JP3152127B2 - Y-branch waveguide type optical tap - Google Patents
Y-branch waveguide type optical tapInfo
- Publication number
- JP3152127B2 JP3152127B2 JP26982195A JP26982195A JP3152127B2 JP 3152127 B2 JP3152127 B2 JP 3152127B2 JP 26982195 A JP26982195 A JP 26982195A JP 26982195 A JP26982195 A JP 26982195A JP 3152127 B2 JP3152127 B2 JP 3152127B2
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- Prior art keywords
- waveguide
- branch
- width
- tapered
- input
- Prior art date
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Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光タップに関し、
特にＹ分岐導波路型光タップに関する。TECHNICAL FIELD The present invention relates to an optical tap.
In particular, it relates to a Y-branch waveguide type optical tap.
【０００２】[0002]
【従来の技術】図６（ａ）は従来の光タップの平面図を
示し、図６（ｂ）はその部分拡大図である。2. Description of the Related Art FIG. 6A is a plan view of a conventional optical tap, and FIG. 6B is a partially enlarged view thereof.
【０００３】図６（ａ）及び図６（ｂ）に示すように、
光タップは、入力導波路６１と、入力導波路６１に接続
され、２つに分岐された分岐導波路６２及び分岐導波路
６３とで構成されている。As shown in FIGS. 6A and 6B,
The optical tap includes an input waveguide 61 and a branch waveguide 62 and a branch waveguide 63 which are connected to the input waveguide 61 and are branched into two.
【０００４】入力導波路６１及び分岐導波路６２は、導
波路幅Ｗが等しく、かつ同一直線上に配置されている。
分岐導波路６３は、分岐導波路６２から角度θ方向に分
岐され導波路幅Ｗ１は分岐導波路６２の導波路幅Ｗより
狭く形成されている。入力導波路６１から入射された光
は、分岐導波路６２、６３に導かれる。導かれた光は、
分岐導波路６３方向の光分布が徐々に拡げられる。光は
直進する性質があるので、拡げられた光の大部分は分岐
導波路６２を伝搬し、分岐導波路６３の導波路幅Ｗ１及
び角度θに応じた光量の光のみが分岐されていく。この
ような非対称Ｙ分岐導波路構造により光タップが構成さ
れている。The input waveguide 61 and the branch waveguide 62 have the same waveguide width W and are arranged on the same straight line.
The branch waveguide 63 is branched from the branch waveguide 62 in the angle θ direction, and the waveguide width W1 is formed to be narrower than the waveguide width W of the branch waveguide 62. Light incident from the input waveguide 61 is guided to the branch waveguides 62 and 63. The guided light is
The light distribution in the direction of the branch waveguide 63 is gradually expanded. Since the light has the property of traveling straight, most of the spread light propagates through the branch waveguide 62, and only light having a light amount corresponding to the waveguide width W1 and the angle θ of the branch waveguide 63 is branched. An optical tap is constituted by such an asymmetric Y-branch waveguide structure.
【０００５】[0005]
【発明が解決しようとする課題】ところで上述した従来
の光タップにおいては、分岐導波路６２、６３の分岐点
６４付近の微細加工を行うことができないので、分岐点
６４になまり６５が形成されてしまう。このため放射損
失の増加、分岐比のばらつき等の問題点があった。放射
損失を低減するため分岐導波路６３の角度θを小さくす
るとなまり６５が大きくなり、放射損失が増加したりす
る。これとは逆に、角度θを大きくすると、分岐点６４
の導波路幅が広くなり、導波路幅Ｗにおけるカットオフ
波長付近において単一モードでなくなり高次モードが発
生する．このため、カットオフ付近の分岐比にばらつき
が生じる。However, in the above-described conventional optical tap, since fine processing near the branch point 64 of the branch waveguides 62 and 63 cannot be performed, the rounding 65 is formed at the branch point 64. I will. For this reason, there have been problems such as an increase in radiation loss and variation in branching ratio. If the angle θ of the branch waveguide 63 is reduced in order to reduce the radiation loss, the roundness 65 increases and the radiation loss increases. Conversely, when the angle θ is increased, the branch point 64
The width of the waveguide becomes wider, and a single mode does not occur near the cutoff wavelength in the waveguide width W, and a higher-order mode occurs. For this reason, variation occurs in the branching ratio near the cutoff.
【０００６】また、光回路構造的に入力導波路６１を伝
搬してきた偶モードの界分布をもつ光は、導波路幅の非
対称な分岐導波路６２、６３の分岐点６４に入射するた
め、分岐導波路６２、６３には奇モードの界分布が発生
し、偶モードとモード結合を起こすため、広波長帯城に
わたり一定の分岐比が得られにくくなる。Further, light having an even mode field distribution, which has propagated through the input waveguide 61 in an optical circuit structure, enters the branch point 64 of the branch waveguides 62 and 63 having asymmetric waveguide widths. Since an odd mode field distribution is generated in the waveguides 62 and 63 and mode coupling occurs with the even mode, it is difficult to obtain a constant branching ratio over a wide wavelength band.
【０００７】以上のような問題点があるため、非対称な
Ｙ分岐導波路を用いた光タップは、光回路作製における
歩留まりの低下を招くという問題があった。[0007] Because of the above-mentioned problems, there is a problem that an optical tap using an asymmetric Y-branch waveguide causes a decrease in the yield in manufacturing an optical circuit.
【０００８】そこで本発明の目的は、放射損失が小さ
く、かつ広波長帯域にわたり一定の分岐比が得られ、製
造時の分岐比ばらつきが少ないＹ分岐導波路型光タップ
を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a Y-branch waveguide type optical tap which has a small radiation loss, a constant branching ratio over a wide wavelength band, and a small variation in branching ratio during manufacturing.
【０００９】[0009]
【課題を解決するための手段】上記目的を達成するため
に本発明は、入力導波路と、入力導波路の出力側に接続
され入力側から出力側にわたって幅が左右対称に拡がっ
たテーパ導波路と、テーパ導波路の出力側に接続され徐
々にテーパ状に拡がった２つの分岐導波路とを備え、２
つの分岐導波路の導波路幅をテーパ導波路側付近で等し
くすると共に、その中間付近で異なるようにしたもので
ある。To achieve the above object, the present invention provides an input waveguide, and a tapered waveguide connected to the output side of the input waveguide and having a width symmetrically widened from the input side to the output side. If, Xu is connected to the output side of the tapered waveguide
S in a two branch waveguides spread tapered, 2
Equal the waveguide width of the two branch waveguides near the tapered waveguide side.
In addition , the difference is made near the middle.
【００１０】上記構成に加え本発明は、出力側付近にお
いて導波路幅が等しくなるようにしたものである。[0010] The present invention in addition to the above arrangement is that as the waveguide width is equal to have your <br/> near the output side.
【００１１】上記構成に加え本発明は、２つの分岐導波
路を、テーパ導波路との接続部において互いに接するこ
となく間隔を隔てて接続したものである。[0011] In addition to the above configuration, the present invention is such that two branch waveguides are connected at an interval without being in contact with each other at a connection portion with the tapered waveguide.
【００１２】上記構成に加え本発明は、２つの分岐導波
路を、テーパ導波路側で導波路幅が入力導波路幅より狭
く、出力側で入力導波路幅と等しくなるように構成した
ものである。[0012] In addition to the above structure present invention, the two branch waveguides, the waveguide width is narrower than the input waveguide width tapered waveguide side, and configured to be equal to the input waveguide width at the output <br />.
【００１３】上記構成に加え本発明は、２つの分岐導波
路形状を、直線のテーパ導波路、単一曲率の曲がりテー
パ導波路、正弦曲線及び余弦曲線のテーパ導波路等で形
成したものである。In addition to the above configuration, the present invention provides two branch waveguides formed by a linear taper waveguide, a single curvature bent taper waveguide, a sine curve and a cosine curve taper waveguide, and the like. .
【００１４】上記構成によって、偶モード界分布の光が
入力導波路を伝搬すると、入力側の幅の等しい分岐導波
路の中心に入力するので、奇モードが発生すること無く
偶モードのみの界分布として両分岐導波路内を伝搬す
る。２つの分岐導波路幅の内、導波路幅の広い方に多く
の光が分岐するので、光の界分布は左右非対称な偶モー
ドとなる。分岐導波路が互いに離れるに従い、左右非対
象となった偶モードの界分布は、それぞれの分岐導波路
に分岐して光タップとして機能する。According to the above configuration, when the light having the even mode field distribution propagates through the input waveguide, the light enters the center of the branch waveguide having the same width on the input side, so that the even mode only field distribution does not occur. And propagates in both branch waveguides. Of the two branch waveguide widths, a large amount of light branches to the wider waveguide width, so that the field distribution of the light is an even mode that is bilaterally asymmetric. As the branch waveguides move away from each other, the field distribution of the even mode, which becomes symmetrical left and right, branches into the respective branch waveguides and functions as an optical tap.
【００１５】したがって放射損失が小さく、広波長帯城
にわたって分岐比ばらつきの少ない、製造誤差の少ない
Ｙ分岐導波路型光タップが得られる。Accordingly, a Y-branch waveguide type optical tap having a small radiation loss, a small branching ratio variation over a wide wavelength band, and a small manufacturing error can be obtained.
【００１６】[0016]
【発明の実施の形態】以下、本発明の実施の形態を添付
図面に基づいて詳述する。Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
【００１７】図１（ａ）は本発明のＹ分岐導波路型光タ
ップの平面図であり、図１（ｂ）はその（楕円内）部分
拡大図である。FIG. 1A is a plan view of a Y-branch waveguide optical tap according to the present invention, and FIG. 1B is a partially enlarged view (within an ellipse).
【００１８】入力導波路１１の出力側には、入力側から
出力側にわたって導波路幅が広がったテーパ導波路１０
が接続されている。テーパ導波路１０の出力側には２つ
の分岐導波路１３、１４が接続されている。これら入力
導波路１１、テーパ導波路１０及び分岐導波路１３、１
４でＹ分岐導波路型光タップが構成されている。尚、Ｌ
ｃはＹ分岐導波路型光タップの中心軸を示す。The output side of the input waveguide 11 has a tapered waveguide 10 having a widened waveguide width from the input side to the output side.
Is connected. Two branch waveguides 13 and 14 are connected to the output side of the tapered waveguide 10. These input waveguide 11, tapered waveguide 10, and branch waveguides 13, 1
4 constitutes a Y-branch waveguide optical tap. Note that L
c indicates the central axis of the Y-branch waveguide optical tap.
【００１９】分岐導波路１３の導波路幅は、テーパ導波
路１０側でＷ１と等しく、出力側でＷと等しい。分岐導
波路１４の導波路幅は、テーパ導波路１０側でＷ１と等
しく、出力側でＷと等しいが、両分岐導波路１３、１４
はその中間においてそれぞれの導波路幅が異なってい
る。また、分岐導波路１３、１４は、テーパ導波路１０
側で導波路幅Ｗ１が入力導波路１１の幅Ｗよりも狭く、
出力側で入力導波路１１と同じ導波路幅Ｗまでテーパ状
に徐々に広がっている。分岐導波路１３、１４の形状
は、直線のテーパ導波路、単一曲率の曲がりテーパ導波
路、正弦曲線及び余弦曲線のテーパ導波路等で形成され
ている。The waveguide width of the branch waveguide 13 is equal to W1 on the tapered waveguide 10 side and equal to W on the output side. The waveguide width of the branch waveguide 14 is equal to W1 on the tapered waveguide 10 side and equal to W on the output side.
Have different waveguide widths in the middle. Further, the branch waveguides 13 and 14 are the same as the tapered waveguide 10.
Side, the waveguide width W1 is smaller than the width W of the input waveguide 11,
On the output side, it gradually expands in a tapered shape to the same waveguide width W as the input waveguide 11. The branch waveguides 13 and 14 are formed of a linear taper waveguide, a curved taper waveguide having a single curvature, a sine curve and a cosine curve taper waveguide, and the like.
【００２０】テーパ導波路１０と分岐導波路１３、１４
の接続部分において、導波路の微細加工を無くすため分
岐導波路１３、１４を間隔ＷＢだけ離して接続してい
る。The tapered waveguide 10 and the branch waveguides 13 and 14
In the connection portion (1), the branch waveguides 13 and 14 are connected to each other at a distance WB in order to eliminate fine processing of the waveguide.
【００２１】図２は、図１に示した分岐導波路の導波路
幅と長さとの関係を示す図であり、図３は図１に示した
分岐導波路の各断面における界分布を示す図である。FIG. 2 is a diagram showing the relationship between the waveguide width and the length of the branch waveguide shown in FIG. 1, and FIG. 3 is a diagram showing the field distribution in each section of the branch waveguide shown in FIG. It is.
【００２２】図２に示すように、分岐導波路１３、１４
の幅は、ｂ−ｂ断面において共にＷ１であるが、導波路
幅がＷ１からＷまでテーパ状に徐々に変化する際に互い
に異なっている。この導波路幅の変化は１次関数的に変
化しているが、これに限定されるものではない。As shown in FIG. 2, the branch waveguides 13 and 14
Are both W1 in the bb cross section, but are different from each other when the waveguide width gradually changes from W1 to W in a tapered shape. The change in the waveguide width changes in a linear function, but is not limited to this.
【００２３】このようにＹ分岐導波路型光タップは、分
岐導波路１３、１４の導波路幅を入出力側においては等
しく、中間部においては異なるように形成されている。As described above, the Y-branch waveguide type optical tap is formed such that the waveguide widths of the branch waveguides 13 and 14 are equal on the input / output side and different in the middle part.
【００２４】このように構成したことで、図３に示すよ
うに、入力導波路１１を伝搬してきた中心軸に対称な偶
モード界分布Ｍ１が、分岐導波路１３、１４を伝搬する
時は、まず、左右対称の導波路幅Ｗ１をもつ分岐導波路
１３、１４の中心に入射する（ａ−ａ断面）ので，奇モ
ードの界分布が発生することが無く偶モードのみの界分
布（ｂ−ｂ断面）Ｍ２としてテーパ導波路内を伝搬す
る。したがって、奇モードの界分布の発生がないため、
偶モードのモード結合が無くなり広波長帯域にわたり一
定の分岐比が得られる。With this configuration, as shown in FIG. 3, when the even mode field distribution M1 symmetric with respect to the central axis propagating through the input waveguide 11 propagates through the branch waveguides 13 and 14, First, since the light enters the centers of the branch waveguides 13 and 14 having the symmetrical waveguide width W1 (a-a cross section), the odd-mode field distribution does not occur and the even-mode field distribution (b- (b section) The light propagates through the tapered waveguide as M2. Therefore, since there is no occurrence of the odd mode field distribution,
Even mode coupling is eliminated, and a constant branching ratio can be obtained over a wide wavelength band.
【００２５】次に、中心軸Ｌｃに対称であった偶モード
の界分布は、分岐導波路１３、１４を伝搬するにつれ互
いの導波路幅が異なってくるので、導波路幅が広い（導
波路の伝搬定数大きい）分岐導波路１４側に多くの光が
分岐していき、光の界分布Ｍ３はｃ−ｃ断面のように左
右非対称な偶モードとなる。分岐導波路１３、１４が互
いに離れるに従い、左右非対称となった偶モードの界分
布（ｃ−ｃ断面）Ｍ３は、それぞれの分岐導波路１３、
１４に分岐（ｄ−ｄ断面、ｅ−ｅ断面）したχ分布Ｍ
４、Ｍ５となる。したがって分岐導波路１３、１４は光
タップとして機能する。Next, the field distribution of the even mode, which is symmetric about the central axis Lc, has a different waveguide width as it propagates through the branch waveguides 13 and 14, so that the waveguide width is wide (waveguide (The propagation constant is large). A lot of light is branched toward the branch waveguide 14 side, and the field distribution M3 of the light becomes an even mode which is asymmetrical as shown in the cc section. As the branch waveguides 13 and 14 move away from each other, the field distribution (cc cross section) M3 of the even mode that becomes asymmetrical in the left-right direction is determined by the respective branch waveguides 13 and 14.
Χ distribution M branched to 14 (dd section, ee section)
4, M5. Therefore, the branch waveguides 13 and 14 function as optical taps.
【００２６】図４は、図１に示したＹ分岐導波路の導波
路幅増加率と分岐比及び放射損失との関係を示す。同図
において横軸は導波路幅増加率軸、左縦軸は分岐比軸、
右縦軸は放射損失軸である。FIG. 4 shows the relationship between the waveguide width increase rate, the branching ratio, and the radiation loss of the Y-branch waveguide shown in FIG. In the figure, the horizontal axis is the waveguide width increase rate axis, the left vertical axis is the branching ratio axis,
The right vertical axis is the radiation loss axis.
【００２７】導波路幅増加率ｐは、図２に示すポート１
（分岐導波路１３）の導波路幅がＷ１からＷになるまで
の距離Ｌ１でポート（分岐導波路１４）の導波路幅がＷ
１からＷになるまでの距離Ｌ２を割ったものとする。分
岐比は、導波路幅増加率ｐの減少とともに大きくなる。
また、放射損失は０．１２ｄＢ以下と小さい。The increase rate p of the waveguide width is the same as that of the port 1 shown in FIG.
The waveguide width of the port (branch waveguide 14) is W at the distance L1 from the waveguide width of the (branch waveguide 13) to W1.
It is assumed that the distance L2 from 1 to W is divided. The branching ratio increases as the waveguide width increase rate p decreases.
Further, the radiation loss is as small as 0.12 dB or less.
【００２８】図５は、図１に示したＹ分岐導波路の損失
波長特性を示す図である。同図において横軸は波長軸で
あり、縦軸は挿入損失軸である。尚、導波路幅増加率ｐ
は０．６３であり、分岐比は１：１．７である。FIG. 5 is a graph showing the loss wavelength characteristics of the Y-branch waveguide shown in FIG. In the figure, the horizontal axis is the wavelength axis, and the vertical axis is the insertion loss axis. The waveguide width increase rate p
Is 0.63 and the branching ratio is 1: 1.7.
【００２９】ポート１（分岐導波路１３）及びポート２
（分岐導波路１４）とも波長１．２５μｍ〜１．６５μ
ｍ帯においてほぼ平坦な特性が得られるのが分かる。Port 1 (branch waveguide 13) and Port 2
(Branch waveguide 14) Both wavelengths 1.25 μm to 1.65 μ
It can be seen that almost flat characteristics can be obtained in the m band.
【００３０】[0030]
【発明の効果】以上要するに本発明によれば、次のよう
な優れた効果を発揮する。In summary, according to the present invention, the following excellent effects are exhibited.
【００３１】両分岐導波路の導波路幅がその中間付近で
異なるようにしたので、放射損失が小さく、かつ広波長
帯域にわたり一定の分岐比が得られ、製造時の分岐比ば
らつきが少ないＹ分岐導波路型光タップが得られる。Since the waveguide widths of the two branch waveguides are different near the middle, a Y-branch having a small radiation loss, a constant branch ratio over a wide wavelength band, and a small variation in the branch ratio during manufacturing. A waveguide optical tap is obtained.
【図１】（ａ）は本発明のＹ分岐導波路型光タップの平
面図であり、（ｂ）は（ａ）の部分拡大図である。FIG. 1A is a plan view of a Y-branch waveguide optical tap according to the present invention, and FIG. 1B is a partially enlarged view of FIG.
【図２】図１に示したＹ分岐導波路の導波路幅と長さと
の関係を示す図である。FIG. 2 is a diagram illustrating a relationship between a waveguide width and a length of a Y-branch waveguide illustrated in FIG. 1;
【図３】図１に示したＹ分岐導波路の各断面における界
分布を示す図である。FIG. 3 is a diagram showing a field distribution in each cross section of the Y-branch waveguide shown in FIG.
【図４】図１に示したＹ分岐導波路の導波路幅増加率と
分岐比及び放射損失との関係を示す。FIG. 4 shows a relationship between a waveguide width increase rate, a branch ratio, and radiation loss of the Y-branch waveguide shown in FIG.
【図５】図１に示したＹ分岐導波路の損失波長特性を示
す図である。FIG. 5 is a diagram illustrating a loss wavelength characteristic of the Y-branch waveguide illustrated in FIG. 1;
【図６】（ａ）は従来の光タップの平面図であり、
（ｂ）は（ａ）の部分拡大図である。FIG. 6A is a plan view of a conventional optical tap,
(B) is a partial enlarged view of (a).
１０ テーパ導波路 １１ 入力導波路 １３、１４ 分岐導波路 Reference Signs List 10 tapered waveguide 11 input waveguide 13, 14 branch waveguide
───────────────────────────────────────────────────── フロントページの続き (72)発明者 岡野 広明 茨城県日立市日高町５丁目１番１号 日 立電線株式会社オプトロシステム研究所 内 (72)発明者 塩田 恒夫 茨城県日立市日高町５丁目１番１号 日 立電線株式会社オプトロシステム研究所 内 (56)参考文献 特開 平７−198972（ＪＰ，Ａ) 特開 平４−240605（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G02B 6/12 - 6/14 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Hiroaki Okano 5-1-1 Hidaka-cho, Hitachi City, Ibaraki Prefecture Inside the Opto-System Research Laboratories, Inc. (72) Inventor Tsuneo Shioda Hitachi, Ibaraki Prefecture 5-1-1 Takamachi Inside Nippon Cable Electric Co., Ltd. Optrosystem Research Laboratory (56) References JP-A-7-198972 (JP, A) JP-A-4-240605 (JP, A) (58) Survey Field (Int.Cl. 7 , DB name) G02B 6/12-6/14
Claims (5)
続され入力側から出力側にわたって幅が左右対称に拡が
ったテーパ導波路と、該テーパ導波路の出力側に接続さ
れ徐々にテーパ状に拡がった２つの分岐導波路とを備
え、２つの分岐導波路の導波路幅をテーパ導波路側付近
で等しくすると共に、その中間付近で異なるようにした
ことを特徴とするＹ分岐導波路型光タップ。An input waveguide, a tapered waveguide connected to an output side of the input waveguide and having a width symmetrically widened from an input side to an output side, and an output of the tapered waveguide. And two branch waveguides connected to the side and gradually expanding in a tapered shape, and the waveguide width of the two branch waveguides is set near the tapered waveguide side.
Characterized in that they are equal to each other, and are different near the middle thereof.
いて導波路幅が等しくなるようにした請求項１記載のＹ
分岐導波路型光タップ。Wherein said two branch waveguides, according to claim 1, wherein the waveguide width is set to be equal to have your <br/> near the output side Y
Branch waveguide type optical tap.
の接続部において互いに接することなく間隔を隔てて接
続した請求項１記載のＹ分岐導波路型光タップ。3. The Y-branch waveguide type optical tap according to claim 1, wherein the two branch waveguides are connected at an interval without being in contact with each other at a connection portion with the tapered waveguide.
で導波路幅が入力導波路幅より狭く、出力側で入力導波
路幅と等しくなるように構成した請求項１記載のＹ分岐
導波路型光タップ。 4. The Y-branch according to claim 1, wherein the two branch waveguides are configured such that the width of the waveguide is narrower than the width of the input waveguide on the tapered waveguide side and equal to the width of the input waveguide on the output side. Waveguide type optical tap.
パ導波路、単一曲率の曲がりテーパ導波路、正弦曲線及
び余弦曲線のテーパ導波路等で形成した請求項１記載の
Ｙ分岐導波路型光タップ。 5. The Y-branch waveguide according to claim 1, wherein said two branch waveguides are formed by a linear taper waveguide, a single-curvature curved taper waveguide, a sine curve and a cosine curve taper waveguide. Wave type light tap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26982195A JP3152127B2 (en) | 1995-10-18 | 1995-10-18 | Y-branch waveguide type optical tap |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26982195A JP3152127B2 (en) | 1995-10-18 | 1995-10-18 | Y-branch waveguide type optical tap |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09113743A JPH09113743A (en) | 1997-05-02 |
| JP3152127B2 true JP3152127B2 (en) | 2001-04-03 |
Family
ID=17477647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26982195A Expired - Fee Related JP3152127B2 (en) | 1995-10-18 | 1995-10-18 | Y-branch waveguide type optical tap |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3152127B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6236784B1 (en) | 1998-08-10 | 2001-05-22 | Hitachi, Ltd. | Y branching optical waveguide and optical integrated circuit |
| WO2002073256A1 (en) | 2001-02-28 | 2002-09-19 | Nec Corporation | Optical circuit element and production method therefor, array-form optical circuit element, optical circuit device using it |
| KR100421149B1 (en) * | 2001-07-11 | 2004-03-04 | 삼성전자주식회사 | Fabrication method for arrayed waveguide grating with three dimensionally tapered connecting member |
| KR100429567B1 (en) * | 2002-02-20 | 2004-04-29 | 삼성전자주식회사 | Optical power splitter |
| US9322997B2 (en) * | 2014-03-25 | 2016-04-26 | Seagate Technology Llc | Branched waveguide configuration |
| CN111679385A (en) * | 2020-06-04 | 2020-09-18 | 无锡市芯飞通光电科技有限公司 | Method for realizing wavelength insensitive uneven light splitting splitter |
-
1995
- 1995-10-18 JP JP26982195A patent/JP3152127B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09113743A (en) | 1997-05-02 |
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