ｌを貯留する液溜め手段である。本実施形態では、貯液槽１２は、例えば、上面側全体を開放した有底の中空容器からなり、上面開放部分から内部に溜めた作用液Ｌ（Ｌａ）の液面Ｌａｆに大気圧が作用するようになっている。貯液槽１２内の作用液Ｌは、例えば、水からなり、後述のように縦長管１４内及び負圧作用部１６内に導入され、貯液槽１２内の作用液Ｌａと縦長管１４或いは負圧作用部１６内の作用液Ｌｂの液面の高低差で負圧作用部１６に負圧の作用空間３０を形成し、その負圧を気密保持する媒体である。なお、作用液Ｌは、水に限らず、対象物Ｆの種類等に応じて種々変更してもよい。例えば、対象物Ｆが食品の場合には作用液Ｌを調味液や着色液等としたり、対象物が電気電子部品の場合には作用液を絶縁剤としたり、対象物が機械部品の場合には作用液を潤滑油としたり、対象物が木材の場合には作用液を防腐剤としたり、その他処理目的に応じて任意の組み合わせで設定するとよい。   As shown in FIG. 1, the liquid storage tank 12 is a liquid storage means for storing a predetermined amount of the working liquid L by bringing the liquid level Laf into contact with the atmosphere. In the present embodiment, the liquid storage tank 12 is composed of, for example, a hollow container with a bottom opened on the entire upper surface side, and atmospheric pressure acts on the liquid surface Laf of the working liquid L (La) accumulated inside from the upper surface opened portion. It is supposed to be. The working liquid L in the liquid storage tank 12 is made of water, for example, and is introduced into the vertical pipe 14 and the negative pressure operating section 16 as described later, and the working liquid La in the liquid storage tank 12 and the vertical pipe 14 or This is a medium in which a negative pressure working space 30 is formed in the negative pressure acting portion 16 by the level difference of the working liquid Lb in the negative pressure acting portion 16 and the negative pressure is hermetically maintained. The working liquid L is not limited to water, and may be variously changed according to the type of the object F or the like. For example, when the object F is a food, the working liquid L is a seasoning liquid or a coloring liquid, or when the object is an electric / electronic component, the working liquid is an insulating agent, or when the object is a mechanical part. May be set in any combination according to the purpose of treatment, such as using a working oil as a lubricating oil, or if the object is wood, the working liquid as a preservative.

図１に示すように、縦長管１４は、上下両端部に開口２４、２６を有し細長く形成された中空管からなり、下端開口２４を貯液槽１２内の作用液Ｌに浸して配置されている。本実施形態では、縦長管１４は、例えば、管の長さが約１０ｍ程度の円筒管からなり、図示しない支持手段で支持されて略鉛直状に立てて配置されている。縦長管１４の下端側には、下端開口２４を開閉する下部開閉弁２８が設けられている。なお、下部開閉弁の代わりに、縦長管１４の上端側又は上下中間位置の任意の位置に開閉弁を設ける構成としてもよい。   As shown in FIG. 1, the vertically long pipe 14 is formed of an elongated hollow pipe having openings 24 and 26 at both upper and lower ends, and the lower end opening 24 is immersed in the working liquid L in the liquid storage tank 12. Has been. In the present embodiment, the vertically long tube 14 is formed of, for example, a cylindrical tube having a tube length of about 10 m, and is supported by a support means (not shown) and arranged in a substantially vertical shape. A lower opening / closing valve 28 for opening and closing the lower end opening 24 is provided on the lower end side of the vertically long pipe 14. In addition, it is good also as a structure which provides an on-off valve in the arbitrary positions of the upper end side of the vertically long pipe 14, or an up-down intermediate position instead of a lower on-off valve.

縦長管１４の上端には負圧作用部１６が互いに内部を連通させた状態で接続されている。負圧作用部１６は、対象物Ｆが入れられる負圧の作用空間３０が内部に形成され、貯液槽１２内の作用液の液面Ｌａｆから所定高さ位置に設置されている。本実施形態では、負圧作用部１６は、例えば、耐圧製の素材で形成され、複数の対象物Ｆを収容可能な大きさの中空内部を有する横長中空箱体からなり、図示しない支持手段で支持されている。負圧作用部１６は、その底壁の横長方向中間位置に縦長管１４の上端が接続され、縦長管１４の上端開口２６を介して該縦長管内と連通しており、底壁が貯液槽１２内の作用液面Ｌａｆから約１０ｍ程度の位置に設置されている。負圧作用部１６は、横長方向の一端側（図１上、左側）に対象物Ｆの投入口３２が設けられるとともに、他端側（図１上、右側）に排出口３４が設けられている。そして、投入口３２に投入装置２２が、排出口３４に排出装置２２がそれぞれ設けられると同時に、後述の負圧側開閉扉５６、５７で開閉されるようになっている。負圧作用部１６には、貯液槽１２内の作用液Ｌを縦長管１４とは別経路で充填させる充填経路３６が接続されている。充填経路３６は、例えば、一端を貯液槽１２の作用液を浸すとともに、他端を負圧作用部１６に接続された配管等からなり、負圧作用部１６と貯液槽１２とを迂回状に連通している。負圧作用部１６は、縦長管１４の下端開口２４を下部開閉弁２８により閉鎖した状態で充填経路３６を介して貯液槽１２から作用液Ｌを負圧作用部１６内及び縦長管１４内に充填させた後、縦長管１４の下端開口２４を開放すると、負圧作用部１６内の作用液が下降し、該液面Ｌｂｆの上方側に負圧の作用空間３０が形成保持される。本実施形態では、負圧の作用空間３０を形成した状態で負圧作用部１６内に作用液Ｌｂが残っている。なお、例えば、縦長管１４をより長く形成して負圧作用部１６をより高い位置に設けることにより、縦長管の縦長管１４内まで液面Ｌｂｆを下降させ、負圧作用部１６の内部全体を作用空間とするようにしてもよい。   A negative pressure acting portion 16 is connected to the upper end of the vertically long pipe 14 in a state where the inside communicates with each other. The negative pressure acting part 16 has a negative pressure working space 30 into which the object F is placed, and is disposed at a predetermined height from the liquid level Laf of the working liquid in the liquid storage tank 12. In the present embodiment, the negative pressure acting portion 16 is formed of, for example, a horizontally long hollow box formed of a pressure-resistant material and having a hollow interior having a size capable of accommodating a plurality of objects F. It is supported. The negative pressure acting portion 16 has an upper end of the vertical tube 14 connected to an intermediate position in the horizontal direction of the bottom wall, and communicates with the inside of the vertical tube through an upper end opening 26 of the vertical tube 14. 12 is installed at a position of about 10 m from the working liquid surface Laf. The negative pressure acting part 16 is provided with an input port 32 for the object F on one end side (upper left side in FIG. 1) in the laterally long direction and a discharge port 34 on the other end side (upper right side in FIG. 1). Yes. A loading device 22 is provided at the loading port 32 and a discharging device 22 is provided at the discharge port 34, and at the same time, the loading device 22 is opened and closed by negative pressure side opening / closing doors 56 and 57 described later. Connected to the negative pressure acting portion 16 is a filling path 36 for filling the working liquid L in the liquid storage tank 12 through a path different from that of the vertically long pipe 14. The filling path 36 includes, for example, a pipe or the like in which one end is immersed in the working liquid of the liquid storage tank 12 and the other end is connected to the negative pressure acting section 16, and bypasses the negative pressure acting section 16 and the liquid storage tank 12. Communicated in a shape. The negative pressure acting part 16 allows the working liquid L to be drawn from the liquid storage tank 12 through the filling path 36 in the state where the lower end opening 24 of the vertical pipe 14 is closed by the lower on-off valve 28 and into the negative pressure acting part 16 and the vertical long pipe 14. Then, when the lower end opening 24 of the longitudinal tube 14 is opened, the working liquid in the negative pressure acting part 16 descends, and a negative pressure working space 30 is formed and held above the liquid level Lbf. In the present embodiment, the working fluid Lb remains in the negative pressure acting portion 16 in a state where the negative pressure working space 30 is formed. In addition, for example, by forming the vertically long tube 14 longer and providing the negative pressure acting portion 16 at a higher position, the liquid level Lbf is lowered into the vertically long tube 14 of the vertically long tube, and the entire inside of the negative pressure acting portion 16 is provided. May be the working space.

負圧作用部１６の作用空間３０は、負圧作用部１６内及び縦長管１４内の作用液Ｌ（Ｌｂ）の重さによる圧力と、貯液槽１２内の作用液Ｌｂの液面Ｌに作用する大気圧と、のバランスにより負圧が形成保持される。貯液槽１２の作用液Ｌａに作用する大気圧Ｐと、負圧作用部１６の作用空間３０の圧力Ｐ１と該負圧作用部１６内及び縦長管１４内の作用液Ｌｂの重さによる圧力Ｐ２の和と、がバランスをとってつりあう（Ｐ＝Ｐ１＋Ｐ２）。縦長管１４内の作用液の圧力Ｐ２は、作用液の密度ρ×重力加速度ｇ×縦長管１４内の作用液面Ｌｂｆと貯液槽１２の作用液面Ｌａｆとの差ｈ、すなわち、作用液の単位体積あたりの重量γ×管内の作用液面Ｌｂｆの貯液槽１２の作用液面Ｌａｆからの高さｈ、であらわされる（Ｐ２＝ρｇｈ＝γｈ）。本実施形態では、作用空間３０の圧力Ｐ１ができるだけ小さな（Ｐ１が０に近い）略真空状態に設定されるように設けられており、いわゆるトリチェリの真空を形成するように縦長管１４及び負圧作用部１６の高さが設定されている。上記式で作用空間２０の圧力Ｐ１を０（真空）に近似するとＰ＝γｈで近似できるので、大気圧Ｐを作用液Ｌの単位体積の重量γで割った値（ｈ＝Ｐ／γ）が大気圧とつりあう作用液Ｌｂの液面限界高さとなる。よって、作用空間３０を略真空状態にするために、貯液槽１２内の作用液面Ｌａｆからの負圧作用部１６の設置高さは、大気圧Ｐを作用液Ｌの単位体積の重量γで割った値（ｈ＝Ｐ／γ）よりも高く設定される。例えば、作用液Ｌが水の場合には負圧作用部１６内の作用液面Ｌｂｆは、貯液槽１２の作用液面Ｌａｆからの高さが約１０ｍ程度となるので、上述のように負圧作用部１６は約１０ｍよりも高い位置に設定されている。   The working space 30 of the negative pressure acting part 16 is formed between the pressure due to the weight of the working liquid L (Lb) in the negative pressure acting part 16 and the longitudinal tube 14 and the liquid level L of the working liquid Lb in the liquid storage tank 12. A negative pressure is formed and maintained by a balance with the atmospheric pressure acting. The atmospheric pressure P acting on the working liquid La in the liquid storage tank 12, the pressure P1 in the working space 30 of the negative pressure acting part 16, and the pressure due to the weight of the working liquid Lb in the negative pressure acting part 16 and the longitudinal tube 14 The sum of P2 is balanced (P = P1 + P2). The pressure P2 of the working fluid in the longitudinal tube 14 is the difference h between the working fluid density ρ × gravity acceleration g × the working fluid surface Lbf in the longitudinal tube 14 and the working fluid surface Laf of the liquid storage tank 12, that is, the working fluid. Γ × height per unit volume × height h of the working liquid level Lbf in the pipe from the working liquid level Laf of the liquid storage tank 12 (P2 = ρgh = γh). In the present embodiment, the pressure P1 in the working space 30 is set so as to be as small as possible (P1 is close to 0) in a substantially vacuum state, and the vertical tube 14 and the negative pressure are formed so as to form a so-called Trichelli vacuum. The height of the action part 16 is set. When the pressure P1 of the working space 20 is approximated to 0 (vacuum) in the above formula, it can be approximated by P = γh, and therefore, a value (h = P / γ) obtained by dividing the atmospheric pressure P by the weight γ of the unit volume of the working liquid L. This is the liquid surface limit height of the working liquid Lb that balances with the atmospheric pressure. Therefore, in order to make the working space 30 in a substantially vacuum state, the installation height of the negative pressure acting part 16 from the working liquid level Laf in the liquid storage tank 12 is set such that the atmospheric pressure P is the weight γ of the unit volume of the working liquid L. Higher than the value divided by (h = P / γ). For example, when the working liquid L is water, the working liquid level Lbf in the negative pressure working unit 16 is about 10 m from the working liquid level Laf of the liquid storage tank 12, so that it is negative as described above. The pressure action part 16 is set at a position higher than about 10 m.

本実施形態では、負圧作用部１６の作用空間３０を負圧にするための負圧形成機構３８が設けられている。負圧形成機構３８は、例えば、上述の縦長管１４の下端開口２４を開閉する下部開閉弁２８と、充填経路３６と、負圧形成部１６の上端に設けられた排気管４０と、排気管４０を開閉する排気弁４２と、充填経路３６に介設され作用空間３０内に作用液を強制的に送る揚水ポンプ４４と、充填経路３６の負圧作用部１６側に介設された給液弁４６と、を含む。排気管４０は、負圧作用部１６の閉鎖されている上端側で管内外を連通するように接続された小管からなる。排気管４０には、水位センサ４８が設けられており、負圧作用部１６に負圧を形成する際に作用液Ｌが負圧作用部１６内に満杯になるのを検出する。揚水ポンプ４４は、例えば、遠心ポンプからなり、稼動時には貯液槽１２内の作用液Ｌを吸引して充填経路３６を圧送して負圧作用部１６内に充填する。図３に示すように、負圧形成機構３８は、下部開閉弁２８、排気弁４２、給液弁４６等の複数の弁の開閉操作及び揚水ポンプ４４のオンオフ操作を行なって、負圧作用部１６の作用空間３０に負圧を形成する。   In the present embodiment, a negative pressure forming mechanism 38 is provided for making the working space 30 of the negative pressure acting portion 16 negative pressure. The negative pressure forming mechanism 38 includes, for example, a lower on-off valve 28 that opens and closes the lower end opening 24 of the above-described vertical pipe 14, a filling path 36, an exhaust pipe 40 provided at the upper end of the negative pressure forming unit 16, and an exhaust pipe An exhaust valve 42 that opens and closes 40, a pumping pump 44 that is provided in the filling path 36 and forcibly sends the working fluid into the working space 30, and a liquid supply that is provided on the negative pressure acting part 16 side of the filling path 36. And a valve 46. The exhaust pipe 40 is composed of a small pipe connected so as to communicate the inside and outside of the pipe at the closed upper end side of the negative pressure acting portion 16. A water level sensor 48 is provided in the exhaust pipe 40 to detect that the working liquid L is filled in the negative pressure acting part 16 when a negative pressure is formed in the negative pressure acting part 16. The pumping pump 44 is composed of, for example, a centrifugal pump. During operation, the pumping pump 44 sucks the working liquid L in the liquid storage tank 12 and pumps it through the filling path 36 to fill the negative pressure acting part 16. As shown in FIG. 3, the negative pressure generating mechanism 38 performs opening / closing operations of a plurality of valves such as the lower opening / closing valve 28, the exhaust valve 42, the liquid supply valve 46, and the on / off operation of the pumping pump 44. A negative pressure is generated in the sixteen working spaces 30.

図１に示すように、搬送装置１８は、負圧作用部１６の作用空間３０に設置され、該作用空間３０において対象物Ｆを作用液Ｌに接触させない状態を維持しながら該対象物Ｆを投入口３２側から排出口３４側に向けて搬送する搬送手段である。本実施形態では、搬送装置１８は、例えば、負圧作用部１６内の作用液の液面Ｌｂｆよりも上方に設置され、無端状のベルトを２つのプーリに巻き掛けて構成されたベルトコンベアからなる。搬送装置１８は、例えば、ベルトコンベアの一端を投入口３２側に近接配置されるとともに、他端側を排出口３４側に近接配置されている。搬送装置１８、複数の対象物Ｆをベルト上に載せて連続的又は断続的に横方向に向けて略直線状に搬送しながら作用空間において対象物Ｆを所定時間負圧作用させることができる。搬送装置１８は、作用空間３０中で対象物Ｆを作用液に接触させないので、例えば、対象物Ｆに付着する液が少ない又はほとんど無い状態となるので対象物Ｆを扱いやすく、乾燥処理や食品の解凍等に有利である。なお、搬送装置１８は、本実施形態に限らず、例えば、対象物Ｆを作用液Ｌｂに所定の短時間だけ接触させて搬送するように構成してもよい。   As shown in FIG. 1, the conveying device 18 is installed in the working space 30 of the negative pressure working unit 16, and maintains the state in which the subject F does not contact the working liquid L in the working space 30. It is a conveying means that conveys from the inlet 32 side toward the outlet 34 side. In the present embodiment, the transport device 18 is, for example, a belt conveyor that is installed above the liquid level Lbf of the working liquid in the negative pressure working unit 16 and is configured by winding an endless belt around two pulleys. Become. For example, one end of the belt conveyor is disposed close to the input port 32 side, and the other end side is disposed close to the discharge port 34 side. The conveying device 18 can apply a negative pressure to the object F in the working space for a predetermined time while carrying a plurality of objects F on the belt and conveying them in a substantially straight line continuously or intermittently in the lateral direction. Since the conveying device 18 does not bring the object F into contact with the working liquid in the working space 30, for example, the liquid that adheres to the object F becomes little or almost free, so that the object F can be handled easily, and drying processing or food It is advantageous for the thawing etc. In addition, the conveying apparatus 18 is not limited to the present embodiment, and for example, the object F may be configured to be brought into contact with the working liquid Lb for a predetermined short time and conveyed.

負圧作用部１６の投入口３２側に設けられる投入装置２０は、負圧作用部１６の作用空間３０の負圧を保持させた状態で、対象物Ｆを外気側ＥＸから作用空間３０内に投入するための負圧保持機能付きの投入手段である。一方、負圧作用部１６の排出口３４側に設けられる排出装置２２は、作用空間３０の負圧を保持させた状態で、処理済みの対象物Ｆを作用空間３０内から外気側ＥＸに取り出す（排出する）ための負圧保持機能付きの排出手段である。さらに、排出装置２２は、排出する際に作用済みの対象物Ｆを作用液に接触させない状態を維持する。投入装置２０と排出装置２２とは、互いに同じ構成で対称的に設けられており、負圧作用部１６と略同じ高さ位置に設けられている。   The charging device 20 provided on the charging port 32 side of the negative pressure acting part 16 keeps the negative pressure in the working space 30 of the negative pressure acting part 16 from the outside air side EX into the working space 30. This is a charging means with a negative pressure holding function for charging. On the other hand, the discharge device 22 provided on the discharge port 34 side of the negative pressure action unit 16 takes out the processed object F from the work space 30 to the outside air EX while keeping the negative pressure in the work space 30. It is a discharge means with a negative pressure holding function for (discharge). Further, the discharging device 22 maintains a state in which the object F that has already been operated is not brought into contact with the working fluid when discharging. The charging device 20 and the discharging device 22 are provided symmetrically with the same configuration, and are provided at substantially the same height as the negative pressure acting portion 16.

本実施形態では、投入装置２０と排出装置２２は、対象物Ｆが入れられる中空内部５２を形成したケース５０を備え、ケース５０の中空内部５２への液体の充填と排出を行わせることにより負圧作用部１６の負圧を保持する液体利用の負圧保持機構６４を有する。具体的には、投入装置２０と排出装置２２とはそれぞれ、例えば、それぞれ内部に対象物Ｆを入れることが可能な中空内部５２を形成した中空箱状又は筒状のケース５０と、中空内部５２の外気側ＥＸを開閉する外気側開閉扉５４、５５と、中空内部５２の負圧作用部１６側を開閉する負圧側開閉扉５６、５７と、中空内部５２に負圧を形成した状態と大気圧状態とを切り換える負圧切換機構５８と、を含む。ケース５０は、例えば、横方向に対向する側面を開放して対象物の入口又は出口を形成し、開放部分に外気側開閉扉５４、５５と負圧側開閉扉５６、５７が設置されている。ケース５０は一部を負圧作用部１６の作用空間３０内に突出した状態で該負圧作用部１６に一体的に接続されている。中空内部５２は、例えば、対象物Ｆを１個ないし数個投入できるような比較的小さな空間で形成され、対象物Ｆを通過させる通路となる。中空内部５２は、例えば、負圧作用部１６と略同じ高さ位置であって、負圧作用部１６内の作用液の液面Ｌｂｆよりも高い位置に設けられている。中空内部５２には、貯液槽１２内の作用液を負圧作用部１６に充填する充填経路３６に分岐接続３６１、３６２されている。外気側開閉扉５４、５５は、外気側ＥＸに臨ませて設けられており、閉時には中空内部５２と外気側ＥＸとを気密閉鎖するとともに、開時には中空内部５２と外気側ＥＸとを連通させる。負圧側開閉扉５６、５７は、負圧作用部１６の作用空間３０の投入口３２又は排出口３４に臨ませて設けられており、閉時には中空内部５２と負圧作用部１６とを気密閉鎖するとともに、開時には中空内部５２と負圧作用部１６とを連通させる。外気側開閉扉５４、５５及び負圧側開閉扉５６、５７は、開時には対象物Ｆを通過可能な大きさで開口するように設けられており、例えば、中空内部５２の横方向の側面部分全体を閉鎖、開放するように設けられている。外気側開閉扉５４、５５及び負圧側開閉扉５６、５７は、例えば、上下方向又は左右方向にスライドして開閉するスライド式の扉からなり、図示しないガイド等に案内されてシリンダやモータ等の任意の駆動機構により開閉駆動される。さらに、負圧側開閉扉５６、５７を開放すると、中空内部５２内に充填される作用液は負圧作用部１６側へ自然に排出できるようになっている。   In the present embodiment, the charging device 20 and the discharging device 22 include a case 50 in which a hollow interior 52 into which the object F is to be placed is formed, and negative charging is performed by filling and discharging the liquid into the hollow interior 52 of the case 50. A liquid-use negative pressure holding mechanism 64 that holds the negative pressure of the pressure acting unit 16 is provided. Specifically, each of the charging device 20 and the discharging device 22 includes, for example, a hollow box-shaped or cylindrical case 50 in which a hollow interior 52 into which an object F can be put is formed, and a hollow interior 52. Open / close doors 54 and 55 for opening and closing the outside air side EX, negative pressure side opening and closing doors 56 and 57 for opening and closing the negative pressure acting portion 16 side of the hollow interior 52, and a state in which negative pressure is formed in the hollow interior 52 And a negative pressure switching mechanism 58 that switches between the atmospheric pressure states. The case 50 has, for example, a laterally opposed side surface opened to form an inlet or outlet for an object, and the open side doors 54 and 55 and the negative pressure side doors 56 and 57 are installed in the open part. The case 50 is integrally connected to the negative pressure acting part 16 in a state where a part projects into the working space 30 of the negative pressure acting part 16. The hollow interior 52 is formed, for example, in a relatively small space where one or several objects F can be inserted, and serves as a passage through which the object F passes. For example, the hollow interior 52 is provided at a position that is substantially the same height as that of the negative pressure acting portion 16 and is higher than the liquid level Lbf of the working fluid in the negative pressure acting portion 16. In the hollow interior 52, branch connections 361 and 362 are connected to a filling path 36 that fills the negative pressure acting portion 16 with the working liquid in the liquid storage tank 12. The outside air opening / closing doors 54 and 55 are provided so as to face the outside air EX, and when closed, the hollow interior 52 and the outside air EX are hermetically sealed, and when opened, the hollow interior 52 and the outside air EX are communicated with each other. . The negative pressure side opening / closing doors 56 and 57 are provided so as to face the input port 32 or the discharge port 34 of the working space 30 of the negative pressure acting part 16, and when closed, the hollow interior 52 and the negative pressure acting part 16 are connected to the airtight chain. At the same time, the hollow interior 52 and the negative pressure acting portion 16 are communicated with each other when opened. The outside air side doors 54 and 55 and the negative pressure side doors 56 and 57 are provided so as to open with a size that allows the object F to pass through when opened, for example, the entire lateral side portion of the hollow interior 52. Is provided to be closed and open. The outside air side doors 54 and 55 and the negative pressure side doors 56 and 57 are, for example, sliding doors that open and close by sliding in the vertical direction or the left and right direction. It is opened and closed by an arbitrary drive mechanism. Further, when the negative pressure side opening / closing doors 56 and 57 are opened, the working fluid filled in the hollow interior 52 can be naturally discharged to the negative pressure acting portion 16 side.

負圧切換機構５８は、中空内部５２と負圧作用部１６とを連通させる際に中空内部５２を負圧形成する状態と、中空内部５２と外気側ＥＸとを連通させる際に中空内部５２を大気圧とする状態と、を選択的に切り換える。このように負圧と大気圧とを切り換えることによって、投入、排出装置２０、２２の負圧保持機能を具体的に実現している。すなわち、外気側ＥＸから投入装置２０に対象物Ｆを入れる際、及び排出装置２２から外気側に対象物Ｆを取り出す際には、中空内部５２と外気側ＥＸとが連通して該中空内部５２は大気圧となるが、負圧作用部１６側の開閉扉５６、５７を気密閉鎖しておくことで該負圧作用部１６の作用空間３０の負圧を保持できる。一方、投入装置２０から負圧作用部１６に対象物Ｆを投入する際、及び負圧作用部１６から排出装置２２へ対象物Ｆを排出する際には、負圧切換機構５８により中空内部５２に負圧を形成することで、中空内部５２と負圧作用部１６とが連通しても該負圧作用部１６の作用空間３０の負圧を保持できる。   The negative pressure switching mechanism 58 is configured to form a negative pressure in the hollow interior 52 when the hollow interior 52 communicates with the negative pressure acting portion 16, and to communicate the hollow interior 52 with the outside air side EX. Selectively switch to atmospheric pressure. By switching between the negative pressure and the atmospheric pressure in this way, the negative pressure holding function of the charging / discharging devices 20 and 22 is specifically realized. That is, when the object F is put into the input device 20 from the outside air side EX and when the object F is taken out from the discharge device 22 to the outside air side, the hollow interior 52 and the outside air side EX communicate with each other. Although the atmospheric pressure becomes atmospheric pressure, the negative pressure in the working space 30 of the negative pressure acting portion 16 can be maintained by sealing the open / close doors 56 and 57 on the negative pressure acting portion 16 side. On the other hand, when the object F is input from the input device 20 to the negative pressure operation unit 16 and when the object F is discharged from the negative pressure operation unit 16 to the discharge device 22, the negative pressure switching mechanism 58 allows the hollow interior 52. By forming a negative pressure in the negative pressure acting portion 16, the negative pressure in the working space 30 of the negative pressure acting portion 16 can be maintained even if the hollow interior 52 and the negative pressure acting portion 16 communicate with each other.

本実施形態では、負圧切換機構５８は、例えば、外気側開閉扉５４、５５と、負圧側開閉扉５６、５７と、充填経路３６の分岐経路３６１、３６２に介設された給液弁６０、６１と、中空内部５２から空気を排気する排気弁６２、６３と、を含む。排気弁６２、６３は、中空内部５２から外部に連通した排気管に介設されている。排気管には、水位センサ６６が設けられており、負圧形成のために中空内部５２に作用液Ｌを充填した際に作用液が満杯になるのを検出する。給液弁６０、６１が設けられる分岐経路３６１、３６２は、充填経路３６において揚水ポンプ４４が介設された位置より下流側で分岐されている。投入装置２０の給液弁６０と排出装置２２の給液弁６１と負圧作用部１６の給液弁４６との３つの給液弁を開閉制御することで、１つのポンプだけで作用液を供給する３つの負圧形成空間を選択的に切り換えることができる。負圧切換機構５８により投入装置２０（排出装置２２）の中空内部５２に負圧を形成する場合には、外気側開閉扉５４（５５）、負圧側開閉扉５６（５７）を閉鎖し、給液弁６０（６１）及び第２排気弁６２（６３）を開放して、充填経路３６を介して中空内部５２に作用液を充填する。その後、給液弁６０（６１）及び排気弁６２（６３）を閉鎖し、負圧側開閉扉５６（５７）のみを開くことにより、作用液が負圧作用部１６内に流出し、中空内部５２に負圧が形成される。すなわち、中空内部５２は、負圧作用部１６の負圧形成と同じ原理で、負圧作用部内の作用液の液面Ｌｂｆと貯液槽１２内の液面Ｌａｆとの差により負圧が形成される。よって本実施形態では、貯液槽から所定の高さ位置に設けられ作用液の自重と大気圧とのバランスにより内部に負圧が形成される３つの負圧形成空間（３０、５２、５２）が開閉扉（５６、５７）を介して直列状に接続され、中央の負圧形成空間（３０）の負圧を保持した状態で、両側の負圧形成空間（５２、５２）のみを負圧状態と大気圧状態とを切り換えて対象物Ｆを投入、排出させるような構成とも言える。そして、これらの３つの負圧形成空間の負圧形成に必要な部材を共通させた構成とすることにより、部品点数が少なく構造が簡単で、制御等も行ないやすい。   In the present embodiment, the negative pressure switching mechanism 58 includes, for example, the outside air side opening / closing doors 54 and 55, the negative pressure side opening / closing doors 56 and 57, and the liquid supply valve 60 interposed in the branch paths 361 and 362 of the filling path 36. 61 and exhaust valves 62 and 63 for exhausting air from the hollow interior 52. The exhaust valves 62 and 63 are interposed in an exhaust pipe communicating from the hollow interior 52 to the outside. A water level sensor 66 is provided in the exhaust pipe, and detects that the working liquid is full when the hollow interior 52 is filled with the working liquid L to form a negative pressure. The branch paths 361 and 362 in which the liquid supply valves 60 and 61 are provided are branched downstream from the position where the pumping pump 44 is interposed in the filling path 36. By controlling the opening and closing of the three liquid supply valves, that is, the liquid supply valve 60 of the charging device 20, the liquid supply valve 61 of the discharge device 22, and the liquid supply valve 46 of the negative pressure operating unit 16, the working liquid can be supplied by only one pump. The three negative pressure forming spaces to be supplied can be selectively switched. When a negative pressure is formed in the hollow interior 52 of the input device 20 (discharge device 22) by the negative pressure switching mechanism 58, the outside air side door 54 (55) and the negative pressure side door 56 (57) are closed and supplied. The liquid valve 60 (61) and the second exhaust valve 62 (63) are opened, and the working fluid is filled into the hollow interior 52 via the filling path 36. Thereafter, the liquid supply valve 60 (61) and the exhaust valve 62 (63) are closed, and only the negative pressure side opening / closing door 56 (57) is opened, so that the working fluid flows into the negative pressure acting portion 16 and the hollow interior 52. A negative pressure is formed in That is, in the hollow interior 52, a negative pressure is formed by the difference between the liquid level Lbf of the working liquid in the negative pressure acting part and the liquid level Laf in the liquid storage tank 12 on the same principle as the negative pressure forming of the negative pressure acting part 16. Is done. Therefore, in this embodiment, three negative pressure formation spaces (30, 52, 52) provided at a predetermined height position from the liquid storage tank and forming a negative pressure inside due to the balance between the weight of the working fluid and the atmospheric pressure. Are connected in series via the open / close doors (56, 57), and the negative pressure in only the negative pressure forming spaces (52, 52) on both sides is maintained in a state where the negative pressure in the central negative pressure forming space (30) is maintained. It can also be said that the object F is inserted and discharged by switching between the state and the atmospheric pressure state. Then, by adopting a configuration in which members necessary for forming the negative pressure in these three negative pressure forming spaces are made common, the number of parts is small, the structure is simple, and control and the like are easy to perform.

図１に示すように、投入装置２０及び排出装置２２の中空内部５２には、移送装置６８が設けられている。移送装置６８は、例えば、搬送装置１８と同じ高さ位置に設置され、無端状のベルトを２つのプーリに巻き掛けて構成されるベルトコンベア等からなる。投入装置２０側では、負圧側開閉扉５６が開いた際に移送装置６８が駆動され、対象物Ｆを中空内部５２内で横方向に搬送させ、該移送装置６８から負圧作用部１６内の搬送装置１８へ対象物Ｆを受け渡して投入させる。同様に、排出装置２２側では、負圧側開閉扉５７が開いた際に移送装置６８が駆動され、負圧作用部１６内の搬送装置１８から移送装置６８へ処理済みの対象物Ｆを受け渡して負圧作用部から排出し、対象物Ｆを中空内部５２で横方向に移動させる。なお、移送装置６８は、投入装置２０、排出装置２２のいずれか一方のみに設けることとしても良い。また、移送装置６８の構成はベルトコンベアに限らず、レールや転動体、ピストン等により対象物を移動させる構成等その他任意の構成でもよい。また、投入、排出装置２０、２２は、例えば、対象物を滑り落とすシュータ等の構造を有していても良い。   As shown in FIG. 1, a transfer device 68 is provided in the hollow interior 52 of the input device 20 and the discharge device 22. The transfer device 68 is, for example, a belt conveyor that is installed at the same height as the transport device 18 and is configured by winding an endless belt around two pulleys. On the feeding device 20 side, when the negative pressure side opening / closing door 56 is opened, the transfer device 68 is driven to convey the object F laterally in the hollow interior 52, and from the transfer device 68 in the negative pressure action unit 16. Deliver the object F to the transport device 18 and put it in. Similarly, on the discharge device 22 side, when the negative pressure side opening / closing door 57 is opened, the transfer device 68 is driven, and the processed object F is transferred from the transfer device 18 in the negative pressure operation unit 16 to the transfer device 68. It discharges | emits from a negative pressure action part, and moves the target object F to the horizontal direction in the hollow inside 52. FIG. The transfer device 68 may be provided in only one of the input device 20 and the discharge device 22. The configuration of the transfer device 68 is not limited to the belt conveyor, and may be any other configuration such as a configuration in which an object is moved by a rail, a rolling element, a piston, or the like. In addition, the charging / discharging devices 20 and 22 may have, for example, a structure such as a shooter that slides down an object.

負圧作用部１６の作用空間３０で対象物Ｆを負圧作用処理させていると、対象物中の空気やガス等が脱気されたり水分が蒸発して、作用空間３０内の圧力が次第に上がって真空度が下がる。その結果、負圧処理の効率、確実性が低下してくる。本実施形態では、作用空間３０の圧力が上昇してきた場合に該作用空間３０を設定された負圧に復帰させる負圧復帰機構７０が設けられている。負圧復帰機構７０は、作用空間３０の圧力を測定する真空センサ７２に連動して負圧形成機構３８を作動するように設けられている。すなわち、負圧復帰機構７０は、真空センサ７２と、負圧形成機構３８と、を含む。真空センサ７２は、例えば、作用空間３０の圧力を直接測定する種々の真空計、または作用空間の圧力により上下変動する負圧作用部内の作用液の液面Ｌｂｆの変化を検知する水位センサを利用したもの等からなる。真空センサ７２からの信号が所定の圧力値以上になった際に、負圧形成機構３８により略真空状態の作用空間３０を復帰形成する。   When the object F is subjected to a negative pressure action treatment in the working space 30 of the negative pressure acting part 16, air or gas in the object is degassed or moisture is evaporated, and the pressure in the working space 30 gradually increases. Raises the vacuum. As a result, the efficiency and certainty of negative pressure processing are reduced. In the present embodiment, a negative pressure return mechanism 70 is provided that returns the working space 30 to a set negative pressure when the pressure in the working space 30 increases. The negative pressure return mechanism 70 is provided so as to operate the negative pressure generating mechanism 38 in conjunction with a vacuum sensor 72 that measures the pressure in the working space 30. That is, the negative pressure return mechanism 70 includes a vacuum sensor 72 and a negative pressure generation mechanism 38. The vacuum sensor 72 uses, for example, various vacuum gauges that directly measure the pressure in the working space 30 or a water level sensor that detects a change in the liquid level Lbf of the working liquid in the negative pressure acting portion that fluctuates up and down due to the pressure in the working space. It is made up of things. When the signal from the vacuum sensor 72 becomes equal to or higher than a predetermined pressure value, the negative pressure forming mechanism 38 restores and forms the working space 30 in a substantially vacuum state.

本実施形態では、図２に示すように、負圧形成機構３８及び負圧復帰機構７０、投入装置２０、排出装置２２は、それぞれ制御部７４によって自動的または半自動的に制御される。制御部７４には、真空センサ７２、負圧作用部１６の水位センサ４８、投入装置２０の水位センサ６６、排出装置２２の水位センサ６６、縦長管１４の下部開閉弁２８、揚水ポンプ４４、が電気的に接続されている。そして、図３に示すように、制御部７４は、それぞれのセンサからの信号に応じて、下部開閉弁２８の開閉制御や揚水ポンプ４４のオンオフ制御を行って作用空間３０に負圧を形成又は復帰する。さらに、制御部７４には搬送装置１８、移送装置６８、開閉扉５４〜５７、排気弁４２、６２、６３、給液弁４６、６０，６１が電気的に接続されており、図４、図５に示すように、制御信号に応じて、開閉扉の開閉制御や移送装置等の駆動停止制御が行なわれる。なお、開閉扉や排気弁、給液弁等の各構成要素は、制御部７４で自動制御する構成に限らず、手動で操作することとしてもよい。   In the present embodiment, as shown in FIG. 2, the negative pressure generation mechanism 38, the negative pressure return mechanism 70, the input device 20, and the discharge device 22 are controlled automatically or semi-automatically by the control unit 74. The control unit 74 includes a vacuum sensor 72, a water level sensor 48 of the negative pressure acting unit 16, a water level sensor 66 of the input device 20, a water level sensor 66 of the discharge device 22, a lower opening / closing valve 28 of the longitudinal tube 14, and a pumping pump 44. Electrically connected. Then, as shown in FIG. 3, the control unit 74 forms a negative pressure in the working space 30 by performing opening / closing control of the lower opening / closing valve 28 and on / off control of the pumping pump 44 in accordance with signals from the respective sensors. Return. Further, the transport device 18, the transfer device 68, the open / close doors 54 to 57, the exhaust valves 42, 62, 63, and the liquid supply valves 46, 60, 61 are electrically connected to the control unit 74. FIG. As shown in FIG. 5, in accordance with the control signal, opening / closing control of the open / close door and drive stop control of the transfer device and the like are performed. In addition, each component, such as an opening / closing door, an exhaust valve, and a liquid supply valve, is not limited to the configuration automatically controlled by the control unit 74, and may be manually operated.

次に、図２ないし図５を参照しつつ、本実施形態に係る負圧作用装置１０の作用すなわち負圧処理方法について説明する。図２に示すように、まず、負圧形成機構３８により負圧作用部１６に負圧の作用空間３０を形成保持させる（Ｓ１００）。具体的には、図３に示すように、最初に、負圧形成部１６の排気弁４２と給液弁４６を開放するとともに縦長管１４の下部開閉弁２８を閉鎖する（Ｓ１０）。この際、全ての開閉扉５４〜５７、及び投入装置２０、排出装置２２の給液弁６０、６１と排気弁６２、６３は閉鎖しておく。その状態で揚水ポンプ４４を駆動して貯液槽１２の作用液Ｌを充填経路３６を介して負圧作用部１６内に強制的に送り入れる（Ｓ１２）。負圧作用部１６内に圧送された作用液Ｌは、縦長管１４の上端開口２６から縦長管１４内に入り、下部開閉弁２８で受け止められ次第に液面を上昇して充填されていくと同時に、縦長管１４内及び負圧作用部１６内の空気は排気弁４２を介して排気される。そして、負圧作用部１６内と縦長管１４内に作用液Ｌが完全に満たされると（Ｓ１４）、水位センサ４８により感知されて、揚水ポンプ４４を停止する（Ｓ１６）。そして、負圧作用部１６の排気弁４２と給液弁４６を閉鎖し（Ｓ１８）、縦長管１４の下部開閉弁２８を開くと（Ｓ２０）、図１に示すように、該縦長管１４の下端開口２４から作用液が貯液槽１２内に一部戻り、負圧作用部１６内の作用液の液面Ｌｂｆが下降して、縦長管内の作用液が大気圧とバランスでつりあう液面高さｈで停止し、液面Ｌｂｆより上方に略真空状態の負圧の作用空間３０が形成される（Ｓ２２）。なお、例えば、揚水ポンプ４４で負圧作用部１６内に作用液Ｌを送り込む際に、負圧作用部１６内に空気を残しておくことで、真空度が低い（圧力が比較的高い）負圧空間を形成することもできる。対象物Ｆの種類に応じて、真空度を調整するようにしてもよい。   Next, the operation of the negative pressure acting device 10 according to the present embodiment, that is, the negative pressure processing method will be described with reference to FIGS. As shown in FIG. 2, first, the negative pressure acting mechanism 16 is caused to form and hold the negative pressure working space 30 by the negative pressure producing mechanism 38 (S100). Specifically, as shown in FIG. 3, first, the exhaust valve 42 and the liquid supply valve 46 of the negative pressure forming unit 16 are opened, and the lower opening / closing valve 28 of the longitudinal tube 14 is closed (S10). At this time, all the open / close doors 54 to 57 and the liquid supply valves 60 and 61 and the exhaust valves 62 and 63 of the input device 20 and the discharge device 22 are closed. In this state, the pumping pump 44 is driven to forcibly feed the working liquid L in the liquid storage tank 12 into the negative pressure acting part 16 through the filling path 36 (S12). The working liquid L pumped into the negative pressure acting part 16 enters the longitudinal pipe 14 from the upper end opening 26 of the longitudinal pipe 14, is received by the lower opening / closing valve 28, and gradually rises and fills the liquid level. The air in the longitudinal tube 14 and the negative pressure operating unit 16 is exhausted through the exhaust valve 42. Then, when the working liquid L is completely filled in the negative pressure acting part 16 and the vertically long pipe 14 (S14), the water level sensor 48 senses it and stops the pumping pump 44 (S16). Then, when the exhaust valve 42 and the liquid supply valve 46 of the negative pressure acting unit 16 are closed (S18) and the lower opening / closing valve 28 of the vertical tube 14 is opened (S20), as shown in FIG. The working liquid partially returns from the lower end opening 24 into the liquid storage tank 12, the liquid level Lbf of the working liquid in the negative pressure working unit 16 descends, and the working liquid level in the vertical tube is balanced with the atmospheric pressure. The working space 30 of a negative pressure is formed in a substantially vacuum state above the liquid level Lbf (S22). For example, when the working liquid L is fed into the negative pressure acting part 16 by the pumping pump 44, the air is left in the negative pressure acting part 16 so that the degree of vacuum is low (the pressure is relatively high). A pressure space can also be formed. The degree of vacuum may be adjusted according to the type of the object F.

負圧作用部１６の作用空間３０内に投入装置２０から対象物Ｆを投入する場合には、負圧側開閉扉５４を閉鎖した状態で大気圧状態の中空内部５２に対象物Ｆを外気側から投入装置２０に投入し（Ｓ１０２）、負圧切換機構５８により中空内部５２に負圧を形成して（Ｓ１０４）、対象物を中空内部５２から負圧作用部１６に投入する（Ｓ１０６）。その後、再び負圧側開閉扉５４を閉鎖した状態で負圧切換機構５８により中空内部５２を大気圧状態に復帰して（Ｓ１０８）、上記同様の操作が繰り返されて負圧作用部１６の負圧を保持しながら複数の対象物Ｆを該負圧作用部１６へ断続的に順番に投入する。具体的には、図４に示すように、まず、投入装置２０の給液弁６０と排気弁６２及び負圧開閉扉５６を閉鎖した状態で、外気側開閉扉５４を開放する（Ｓ３０）。投入装置２０の中空内部５２は外気側ＥＸと連通し大気圧となっており、該開閉扉５４を開けた開口より対象物Ｆを中空内部５２内に入れ、移送装置６８に載せる（Ｓ３２）。この際、負圧側開閉扉５６により気密閉鎖されているので、負圧作用部１６内の負圧は保持される。外気側開閉扉５４を閉鎖して（Ｓ３４）、給液弁６０と排気弁６２を開放した状態で（Ｓ３６）、揚水ポンプ４４を駆動して投入装置２０の中空内部５２に作用液を充填する（Ｓ３８）。中空内部５２に作用液が充填されてその液面が上昇していくと同時に、中空内部５２の空気は排気弁６２を介して排気される。この際、対象物Ｆは作用液Ｆに浸されることとなる。よって、例えば、この作用液を充填するステップを利用して、作用液を対象物に含浸させるような構成としてもよい。中空内部５２内に作用液Ｌが完全に充填されると（Ｓ４０）、水位センサ６６により感知されて、揚水ポンプ４４を停止する（Ｓ４２）。そして、投入装置２０の給液弁６０と排気弁６２とを閉鎖する（Ｓ４４）。この状態で、負圧側開閉扉５６を開くと（Ｓ４６）、投入装置２０は負圧を形成保持する作用液がつりあう液面位置よりも高い位置に設けられていることから、開いた開口から中空内部５２内の作用液は負圧作用部１６へ流出し、中空内部５２に略真空状態の負圧が形成される（Ｓ４８）。この状態では、外気側開閉扉５４は閉鎖されているので負圧形成部１６の負圧が保持される。投入装置２０の移送装置６８を駆動して、対象物Ｆを負圧作用部１６内の搬送装置１８の投入口３２側に移送して、対象物Ｆの投入を行う（Ｓ５０）。その後、再び負圧側開閉扉５６を閉じ（Ｓ５２）、外気側開閉扉５４を開くと中空内部５２は大気圧に復帰する。なお、排気弁６２を開いて大気圧に復帰させることとしてもよい。このように上記ステップ（Ｓ３０〜Ｓ５２）を繰り返して、負圧を保持しながら対象物の負圧作用部への投入を行う。   When the object F is thrown into the working space 30 of the negative pressure acting part 16 from the throwing device 20, the object F is put into the hollow interior 52 in the atmospheric pressure state from the outside air side with the negative pressure side opening / closing door 54 closed. The charging device 20 is charged (S102), negative pressure is generated in the hollow interior 52 by the negative pressure switching mechanism 58 (S104), and the object is thrown from the hollow interior 52 to the negative pressure application unit 16 (S106). Thereafter, the hollow interior 52 is returned to the atmospheric pressure state by the negative pressure switching mechanism 58 with the negative pressure side opening / closing door 54 closed again (S108), and the same operation as described above is repeated, so that the negative pressure of the negative pressure acting portion 16 is restored. A plurality of objects F are intermittently thrown into the negative pressure acting portion 16 in order. Specifically, as shown in FIG. 4, first, the outside air side opening / closing door 54 is opened with the liquid supply valve 60, the exhaust valve 62 and the negative pressure opening / closing door 56 of the charging device 20 closed (S30). The hollow interior 52 of the charging device 20 communicates with the outside air side EX and is at atmospheric pressure, and the object F is put into the hollow interior 52 through the opening of the opening / closing door 54 and placed on the transfer device 68 (S32). At this time, since the air-tight chain is formed by the negative pressure side opening / closing door 56, the negative pressure in the negative pressure acting portion 16 is maintained. With the outside air side opening / closing door 54 closed (S34) and the liquid supply valve 60 and the exhaust valve 62 opened (S36), the pumping pump 44 is driven to fill the hollow interior 52 of the charging device 20 with the working liquid. (S38). At the same time as the working liquid is filled in the hollow interior 52 and its liquid level rises, the air in the hollow interior 52 is exhausted through the exhaust valve 62. At this time, the object F is immersed in the working fluid F. Therefore, for example, it is good also as a structure which makes a target object impregnate a working liquid using the step filled with this working liquid. When the working liquid L is completely filled in the hollow interior 52 (S40), it is detected by the water level sensor 66 and the pumping pump 44 is stopped (S42). Then, the liquid supply valve 60 and the exhaust valve 62 of the charging device 20 are closed (S44). When the negative pressure side opening / closing door 56 is opened in this state (S46), the charging device 20 is provided at a position higher than the liquid surface position where the working liquid that forms and holds the negative pressure is balanced, so that the opening device 20 is hollow from the opened opening. The working fluid in the interior 52 flows out to the negative pressure acting portion 16, and a negative pressure in a substantially vacuum state is formed in the hollow interior 52 (S48). In this state, since the open / close door 54 is closed, the negative pressure of the negative pressure forming unit 16 is maintained. The transfer device 68 of the input device 20 is driven to transfer the object F to the input port 32 side of the transfer device 18 in the negative pressure operation unit 16 to input the object F (S50). After that, when the negative pressure side opening / closing door 56 is closed again (S52) and the outside air side opening / closing door 54 is opened, the hollow interior 52 returns to atmospheric pressure. The exhaust valve 62 may be opened to return to atmospheric pressure. In this manner, the above steps (S30 to S52) are repeated, and the object is thrown into the negative pressure acting part while maintaining the negative pressure.

図２に戻って、負圧作用部１６に投入された対象物Ｆは、搬送装置１８を介して作用液に接触しない状態で作用空間３０を排出口３４に向かって搬送されながら、所定時間負圧作用を受けて、対象物内部の気体の脱気、脱泡及び乾燥処理等される（Ｓ１１０）。搬送装置１８の速度を調整して処理時間を設定してもよい。   Returning to FIG. 2, the object F thrown into the negative pressure application unit 16 is negative for a predetermined time while being conveyed toward the discharge port 34 through the action space 30 without being in contact with the working liquid via the conveying device 18. Under the pressure action, the gas inside the object is degassed, defoamed, dried, etc. (S110). The processing time may be set by adjusting the speed of the transport device 18.

負圧作用部１６で負圧作用処理を受けた処理済みの対象物Ｆを、負圧作用部１６の排出口３４から排出装置２２を介して外気側ＥＸに排出する場合には、排出装置２２の中空内部５２を負圧切換機構５８により大気圧状態から負圧を形成し（Ｓ１１２）、対象物Ｆを搬送装置１８から負圧の中空内部５２へ排出する（Ｓ１１４）。その後、負圧側開閉扉５７を閉鎖した状態で負圧切換機構５８により中空内部５２を大気圧状態に復帰して（Ｓ１１６）、対象物を排出装置２２から外気側へ取り出す（Ｓ１１８）。上記同様の操作が繰り返されて負圧作用部１６の負圧を保持しながら複数の対象物Ｆを断続的に順次排出する。具体的には、図５に示すように、排出装置２２の負圧側開閉扉５７と外気側開閉扉５５をともに閉鎖した状態で、給液弁６１、排気弁６３を開放する（Ｓ６０）。揚水ポンプ４４を駆動して排出装置２２の中空内部５２に作用液を充填する（Ｓ６２）。中空内部５２に作用液が充填されてその液面が上昇していくと同時に、中空内部５２の空気は排気弁６３を介して排気される。中空内部５２内に作用液Ｌが完全に充填されると（Ｓ６４）、水位センサ６６が感知し、揚水ポンプ４４を停止する（Ｓ６６）。排出装置２２の給液弁６１と排気弁６３とを閉鎖する（Ｓ６８）。この状態で負圧側開閉扉５７を開くと（Ｓ７０）、排出装置２２は負圧を形成保持する作用液がつりあう液面Ｌｂｆ位置よりも高い位置に設けられていることから、扉を開いた開口から中空内部５２内の作用液は負圧作用部１６へ流出し、中空内部５２に略真空状態の負圧が形成される（Ｓ７２）。この際、外気側開閉扉５５は閉鎖されているので負圧形成部１６の負圧は保持される。そして、負圧作用部１６の搬送装置１８から排出装置２２の移送装置６８へ処理済みの対象物Ｆが受け渡された後、移送装置６８を停止して対象物Ｆを中空内部５２に収容する（Ｓ７４）。負圧側開閉扉５７を閉鎖した後（Ｓ７８）、外気側開閉扉５５を開放することにより中空内部５２は大気圧に復帰する（Ｓ８０）。この際、閉鎖された負圧側開閉扉５７により、負圧作用部１６の負圧は保持される。排出装置２２の中空内部５２から対象物Ｆを取り出し（Ｓ８２）、外気側開閉扉５５を閉鎖する（Ｓ８４）。このように上記ステップ（Ｓ６０〜Ｓ８４）を繰り返して、負圧を保持しながら対象物の負圧作用部からの排出を行う。なお、投入装置２０による投入と排出装置２２による排出のタイミングを同期するようにしてもよい。   In a case where the processed object F that has been subjected to the negative pressure action process in the negative pressure action part 16 is discharged from the discharge port 34 of the negative pressure action part 16 to the outside air EX via the discharge apparatus 22, the discharge apparatus 22. A negative pressure is formed in the hollow interior 52 from the atmospheric pressure state by the negative pressure switching mechanism 58 (S112), and the object F is discharged from the transport device 18 to the hollow interior 52 of the negative pressure (S114). Thereafter, with the negative pressure side opening / closing door 57 closed, the hollow interior 52 is returned to the atmospheric pressure state by the negative pressure switching mechanism 58 (S116), and the object is taken out from the discharge device 22 to the outside air side (S118). The same operation as described above is repeated, and the plurality of objects F are intermittently discharged sequentially while maintaining the negative pressure of the negative pressure acting unit 16. Specifically, as shown in FIG. 5, the liquid supply valve 61 and the exhaust valve 63 are opened with both the negative pressure side opening / closing door 57 and the outside air side opening / closing door 55 of the discharge device 22 closed (S60). The pump 60 is driven to fill the hollow interior 52 of the discharge device 22 with the working fluid (S62). At the same time as the working liquid is filled in the hollow interior 52 and its liquid level rises, the air in the hollow interior 52 is exhausted through the exhaust valve 63. When the working liquid L is completely filled in the hollow interior 52 (S64), the water level sensor 66 senses and the pumping pump 44 is stopped (S66). The liquid supply valve 61 and the exhaust valve 63 of the discharge device 22 are closed (S68). When the negative pressure side open / close door 57 is opened in this state (S70), the discharge device 22 is provided at a position higher than the liquid level Lbf position where the working liquid that forms and holds the negative pressure is balanced. Then, the working fluid in the hollow interior 52 flows out to the negative pressure acting portion 16, and a negative pressure in a substantially vacuum state is formed in the hollow interior 52 (S72). At this time, since the outside air side opening / closing door 55 is closed, the negative pressure of the negative pressure forming portion 16 is maintained. Then, after the processed object F is delivered from the transport device 18 of the negative pressure operation unit 16 to the transfer device 68 of the discharge device 22, the transfer device 68 is stopped and the object F is accommodated in the hollow interior 52. (S74). After closing the negative pressure side opening / closing door 57 (S78), the hollow interior 52 returns to atmospheric pressure by opening the outside air opening / closing door 55 (S80). Under the present circumstances, the negative pressure of the negative pressure action part 16 is hold | maintained by the closed negative pressure side opening / closing door 57. FIG. The object F is taken out from the hollow interior 52 of the discharge device 22 (S82), and the outside air opening / closing door 55 is closed (S84). In this way, the above steps (S60 to S84) are repeated, and the object is discharged from the negative pressure acting part while maintaining the negative pressure. In addition, you may make it synchronize the timing of injection | throwing-in by the injection | throwing-in apparatus 20, and discharge | emission by the discharge | emission apparatus 22. FIG.

上述のように、負圧作用部１６の作用空間３０で、複数の対象物Ｆを連続的又は断続的に負圧作用させるとともに、負圧作用部１６の負圧を保持した状態で対象物Ｆを外気側ＥＸから負圧作用部１６へ投入及び負圧作用部１６から外気側へ排出することができ、効率良く大量の対象物を負圧作用することができる。負圧処理中に対象物から脱気された空気やガスにより負圧作用部１６の作用空間３０の真空度が低くなってくると真空センサ７２で感知し、負圧作用部の搬送装置１８を停止して、図２と同じフローチャートで作用空間３０は所定の負圧に復帰形成される。なお、本実施形態では食品等の固形物を単に脱気や含有水分を蒸発して乾燥するために負圧作用を利用する態様で説明したがそれに限るものではなく、例えば、食品、医薬品、化学製品、金属材料、電子・電気部品や半導体、機械部品、木製品の製造や加工、保存、乾燥処理等で負圧作用する際にも適用することができる。また、負圧処理装置は、例えば、機械や精密機器類、又は繊維製品の洗浄にも適用できる。   As described above, in the working space 30 of the negative pressure acting part 16, a plurality of objects F are continuously or intermittently subjected to negative pressure, and the object F is maintained in a state where the negative pressure of the negative pressure acting part 16 is maintained. Can be introduced into the negative pressure acting unit 16 from the outside air side EX and discharged from the negative pressure acting unit 16 to the outside air side, and a large amount of objects can be efficiently negatively acted on. When the degree of vacuum in the working space 30 of the negative pressure acting part 16 is lowered by the air or gas degassed from the object during the negative pressure processing, the vacuum sensor 72 senses it, and the transport device 18 of the negative pressure acting part is detected. After stopping, the working space 30 is returned to a predetermined negative pressure in the same flowchart as in FIG. In the present embodiment, the solid material such as food is simply degassed and the negative pressure action is used to evaporate and dry the contained water. However, the present invention is not limited to this. For example, food, medicine, chemical It can also be applied when negative pressure is applied in the manufacture, processing, storage, drying, etc. of products, metal materials, electronic / electric parts, semiconductors, machine parts, and wood products. Further, the negative pressure treatment apparatus can be applied to, for example, washing of machines, precision instruments, or textile products.

次に、図６ないし図８を参照しつつ、本発明の第２実施形態の負圧作用装置１０−２について説明する。上記した第１実施形態と同一構成、同一部材には、同一符号を付し、その詳細な説明は省略する。図６に示すように本実施形態では、貯液槽１２と、縦長管１４と、負圧作用部１６と、は上記実施形態と略同じ構成であるが、搬送装置１８と、投入装置２０と、排出装置２２の構成が上記実施形態とは異なっている。また、縦長管１４には、下端開閉弁２８の代わりに上部寄りの中間位置に開閉弁７６が設けられている。   Next, a negative pressure acting device 10-2 according to a second embodiment of the present invention will be described with reference to FIGS. The same configurations and the same members as those of the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted. As shown in FIG. 6, in the present embodiment, the liquid storage tank 12, the vertically long tube 14, and the negative pressure operation unit 16 have substantially the same configuration as that of the above embodiment, but the transport device 18, the charging device 20, and the like. The configuration of the discharge device 22 is different from that of the above embodiment. Further, the vertically long pipe 14 is provided with an opening / closing valve 76 at an intermediate position near the upper portion instead of the lower end opening / closing valve 28.

本実施形態では、搬送装置１８は、負圧作用部１６の内部で対象物を横方向に搬送するとともに、作用液の液面Ｌｂｆより上方に上昇して作用液とは接触しない位置と、下降して作用液中に没する位置と、に上下変位するように設けられている。搬送装置１８は、例えば、シリンダ等の上下駆動機構７８で支持されるとともに、図示しないガイド等を介して安定した状態で上下移動を案内される。搬送装置１８と上下駆動機構７８は、例えば、制御部７４に電気的に接続されて制御される。搬送装置１８は、通常は対象物Ｆを搬送しつつ作用液の液面Ｌｂｆより高い非接触の位置に配置させておき、予め設定した時間ごとに作用液中まで下降して対象物を所定の短時間だけ作用液Ｌｂｆに浸けて、再び液面より高い位置に上昇させるのを繰り返しながら対象物を排出口側まで搬送する。   In the present embodiment, the transport device 18 transports the object in the lateral direction inside the negative pressure acting unit 16, and rises above the liquid level Lbf of the working fluid and does not come into contact with the working fluid. Thus, it is provided so as to be displaced vertically to a position where it is immersed in the working liquid. The transport device 18 is supported by a vertical drive mechanism 78 such as a cylinder, for example, and is guided to move up and down in a stable state via a guide or the like (not shown). The transport device 18 and the vertical drive mechanism 78 are electrically connected to the control unit 74 and controlled, for example. The conveying device 18 is usually arranged at a non-contact position higher than the liquid level Lbf of the working liquid while conveying the object F, and descends into the working liquid at predetermined time intervals to move the object to a predetermined level. The object is conveyed to the discharge port side while being repeatedly immersed in the working liquid Lbf for a short time and then raised again to a position higher than the liquid level.

投入装置２０及び排出装置２２は、中空内部を形成したケースを備え、ケースの中空内部への液体の充填と排出を行わせることにより負圧作用部１６の負圧を保持する液体利用の負圧保持機構６４を有するが、詳細な構造が上記実施形態と異なっている。本実施形態では、図６に示すように、投入装置２０及び排出装置２２は、円筒状ケース８０と、円筒状ケース８０を複数の空間に分割して円筒状ケース中心に軸支された回転軸８６回りに回転する回転扉８２と、を含む。円筒状ケース８０は、例えば、円筒状周壁の外気側ＥＸに臨む一部分と負圧形成部１６に臨む一部分に対象物Ｆが通過する開口８８、８９が設けられている。回転扉８２は、例えば、回転軸８６から円筒状ケース内壁に向けて突出し回転軸周りに９０度間隔で配置された４つの羽根８４を有している。羽根８４は、円筒状ケース８０の中空空間を右上、右下、左上、左下の４つの同じ大きさの扇形状空間に分割しており、羽根先端側には円筒状ケース内壁に接摺して水密気密を保持するパッキンが取り付けられている。投入装置２０では、右上空間と左下空間が外気側及び負圧作用部とは気密閉鎖された閉鎖空間となり、左上空間が外気側ＥＸに臨む空間となり、右下空間が負圧作用部１６に臨む空間となっている。そして、回転扉８２が回転軸８６中心に右回りに９０度ずつ回転するごとに、これらの４つの空間の位置が切り換えられることとなる。一方、排出装置２２では、右上空間と左下空間が外気側及び負圧作用部とは気密閉鎖された閉鎖空間となり、右下空間が外気側ＥＸに臨む空間となり、左上空間が負圧作用部１６に臨む空間となっている。そして、回転扉８２が回転軸８６中心に左回りに９０度ずつ回転するごとに、これらの４つの空間の位置が切り換えられることとなる。さらに、投入装置２０及び排出装置２２の右上の閉鎖空間には、給液弁６０、６１を介設した分岐管３６１、３６２が接続されるとともに、排気弁６２、６３を介設した排気管が接続され、該閉鎖空間内部に貯液槽１２内の作用液をポンプ４４により充填できるようになっている。このケース内部の右上閉鎖空間内に作用液を充填して空気を排気した状態で排気弁、給液弁を閉鎖し、回転扉８２を９０度回転させて、負圧作用部１６に連通させると、作用液が負圧作用部１６内に流出されるとともに、負圧作用部１６の負圧が保持される。投入装置２０と排出装置２２は、それらの負圧作用部への投入位置と排出位置に応じて高さが異なって設定されている。なお、例えば、円筒状ケース８０の外気側ＥＸに臨む部分に作用液を貯留した液槽を連通して設け、給液弁の代わりに液槽から常に該空間に作用液が充填されるように構成してもよい。また、回転扉８２の羽根８４の数は、３枚以上であれば任意でよく、円筒状ケース８０内を少なくとも３つの空間に気密状態で分割するような構成であればよい。また、図６では、排出装置２２から排出された対象物Ｆを受けて搬送する外部搬送装置９０が設けられている。   The charging device 20 and the discharging device 22 include a case in which a hollow interior is formed, and a negative pressure using liquid that holds the negative pressure of the negative pressure operation unit 16 by filling and discharging the liquid into the hollow interior of the case. Although the holding mechanism 64 is provided, the detailed structure is different from that of the above embodiment. In the present embodiment, as shown in FIG. 6, the charging device 20 and the discharging device 22 include a cylindrical case 80 and a rotary shaft that is pivotally supported at the center of the cylindrical case by dividing the cylindrical case 80 into a plurality of spaces. A revolving door 82 that rotates around 86. The cylindrical case 80 is provided with openings 88 and 89 through which the object F passes, for example, in a part facing the outside air EX and a part facing the negative pressure forming part 16 of the cylindrical peripheral wall. The rotary door 82 has, for example, four blades 84 that protrude from the rotary shaft 86 toward the inner wall of the cylindrical case and are arranged at intervals of 90 degrees around the rotary shaft. The blade 84 divides the hollow space of the cylindrical case 80 into four fan-shaped spaces of the same size, upper right, lower right, upper left, and lower left, and touches the inner wall of the cylindrical case at the blade tip side. Packing that keeps watertight and airtight is attached. In the charging device 20, the upper right space and the lower left space are a closed space in which the outside air side and the negative pressure acting part are hermetically sealed, the upper left space is a space facing the outside air EX, and the lower right space faces the negative pressure acting part 16. It is a space. Each time the revolving door 82 rotates 90 degrees clockwise about the rotation axis 86, the positions of these four spaces are switched. On the other hand, in the discharge device 22, the upper right space and the lower left space are a closed space in which the outside air side and the negative pressure acting portion are hermetically sealed, the lower right space is a space facing the outside air EX, and the upper left space is the negative pressure acting portion 16. It is a space that faces. Each time the revolving door 82 rotates 90 degrees counterclockwise about the rotation shaft 86, the positions of these four spaces are switched. Further, branch pipes 361 and 362 having liquid supply valves 60 and 61 are connected to an upper right closed space of the charging device 20 and the discharge device 22, and exhaust pipes having exhaust valves 62 and 63 are provided. It is connected so that the working liquid in the liquid storage tank 12 can be filled in the closed space by the pump 44. When the working fluid is filled in the upper right closed space inside the case and the air is exhausted, the exhaust valve and the liquid supply valve are closed, and the rotary door 82 is rotated 90 degrees to communicate with the negative pressure acting portion 16. The working fluid flows out into the negative pressure acting part 16 and the negative pressure of the negative pressure acting part 16 is maintained. The charging device 20 and the discharging device 22 are set to have different heights depending on the charging position and the discharging position to the negative pressure acting portion. For example, a liquid tank storing the working liquid is provided in communication with the portion facing the outside air side EX of the cylindrical case 80 so that the space is always filled with the working liquid from the liquid tank instead of the liquid supply valve. It may be configured. Further, the number of blades 84 of the rotary door 82 may be arbitrary as long as it is three or more, and may be a configuration that divides the inside of the cylindrical case 80 into at least three spaces in an airtight state. In FIG. 6, an external transfer device 90 that receives and transfers the object F discharged from the discharge device 22 is provided.

次に、本実施形態に係る負圧作用装置１０−２の作用について説明する。上記第１実施形態と同じ操作及び制御を行って、負圧形成機構３８により負圧作用部１６に負圧の作用空間３０を形成保持させる。なお、本実施形態では、開閉弁７６が縦長管１６の中間位置に設けられているので、最初に負圧を形成する際には、縦長管１６中の開閉弁７６と貯液槽１２の作用液液面までの分の空気が残るので、同じ操作を２回行なうことで空気を略完全に排気して負圧作用部１６に略真空に近い負圧を形成する。負圧作用部１６の作用空間３０内に投入装置２０から対象物Ｆを投入する場合には、図７に示すように、大気圧状態の円筒状ケース８０の左上の外気側に臨む空間に対象物Ｆを投入する（Ｓ１３０）。回転扉８２を９０度回転すると対象物が入れられた空間は円筒状ケースの右上の閉鎖された空間に移動する。投入装置２０の給液弁６０、排気弁６２を開放した状態で（Ｓ１３２）、揚水ポンプ４４を駆動して該右上の閉鎖空間に作用液を充填し（Ｓ１３４）、該右上の閉鎖空間内に作用液が充満すると（Ｓ１３６）、揚水ポンプ４４を停止し（Ｓ１３８）、給液弁６０、排気弁６２を閉鎖する（Ｓ１４０）。その状態で回転扉８２を９０度回転すると、作用液が充填した空間は右下の負圧作用部１６と連通した空間に切り換えられ、作用液が負圧作用部１６内に流出すると同時に、対象物Ｆは負圧作用部１６の搬送装置に移動される（Ｓ１４２）。これにより、負圧作用部１６の負圧を保持できる。その後、回転扉８２を９０度回転させると、空になった右下の空間は負圧の状態で左下の閉鎖空間を経て（Ｓ１４４）、さらに回転扉８２を９０度回転させると１周して左上の空間に戻る。このような工程を繰り返して対象物を投入する。   Next, the operation of the negative pressure device 10-2 according to the present embodiment will be described. The same operation and control as in the first embodiment are performed, and the negative pressure working mechanism 30 forms and holds the negative pressure working space 30 by the negative pressure working mechanism 38. In the present embodiment, since the on-off valve 76 is provided at an intermediate position of the vertically long pipe 16, the action of the on-off valve 76 and the liquid storage tank 12 in the vertically long pipe 16 when the negative pressure is first formed. Since the air up to the liquid level remains, the same operation is performed twice, so that the air is almost completely exhausted, and a negative pressure close to a vacuum is formed in the negative pressure acting portion 16. When the object F is thrown into the working space 30 of the negative pressure acting part 16 from the throwing device 20, as shown in FIG. 7, the object is placed in the space facing the upper left outside air side of the cylindrical case 80 in the atmospheric pressure state. The object F is thrown in (S130). When the revolving door 82 is rotated 90 degrees, the space in which the object is placed moves to the closed space at the upper right of the cylindrical case. With the liquid supply valve 60 and the exhaust valve 62 of the charging device 20 opened (S132), the pumping pump 44 is driven to fill the upper right closed space with the working liquid (S134), and the upper right closed space is filled. When the working fluid is filled (S136), the pumping pump 44 is stopped (S138), and the liquid supply valve 60 and the exhaust valve 62 are closed (S140). When the rotary door 82 is rotated 90 degrees in this state, the space filled with the working fluid is switched to a space communicating with the lower right negative pressure acting portion 16, and at the same time the working fluid flows into the negative pressure acting portion 16. The thing F is moved to the conveying apparatus of the negative pressure action part 16 (S142). Thereby, the negative pressure of the negative pressure action part 16 can be hold | maintained. After that, when the revolving door 82 is rotated 90 degrees, the empty right lower space passes through the lower left closed space in a negative pressure state (S144), and when the revolving door 82 is further rotated 90 degrees, it makes one round. Return to the upper left space. Such a process is repeated and an object is thrown in.

負圧作用部１６に投入された対象物Ｆは、搬送装置１８を介して排出口３４に向かって搬送されながら、作用液に接触しない状態と作用液に接触した状態とを切り換えることによって、予め設定した所定の短時間だけ対象物を作用液に接触される。負圧作用部１６で負圧作用処理を受けた処理済みの対象物Ｆを、負圧作用部１６の排出口３４から排出装置２２を介して外気側ＥＸに排出する場合には、図８に示すように、上記同様に右上の閉鎖空間で排出装置２２の給液弁６１、排気弁６３を開放した状態で（Ｓ１５０）揚水ポンプ４４を駆動して右上の閉鎖空間内に作用液を充填し（Ｓ１５２）、作用液が充満したら（Ｓ１５４）揚水ポンプ４４を停止して（Ｓ１５６）、排出装置２２の給液弁６１、排気弁６３を閉鎖する（Ｓ１５８）。回転扉８２を左回りに９０度回転すると、作用液が充填された空間が左上に移動して負圧作用部１６に連通し、作用液が流出して負圧が保持される（Ｓ１６０）。負圧作用部１６の処理済みの対象物Ｆを受け取ると（Ｓ１６２）、回転扉８２を９０度回転して負圧状態で左下の閉鎖空間へ移動し（Ｓ１６４）、さらに回転扉８２を９０度回転すると、対象物Ｆが入った空間が外気側に連通して対象物Ｆを外側に排出する（Ｓ１６６）。このような工程を繰り返して対象物を排出する。本実施形態においても、負圧作用部１６の負圧を保持して対象物を断続的に投入、排出しながら負圧作用処理できると同時に、対象物を短時間だけ作用液に接触させて負圧処理することができる。   The object F thrown into the negative pressure acting unit 16 is conveyed in advance toward the discharge port 34 via the conveying device 18 and is switched in advance between a state where it does not contact the working liquid and a state where it contacts the working liquid. The object is brought into contact with the working fluid for a set short period of time. When the processed object F that has been subjected to the negative pressure action process in the negative pressure action part 16 is discharged from the discharge port 34 of the negative pressure action part 16 to the outside air side EX via the discharge device 22, FIG. As shown above, in the same manner as above, with the liquid supply valve 61 and the exhaust valve 63 of the discharge device 22 opened in the upper right closed space (S150), the pumping pump 44 is driven to fill the upper right closed space with the working liquid. (S152) When the working fluid is filled (S154), the pumping pump 44 is stopped (S156), and the liquid supply valve 61 and the exhaust valve 63 of the discharge device 22 are closed (S158). When the revolving door 82 is rotated 90 degrees counterclockwise, the space filled with the working fluid moves to the upper left and communicates with the negative pressure acting section 16, and the working fluid flows out and the negative pressure is maintained (S160). Upon receiving the processed object F of the negative pressure acting unit 16 (S162), the rotary door 82 is rotated 90 degrees to move to the lower left closed space in a negative pressure state (S164), and the rotary door 82 is further moved 90 degrees. When rotating, the space containing the object F communicates with the outside air side and discharges the object F to the outside (S166). Such a process is repeated to discharge the object. Also in this embodiment, negative pressure action processing can be performed while the negative pressure of the negative pressure action section 16 is maintained and the object is intermittently charged and discharged, and at the same time, the object is brought into contact with the working liquid for a short time to be negative. Pressure treatment can be performed.

次に、図９を参照しつつ、本発明の第３実施形態の負圧作用装置１０−３について説明する。上記した第２実施形態と同一構成、同一部材には、同一符号を付し、その詳細な説明は省略する。図９に示すように、本実施形態では、貯液槽１２と、縦長管１４と、負圧作用部１６と、投入装置２０と、排出装置２２と、は上記第２実施形態と略同じ構成であるが、搬送装置１８の構成が第２実施形態とは異なっている。なお、本実施形態では、投入装置２０と排出装置２２は、同じ高さ位置に設定されている。搬送装置１８は、投入口側と、搬出口側が作用液の液面より上方に位置され、中間位置が作用液中に没するように設けられている。よって、搬送装置１８で搬送される対象物Ｆは、搬送途中で短時間だけ作用液に接触されて負圧処理される。搬送装置１８には、対象物Ｆが落ちないように支持するフックや籠等の図示しない係止部材が設けられている。本実施形態でも第２実施形態同様の作用効果を奏しうる。なお、投入装置２０及び排出装置２２は、上記した第１ないし第３の実施形態の構成に限らず、負圧作用部の負圧を保持しながら対象物を投入又は排出できる構成であれば任意の構成でよい。   Next, a negative pressure acting device 10-3 according to a third embodiment of the present invention will be described with reference to FIG. The same configurations and the same members as those of the second embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted. As shown in FIG. 9, in the present embodiment, the liquid storage tank 12, the vertically long tube 14, the negative pressure operation unit 16, the input device 20, and the discharge device 22 are substantially the same as those in the second embodiment. However, the configuration of the transfer device 18 is different from that of the second embodiment. In the present embodiment, the input device 20 and the discharge device 22 are set at the same height position. The conveying device 18 is provided such that the inlet side and the outlet side are positioned above the liquid level of the working liquid and the intermediate position is submerged in the working liquid. Therefore, the object F conveyed by the conveying device 18 is brought into contact with the working liquid for a short time during the conveyance and is subjected to negative pressure processing. The conveying device 18 is provided with a locking member (not shown) such as a hook or a hook for supporting the object F so as not to fall. In this embodiment, the same operational effects as those of the second embodiment can be obtained. Note that the input device 20 and the discharge device 22 are not limited to the configurations of the first to third embodiments described above, and any configuration can be used as long as the target can be input or discharged while maintaining the negative pressure of the negative pressure operation unit. The configuration of

以上説明した本発明の負圧作用装置は、上記した実施形態のみの構成に限定されるものではなく、特許請求の範囲に記載した本発明の本質を逸脱しない範囲において、任意の改変を行ってもよい。   The negative pressure operating device of the present invention described above is not limited to the configuration of only the above-described embodiment, and may be arbitrarily modified without departing from the essence of the present invention described in the claims. Also good.

本発明の負圧作用装置は、例えば、食品、医薬品、化学製品、金属材料、電子・電気部品や半導体、機械部品、木製品、繊維製品の製造や加工、保存、洗浄、乾燥処理等に利用できる。   The negative pressure device of the present invention can be used for manufacturing, processing, storing, washing, drying processing, etc. of foods, pharmaceuticals, chemical products, metal materials, electronic / electric parts, semiconductors, mechanical parts, wooden products, textile products, etc. .

１０ 負圧作用装置
１２ 貯液槽
１４ 縦長管
１６ 負圧作用部
１８ 搬送装置
２０ 投入装置
２２ 排出装置
２４ 下端開口
３０ 作用空間
３２ 投入口
３４ 排出口
３６ 充填経路
４４ 揚水ポンプ
５２ 中空内部
５４、５５ 外気側開閉扉
５６、５７ 負圧側開閉扉
５８ 負圧切換機構
６０、６１ 給液弁
６２、６３ 排気弁
６８ 移送装置
８０ 円筒状ケース
８２ 回転扉
８４ 羽根
Ｌ 作用液
ＥＸ 外気側
DESCRIPTION OF SYMBOLS 10 Negative pressure action apparatus 12 Liquid storage tank 14 Vertically long pipe 16 Negative pressure action part 18 Conveyance apparatus 20 Input apparatus 22 Discharge apparatus 24 Lower end opening 30 Working space 32 Input opening 34 Discharge opening 36 Filling path 44 Pumping pump 52 Hollow inside 54, 55 Outside open / close door 56, 57 Negative pressure open / close door 58 Negative pressure switching mechanism 60, 61 Fluid supply valve 62, 63 Exhaust valve 68 Transfer device 80 Cylindrical case 82 Revolving door 84 Blade L Working fluid EX Outside air side

Claims (8)

液面を大気に接触させた状態で作用液を貯留する貯液槽と、
下端開口を貯液槽内の作用液中に浸して配置された中空の縦長管と、
縦長管の上端に連通接続して貯液槽から所定高さ位置に設けられ、対象物が入れられる負圧の作用空間が内部に形成された負圧作用部であって、縦長管の下端開口を閉鎖した状態で該縦長管とは別経路で貯液槽から作用液を負圧作用部内及び縦長管内に充填させた後、縦長管の下端開口を開放し、作用空間に負圧を形成保持させる負圧作用部と、
負圧作用部の作用空間に設置され、該作用空間の負圧を形成保持する作用液に対象物を接触させない状態、又は短時間だけ接触させた状態で、作用空間への投入口側から排出口側に向けて対象物を搬送する搬送装置と、
負圧作用部の投入口側に設けられ、負圧作用部の負圧を保持させた状態で外気側から負圧作用部内に対象物を投入する負圧保持機能付き投入装置と、
負圧作用部の排出口側に設けられ、負圧作用部の負圧を保持させた状態で、かつ負圧作用部内の負圧作用済みの対象物を作用液とは接触させない状態で外気側に取り出す負圧保持機能付き排出装置と、を備えたことを特徴とする負圧作用装置。 A reservoir for storing the working fluid in a state where the liquid level is in contact with the atmosphere;
A hollow longitudinal tube arranged with the lower end opening immersed in the working liquid in the liquid storage tank;
A negative pressure working portion that is connected to the upper end of the vertical pipe and is provided at a predetermined height position from the liquid storage tank, and in which a negative pressure working space into which an object is placed is formed, and the lower end opening of the vertical pipe In a state where the vertical tube is closed, the working fluid is filled into the negative pressure working part and the vertical tube from the liquid storage tank through a different path, and then the lower end opening of the vertical tube is opened to maintain a negative pressure in the working space. A negative pressure acting part,
It is installed in the working space of the negative pressure acting part, and is discharged from the inlet side to the working space in a state where the target object is not brought into contact with the working liquid that forms and holds the negative pressure in the working space, or in a state where it is brought into contact with the working space for a short time. A transport device for transporting an object toward the exit side;
A charging device with a negative pressure holding function that is provided on the charging port side of the negative pressure acting part, and that throws an object into the negative pressure acting part from the outside air side while holding the negative pressure of the negative pressure acting part;
Provided on the discharge port side of the negative pressure acting part, while maintaining the negative pressure of the negative pressure acting part, and in the state where the negative pressure acted object in the negative pressure acting part is not in contact with the working fluid side And a discharge device with a negative pressure holding function to be taken out. 投入装置と排出装置は、対象物が入れられる中空内部を形成したケースを備え、ケースの中空内部への液体の充填と排出を行わせることにより負圧作用部の負圧を保持する液体利用の負圧保持機構を有することを特徴とする請求項１記載の負圧作用装置。   The charging device and the discharging device are provided with a case in which a hollow interior into which an object is to be placed is formed, and the liquid is used to maintain the negative pressure of the negative pressure acting part by filling and discharging the liquid into the hollow interior of the case. The negative pressure acting device according to claim 1, further comprising a negative pressure holding mechanism. 投入装置と排出装置は、ケースの中空内部を、外気側及び負圧作用部とは気密閉鎖した態様と、外気側と連通した態様と、負圧作用部と連通した態様と、に切り換え可能に設けられ、
該中空内部を外気側及び負圧作用部とは閉鎖した態様で作用液を充填した後、負圧作用部と連通して作用液を排出することにより、負圧形成部の負圧を保持させることを特徴とする請求項２記載の負圧作用装置。 The charging device and the discharging device can be switched between a hollow interior of the case between an external air side and a negative pressure acting part, an airtight chained state, an aspect communicating with the outside air side, and an aspect communicating with the negative pressure acting part. Provided,
After filling the hollow interior with the working air in such a manner that the outside air side and the negative pressure acting portion are closed, the negative pressure forming portion is held at a negative pressure by discharging the working fluid in communication with the negative pressure acting portion. The negative pressure action device according to claim 2, wherein: 投入装置と排出装置はそれぞれ、対象物が入れられる中空内部を形成したケースと、
閉時には中空内部と負圧作用部、又は中空内部と外気側を気密閉鎖するとともに、開時には対象物が通過可能に中空内部と負圧作用部、又は中空内部と外気側とを連通させる複数の開閉扉と、
中空内部と負圧作用部とを連通させる際に中空内部に負圧を形成する状態と、中空内部と外気側とを連通させる際に中空内部を大気圧とする状態とを選択的に切り換える負圧切換機構と、を有することを特徴とする請求項１ないし３のいずれかに記載の負圧作用装置。 Each of the charging device and the discharging device has a case in which a hollow interior into which an object is put is formed,
When closed, the hollow interior and the negative pressure acting part, or the hollow inside and the outside air side are hermetically sealed, and when opened, the hollow interior and the negative pressure acting part or the hollow inside and the outside air side are communicated so that the object can pass through. A door,
A negative switch that selectively switches between a state in which a negative pressure is formed in the hollow interior when the hollow interior communicates with the negative pressure acting portion and a state in which the hollow interior is at atmospheric pressure when the hollow interior communicates with the outside air side. The negative pressure acting device according to claim 1, further comprising a pressure switching mechanism. 投入装置と排出装置は、貯液槽から所定の高さ位置に設置され、
負圧切換機構は、ケースの中空内部に貯液槽内の作用液を充填させるための経路に介設された給液弁と、
中空内部から空気を排気する排気弁と、
開時に中空内部の作用液を負圧作用部に排出させるように設けられた負圧作用部側の開閉扉と、を含み、
給液弁及び排気弁を開放して充填経路を介して中空内部に作用液を充填した後、給液弁及び排気弁を閉鎖し、負圧作用部側の開閉扉のみを開くことにより、中空内部に負圧を形成することを特徴とする請求項４記載の負圧作用装置。 The charging device and the discharging device are installed at a predetermined height from the liquid storage tank,
The negative pressure switching mechanism includes a liquid supply valve interposed in a path for filling the working liquid in the liquid storage tank into the hollow interior of the case,
An exhaust valve for exhausting air from the hollow interior;
An open / close door on the negative pressure acting part side provided to discharge the working fluid inside the hollow to the negative pressure acting part when opened,
Open the liquid supply valve and exhaust valve and fill the hollow interior with working fluid via the filling path, then close the liquid supply valve and exhaust valve, and open only the open / close door on the negative pressure operation side to 5. The negative pressure acting device according to claim 4, wherein a negative pressure is formed inside. 負圧作用部に負圧を形成するための機構は負圧作用部内に貯液槽内の作用液を充填させる経路に設けられたポンプを含み、
該経路はポンプの下流側で分岐され投入装置と排出装置とにそれぞれ給液弁を介して接続されたことを特徴とする請求項５記載の負圧作用装置。 The mechanism for forming the negative pressure in the negative pressure acting part includes a pump provided in a path for filling the working liquid in the liquid storage tank in the negative pressure acting part,
6. The negative pressure operating device according to claim 5, wherein the path is branched downstream of the pump and connected to the charging device and the discharging device via a liquid supply valve. 投入装置及び／又は排出装置には、対象物を搬送し、負圧作用部内の搬送装置と受け渡しする移送装置が設置されたことを特徴とする請求項１ないし６のいずれかに記載の負圧作用装置。   The negative pressure according to any one of claims 1 to 6, wherein the charging device and / or the discharging device is provided with a transfer device for transferring an object and transferring it to and from the transfer device in the negative pressure operating section. Working device. 投入装置と排出装置はそれぞれ、円筒状周壁の外気側に臨む一部分と負圧形成部に臨む一部分に対象物が通過する開口が設けられた円筒状ケースと、
円筒状ケース中心に軸支された回転軸からケース内壁に向けて突出しケース内部を外気側及び負圧作用部とは気密閉鎖された閉鎖空間と外気側に臨む空間と負圧作用部に臨む空間とに分割して水密気密状態を保持して仕切る複数の羽根を含む回転扉と、を含み、
複数の羽根で仕切られた閉鎖空間に作用液を充填させた状態で回転扉を回転軸周りに回転させることにより負圧作用部の負圧を保持させることを特徴とする請求項１ないし３のいずれかに記載の負圧作用装置。
Each of the charging device and the discharging device has a cylindrical case provided with an opening through which an object passes in a part facing the outside air side of the cylindrical peripheral wall and a part facing the negative pressure forming part,
Projected from the rotating shaft pivotally supported at the center of the cylindrical case toward the inner wall of the case, the inside of the case is closed to the outside air side and the negative pressure acting part, the closed space that is hermetically sealed, the space facing the outside air side, and the space facing the negative pressure acting part A revolving door including a plurality of blades that are divided into
4. The negative pressure of the negative pressure acting part is maintained by rotating the rotary door around the rotation axis in a state where the working liquid is filled in a closed space partitioned by a plurality of blades. The negative pressure action apparatus in any one.
JP2011071311A 2011-03-29 2011-03-29 Negative pressure device Expired - Fee Related JP4771268B1 (en)

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CN107503991A (en) * 2017-09-26 2017-12-22 眉山中车制动科技股份有限公司 A kind of automatic liquid injection device

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CN112435952A (en) * 2020-10-23 2021-03-02 中国电子科技集团公司第二十九研究所 Device for separating chip from elastic gel membrane

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WO2010018642A1 (en) * 2008-08-11 2010-02-18 Midori Norio Liquid deaerator

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WO2009157094A1 (en) * 2008-06-26 2009-12-30 Midori Norio Method and device for producing a vacuum intermittently
WO2010018642A1 (en) * 2008-08-11 2010-02-18 Midori Norio Liquid deaerator

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Publication number Priority date Publication date Assignee Title
CN107503991A (en) * 2017-09-26 2017-12-22 眉山中车制动科技股份有限公司 A kind of automatic liquid injection device

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