JP2016138661A - Guide device, exposure device and manufacturing method of article - Google Patents

Guide device, exposure device and manufacturing method of article Download PDF

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JP2016138661A
JP2016138661A JP2016077562A JP2016077562A JP2016138661A JP 2016138661 A JP2016138661 A JP 2016138661A JP 2016077562 A JP2016077562 A JP 2016077562A JP 2016077562 A JP2016077562 A JP 2016077562A JP 2016138661 A JP2016138661 A JP 2016138661A
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plate members
moving
guide
guide device
moving member
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JP6104426B2 (en
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諸橋　明
Akira Morohashi
明 諸橋
是永　伸茂
Nobushige Korenaga
伸茂 是永
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Canon Inc
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Abstract

PROBLEM TO BE SOLVED: To provide a technology advantageous in preventing scattering of particles in a driving device.SOLUTION: A guide device has a guide member arranged on a first surface of a base, and a moving member which is movable along a first direction which is an extension direction of the guide member, and it includes a plurality of first plate members and a plurality of second plate members fixed to the moving member and moving together with the moving member. The plurality of first plate members are provided on the first direction side with respect to the moving member, and each of them has an extension surface extending in the direction crossing the first surface from a portion facing the first surface. The plurality of second plate members are provided on the second direction side, which is the direction along the first surface and crossing the first direction, with respect to the moving member, and each of them has an extension surface extending in the direction crossing the first surface from the portion facing the first surface. The plurality of first plate members are arranged being separated from each other in the first direction, and the plurality of second plate members are arranged being separated from each other in the second direction.SELECTED DRAWING: Figure 2

Description

本発明は、案内装置、露光装置および物品の製造方法に関する。   The present invention relates to a guide device, an exposure apparatus, and an article manufacturing method.

半導体デバイス等の製造に用いられる露光装置には、半導体集積回路における回路パターンの微細化や高集積化に伴って、高精度な微細加工技術が要求されている。このような露光装置は、基板を保持した基板ステージを駆動する駆動装置を備え、駆動装置は、基板ステージの移動を案内する案内装置を備えている。   An exposure apparatus used for manufacturing a semiconductor device or the like is required to have a highly accurate fine processing technique as a circuit pattern in a semiconductor integrated circuit is miniaturized and highly integrated. Such an exposure apparatus includes a drive device that drives a substrate stage holding a substrate, and the drive device includes a guide device that guides the movement of the substrate stage.

案内装置は、一般的に、基台の上に支持されて基板ステージが移動する方向と平行に備えられた案内部材と、基板ステージを支持して案内部材に沿って移動する移動部材とを備えている。かかる案内装置は、基板ステージが移動する際に発生する基板ステージの回転（ピッチングやヨーイングなど）を抑制し、基板ステージを滑らかに移動させることができる。しかし、このような案内装置では、移動部材が移動する際に案内部材と移動部材とが擦れるため、擦れた部分からパーティクルが発生する。そして、発生したパーティクルが案内装置の外部に飛散してしまうと、パーティクルが基板やパターンに付着してパターン欠損や歩留り低下などを引き起こし、露光装置における高精度な微細加工を阻害してしまう。そこで、移動部材の移動方向の端部にカバーを取り付けることでパーティクルの飛散を防止する技術が提案されている（特許文献１参照）。   In general, a guide device includes a guide member supported on a base and provided parallel to a direction in which the substrate stage moves, and a moving member that supports the substrate stage and moves along the guide member. ing. Such a guide device can suppress the rotation (pitching, yawing, etc.) of the substrate stage that occurs when the substrate stage moves, and can move the substrate stage smoothly. However, in such a guide device, when the moving member moves, the guide member and the moving member rub against each other, so that particles are generated from the rubbed portion. When the generated particles are scattered outside the guide device, the particles adhere to the substrate or the pattern, causing a pattern defect or a decrease in yield, thereby hindering high-precision fine processing in the exposure apparatus. Therefore, a technique for preventing scattering of particles by attaching a cover to the end of the moving member in the moving direction has been proposed (see Patent Document 1).

特開２０１１−００７３２４号公報JP 2011-007324 A

しかしながら、移動部材の移動方向の端部にカバーを取り付けただけでは、案内部材と移動部材との間から発生したパーティクルがカバーの内部で飛び続けてしまう。そのため、パーティクルが飛ぶ方向によっては、カバーと案内部材もしくは基台との隙間からカバーの外部にパーティクルが飛散してしまうという問題がある。このように、従来の技術では、パーティクルの飛散を防止する効果が不十分であった。   However, if the cover is only attached to the end of the moving member in the moving direction, particles generated between the guide member and the moving member will continue to fly inside the cover. Therefore, depending on the direction in which the particles fly, there is a problem that the particles are scattered outside the cover from the gap between the cover and the guide member or the base. Thus, in the conventional technique, the effect of preventing the scattering of particles was insufficient.

そこで、本発明は、案内装置において、パーティクルの飛散を防止する上で有利な技術を提供することを目的とする。   Therefore, an object of the present invention is to provide a technique advantageous in preventing scattering of particles in a guide device.

上記目的を達成するために、本発明の一側面としての駆動装置は、基台の第１面上に配置された案内部材と、前記案内部材の延伸方向である第１方向に沿って移動可能な移動部材と、を有する案内装置であって、前記移動部材に固定されて前記移動部材とともに移動する複数の第１板部材および複数の第２板部材を含み、前記複数の第１板部材は、前記移動部材に対して前記第１方向側に設けられ、それぞれが前記第１面と対面する部分から前記第１面と交差する方向に延伸した延伸面を有し、前記複数の第２板部材は、前記移動部材に対して、前記第１面に沿う方向であり且つ前記第１方向と交差する第２方向側に設けられ、それぞれが前記第１面と対面する部分から前記第１面と交差する方向に延伸した延伸面を有し、前記複数の第１板部材は前記第１方向に互いに離隔して配置され、前記複数の第２板部材は前記第２方向に互いに離隔して配置されていることを特徴とする。   In order to achieve the above object, a drive device according to one aspect of the present invention is movable along a guide member disposed on a first surface of a base and a first direction that is an extension direction of the guide member. A plurality of first plate members and a plurality of second plate members that are fixed to the moving member and move together with the moving member, wherein the plurality of first plate members are A plurality of second plates, each having a stretched surface provided on the first direction side with respect to the moving member, each extending in a direction intersecting the first surface from a portion facing the first surface. The member is provided on the second direction side that is in a direction along the first surface and intersects the first direction with respect to the moving member, and each of the first surface from a portion facing the first surface. A plurality of first plates having a stretched surface extending in a direction intersecting with the plurality of first plates Timber are spaced apart from each other in the first direction, the plurality of second plate member is characterized by being spaced apart from each other in the second direction.

本発明によれば、案内装置において、パーティクルの飛散を防止する上で有利な技術を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, in a guide apparatus, the technique advantageous when preventing scattering of a particle can be provided.

本発明の第１実施形態の案内装置を備えた駆動装置を示す図である。It is a figure which shows the drive device provided with the guide apparatus of 1st Embodiment of this invention. 第１実施形態の案内装置の構成を示す仰瞰図である。It is a top view which shows the structure of the guide apparatus of 1st Embodiment. 第１実施形態の案内装置を案内部材の側面方向から見たときの断面図である。It is sectional drawing when the guide apparatus of 1st Embodiment is seen from the side surface direction of a guide member. 第１実施形態の案内装置を移動部材の移動方向から見たときの断面図である。It is sectional drawing when the guide apparatus of 1st Embodiment is seen from the moving direction of a moving member. パーティクルがカバーユニットから飛散する様子を示した図である。It is the figure which showed a mode that the particle scattered from the cover unit. 本発明の実施形態の露光装置を示す図である。It is a figure which shows the exposure apparatus of embodiment of this invention.

以下、添付図面を参照して、本発明の好適な実施の形態について説明する。なお、各図において、同一の部材については同一の参照番号を付し、重複する説明は省略する。   DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described with reference to the accompanying drawings. In addition, in each figure, the same reference number is attached | subjected about the same member and the overlapping description is abbreviate | omitted.

＜第１実施形態＞
本発明の第１実施形態の案内装置５について、図１を参照して説明する。図１は、本発明の第１実施形態の案内装置５を備えた駆動装置１００を示す図である。駆動装置１００は、基台１と、ねじ部材２と、ナット部材３と、基板ステージ４とを備える。また、駆動装置１００は、基板ステージ４の移動を案内するための案内装置５と、ねじ部材２を回転駆動させるためのモーター８とを備える。 <First Embodiment>
A guide device 5 according to a first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a diagram showing a drive device 100 including a guide device 5 according to the first embodiment of the present invention. The drive device 100 includes a base 1, a screw member 2, a nut member 3, and a substrate stage 4. Further, the driving device 100 includes a guide device 5 for guiding the movement of the substrate stage 4 and a motor 8 for rotating the screw member 2.

ねじ部材２は、棒状に形成されており、ねじ部材２の側面には、ねじ溝が螺旋状に形成されている。また、ねじ部材２は、ねじ部材２の両端部において基台１に固定された支持台９よって回転自在に支持され、ねじ部材２の一方の端部がモーター８に接続されている。そのため、モーター８に信号が供給されてモーター８が駆動すると、ねじ部材２が回転軸を中心に回転する。   The screw member 2 is formed in a rod shape, and a screw groove is spirally formed on the side surface of the screw member 2. The screw member 2 is rotatably supported by support bases 9 fixed to the base 1 at both ends of the screw member 2, and one end of the screw member 2 is connected to the motor 8. Therefore, when a signal is supplied to the motor 8 and the motor 8 is driven, the screw member 2 rotates around the rotation axis.

ナット部材３は、円筒状に形成されており、ナット部材３の中心を貫通するねじ部材２に螺合している。ナット部材３の内側には、ねじ部材２のねじ溝と同じ間隔のねじ溝が形成されており、ナット部材３のねじ溝とねじ部材２のねじ溝との間には転動体が備えられている。この転動体により、ねじ部材２が回転したときに、ナット部材３がねじ部材２の回転軸に沿って摺動することができる。また、ナット部材３は、基板ステージ４を支持しており、ナット部材３がねじ部材２の回転軸に沿って摺動することで、基板ステージ４をねじ部材２の回転軸方向に駆動することができる。   The nut member 3 is formed in a cylindrical shape, and is screwed into a screw member 2 that passes through the center of the nut member 3. Inside the nut member 3, screw grooves having the same interval as the screw grooves of the screw member 2 are formed, and a rolling element is provided between the screw groove of the nut member 3 and the screw groove of the screw member 2. Yes. By this rolling element, when the screw member 2 rotates, the nut member 3 can slide along the rotation axis of the screw member 2. The nut member 3 supports the substrate stage 4, and the substrate member 4 is driven in the direction of the rotation axis of the screw member 2 by sliding the nut member 3 along the rotation axis of the screw member 2. Can do.

案内装置５は、基板ステージ４が移動する際に発生する基板ステージ４の回転（ピッチングやヨーイングなど）を抑制して、基板ステージ４を滑らかに移動させるために備えられており、案内部材６と移動ユニット７とで構成される。案内部材６は、下面の全面が基台１（の第１面上）に固定されており、基板ステージ４が移動する範囲にわたって、ねじ部材２の回転軸方向と平行になるように、ねじ部材２の両側に配置されている。案内部材６の側面には、移動ユニット７を案内部材６に沿って移動させるための溝１１が形成されており、後述する転動体１２が案内部材６に形成された溝１１に配置される。また、移動ユニット７は、基板ステージ４を支持しており、基板ステージ４の移動に伴い、案内部材６に沿って移動する。   The guide device 5 is provided for smoothly moving the substrate stage 4 by suppressing the rotation (pitching, yawing, etc.) of the substrate stage 4 that occurs when the substrate stage 4 moves. It is comprised with the movement unit 7. FIG. The guide member 6 has a screw member whose entire lower surface is fixed to the base 1 (on the first surface thereof) and is parallel to the rotational axis direction of the screw member 2 over the range in which the substrate stage 4 moves. 2 on both sides. A groove 11 for moving the moving unit 7 along the guide member 6 is formed on the side surface of the guide member 6, and a rolling element 12 described later is disposed in the groove 11 formed in the guide member 6. The moving unit 7 supports the substrate stage 4 and moves along the guide member 6 as the substrate stage 4 moves.

ここで、第１実施形態の案内装置５における移動ユニット７について、図２を参照して説明する。図２は、第１実施形態の案内装置５における移動ユニット７の構成を示す仰瞰図（基台１は図示せず）である。移動ユニット７は、移動部材２０とカバーユニット３０とで構成されている。移動部材２０は、案内部材６の上面および側面を囲うように構成されており、案内部材６（の延伸方向（第１方向））に沿って移動可能である。移動部材２０の内側には、案内部材６に形成された溝１１に対応する溝２１が形成されており、移動部材２０に形成された溝２１と案内部材６に形成された溝１１との間には転動体１２が備えられている。この転動体１２により、基板ステージ４が移動したときに、移動部材２０が案内部材６に沿って滑らかに移動することができる。しかし、転動体１２によって移動部材２０が案内部材６に沿って滑らかに移動できたとしても、案内部材６と移動部材２０と転動体１２との擦れは防止できないため、擦れた部分からパーティクル１３が発生してしまう。そして、発生したパーティクル１３が案内装置５の外部へ飛散し、例えば、案内装置５を有する露光装置内に混入すると、パターン欠損や歩留り低下などを引き起こし、露光装置における高精度な微細加工を阻害してしまう。そこで、第１実施形態の駆動装置１００における移動ユニット７は、パーティクル１３の飛散を防止するためにカバーユニット３０を備えている。   Here, the moving unit 7 in the guide device 5 of the first embodiment will be described with reference to FIG. FIG. 2 is a top view (the base 1 is not shown) showing the configuration of the moving unit 7 in the guide device 5 of the first embodiment. The moving unit 7 includes a moving member 20 and a cover unit 30. The moving member 20 is configured to surround the upper surface and the side surface of the guide member 6, and is movable along the guide member 6 (its extending direction (first direction)). A groove 21 corresponding to the groove 11 formed in the guide member 6 is formed inside the moving member 20. Between the groove 21 formed in the moving member 20 and the groove 11 formed in the guide member 6. Is provided with a rolling element 12. By this rolling element 12, the moving member 20 can move smoothly along the guide member 6 when the substrate stage 4 moves. However, even if the moving member 20 can be smoothly moved along the guide member 6 by the rolling element 12, the rubbing between the guide member 6, the moving member 20, and the rolling element 12 cannot be prevented. Will occur. Then, if the generated particles 13 are scattered outside the guide device 5 and mixed into the exposure device having the guide device 5, for example, pattern loss and yield reduction are caused, and high-precision fine processing in the exposure device is hindered. End up. Therefore, the moving unit 7 in the driving apparatus 100 of the first embodiment includes a cover unit 30 in order to prevent the particles 13 from scattering.

カバーユニット３０は、移動部材２０の移動方向（±Ｘ方向）の側面に配置された第１カバーユニット３０ａと、移動部材２０の移動方向と直交する方向（±Ｙ方向）の側面に配置された第２カバーユニット３０ｂとを有する。第１カバーユニット３０ａと第２カバーユニット３０ｂは、移動部材２０の側面を取り囲んで一体になるように構成されており、移動部材２０と案内部材６との間から発生したパーティクル１３が飛散することを防止している。以下に、第１カバーユニット３０ａおよび第２カバーユニット３０ｂの構成について図３および図４を参照してそれぞれ説明する。   The cover unit 30 is arranged on the side surface in the direction (± Y direction) orthogonal to the first cover unit 30a arranged on the side surface in the moving direction (± X direction) of the moving member 20 and the moving direction of the moving member 20. And a second cover unit 30b. The 1st cover unit 30a and the 2nd cover unit 30b are comprised so that the side surface of the moving member 20 may be united, and the particle | grains 13 which generate | occur | produced between the moving member 20 and the guide member 6 scatter. Is preventing. Below, the structure of the 1st cover unit 30a and the 2nd cover unit 30b is each demonstrated with reference to FIG. 3 and FIG.

まず、第１カバーユニット３０ａについて図３を参照して説明する。図３は、第１実施形態の案内装置５における移動ユニット７を案内部材６の側面方向（Ｙ方向）から見たときの断面図である。図３において、一点破線より右側は案内部材６上における断面図であり、一点破線より左側は案内部材６よりすぐ手前における断面図である。第１カバーユニット３０ａは、移動部材２０の移動方向（±Ｘ方向）に（第１方向側に）、移動部材２０を挟んで対になるように配置されている。また、第１カバーユニット３０ａは、第１カバー部材３１ａ（第１固定部材）と、複数の第１板部材３２ａと、複数の第１スペーサ３４ａ（第１固定部材）とを備え、それらをユニット化している。   First, the first cover unit 30a will be described with reference to FIG. FIG. 3 is a cross-sectional view of the moving unit 7 in the guide device 5 according to the first embodiment when viewed from the side surface direction (Y direction) of the guide member 6. In FIG. 3, the right side from the dashed line is a sectional view on the guide member 6, and the left side from the dashed line is a sectional view immediately before the guide member 6. The first cover unit 30a is disposed so as to be paired in the moving direction (± X direction) of the moving member 20 (on the first direction side) with the moving member 20 interposed therebetween. The first cover unit 30a includes a first cover member 31a (first fixing member), a plurality of first plate members 32a, and a plurality of first spacers 34a (first fixing members). It has become.

第１カバー部材３１ａは、移動部材２０から移動部材の移動方向（±Ｘ方向）に突出し、基台１に対面する第１部分３５ａと、移動部材２０の上面に接続された第１接続部３６ａとを含んでいる。ここで、第１カバー部材３１ａの第１接続部３６ａは、第１部分３５ａを移動部材２０に接続できればよいため、移動部材２０の上面の一部のみに接続するように構成してもよいし、移動部材２０の側面に接続するように構成してもよい。また、第１部分３５ａを移動部材２０に直接接続できる場合には、第１カバー部材３１ａは、第１接続部３６ａを備えずに、第１部分３５ａのみで構成してもよい。   The first cover member 31 a protrudes from the moving member 20 in the moving direction (± X direction) of the moving member, faces the base 1, and a first connection portion 36 a connected to the upper surface of the moving member 20. Including. Here, since the 1st connection part 36a of the 1st cover member 31a should just connect the 1st part 35a to the moving member 20, it may be comprised so that it may connect only to a part of upper surface of the moving member 20. Further, it may be configured to be connected to the side surface of the moving member 20. Moreover, when the 1st part 35a can be directly connected to the moving member 20, the 1st cover member 31a may be comprised only with the 1st part 35a, without providing the 1st connection part 36a.

第１板部材３２ａ（延伸面）は、基台１と隙間を介して対面している端部（部分）から第１カバー部材３１ａの第１部分３５ａに向けて延び（延伸し）、第１部分３５ａに接続するように構成されている。また、第１板部材３２ａには、案内部材６を貫通させるための切欠部３３が形成されており、案内部材６の上面および側面を囲むような逆凹形状となっている。第１板部材３２ａに形成された切欠部３３は、移動ユニット７が移動する際に第１板部材３２ａが案内部材６と接触しないように、即ち、第１板部材３２ａと案内部材６との間に隙間ができるように構成されている。このような第１板部材３２ａは複数枚用いられ、複数の第１板部材３２ａのそれぞれは、移動部材２０から離れる方向に、即ち、移動部材２０の移動方向（±Ｘ方向）に相互に離隔して配置されている。なお、複数の第１板部材３２ａを、後述する第１スペーサ３４ａによって移動部材２０に固定できる場合は、第１カバー部材３１ａを用いなくてもよい。   The first plate member 32a (extension surface) extends (extends) from the end (part) facing the base 1 via a gap toward the first part 35a of the first cover member 31a, and the first plate member 32a (extension surface) It is comprised so that it may connect to the part 35a. Further, the first plate member 32 a is formed with a notch 33 for penetrating the guide member 6, and has a reverse concave shape surrounding the upper surface and the side surface of the guide member 6. The notch 33 formed in the first plate member 32a is arranged so that the first plate member 32a does not come into contact with the guide member 6 when the moving unit 7 moves, that is, between the first plate member 32a and the guide member 6. It is comprised so that a clearance gap may be made between them. A plurality of such first plate members 32a are used, and each of the plurality of first plate members 32a is separated from each other in the direction away from the moving member 20, that is, in the moving direction (± X direction) of the moving member 20. Are arranged. In addition, when the some 1st board member 32a can be fixed to the moving member 20 with the 1st spacer 34a mentioned later, the 1st cover member 31a does not need to be used.

第１スペーサ３４ａは、移動部材２０の移動方向（±Ｘ方向）に離隔して配置された複数の第１板部材３２ａの間（以下、複数の第１板部材３２ａにおける隙間とする）に挿入される。また、第１スペーサ３４ａは、基台側に開放した逆凹形状をしており、複数の第１板部材３２ａにおける間隔を一定値（ピッチｐ）に保っている。なお、複数の第１板部材３２ａにおける隙間が第１カバー部材３１ａによって一定値に保つことができる場合には、第１スペーサ３４ａを用いなくてもよい。   The first spacer 34a is inserted between a plurality of first plate members 32a that are spaced apart in the moving direction (± X direction) of the moving member 20 (hereinafter referred to as a gap in the plurality of first plate members 32a). Is done. Moreover, the 1st spacer 34a is carrying out the reverse concave shape open | released to the base side, and is maintaining the space | interval in the some 1st board member 32a at a fixed value (pitch p). In addition, when the clearance gap in the some 1st board member 32a can be kept at a fixed value with the 1st cover member 31a, it is not necessary to use the 1st spacer 34a.

次に、第２カバーユニット３０ｂについて図４を参照して説明する。図４は、第１実施形態の案内装置５における移動ユニット７を移動部材２０の移動方向（−Ｘ方向）から見たときの断面図である。第２カバーユニット３０ｂは、移動部材２０の移動方向と直交する方向（±Ｙ方向）に（第１面に沿う方向であり且つ第１方向と交差する第２方向側に）、移動部材２０を挟んで対になるように配置されている。また、第２カバーユニット３０ｂは、第２カバー部材３１ｂ（第２固定部材）と、複数の第２板部材３２ｂと、複数のスペーサ３４ｂ（第２固定部材）とを備え、それらをユニット化している。なお、第２カバーユニット３０ｂが配置される方向は、移動部材２０の移動方向と直交する方向（±Ｙ方向）に限定するものではなく、移動部材２０の移動方向と異なる方向であればよい。   Next, the second cover unit 30b will be described with reference to FIG. FIG. 4 is a cross-sectional view of the moving unit 7 in the guide device 5 according to the first embodiment when viewed from the moving direction (−X direction) of the moving member 20. The second cover unit 30b moves the moving member 20 in a direction (± Y direction) orthogonal to the moving direction of the moving member 20 (on the second direction side that is along the first surface and intersects the first direction). It is arranged so as to be paired with a sandwich. The second cover unit 30b includes a second cover member 31b (second fixing member), a plurality of second plate members 32b, and a plurality of spacers 34b (second fixing members). Yes. The direction in which the second cover unit 30b is arranged is not limited to the direction (± Y direction) orthogonal to the moving direction of the moving member 20, but may be any direction different from the moving direction of the moving member 20.

第２カバー部材３１ｂは、移動部材２０から移動部材２０の移動方向と直交する方向（±Ｙ方向）に突出し、基台１に対面する第２部分３５ｂと、移動部材２０の上面に接続された第２接続部３６ｂとを含んでいる。ここで、第２カバー部材３１ｂの第２接続部３６ｂは、第２部分３５ｂを移動部材２０に接続できればよいため、移動部材２０の上面の一部のみに接続するように構成してもよいし、移動部材２０の側面に接続するように構成してもよい。また、第２部分３５ｂを移動部材２０に直接接続できる場合には、第２カバー部材３１ｂは、第２接続部３６ｂを備えずに、第２部分３５ｂのみで構成してもよい。   The second cover member 31 b protrudes from the moving member 20 in a direction (± Y direction) orthogonal to the moving direction of the moving member 20, and is connected to the second portion 35 b facing the base 1 and the upper surface of the moving member 20. 2nd connection part 36b. Here, the second connecting portion 36b of the second cover member 31b only needs to be able to connect the second portion 35b to the moving member 20, and may be configured to connect only to a part of the upper surface of the moving member 20. Further, it may be configured to be connected to the side surface of the moving member 20. Moreover, when the 2nd part 35b can be directly connected to the moving member 20, the 2nd cover member 31b may be comprised only with the 2nd part 35b, without providing the 2nd connection part 36b.

第１実施形態のカバーユニット３０では、第１カバー部材３１ａと第２カバー部材３１ｂとが一体的に（即ち、同一部材で）構成されているため、第１接続部３６ａと第２接続部３６ｂとは共通した部材として構成されている。但し、第１カバー部材３１ａと第２カバー部材３１ｂとが相互に独立して構成される場合には、第１カバー部材３１ａおよび第２カバー部材３１ｂは、第１接続部３６ａおよび第２接続部３６ｂをそれぞれ含むように構成される。この場合、第１接続部３６ａおよび第２接続部３６ｂは、相互に独立した部材となり、第１接続部３６ａおよび第２接続部３６ｂを介して第１カバー部材３１ａおよび第２カバー部材３１ｂのそれぞれが移動部材２０に接続される。   In the cover unit 30 of the first embodiment, since the first cover member 31a and the second cover member 31b are configured integrally (that is, by the same member), the first connection portion 36a and the second connection portion 36b are configured. Are configured as a common member. However, when the first cover member 31a and the second cover member 31b are configured independently of each other, the first cover member 31a and the second cover member 31b are connected to the first connection portion 36a and the second connection portion, respectively. 36b is included. In this case, the first connection part 36a and the second connection part 36b are members independent of each other, and the first cover member 31a and the second cover member 31b are respectively connected via the first connection part 36a and the second connection part 36b. Is connected to the moving member 20.

第２板部材３２ｂ（延伸面）は、基台１と隙間を介して対面している端部（部分）から第２カバー部材３１ｂの第２部分３５ｂに向けて延び（延伸し）、第２部分３５ｂに接続するように構成されている。このような第２板部材３２ｂは複数枚用いられ、複数の第２板部材３２ｂのそれぞれは、移動部材２０から離れる方向に、即ち、移動部材２０の移動方向と直交する方向（±Ｙ方向）に相互に離隔して配置されている。なお、複数の第２板部材３２ｂを、後述する第２スペーサ３４ｂによって移動部材２０に固定できる場合は、第２カバー部材３１ｂを用いなくてもよい。   The second plate member 32b (extension surface) extends (extends) from the end (part) facing the base 1 through the gap toward the second part 35b of the second cover member 31b, It is comprised so that it may connect to the part 35b. A plurality of such second plate members 32b are used, and each of the plurality of second plate members 32b is in a direction away from the moving member 20, that is, a direction orthogonal to the moving direction of the moving member 20 (± Y direction). Are spaced apart from each other. In addition, when the 2nd plate member 32b can be fixed to the moving member 20 by the 2nd spacer 34b mentioned later, it is not necessary to use the 2nd cover member 31b.

第２スペーサ３４ｂは、移動部材２０の移動方向と直交する方向（±Ｙ方向）に離隔して配置された複数の第２板部材３２ｂの間（以下、複数の第２板部材３２ｂにおける隙間とする）に挿入される。また、第２スペーサ３４ｂは、基台側に開放した逆凹形状をしており、複数の第２板部材３２ｂにおける間隔を一定値（ピッチｐ）に保っている。なお、複数の第２板部材３２ｂにおける隙間が第２カバー部材３１ｂによって一定値に保つことができる場合は、第２スペーサ３４ｂを用いなくてもよい。   The second spacer 34b is formed between a plurality of second plate members 32b that are spaced apart in a direction (± Y direction) orthogonal to the moving direction of the moving member 20 (hereinafter referred to as gaps in the plurality of second plate members 32b). To be inserted). Moreover, the 2nd spacer 34b is carrying out the reverse concave shape open | released to the base side, and is maintaining the space | interval in the several 2nd board member 32b at a fixed value (pitch p). In addition, when the clearance gap in the some 2nd board member 32b can be kept at a constant value with the 2nd cover member 31b, it is not necessary to use the 2nd spacer 34b.

このように構成された第１カバーユニット３０ａおよび第２カバーユニット３０ｂは、±Ｘ方向および±Ｙ方向に飛散するパーティクル１３をそれぞれトラップすることができる。即ち、第１実施形態の案内装置５は、案内部材６と移動部材２０との間から発生したパーティクル１３が案内装置５の外部に飛散することを防止する。なお、第１カバーユニット３０ａおよび第２カバーユニット３０ｂは、移動部材２０に着脱可能に構成してもよい。また、第１カバーユニット３０ａと第２カバーユニット３０ｂとは、互いに着脱可能に構成してもよい。   The first cover unit 30a and the second cover unit 30b thus configured can trap the particles 13 scattered in the ± X direction and the ± Y direction, respectively. That is, the guide device 5 according to the first embodiment prevents the particles 13 generated between the guide member 6 and the moving member 20 from being scattered outside the guide device 5. The first cover unit 30a and the second cover unit 30b may be configured to be detachable from the moving member 20. Further, the first cover unit 30a and the second cover unit 30b may be configured to be detachable from each other.

ここで、カバーユニット３０がパーティクル１３の飛散を防止する作用について図５を参照して説明する。図５（ａ）は、案内部材６と移動部材２０との間から発生したパーティクル１３が第２カバーユニット３０ｂの外部に飛散する様子を示した図である。パーティクル１３の入射角θがｔａｎθ＝２ｇ／ｐを満たすとき、パーティクル１３は、複数の第２板部材３２ｂの基台側の端面と基台１との間で反射を繰り返しながら第２カバーユニット３０ｂの外部に飛散してしまう。ここで、ｐは複数の第２板部材３２ｂにおける間隔（ピッチ）であり、ｇは第２板部材３２ｂの基台側の端面と基台１との隙間である。しかし、このような条件を満たすパーティクル１３が発生することは極めて稀であり、大抵の場合は、図５（ｂ）に示すように、パーティクル１３は複数の第２板部材３２ｂにおける隙間３７に入り込む。図５（ｂ）は、案内部材６と移動部材２０との間から発生したパーティクル１３が複数の第２板部材３２ｂにおける隙間３７に入り込む様子を示した図である。隙間３７に入り込んだパーティクル１３は、複数の第２板部材３２ｂ（移動部材２０も含む）や第２スペーサ３４ｂで多数回の反射を繰り返すため、パーティクル１３の運動エネルギーが徐々に減衰される。その結果、パーティクル１３は複数の第２板部材３２ｂや第２スペーサ３４ｂにトラップされ、移動ユニット７の外部に飛散することが殆どなくなる。   Here, the effect | action which the cover unit 30 prevents scattering of the particle 13 is demonstrated with reference to FIG. FIG. 5A is a diagram illustrating a state in which particles 13 generated between the guide member 6 and the moving member 20 are scattered outside the second cover unit 30b. When the incident angle θ of the particle 13 satisfies tan θ = 2 g / p, the particle 13 repeats reflection between the base side end surface of the plurality of second plate members 32 b and the base 1, and the second cover unit 30 b. Will be scattered outside. Here, p is an interval (pitch) between the plurality of second plate members 32 b, and g is a gap between the end surface of the second plate member 32 b on the base side and the base 1. However, it is extremely rare that the particles 13 satisfying such a condition are generated. In most cases, as shown in FIG. 5B, the particles 13 enter the gaps 37 in the plurality of second plate members 32b. . FIG. 5B is a diagram illustrating a state in which particles 13 generated between the guide member 6 and the moving member 20 enter the gaps 37 in the plurality of second plate members 32b. Since the particles 13 that have entered the gap 37 are repeatedly reflected many times by the plurality of second plate members 32b (including the moving member 20) and the second spacer 34b, the kinetic energy of the particles 13 is gradually attenuated. As a result, the particles 13 are trapped by the plurality of second plate members 32b and the second spacers 34b and hardly scattered outside the moving unit 7.

案内部材６と移動部材２０との間から発生するパーティクル１３が移動ユニット７の外部に飛散することをより少なくするためには、第２板部材３２ｂの基台側の端面と基台１との隙間ｇを小さくするとよい。これにより、入射角θが小さいパーティクル１３しか隙間ｇを通過できなくなり、パーティクル１３の飛散を更に防止することができる。また、第２カバーユニット３０ｂにおいて第２板部材３２ｂの数が多いほど、および第２板部材３２ｂの外側の寸法が大きいほど、パーティクル１３の飛散の防止効果を高めることができるが、移動ユニット７の大型化を招いてしまう。そのため、移動ユニット７の大きさを考慮して、第２板部材３２ｂの数および外側の寸法を設定するとよい。さらに、第２カバー部材３１ｂと複数の第２板部材３２ｂと第２スペーサ３４ｂとを有する第２カバーユニット３０ｂを、機械加工などにより一つの部品としてユニット化することもできる。なお、図５では、案内部材６と移動部材２０の間から±Ｙ方向にパーティクル１３が発生した場合について説明したが、移動部材２０の移動方向（±Ｘ方向）にパーティクル１３が発生した場合においても同様である。この場合は、パーティクル１３は第１カバーユニット３０ａにトラップされるため、第１カバーユニット３０ａも上述した第２カバーユニットと同様に構成するとよい。   In order to further reduce the scattering of particles 13 generated between the guide member 6 and the moving member 20 to the outside of the moving unit 7, the end surface on the base side of the second plate member 32 b and the base 1 The gap g should be reduced. Thereby, only the particles 13 having a small incident angle θ can pass through the gap g, and the scattering of the particles 13 can be further prevented. Further, as the number of the second plate members 32b in the second cover unit 30b is larger and the outside dimension of the second plate member 32b is larger, the effect of preventing the scattering of the particles 13 can be enhanced. Will lead to an increase in size. Therefore, in consideration of the size of the moving unit 7, the number of the second plate members 32 b and the outer dimensions may be set. Furthermore, the second cover unit 30b having the second cover member 31b, the plurality of second plate members 32b, and the second spacer 34b can be unitized as one component by machining or the like. In FIG. 5, the case where the particles 13 are generated in the ± Y direction from between the guide member 6 and the moving member 20 has been described. However, in the case where the particles 13 are generated in the moving direction (± X direction) of the moving member 20. Is the same. In this case, since the particles 13 are trapped in the first cover unit 30a, the first cover unit 30a may be configured similarly to the second cover unit described above.

上述したように、第１実施形態の案内装置５は、案内部材６と移動部材２０との間から発生したパーティクル１３を、カバーユニット３０の中に入り込ませてトラップすることができる。従って、第１実施形態の案内装置５では、パーティクル１３が案内装置５の外部に飛散することを大幅に減らすことができる。   As described above, the guide device 5 according to the first embodiment can trap the particles 13 generated between the guide member 6 and the moving member 20 by entering the cover unit 30. Therefore, in the guide device 5 of the first embodiment, it is possible to greatly reduce the scattering of the particles 13 to the outside of the guide device 5.

＜露光装置の実施形態＞
本発明の実施形態にかかる案内装置を有する露光装置２００について、図６を参照して説明する。図６は、本発明の露光装置２００の構成を示す概略図である。本発明の露光装置２００は、マスク４０のパターンを基板４１（例えば、ガラス基板や半導体基板）に投影して基板を露光するように構成される。露光装置２００は、マスク４０に光を照射する照明光学系４２と、マスク４０を保持するマスクステージ４３と、基板４１を保持する基板ステージ４と、マスク４０のパターンを基板４１に投影する投影光学系４４と、駆動装置１００とを備える。駆動装置１００は、ねじ部材２とナット部材３と案内装置５とを含み、基板ステージ４を駆動する。ねじ部材２は、基台１の上に支持されており、モーター８が駆動することによって回転軸を中心に回転する。ナット部材３は、基板ステージ４を支持しており、ねじ部材２が回転することによって、ねじ部材２の回転軸に沿って基板ステージ４を駆動可能にする。案内装置５は、基台１の上に配置された案内部材６と、基板ステージ４を支持すると共に、基板ステージ４の移動に伴って案内部材６に沿って移動可能な移動部材２０とを有する。そして、移動部材２０は、第１実施形態の案内装置５と同様に、案内装置５から発生するパーティクルが飛散することを防止するカバーユニット３０を備えている。 <Embodiment of exposure apparatus>
An exposure apparatus 200 having a guide device according to an embodiment of the present invention will be described with reference to FIG. FIG. 6 is a schematic diagram showing the configuration of the exposure apparatus 200 of the present invention. The exposure apparatus 200 of the present invention is configured to expose the substrate by projecting the pattern of the mask 40 onto the substrate 41 (for example, a glass substrate or a semiconductor substrate). The exposure apparatus 200 includes an illumination optical system 42 that irradiates light to the mask 40, a mask stage 43 that holds the mask 40, a substrate stage 4 that holds the substrate 41, and projection optics that projects the pattern of the mask 40 onto the substrate 41. A system 44 and a driving device 100 are provided. The drive device 100 includes a screw member 2, a nut member 3, and a guide device 5, and drives the substrate stage 4. The screw member 2 is supported on the base 1 and rotates about the rotation axis when the motor 8 is driven. The nut member 3 supports the substrate stage 4, and the substrate stage 4 can be driven along the rotation axis of the screw member 2 when the screw member 2 rotates. The guide device 5 includes a guide member 6 disposed on the base 1 and a moving member 20 that supports the substrate stage 4 and is movable along the guide member 6 as the substrate stage 4 moves. . And the moving member 20 is provided with the cover unit 30 which prevents that the particle | grains which generate | occur | produce from the guide apparatus 5 are scattered like the guide apparatus 5 of 1st Embodiment.

このように構成された露光装置２００は、上述したように、駆動装置１００が備える案内装置５がカバーユニット３０を備えているため、案内装置５から発生するパーティクルが飛散することを防止している。従って、露光装置２００では、露光時にパーティクルが基板やマスクに付着することが低減され、パターン欠損や歩留り低下などを抑制することができる。換言すれば、露光装置２００は、高精度な微細加工を実現することができる。   As described above, the exposure apparatus 200 configured in this way prevents the particles generated from the guide apparatus 5 from scattering because the guide apparatus 5 included in the drive apparatus 100 includes the cover unit 30. . Therefore, in the exposure apparatus 200, it is possible to reduce the adhesion of particles to the substrate and the mask during exposure, and it is possible to suppress pattern defects and yield reduction. In other words, the exposure apparatus 200 can realize highly accurate fine processing.

＜物品の製造方法の実施形態＞
本発明の実施形態にかかる物品の製造方法は、例えば、半導体デバイス等のマイクロデバイスや微細構造を有する素子等の物品を製造するのに好適である。本実施形態の物品の製造方法は、基板に塗布された感光剤に上記の露光装置を用いて潜像パターンを形成する工程（基板に描画を行う工程）と、かかる工程で潜像パターンが形成された基板を現像する工程とを含む。更に、かかる製造方法は、他の周知の工程（酸化、成膜、蒸着、ドーピング、平坦化、エッチング、レジスト剥離、ダイシング、ボンディング、パッケージング等）を含む。本実施形態の物品の製造方法は、従来の方法に比べて、物品の性能・品質・生産性・生産コストの少なくとも１つにおいて有利である。 <Embodiment of Method for Manufacturing Article>
The method for manufacturing an article according to an embodiment of the present invention is suitable, for example, for manufacturing an article such as a microdevice such as a semiconductor device or an element having a fine structure. In the method for manufacturing an article according to the present embodiment, a latent image pattern is formed on the photosensitive agent applied to the substrate using the above exposure apparatus (a step of drawing on the substrate), and the latent image pattern is formed in this step. Developing the processed substrate. Further, the manufacturing method includes other well-known steps (oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, and the like). The method for manufacturing an article according to the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared with the conventional method.

以上、本発明の好ましい実施形態について説明したが、本発明はこれらの実施形態に限定されないことはいうまでもなく、その要旨の範囲内で種々の変形および変更が可能である。   As mentioned above, although preferred embodiment of this invention was described, it cannot be overemphasized that this invention is not limited to these embodiment, A various deformation | transformation and change are possible within the range of the summary.

１：基台、２：ねじ部材、３：ナット部材、４：基板ステージ、５：案内装置、３０：カバーユニット、１００：駆動装置 1: base, 2: screw member, 3: nut member, 4: substrate stage, 5: guide device, 30: cover unit, 100: drive device

Claims (9)

基台の第１面上に配置された案内部材と、前記案内部材の延伸方向である第１方向に沿って移動可能な移動部材と、を有する案内装置であって、
前記移動部材に固定されて前記移動部材とともに移動する複数の第１板部材および複数の第２板部材を含み、
前記複数の第１板部材は、前記移動部材に対して前記第１方向側に設けられ、それぞれが前記第１面と対面する部分から前記第１面と交差する方向に延伸した延伸面を有し、
前記複数の第２板部材は、前記移動部材に対して、前記第１面に沿う方向であり且つ前記第１方向と交差する第２方向側に設けられ、それぞれが前記第１面と対面する部分から前記第１面と交差する方向に延伸した延伸面を有し、
前記複数の第１板部材は前記第１方向に互いに離隔して配置され、前記複数の第２板部材は前記第２方向に互いに離隔して配置されていることを特徴とする案内装置。 A guide device having a guide member disposed on a first surface of a base and a movable member movable along a first direction which is an extending direction of the guide member,
Including a plurality of first plate members and a plurality of second plate members fixed to the moving member and moving together with the moving member;
The plurality of first plate members are provided on the first direction side with respect to the moving member, and each of the first plate members has an extending surface extending in a direction intersecting the first surface from a portion facing the first surface. And
The plurality of second plate members are provided on a second direction side that is in a direction along the first surface and intersects the first direction with respect to the moving member, and each of the second plate members faces the first surface. Having a stretched surface stretched in a direction intersecting the first surface from a portion;
The plurality of first plate members are spaced apart from each other in the first direction, and the plurality of second plate members are spaced apart from each other in the second direction. 前記複数の第１板部材および前記複数の第２板部材は、前記移動部材の側面を取り囲んでいることを特徴とする請求項１に記載の案内装置。   The guide device according to claim 1, wherein the plurality of first plate members and the plurality of second plate members surround a side surface of the moving member. 前記複数の第１板部材のそれぞれは、前記案内部材が貫通する切欠部を前記基台側に有することを特徴とする請求項１又は２に記載の案内装置。   3. The guide device according to claim 1, wherein each of the plurality of first plate members has a notch through which the guide member passes on the base side. 前記複数の第１板部材の間隔を固定する第１固定部材を有することを特徴とする請求項１乃至３のうちいずれか１項に記載の案内装置。   4. The guide device according to claim 1, further comprising a first fixing member that fixes an interval between the plurality of first plate members. 5. 前記第１固定部材は、前記複数の第１板部材の間に配置されたスペーサ、および、前記第１面に沿って延伸し且つ前記複数の第１板部材における端部のうち前記第１面から遠い側の端部に接続された第１カバー部材の少なくとも一方を含むことを特徴とする請求項４に記載の案内装置。   The first fixing member includes a spacer disposed between the plurality of first plate members, and the first surface of the end portions of the plurality of first plate members that extend along the first surface. The guide device according to claim 4, comprising at least one of a first cover member connected to an end portion on a side far from the first cover member. 前記複数の第２板部材の間隔を固定する第２固定部材を有することを特徴とする請求項１乃至５のうちいずれか１項に記載の案内装置。   The guide device according to any one of claims 1 to 5, further comprising a second fixing member that fixes an interval between the plurality of second plate members. 前記第２固定部材は、前記複数の第２板部材の間に配置されたスペーサ、および、前記第１面に沿って延伸し且つ前記複数の第２板部材における端部のうち前記第１面から遠い側の端部に接続された第２カバー部材の少なくとも一方を含むことを特徴とする請求項６に記載の案内装置。   The second fixing member includes a spacer disposed between the plurality of second plate members, and the first surface among end portions of the plurality of second plate members that extend along the first surface. The guide device according to claim 6, comprising at least one of second cover members connected to an end portion far from the end portion. 基板ステージに保持された基板を露光する露光装置であって、
前記基板ステージを駆動する駆動装置を備え、
前記駆動装置は、基台の上に支持されたねじ部材と、前記基板ステージを支持し、前記ねじ部材の回転軸に沿って前記基板ステージを駆動可能なナット部材と、前記基板ステージを支持して前記基板ステージの移動を案内する請求項１乃至７のうちいずれか１項に記載の案内装置と、を有することを特徴とする露光装置。 An exposure apparatus that exposes a substrate held on a substrate stage,
A driving device for driving the substrate stage;
The driving device supports a screw member supported on a base, the substrate stage, a nut member capable of driving the substrate stage along a rotation axis of the screw member, and the substrate stage. An exposure apparatus comprising: the guide device according to claim 1 that guides movement of the substrate stage. 請求項８に記載の露光装置を用いてマスクに形成されたパターンを基板に露光するステップと、
前記ステップで露光された前記基板を現像するステップと、
を有することを特徴とする物品の製造方法。 Exposing the pattern formed on the mask to the substrate using the exposure apparatus according to claim 8;
Developing the substrate exposed in the step;
A method for producing an article comprising:
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JPH1037956A (en) * 1996-07-19 1998-02-13 Mitsubishi Jidosha Tekunometaru Kk Rear motion bearing with cover
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