JP4703565B2 - ターボ分子ポンプの軸受支持構造 - Google Patents
ターボ分子ポンプの軸受支持構造 Download PDFInfo
- Publication number
- JP4703565B2 JP4703565B2 JP2006528511A JP2006528511A JP4703565B2 JP 4703565 B2 JP4703565 B2 JP 4703565B2 JP 2006528511 A JP2006528511 A JP 2006528511A JP 2006528511 A JP2006528511 A JP 2006528511A JP 4703565 B2 JP4703565 B2 JP 4703565B2
- Authority
- JP
- Japan
- Prior art keywords
- sleeve
- bearing
- molecular pump
- support structure
- turbo molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/059—Roller bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
- F16C35/04—Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
- F16C35/06—Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
- F16C35/07—Fixing them on the shaft or housing with interposition of an element
- F16C35/077—Fixing them on the shaft or housing with interposition of an element between housing and outer race ring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C37/00—Cooling of bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Support Of The Bearing (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Description
2、2a ハウジング(中間ハウジング、下部ハウジング)
2b1 スリーブ挿通穴
4、5 軸受(玉軸受)
6、7 スリーブ(第1スリーブ、第2スリーブ)
6a、7a 内側スリーブ
6b、7b 外側スリーブ
6c、7c ゲル層
6a2、6d、6e、7a2、7d、7e 弾性体(Oリング)
8 軸受予圧用ばね
Claims (5)
- 上下の転がり軸受によってロータの回転軸を軸支する方式のターボ分子ポンプにおいて、前記上下の転がり軸受を各々内外二重の円筒構造からなる上下のスリーブ内にそれぞれ支承し、これら上下のスリーブを構成する各内側スリーブと外側スリーブとの間に間隙を設けて、該間隙に熱伝導ゲルを充填して円環状のゲル層を形成すると共に、該ゲル層の両端部にそれぞれOリング等の弾性体を配置して前記ゲル層を密封したことを特徴とするターボ分子ポンプの軸受支持構造。
- 前記内側スリーブと前記外側スリーブとは、前記ゲル層の両端部に配置した前記Oリング等の弾性体の一方又は双方の介在により、これら内側スリーブと外側スリーブとの間に所定の間隔を保持するように形成したことを特徴とする請求項1に記載のターボ分子ポンプの軸受支持構造。
- 前記上下の転がり軸受が、これら各軸受を支承する上下の前記二重のスリーブの内の各内側スリーブに各軸受の外輪の外周部及び片端面部を当接させて嵌入しており、これら上下のスリーブのいずれか一方の外側スリーブはハウジングに固定され、他方の外側スリーブは前記ハウジング内に設けたスリーブ挿通穴内に軸方向の摺動自在に嵌入されており、更に前記上下の軸受に軸方向の力を作用する軸受予圧用ばねを具備したことを特徴とする請求項1又は請求項2に記載のターボ分子ポンプの軸受支持構造。
- 前記ゲル状体を、円環状に形成した可撓性を有する薄肉の袋内に密封して、前記内側スリーブと前記外側スリーブとの間に配置したことを特徴とする請求項1乃至請求項3のいずれか1に記載のターボ分子ポンプの軸受支持構造。
- 前記熱伝導ゲルは、少なくとも1W/m・kの熱伝導率を有するものとしたことを特徴とする請求項1乃至請求項4のいずれか1に記載のターボ分子ポンプの軸受支持構造。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006528511A JP4703565B2 (ja) | 2004-06-25 | 2005-06-20 | ターボ分子ポンプの軸受支持構造 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004188080 | 2004-06-25 | ||
JP2004188080 | 2004-06-25 | ||
PCT/JP2005/011244 WO2006001243A1 (ja) | 2004-06-25 | 2005-06-20 | ターボ分子ポンプの軸受支持構造 |
JP2006528511A JP4703565B2 (ja) | 2004-06-25 | 2005-06-20 | ターボ分子ポンプの軸受支持構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2006001243A1 JPWO2006001243A1 (ja) | 2008-04-17 |
JP4703565B2 true JP4703565B2 (ja) | 2011-06-15 |
Family
ID=35781726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006528511A Expired - Fee Related JP4703565B2 (ja) | 2004-06-25 | 2005-06-20 | ターボ分子ポンプの軸受支持構造 |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1760319A4 (ja) |
JP (1) | JP4703565B2 (ja) |
CN (1) | CN100432446C (ja) |
WO (1) | WO2006001243A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102269176A (zh) * | 2011-07-19 | 2011-12-07 | 美的集团有限公司 | 一种塔扇轴承组件结构 |
KR200476603Y1 (ko) * | 2014-08-19 | 2015-03-12 | 김강돈 | 송풍기의 모터 축 지지장치 |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0701609D0 (en) | 2007-01-29 | 2007-03-07 | Boc Group Plc | Vacuum pump |
DE102007037792A1 (de) * | 2007-08-10 | 2009-02-12 | Oerlikon Leybold Vacuum Gmbh | Pumpen-Lageranordnung |
JP5538768B2 (ja) * | 2009-08-06 | 2014-07-02 | 株式会社大阪真空機器製作所 | 分子ポンプの軸受放熱構造 |
CA3035508A1 (en) | 2011-07-13 | 2013-01-17 | Fisher & Paykel Healthcare Limited | Impeller and motor assembly |
JP5919745B2 (ja) * | 2011-11-15 | 2016-05-18 | 株式会社島津製作所 | 真空ポンプ |
DE102011119907A1 (de) * | 2011-12-01 | 2013-06-06 | Pfeiffer Vacuum Gmbh | Wälzlager für eine Vakuumpumpe |
CN104185736B (zh) * | 2012-04-04 | 2016-12-28 | 株式会社岛津制作所 | 真空泵 |
GB2507501B (en) | 2012-10-30 | 2015-07-15 | Edwards Ltd | Vacuum pump |
GB2507500B (en) * | 2012-10-30 | 2015-06-17 | Edwards Ltd | Vacuum pump |
DE212013000256U1 (de) | 2012-12-18 | 2015-07-22 | Fisher & Paykel Healthcare Ltd. | Impeller und Rotor Baugruppe |
DE202013002018U1 (de) * | 2013-03-01 | 2014-06-02 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
DE202013008470U1 (de) | 2013-09-24 | 2015-01-08 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
FR3016294B1 (fr) * | 2014-01-14 | 2019-08-02 | Airfan | Procede d'optimisation thermique et phonique d'un moteur de production regule de gaz et appareil d'assistance respiratoire correspondant |
JP6458414B2 (ja) | 2014-09-10 | 2019-01-30 | 株式会社島津製作所 | 真空ポンプ |
JP6269452B2 (ja) * | 2014-11-19 | 2018-01-31 | 株式会社豊田自動織機 | ターボ機械 |
CN104632691A (zh) * | 2015-02-11 | 2015-05-20 | 中国工程物理研究院机械制造工艺研究所 | 一种涡轮分子泵轴承座 |
JP6772721B2 (ja) * | 2015-10-23 | 2020-10-21 | 株式会社島津製作所 | 真空ポンプ |
JP6276810B2 (ja) | 2016-08-04 | 2018-02-07 | Ntn株式会社 | エアタービン駆動スピンドル |
CN210135114U (zh) * | 2016-08-26 | 2020-03-10 | 依必安-派特圣乔根有限责任两合公司 | 通风设备和风扇 |
AU2018256754B2 (en) * | 2017-04-23 | 2024-05-30 | Fisher & Paykel Healthcare Limited | Breathing assistance apparatus |
CN108678975A (zh) * | 2018-07-17 | 2018-10-19 | 中国工程物理研究院机械制造工艺研究所 | 一种抗振动分子泵 |
CN110985537A (zh) * | 2019-12-31 | 2020-04-10 | 湖南崇德工业科技有限公司 | 立式推力滑动轴承的抗震装置 |
CN111102233A (zh) * | 2020-01-07 | 2020-05-05 | 北京中科科仪股份有限公司 | 一种轴承安装结构及导热脂加注方法 |
GB2617843B (en) * | 2022-04-20 | 2024-05-08 | Edwards Ltd | Vacuum pump damping arrangements |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6332392Y2 (ja) * | 1983-10-31 | 1988-08-29 | ||
JPH018711Y2 (ja) * | 1984-03-26 | 1989-03-08 | ||
JPH01124426U (ja) * | 1988-02-18 | 1989-08-24 | ||
JPH0254945U (ja) * | 1988-10-14 | 1990-04-20 | ||
JPH084761A (ja) * | 1994-06-16 | 1996-01-09 | Mitsubishi Heavy Ind Ltd | 軸受用ダンパ |
JP2003172288A (ja) * | 2001-12-05 | 2003-06-20 | Osaka Vacuum Ltd | 分子ポンプの軸受支持機構 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0196352A1 (de) * | 1985-04-04 | 1986-10-08 | Leybold Aktiengesellschaft | Turbomolekular-Vakuumpumpe mit einem Rotor und mindestens einem Wälzlager |
JPH02103980A (ja) * | 1988-10-13 | 1990-04-17 | Fanuc Ltd | 気体レーザ発振装置 |
DE3926577A1 (de) * | 1989-08-11 | 1991-02-14 | Leybold Ag | Vakuumpumpe mit einem rotor und mit unter vakuum betriebenen rotorlagerungen |
JP3190281B2 (ja) * | 1997-02-24 | 2001-07-23 | ミネベア株式会社 | インナロータタイプ回転機 |
JPH10288195A (ja) * | 1997-04-16 | 1998-10-27 | Shimadzu Corp | 回転機械 |
SE512770C2 (sv) * | 1998-02-19 | 2000-05-08 | Alfa Laval Ab | Stödanordning |
-
2005
- 2005-06-20 JP JP2006528511A patent/JP4703565B2/ja not_active Expired - Fee Related
- 2005-06-20 EP EP05751121A patent/EP1760319A4/en not_active Withdrawn
- 2005-06-20 WO PCT/JP2005/011244 patent/WO2006001243A1/ja not_active Application Discontinuation
- 2005-06-20 CN CNB2005800211228A patent/CN100432446C/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6332392Y2 (ja) * | 1983-10-31 | 1988-08-29 | ||
JPH018711Y2 (ja) * | 1984-03-26 | 1989-03-08 | ||
JPH01124426U (ja) * | 1988-02-18 | 1989-08-24 | ||
JPH0254945U (ja) * | 1988-10-14 | 1990-04-20 | ||
JPH084761A (ja) * | 1994-06-16 | 1996-01-09 | Mitsubishi Heavy Ind Ltd | 軸受用ダンパ |
JP2003172288A (ja) * | 2001-12-05 | 2003-06-20 | Osaka Vacuum Ltd | 分子ポンプの軸受支持機構 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102269176A (zh) * | 2011-07-19 | 2011-12-07 | 美的集团有限公司 | 一种塔扇轴承组件结构 |
CN102269176B (zh) * | 2011-07-19 | 2013-03-27 | 美的集团股份有限公司 | 一种塔扇轴承组件结构 |
KR200476603Y1 (ko) * | 2014-08-19 | 2015-03-12 | 김강돈 | 송풍기의 모터 축 지지장치 |
Also Published As
Publication number | Publication date |
---|---|
EP1760319A4 (en) | 2010-07-07 |
WO2006001243A1 (ja) | 2006-01-05 |
CN100432446C (zh) | 2008-11-12 |
JPWO2006001243A1 (ja) | 2008-04-17 |
CN1973134A (zh) | 2007-05-30 |
EP1760319A1 (en) | 2007-03-07 |
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