JP2014163825A - Temperature characteristic correction circuit and method for magnetic sensor - Google Patents

Temperature characteristic correction circuit and method for magnetic sensor Download PDF

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JP2014163825A
JP2014163825A JP2013035857A JP2013035857A JP2014163825A JP 2014163825 A JP2014163825 A JP 2014163825A JP 2013035857 A JP2013035857 A JP 2013035857A JP 2013035857 A JP2013035857 A JP 2013035857A JP 2014163825 A JP2014163825 A JP 2014163825A
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temperature characteristic
temperature
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JP5878883B2 (en
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Takashi Mori
隆嗣 森
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Asahi Kasei Electronics Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide the temperature characteristic correction circuit and method of a magnetic sensor capable of canceling temperature characteristics with simple circuit configurations and procedures.SOLUTION: The temperature characteristic correction circuit includes: a temperature characteristic generation circuit 1 for generating a first voltage having temperature characteristics; a correction reference temperature adjustment circuit 2 for setting a second voltage; a primary correction value adjustment circuit 3 for amplifying a difference between the first voltage and the second voltage; a function circuit 4 for generating currents having temperature characteristics by using a third voltage adjusted by the primary correction value adjustment circuit 3 as a reference; a function output adjustment circuit 5 for generating a fourth voltage corresponding to the variation of a magnetic sensor; an addition circuit 6 for generating a fifth voltage by adding the third voltage as primary correction components and the fourth voltage as high-order correction components; and a voltage generation circuit 7 for generating drive voltages V6(T) an V7(T) by using the fifth voltage as a reference, and for voltage-driving the magnetic sensor by giving those drive voltages to power supply terminals Cp and Cn.

Description

本発明は、磁気センサの温度特性補正装置及び温度特性補正方法に関し、より詳細には、温度特性を簡単な回路構成及び手順でキャンセルすることができる磁気センサの温度特性補正回路及び温度特性補正方法に関する。   The present invention relates to a temperature characteristic correction apparatus and a temperature characteristic correction method for a magnetic sensor, and more specifically, a temperature characteristic correction circuit and a temperature characteristic correction method for a magnetic sensor capable of canceling the temperature characteristic with a simple circuit configuration and procedure. About.

従来から磁気ホールセンサは、携帯電話の開閉ＳＷや電流センサなど様々な分野で使用されている。この磁気ホールセンサのメリットとして、非接触型であること、汚れに強いことなどが挙げられる。
図１は、従来の定電圧駆動した磁気ホールセンサを説明するための構成図である。この磁気ホールセンサは、ホール素子とホール素子の定電圧源とを備えている。駆動電圧Ｖと印加磁場Ｂからホール素子の起電力ＶＨＶは、下式で与えられる。
ＶＨＶ＝ＳＶ・Ｖ・Ｂ
なお、ＳＶは、ホール素子を定電圧駆動した場合の磁気感度を示している。 Conventionally, magnetic Hall sensors have been used in various fields such as opening / closing SWs of mobile phones and current sensors. Advantages of this magnetic Hall sensor include a non-contact type and resistance to dirt.
FIG. 1 is a block diagram for explaining a conventional magnetic Hall sensor driven at a constant voltage. This magnetic Hall sensor includes a Hall element and a constant voltage source for the Hall element. From the drive voltage V and the applied magnetic field B, the electromotive force V HV of the Hall element is given by the following equation.
VHV = SV ・ V ・ B
SV represents the magnetic sensitivity when the Hall element is driven at a constant voltage.

図２は、従来の定電流駆動した磁気ホールセンサを説明するための構成図である。この磁気ホールセンサは、ホール素子とホール素子の定電流源とを備えている。駆動電流Ｉと印加磁場Ｂからホール素子の起電力ＶＨＩは、下式で与えられる。
ＶＨＩ＝ＳＩ・Ｉ・Ｂ
なお、ＳＶは、ホール素子を定電流駆動した場合の磁気感度を示している。
図３は、従来のホール素子の電源端子と主力端子の関係を示す図である。図１及び図２に示したホール素子は、図３に示す電源端子ＣＰ，ＣＮに電圧又は電流を印加し、それらと対向した位置に設けられている出力端子ＶＰ，ＶＮから起電力を取り出す構成となっている。 FIG. 2 is a configuration diagram for explaining a conventional magnetic Hall sensor driven by a constant current. This magnetic Hall sensor includes a Hall element and a constant current source of the Hall element. From the drive current I and the applied magnetic field B, the electromotive force V HI of the Hall element is given by the following equation.
V HI = SI ・ I ・ B
SV represents the magnetic sensitivity when the Hall element is driven at a constant current.
FIG. 3 is a diagram showing the relationship between the power supply terminals and main power terminals of a conventional Hall element. The Hall element shown in FIG. 1 and FIG. 2 applies voltage or current to the power supply terminals C P and C N shown in FIG. 3 and starts from output terminals V P and V N provided at positions facing them. The power is extracted.

従来から各種分野で使用され、普及してきた磁気ホールセンサであるが、磁気検出精度への要求はますます厳しくなっている。ここで問題となるのは、ホールセンサに使用されているホール素子の温度特性である。ホール素子が置かれている環境温度Ｔａに依存して、磁気感度ＳＶ又はＳＩが変化することで、起電力ＶＨＶ又はＶＨＩが変化する。つまり、温度変化に対し一定の起電力ＶＨＶ又はＶＨＩを得られないこととなる。 Although the magnetic Hall sensor has been used in various fields and has been widely used in the past, the demand for magnetic detection accuracy is becoming stricter. The problem here is the temperature characteristics of the Hall element used in the Hall sensor. Depending on the ambient temperature Ta where the Hall element is placed, the electromotive force VHV or VHI changes as the magnetic sensitivity SV or SI changes. That is, a constant electromotive force V HV or V HI cannot be obtained with respect to a temperature change.

例えば、特許文献１に記載のものは、１つの屈折点を持つ２本の直線を物理量センサの駆動電流に反映させることで物理量センサの温度特性をキャンセルしている。つまり、この特許文献１は、簡単な回路構成で物理量センサの温度補償が行える物理量センサ温度補償回路に関するもので、２次の温度特性を持つ物理量センサのオフセット電圧温度特性を、一つの屈折点を有する２本の直線による折れ線で示される温度特性補償信号に基づき補償するものである。   For example, the device described in Patent Document 1 cancels the temperature characteristics of a physical quantity sensor by reflecting two straight lines having one refraction point in the driving current of the physical quantity sensor. In other words, this Patent Document 1 relates to a physical quantity sensor temperature compensation circuit capable of performing temperature compensation of the physical quantity sensor with a simple circuit configuration. The offset voltage temperature characteristic of a physical quantity sensor having a second-order temperature characteristic is represented by one refraction point. Compensation is based on a temperature characteristic compensation signal indicated by a broken line with two straight lines.

特開２００９−５８３２７号公報JP 2009-58327 A

上述した特許文献１のように、２本の直線で物理量センサの温度特性をキャンセルするためには、すべての物理量センサ素子で少なくとも３温度での検査と調整が必要となる。
したがって、本発明のように、磁気センサの温度特性の１次成分と高次成分に相関がある場合に、１次成分の調整と高次成分の調整を連動させることで、２温度での調整で高次成分まで調整でき、温度特性を簡単な回路構成及び手順でキャンセルすることができる磁気センサの温度特性補正回路及び温度特性補正方法を実現することはできない。 As in Patent Document 1 described above, in order to cancel the temperature characteristics of the physical quantity sensor with two straight lines, all physical quantity sensor elements must be inspected and adjusted at at least three temperatures.
Therefore, when there is a correlation between the primary component and the high-order component of the temperature characteristic of the magnetic sensor as in the present invention, the adjustment at the two temperatures is performed by interlocking the adjustment of the primary component and the adjustment of the high-order component. Therefore, it is impossible to realize a temperature characteristic correction circuit and a temperature characteristic correction method for a magnetic sensor that can adjust to higher order components and cancel temperature characteristics with a simple circuit configuration and procedure.

本発明は、このような問題に鑑みてなされたもので、その目的とするところは、温度特性を簡単な回路構成及び手順でキャンセルすることができる磁気センサの温度特性補正回路及び温度特性補正方法を提供することにある。   The present invention has been made in view of such a problem, and an object of the present invention is to provide a temperature characteristic correction circuit and a temperature characteristic correction method for a magnetic sensor capable of canceling temperature characteristics with a simple circuit configuration and procedure. Is to provide.

本発明は、このような目的を達成するためになされたもので、請求項１に記載の発明は、磁気センサの温度特性の１次成分と高次成分に相関がある場合に、前記１次成分の調整と前記高次成分の調整を連動させることで、２温度での調整で前記高次成分まで調整できる磁気センサの温度特性補正回路であって、温度特性を有する第１の電圧（Ｖ１（Ｔ））を生成する温度特性生成回路（１）と、温度特性を補正しても起電力（ＶＨＶ又はＶＨＩ）に影響が出ない第２の電圧（Ｖ２）を設定するための補正基準温度調整回路（２）と、前記温度特性生成回路（１）からの第１の電圧（Ｖ１（Ｔ））と前記補正基準温度調整回路（２）からの第２の電圧（Ｖ２）との差分を増幅する１次補正値調整回路（３）と、該１次補正値調整回路（３）で調整した第３の電圧（Ｖ３（Ｔ））をリファレンスとして任意の温度特性を有する電流（Ｉ１（Ｖ３（Ｔ）））を生成する関数回路（４）と、該関数回路（４）の出力電流（Ｉ１（Ｖ３（Ｔ）））を電圧に変換し、電圧レベルを調整して前記磁気センサのバラツキに対応した第４の電圧（Ｖ４（Ｖ３（Ｔ）））を生成する関数出力調整回路（５）と、前記第３の電圧（Ｖ３（Ｔ））を１次の補正成分とし、前記第４の電圧（Ｖ４（Ｖ３（Ｔ）））を高次の補正成分とし、これらの２つを加算した第５の電圧（Ｖ５（Ｖ３（Ｔ））＝Ｖ３（Ｔ）＋Ｖ４（Ｖ３（Ｔ）））を生成する加算回路（６）と、前記磁気センサを電圧駆動又は電流駆動するために、前記第５の電圧（Ｖ５（Ｖ３（Ｔ）））をリファレンスとして、駆動電圧（Ｖ６（Ｔ），Ｖ７（Ｔ））又は駆動電流（Ｉ２（Ｔ））を生成し、それぞれの電源端子（ＣｐとＣｎ）に与えて前記磁気センサを電圧駆動又は電流駆動する生成回路（７又は１７）とを備えていることを特徴とする。 The present invention has been made to achieve such an object, and the invention according to claim 1 is characterized in that the first-order component and the first-order component of the temperature characteristic of the magnetic sensor have a correlation with the first-order component. A temperature characteristic correction circuit for a magnetic sensor capable of adjusting up to the higher order component by adjusting at two temperatures by linking the adjustment of the component and the adjustment of the higher order component, and a first voltage (V1) having a temperature characteristic. (T)) and a correction for setting a second voltage (V2) that does not affect the electromotive force (V HV or V HI ) even if the temperature characteristic is corrected. A reference temperature adjustment circuit (2), a first voltage (V1 (T)) from the temperature characteristic generation circuit (1), and a second voltage (V2) from the correction reference temperature adjustment circuit (2). The primary correction value adjustment circuit (3) for amplifying the difference and the primary correction value adjustment circuit (3) A function circuit (4) for generating a current (I1 (V3 (T))) having an arbitrary temperature characteristic with the adjusted third voltage (V3 (T)) as a reference, and an output current of the function circuit (4) (I1 (V3 (T))) is converted into a voltage, and the voltage level is adjusted to generate a fourth voltage (V4 (V3 (T))) corresponding to the variation of the magnetic sensor ( 5) and the third voltage (V3 (T)) as a primary correction component, the fourth voltage (V4 (V3 (T))) as a high-order correction component, and these two An adder circuit (6) for generating a summed fifth voltage (V5 (V3 (T)) = V3 (T) + V4 (V3 (T))), and for driving the magnetic sensor by voltage or current, Using the fifth voltage (V5 (V3 (T))) as a reference, drive voltages (V6 (T), V (T)) or a drive current (I2 (T)) is generated and applied to the respective power supply terminals (Cp and Cn), and a generation circuit (7 or 17) for voltage driving or current driving the magnetic sensor is provided. It is characterized by being.

また、請求項２に記載の発明は、磁気センサの温度特性の１次成分と高次成分に相関がある場合に、前記１次成分の調整と前記高次成分の調整を連動させることで、２温度での調整で前記高次成分まで調整できる磁気センサの温度特性補正方法であって、１次の温度特性を有する信号を生成する１次温特生成ステップと、前記１次の温度特性を有する信号をもとに所定の温度特性を有する信号を生成する所定温特生成ステップと、前記１次の温度特性を有する信号と前記所定の温度特性を有する信号とを加算する加算ステップと、加算した結果を前記磁気センサの駆動電圧又は駆動電流に反映させる反映ステップとを有していることを特徴とする。   Further, in the invention according to claim 2, when there is a correlation between the primary component and the high-order component of the temperature characteristic of the magnetic sensor, the adjustment of the primary component and the adjustment of the high-order component are interlocked, A temperature characteristic correction method for a magnetic sensor capable of adjusting up to the higher order component by adjusting at two temperatures, wherein a primary temperature characteristic generating step for generating a signal having a primary temperature characteristic, and the primary temperature characteristic A predetermined temperature characteristic generating step for generating a signal having a predetermined temperature characteristic based on the signal having, an adding step for adding the signal having the primary temperature characteristic and the signal having the predetermined temperature characteristic; And a reflecting step of reflecting the result obtained in the drive voltage or drive current of the magnetic sensor.

また、請求項３に記載の発明は、請求項２に記載の発明において、前記１次温特生成ステップは、補正後の磁気センサの駆動電圧又は駆動電流と補正後の磁気センサの駆動電圧又は駆動電流が第１の温度において一致するように、前記１次の温度特性を有する信号を生成することを特徴とする。
また、請求項４に記載の発明は、請求項３に記載の発明において、前記所定温特生成ステップは、前記第１の温度における補正後の磁気センサの駆動電圧又は駆動電流と第２の温度における補正後の磁気センサの駆動電圧又は駆動電流が一致するように、前記所定の温度特性を有する信号を生成することを特徴とする。 According to a third aspect of the present invention, in the invention of the second aspect, the primary temperature characteristic generation step includes the corrected driving voltage or driving current of the magnetic sensor and the corrected driving voltage of the magnetic sensor or The signal having the first-order temperature characteristic is generated so that the drive currents coincide with each other at the first temperature.
According to a fourth aspect of the present invention, in the invention according to the third aspect, the predetermined temperature characteristic generating step includes: correcting the driving voltage or driving current of the magnetic sensor after the correction at the first temperature and the second temperature. The signal having the predetermined temperature characteristic is generated so that the drive voltage or drive current of the magnetic sensor after the correction in (1) matches.

また、請求項５に記載の発明は、請求項４に記載の発明において、前記磁気センサに対して前記各ステップを行う実行ステップと、前記磁気センサとは他の磁気センサに対して、前記磁気センサに対する前記実行ステップと同じ設定をするステップと、補正後の他の磁気センサの駆動電圧又は駆動電流と補正後の他の磁気センサの駆動電圧又は駆動電流が第３の温度において一致するように、前記１次の温度特性を有する信号を生成するステップとを有していることを特徴とする。   According to a fifth aspect of the present invention, in the invention according to the fourth aspect of the present invention, an execution step of performing each step on the magnetic sensor, and the magnetic sensor is different from the magnetic sensor in the magnetic field. The step of performing the same setting as the execution step for the sensor, and the drive voltage or drive current of the other magnetic sensor after correction match the drive voltage or drive current of the other magnetic sensor after correction at the third temperature. And a step of generating a signal having the first-order temperature characteristic.

本発明によれば、磁気センサの温度特性の１次成分と高次成分に相関がある場合に、１次成分の調整と高次成分の調整を連動させることで、２温度での調整で高次成分まで調整でき、温度特性を簡単な回路構成及び手順でキャンセルすることができる磁気センサの温度特性補正回路及び温度特性補正方法を実現することができる。   According to the present invention, when the primary component and the high-order component of the temperature characteristic of the magnetic sensor are correlated, the adjustment of the primary component and the adjustment of the high-order component are linked to increase the adjustment at two temperatures. It is possible to realize a temperature characteristic correction circuit and a temperature characteristic correction method for a magnetic sensor that can adjust up to the next component and cancel the temperature characteristic with a simple circuit configuration and procedure.

従来の定電圧駆動した磁気ホールセンサを説明するための構成図である。It is a block diagram for demonstrating the conventional magnetic Hall sensor driven by the constant voltage. 従来の定電流駆動した磁気ホールセンサを説明するための構成図である。It is a block diagram for demonstrating the conventional magnetic Hall sensor driven by the constant current. 従来のホール素子の電源端子と主力端子の関係を示す図である。It is a figure which shows the relationship between the power supply terminal of a conventional Hall element, and a main terminal. 本発明に係る磁気センサの温度特性補正回路の実施例１を説明するためのブロック構成図である。It is a block block diagram for demonstrating Example 1 of the temperature characteristic correction circuit of the magnetic sensor which concerns on this invention. 磁気センサの温度特性のバラツキを示す図である。It is a figure which shows the variation in the temperature characteristic of a magnetic sensor. 磁気センサの温度特性の補正した温度特性を示す図である。It is a figure which shows the temperature characteristic which corrected the temperature characteristic of the magnetic sensor. 本発明に係る磁気センサの温度特性補正回路の実施例２を説明するためのブロック構成図である。It is a block block diagram for demonstrating Example 2 of the temperature characteristic correction circuit of the magnetic sensor which concerns on this invention. 図５から抜き出した代表例を示す磁気センサの温度特性を示す図である。It is a figure which shows the temperature characteristic of the magnetic sensor which shows the representative example extracted from FIG. 基準温度調整を示す図である。It is a figure which shows reference temperature adjustment. 高温と室温における磁気センサの温度特性を示す図である。It is a figure which shows the temperature characteristic of the magnetic sensor in high temperature and room temperature. 補正後の磁気センサの温度特性を示す図であるIt is a figure which shows the temperature characteristic of the magnetic sensor after correction | amendment.

以下、図面を参照して本発明の各実施例について説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図４は、本発明に係る磁気センサの温度特性補正回路の実施例１を説明するためのブロック構成図である。図５は、磁気センサの温度特性のバラツキを示す図である。図中符号１は温度特性生成回路、２は補正基準温度調整回路、３は１次補正値調整回路、４は関数回路、５は関数出力調整回路、６は加算回路、７は駆動回路（電圧生成回路）を示している。   FIG. 4 is a block diagram for explaining the first embodiment of the temperature characteristic correction circuit of the magnetic sensor according to the present invention. FIG. 5 is a diagram illustrating variation in temperature characteristics of the magnetic sensor. In the figure, reference numeral 1 is a temperature characteristic generation circuit, 2 is a correction reference temperature adjustment circuit, 3 is a primary correction value adjustment circuit, 4 is a function circuit, 5 is a function output adjustment circuit, 6 is an addition circuit, 7 is a drive circuit (voltage) Generation circuit).

本発明の温度特性補正回路は、図５に示すように、ＩｎＡｓ系の磁気センサの温度特性でみられるような、温度特性の１次成分と高次成分に相関がある場合に有効である。
本発明に係る磁気センサの温度特性補正回路は、磁気センサの温度特性の１次成分と高次成分に相関がある場合に、１次成分の調整と高次成分の調整を連動させることで、２温度での調整で高次成分まで調整できる磁気センサの温度特性補正回路である。 As shown in FIG. 5, the temperature characteristic correction circuit of the present invention is effective when there is a correlation between the first order component and the higher order component of the temperature characteristic as seen in the temperature characteristic of the InAs magnetic sensor.
When the temperature characteristic correction circuit of the magnetic sensor according to the present invention has a correlation between the primary component and the high-order component of the temperature characteristic of the magnetic sensor, the adjustment of the primary component and the adjustment of the high-order component are linked with each other, It is a temperature characteristic correction circuit of a magnetic sensor that can adjust up to higher order components by adjusting at two temperatures.

温度特性生成回路１は、温度特性を有する第１の電圧Ｖ１（Ｔ）を生成するものである。また、補正基準温度調整回路２は、温度特性を補正しても起電力ＶＨＶ又はＶＨＩに影響が出ない第２の電圧Ｖ２を設定するためのものである。
また、１次補正値調整回路３は、温度特性生成回路１からの第１の電圧Ｖ１（Ｔ）と補正基準温度調整回路２からの第２の電圧Ｖ２との差分を増幅するものである。また、関数回路４は、１次補正値調整回路３で調整した第３の電圧Ｖ３（Ｔ）をリファレンスとして任意の温度特性を有する電流Ｉ１（Ｖ３（Ｔ））を生成するものである。 The temperature characteristic generation circuit 1 generates a first voltage V1 (T) having temperature characteristics. The correction reference temperature adjustment circuit 2 is for setting the second voltage does not affect the electromotive force V HV or V HI be corrected temperature characteristic V2.
The primary correction value adjustment circuit 3 amplifies the difference between the first voltage V1 (T) from the temperature characteristic generation circuit 1 and the second voltage V2 from the correction reference temperature adjustment circuit 2. The function circuit 4 generates a current I1 (V3 (T)) having an arbitrary temperature characteristic with the third voltage V3 (T) adjusted by the primary correction value adjusting circuit 3 as a reference.

また、関数出力調整回路５は、関数回路４の出力電流Ｉ１（Ｖ３（Ｔ））を電圧に変換し、電圧レベルを調整して磁気センサのバラツキに対応した第４の電圧Ｖ４（Ｖ３（Ｔ））を生成するものである。また、加算回路６は、第３の電圧Ｖ３（Ｔ）を１次の補正成分とし、第４の電圧Ｖ４（Ｖ３（Ｔ））を高次の補正成分とし、これらの２つを加算した第５の電圧Ｖ５（Ｖ３（Ｔ）＝Ｖ３（Ｔ）＋Ｖ４（Ｖ３（Ｔ））を生成するものである。
また、電圧生成回路７は、磁気センサを電圧駆動するために、第５の電圧（Ｖ５（Ｖ３（Ｔ）））をリファレンスとして、駆動電圧Ｖ６（Ｔ），Ｖ７（Ｔ）を生成し、それぞれの電源端子ＣｐとＣｎに与えて磁気センサを電圧駆動するものである。 The function output adjustment circuit 5 converts the output current I1 (V3 (T)) of the function circuit 4 into a voltage, adjusts the voltage level, and adjusts the voltage to a fourth voltage V4 (V3 (T3 (T3)) corresponding to the variation of the magnetic sensor. )). The adder circuit 6 uses the third voltage V3 (T) as a primary correction component and the fourth voltage V4 (V3 (T)) as a high-order correction component, and adds these two. 5 (V3 (T) = V3 (T) + V4 (V3 (T))).
The voltage generation circuit 7 generates drive voltages V6 (T) and V7 (T) using the fifth voltage (V5 (V3 (T))) as a reference to drive the magnetic sensor. Are supplied to the power supply terminals Cp and Cn to drive the voltage of the magnetic sensor.

上述した各構成要素をさらに詳細に以下に説明する。
温度特性（温特）生成回路１は、異なる温度特性を持つ抵抗を使用したり、バンドギャップ回路を用いたりする回路などを用いて温度特性を持った第１の電圧Ｖ１（Ｔ）を生成する。また、補正基準温度調整回路２は、温度特性を補正してもＶＨＶやＶＨＩに影響が出ない温度を設定するための回路である。 Each component described above will be described in more detail below.
The temperature characteristic (temperature characteristic) generation circuit 1 generates a first voltage V1 (T) having a temperature characteristic using a circuit using a resistor having a different temperature characteristic or a band gap circuit. . The correction reference temperature adjustment circuit 2 is a circuit for setting the temperature be corrected temperature characteristic does not affect the V HV and V HI.

図６に示すように、温度特性を補正した場合にリファレンスとなる温度での、起電力ＶＨＶやＶＨＩが変化した場合には補正が正しく行えないため、温度特性の補正を行ってもリファレンスとなる温度での、起電力ＶＨＶやＶＨＩが変化しないように調整を行う必要がある。温度特性補正のリファレンスとなる温度で、Ｖ１（Ｔ）＝Ｖ２となるように設定することで、起電力ＶＨＶやＶＨＩが変化しない調整を行う。 As shown in FIG. 6, when the electromotive force V HV or V HI changes at the reference temperature when the temperature characteristic is corrected, the correction cannot be performed correctly. Therefore, even if the temperature characteristic is corrected, the reference is performed. It is necessary to make adjustments so that the electromotive forces V HV and V HI do not change at the temperature. Adjustment is performed such that the electromotive forces VHV and VHI do not change by setting V1 (T) = V2 at a temperature that serves as a reference for correcting the temperature characteristics.

また、１次補正値調整回路３は、第１の電圧Ｖ１（Ｔ）と第２の電圧Ｖ２の差分を増幅する回路である。基準電圧をＶａとすると、１次補正値調整回路の出力は、第３の電圧Ｖ３（Ｔ）＝Ａ・｛Ｖ１（Ｔ）−Ｖ２｝＋Ｖａとして与えられる。個々での増幅率Ａは、磁気センサの温度特性のバラツキに応じて個々に設定する値である。
また、関数回路４は、１次補正値調整回路で調整したＶ３（Ｔ）をリファレンスとして任意の温度特性を持つＩ１（Ｖ３（Ｔ））を生成する。１次の温度特性を持つ電圧Ｖ３（Ｔ）をリファレンスとしているため、１次補正値調整回路３の増幅率Ａを調整しＶ３（Ｔ）の値が変化すると連動して出力Ｉ１（Ｖ３（Ｔ））の値も変化する。
また、関数出力調整回路５は、関数回路４の出力Ｉ１（Ｖ３（Ｔ））を電圧へと変換し、電圧レベルを調整し磁気センサのバラツキに対応した第４の電圧Ｖ４（Ｉ１（Ｖ３（Ｔ）））、つまり、Ｖ４（Ｖ３（Ｔ））を生成することができる。 The primary correction value adjustment circuit 3 is a circuit that amplifies the difference between the first voltage V1 (T) and the second voltage V2. When the reference voltage is Va, the output of the primary correction value adjusting circuit is given as the third voltage V3 (T) = A · {V1 (T) −V2} + Va. The individual amplification factor A is a value set individually in accordance with variations in temperature characteristics of the magnetic sensor.
Further, the function circuit 4 generates I1 (V3 (T)) having an arbitrary temperature characteristic with V3 (T) adjusted by the primary correction value adjusting circuit as a reference. Since the voltage V3 (T) having the primary temperature characteristic is used as a reference, the output I1 (V3 (T3) is interlocked when the gain A of the primary correction value adjusting circuit 3 is adjusted and the value of V3 (T) changes. The value of)) also changes.
The function output adjustment circuit 5 converts the output I1 (V3 (T)) of the function circuit 4 into a voltage, adjusts the voltage level, and adjusts the voltage to a fourth voltage V4 (I1 (V3 ( T))), that is, V4 (V3 (T)) can be generated.

また、加算回路６は、Ｖ３（Ｔ）を１次の補正成分とし、Ｖ４（Ｖ３（Ｔ））を高次の補正成分とし、この２つを加算した第５の電圧Ｖ５（Ｖ３（Ｔ））＝Ｖ３（Ｔ）＋Ｖ４（Ｖ３（Ｔ））を生成する。
また、駆動回路（電圧生成回路）７は、磁気センサを定電圧駆動するための回路である。第５の電圧Ｖ５（Ｖ３（Ｔ））をリファレンスとして、第６の電圧Ｖ６（Ｖ５）、つまりＶ６（Ｖ３（Ｔ））とＶ７（Ｖ５）、つまり、第７の電圧Ｖ７（Ｖ３（Ｔ））を生成し、それぞれＣｐとＣｎに与え磁気センサを定電圧駆動する。 The adding circuit 6 uses V3 (T) as a primary correction component, V4 (V3 (T)) as a high-order correction component, and adds these two to a fifth voltage V5 (V3 (T) ) = V3 (T) + V4 (V3 (T)).
The drive circuit (voltage generation circuit) 7 is a circuit for driving the magnetic sensor at a constant voltage. The sixth voltage V6 (V5), that is, V6 (V3 (T)) and V7 (V5), that is, the seventh voltage V7 (V3 (T)), using the fifth voltage V5 (V3 (T)) as a reference. ) And applied to Cp and Cn, respectively, to drive the magnetic sensor at a constant voltage.

図７は、本発明に係る磁気センサの温度特性補正回路の実施例２を説明するためのブロック構成図である。図中符号１７は駆動回路（電流生成回路）を示している。なお、図４と同じ機能を有する構成要素には同一の符号を付してある。図７のように駆動回路１７でＩ２（Ｔ）＝Ｉ２（Ｖ３（Ｔ））のような電流生成する回路を用いることで磁気センサを定電流駆動することもできる。つまり、電圧生成回路１７は、磁気センサを電流駆動するために、第５の電圧Ｖ５（Ｖ３（Ｔ））をリファレンスとして、駆動電流Ｉ２（Ｔ）を生成し、それぞれの電源端子ＣｐとＣｎに与えて磁気センサを電流駆動するものである。   FIG. 7 is a block diagram for explaining a second embodiment of the temperature characteristic correction circuit of the magnetic sensor according to the present invention. Reference numeral 17 in the figure denotes a drive circuit (current generation circuit). In addition, the same code | symbol is attached | subjected to the component which has the same function as FIG. As shown in FIG. 7, the drive circuit 17 can drive the magnetic sensor at a constant current by using a circuit that generates a current such as I2 (T) = I2 (V3 (T)). That is, the voltage generation circuit 17 generates the drive current I2 (T) using the fifth voltage V5 (V3 (T)) as a reference to drive the magnetic sensor with current, and supplies the drive current I2 (T) to the respective power supply terminals Cp and Cn. The magnetic sensor is current driven.

このように、駆動電圧又は駆動電流をＶ３（Ｔ）の関数とすることで、Ｖ３（Ｔ）のみの調整で、温度特性の１次成分及び関数成分を補正することができる。
次に、本発明に係る磁気センサの温度特性補正方法について以下に説明する。
温度特性の１次成分と高次成分に相関がある磁気センサの温度特性をキャンセルする場合に、補正の基準温度（リファレンス）を高温とし、高温と室温で温度特性を補正する場合の手順について説明する。 In this way, by setting the drive voltage or drive current as a function of V3 (T), the primary component and the function component of the temperature characteristic can be corrected by adjusting only V3 (T).
Next, a temperature characteristic correction method for a magnetic sensor according to the present invention will be described below.
Describes the procedure for correcting the temperature characteristics at high and room temperature, with the reference temperature (reference) for correction being high when canceling the temperature characteristics of the magnetic sensor that has a correlation between the primary component and the high-order component of the temperature characteristics To do.

本発明に係る磁気センサの温度特性補正方法は、磁気センサの温度特性の１次成分と高次成分に相関がある場合に、１次成分の調整と高次成分の調整を連動させることで、２温度での調整で高次成分まで調整できる磁気センサの温度特性補正方法である。
まず、１次温特生成ステップにおいて、１次の温度特性を有する信号を生成する。次に、所定温特生成ステップにおいて、１次の温度特性を有する信号をもとに所定の温度特性を有する信号を生成する。 The temperature characteristic correction method for a magnetic sensor according to the present invention, when there is a correlation between the primary component and the higher order component of the temperature characteristic of the magnetic sensor, interlocking the adjustment of the primary component and the adjustment of the higher order component, This is a temperature characteristic correction method for a magnetic sensor that can adjust up to higher order components by adjusting at two temperatures.
First, in the primary temperature special generation step, a signal having a primary temperature characteristic is generated. Next, in a predetermined temperature characteristic generation step, a signal having a predetermined temperature characteristic is generated based on a signal having a primary temperature characteristic.

次に、加算ステップにおいて、１次の温度特性を有する信号と所定の温度特性を有する信号とを加算する。次に、反映ステップにおいて、加算した結果を磁気センサの駆動電圧又は駆動電流に反映させる。
また、１次温特生成ステップは、補正後の磁気センサの駆動電圧又は駆動電流と補正後の磁気センサの駆動電圧又は駆動電流が第１の温度において一致するように、１次の温度特性を有する信号を生成する。 Next, in the addition step, a signal having a primary temperature characteristic and a signal having a predetermined temperature characteristic are added. Next, in the reflection step, the added result is reflected in the drive voltage or drive current of the magnetic sensor.
Further, the primary temperature characteristic generation step sets the primary temperature characteristic so that the corrected driving voltage or driving current of the magnetic sensor matches the corrected driving voltage or driving current of the magnetic sensor at the first temperature. A signal having

また、所定温特生成ステップは、第１の温度における補正後の磁気センサの駆動電圧又は駆動電流と第２の温度における補正後の磁気センサの駆動電圧又は駆動電流が一致するように、所定の温度特性を有する信号を生成する。
また、磁気センサに対して上述した各ステップを実行する実行ステップと、磁気センサとは他の磁気センサに対して、磁気センサに対する実行ステップと同じ設定をするステップと、補正後の他の磁気センサの駆動電圧又は駆動電流と補正後の他の磁気センサの駆動電圧又は駆動電流が第３の温度において一致するように、１次の温度特性を有する信号を生成するステップとを有している。 In addition, the predetermined temperature special generation step is performed so that the corrected driving voltage or driving current of the magnetic sensor at the first temperature matches the corrected driving voltage or driving current of the magnetic sensor at the second temperature. A signal having a temperature characteristic is generated.
In addition, an execution step for executing the above-described steps for the magnetic sensor, a step for performing the same setting as the execution step for the magnetic sensor for another magnetic sensor, and another magnetic sensor after correction Generating a signal having a first-order temperature characteristic so that the drive voltage or drive current of the second magnetic sensor matches the drive voltage or drive current of the other magnetic sensor after correction at the third temperature.

以下に、各手順について詳細に説明する。
［手順１］
図８は、図５から抜き出した代表例を示す磁気センサの温度特性を示す図である。まず、高温で補正基準温度調整回路２を用いて基準温度の調整を行う。温度特性のないＶ２の値が温度特性を持つＶ１（Ｔ）値と同じになるようにＶ２を調整する。図９は、基準温度調整を示す図である。
［手順２］
高温（基準温度）での起電力ＶＨＶ又はＶＨＩを測定する。この値をリファレンスにして温度特性の補正を行う。 Hereinafter, each procedure will be described in detail.
[Procedure 1]
FIG. 8 is a diagram showing temperature characteristics of a magnetic sensor showing a representative example extracted from FIG. First, the reference temperature is adjusted using the corrected reference temperature adjustment circuit 2 at a high temperature. V2 is adjusted so that the value of V2 having no temperature characteristic is the same as the value of V1 (T) having the temperature characteristic. FIG. 9 is a diagram showing the reference temperature adjustment.
[Procedure 2]
The electromotive force V HV or V HI at a high temperature (reference temperature) is measured. Temperature characteristics are corrected using this value as a reference.

［手順３］
室温での起電力ＶＨＶ又はＶＨＩを測定しながら、１次補正値調整回路３の調整と同時に関数出力調整回路５の調整を行う。このとき、図１０に示すように、高温（基準温度）と室温の起電力ＶＨＶ又はＶＨＩを測定しただけでは１次補正値調整回路３と関数出力調整回路５の調整値の組み合わせで最適な調整値が複数とれるので、それぞれの調整値を記録しておく。 [Procedure 3]
The function output adjustment circuit 5 is adjusted simultaneously with the adjustment of the primary correction value adjustment circuit 3 while measuring the electromotive force V HV or V HI at room temperature. Optimal this time, as shown in FIG. 10, a combination of high temperature (reference temperature) and the adjustment value of the room temperature electromotive force V HV or V HI alone is primary correction value adjusting circuit 3 were measured for the function output adjusting circuit 5 Since a plurality of adjustment values can be taken, each adjustment value is recorded.

［手順４］
低温での起電力ＶＨＶ又はＶＨＩを測定し、手順２（高温（基準温度））で測定した起電力ＶＨＶ又はＶＨＩの値と同じ１次補正値調整回路３と関数出力調整回路５の調整値の組み合わせを最終補正値とする。
上述した手順１乃至手順４を行うことで温度特性をキャンセルすることができる。
つまり、磁気センサの温度特性の１次成分と高次成分に相関がある場合に、あるサンプルを用いて手順４で決定した関数出力調整回路５の調整値を、他のサンプルにも適用することで、高温（基準温度）と室温の２温度での精度が良い補正ができる。
手順４で関数出力調整回路５の調整値を次のサンプルを補正する場合に適用し、手順１から手順３までの調整をおこなう。このとき関数出力調整回路５の調整値は決まっているので、手順は以下のようになる。 [Procedure 4]
Measuring the electromotive force V HV or V HI at low temperatures, Step 2 (high temperature (reference temperature)) same primary correction value adjusting circuit 3 and the value of the electromotive force V HV or V HI measured at the function output adjusting circuit 5 The combination of the adjustment values is the final correction value.
The temperature characteristics can be canceled by performing the procedure 1 to the procedure 4 described above.
That is, when there is a correlation between the first order component and the higher order component of the temperature characteristics of the magnetic sensor, the adjustment value of the function output adjustment circuit 5 determined in step 4 using a certain sample is applied to other samples. Therefore, correction with high accuracy at two temperatures, that is, a high temperature (reference temperature) and a room temperature can be performed.
The adjustment value of the function output adjustment circuit 5 is applied when correcting the next sample in the procedure 4, and the adjustment from the procedure 1 to the procedure 3 is performed. At this time, since the adjustment value of the function output adjustment circuit 5 is determined, the procedure is as follows.

［手順５］
高温で補正基準温度調整回路２を用いて基準温度の調整を行い、温度特性のないＶ２の値が温度特性を持つＶ１（Ｔ）と同じ値になるように調整する。
［手順６］
高温（基準温度）での起電力ＶＨＶ又はＶＨＩを測定する。この値をリファレンスにして温度特性の補正を行う。 [Procedure 5]
The reference temperature is adjusted using the corrected reference temperature adjustment circuit 2 at a high temperature so that the value of V2 having no temperature characteristic is the same as V1 (T) having the temperature characteristic.
[Procedure 6]
The electromotive force V HV or V HI at a high temperature (reference temperature) is measured. Temperature characteristics are corrected using this value as a reference.

［手順７］
室温において、手順４で決めた調整値で関数出力調整回路の値を決めておき、起電力ＶＨＶ又はＶＨＩを測定しながら、１次補正値調整回路３の調整を行う。このとき、１次補正値調整回路３の出力Ｖ３（Ｔ）が変動すると、関数回路４の出力Ｉ１（Ｖ３（Ｔ））も連動して変動するので、１次の温度特性と高次の温度特性に相関がある場合に精度よく温度特性の補正を行うことができる。 [Procedure 7]
At room temperature, the value of the function output adjustment circuit is determined with the adjustment value determined in step 4, and the primary correction value adjustment circuit 3 is adjusted while measuring the electromotive force VHV or VHI . At this time, if the output V3 (T) of the primary correction value adjustment circuit 3 changes, the output I1 (V3 (T)) of the function circuit 4 also changes in conjunction with it, so the primary temperature characteristic and the high-order temperature When the characteristics are correlated, the temperature characteristics can be corrected with high accuracy.

図１１は、補正後の磁気センサの温度特性を示す図である。実際に調整を行った温度以外では最適な補正がされていないが、温度特性は十分低減される。
以上のように、本発明によれば、磁気センサの温度特性の１次成分と高次成分に相関がある場合に、１次成分の調整と高次成分の調整を連動させることで、２温度での調整で高次成分まで調整でき、温度特性を簡単な回路構成及び手順でキャンセルすることができる磁気センサの温度特性補正回路及び温度特性補正方法を実現することができる。 FIG. 11 is a diagram illustrating the temperature characteristics of the magnetic sensor after correction. Although the optimum correction is not performed except for the temperature at which the adjustment is actually performed, the temperature characteristics are sufficiently reduced.
As described above, according to the present invention, when there is a correlation between the primary component and the high-order component of the temperature characteristics of the magnetic sensor, the adjustment of the primary component and the adjustment of the high-order component are linked to each other, Thus, it is possible to realize a temperature characteristic correction circuit and a temperature characteristic correction method for a magnetic sensor that can adjust up to higher order components and can cancel temperature characteristics with a simple circuit configuration and procedure.

１ 温度特性生成回路（温特生成回路）
２ 補正基準温度調整回路
３ １次補正値調整回路
４ 関数回路
５ 関数出力調整回路
６ 加算回路
７ 駆動回路（電圧生成回路）
１７ 駆動回路（電流生成回路） 1 Temperature characteristics generation circuit (temperature characteristics generation circuit)
2 correction reference temperature adjustment circuit 3 primary correction value adjustment circuit 4 function circuit 5 function output adjustment circuit 6 addition circuit 7 drive circuit (voltage generation circuit)
17 Drive circuit (current generation circuit)

Claims (5)

磁気センサの温度特性の１次成分と高次成分に相関がある場合に、前記１次成分の調整と前記高次成分の調整を連動させることで、２温度での調整で前記高次成分まで調整できる磁気センサの温度特性補正回路であって、
温度特性を有する第１の電圧を生成する温度特性生成回路と、
温度特性を補正しても起電力に影響が出ない第２の電圧を設定するための補正基準温度調整回路と、
前記温度特性生成回路からの第１の電圧と前記補正基準温度調整回路からの第２の電圧との差分を増幅する１次補正値調整回路と、
該１次補正値調整回路で調整した第３の電圧をリファレンスとして任意の温度特性を有する電流を生成する関数回路と、
該関数回路の出力電流を電圧に変換し、電圧レベルを調整して前記磁気センサのバラツキに対応した第４の電圧を生成する関数出力調整回路と、
前記第３の電圧を１次の補正成分とし、前記第４の電圧を高次の補正成分とし、これらの２つを加算した第５の電圧を生成する加算回路と、
前記磁気センサを電圧駆動または電流駆動するために、前記第５の電圧をリファレンスとして、駆動電圧又は駆動電流を生成し、それぞれの電源端子に与えて前記磁気センサを電圧駆動または電流駆動する生成回路と
を備えていることを特徴とする磁気センサの温度特性補正回路。 When there is a correlation between the primary component and the higher-order component of the temperature characteristics of the magnetic sensor, the adjustment of the primary component and the adjustment of the higher-order component are interlocked to achieve the higher-order component by adjusting at two temperatures. A temperature sensor correction circuit for an adjustable magnetic sensor,
A temperature characteristic generation circuit for generating a first voltage having a temperature characteristic;
A correction reference temperature adjustment circuit for setting a second voltage that does not affect the electromotive force even if the temperature characteristic is corrected;
A primary correction value adjustment circuit that amplifies a difference between the first voltage from the temperature characteristic generation circuit and the second voltage from the correction reference temperature adjustment circuit;
A function circuit that generates a current having an arbitrary temperature characteristic with reference to the third voltage adjusted by the primary correction value adjustment circuit;
A function output adjustment circuit that converts the output current of the function circuit into a voltage and adjusts the voltage level to generate a fourth voltage corresponding to the variation of the magnetic sensor;
An adder circuit that generates a fifth voltage obtained by adding the second voltage to the third voltage as a first-order correction component and the fourth voltage as a higher-order correction component;
In order to drive the magnetic sensor by voltage or current, a generation circuit that generates a drive voltage or drive current using the fifth voltage as a reference, and supplies the power voltage to each power supply terminal to drive the magnetic sensor by voltage or current. And a temperature characteristic correction circuit for a magnetic sensor. 磁気センサの温度特性の１次成分と高次成分に相関がある場合に、前記１次成分の調整と前記高次成分の調整を連動させることで、２温度での調整で前記高次成分まで調整できる磁気センサの温度特性補正方法であって、
１次の温度特性を有する信号を生成する１次温特生成ステップと、
前記１次の温度特性を有する信号をもとに所定の温度特性を有する信号を生成する所定温特生成ステップと、
前記１次の温度特性を有する信号と前記所定の温度特性を有する信号とを加算する加算ステップと、
加算した結果を前記磁気センサの駆動電圧又は駆動電流に反映させる反映ステップと
を有していることを特徴とする磁気センサの温度特性補正方法。 When there is a correlation between the primary component and the higher-order component of the temperature characteristics of the magnetic sensor, the adjustment of the primary component and the adjustment of the higher-order component are interlocked to achieve the higher-order component by adjusting at two temperatures. A temperature sensor correction method for an adjustable magnetic sensor,
A primary temperature characteristic generating step for generating a signal having a primary temperature characteristic;
A predetermined temperature characteristic generating step for generating a signal having a predetermined temperature characteristic based on the signal having the primary temperature characteristic;
An adding step of adding the signal having the primary temperature characteristic and the signal having the predetermined temperature characteristic;
And a reflection step of reflecting the added result in the driving voltage or driving current of the magnetic sensor. 前記１次温特生成ステップは、
補正後の磁気センサの駆動電圧又は駆動電流と補正後の磁気センサの駆動電圧又は駆動電流が第１の温度において一致するように、前記１次の温度特性を有する信号を生成することを特徴とする請求項２に記載の磁気センサの温度特性補正方法。 The primary temperature special generation step includes:
Generating a signal having the primary temperature characteristic so that the corrected driving voltage or driving current of the magnetic sensor and the corrected driving voltage or driving current of the magnetic sensor coincide with each other at the first temperature; The method for correcting a temperature characteristic of a magnetic sensor according to claim 2. 前記所定温特生成ステップは、
前記第１の温度における補正後の磁気センサの駆動電圧又は駆動電流と第２の温度における補正後の磁気センサの駆動電圧又は駆動電流が一致するように、前記所定の温度特性を有する信号を生成することを特徴とする請求項３に記載の磁気センサの温度特性補正方法。 The predetermined temperature characteristic generation step includes:
Generate a signal having the predetermined temperature characteristic so that the corrected driving voltage or driving current of the magnetic sensor at the first temperature matches the corrected driving voltage or driving current of the magnetic sensor at the second temperature. The method for correcting a temperature characteristic of a magnetic sensor according to claim 3. 前記磁気センサに対して前記各ステップを行う実行ステップと、
前記磁気センサとは他の磁気センサに対して、前記磁気センサに対する前記実行ステップと同じ設定をするステップと、
補正後の他の磁気センサの駆動電圧又は駆動電流と補正後の他の磁気センサの駆動電圧又は駆動電流が第３の温度において一致するように、前記１次の温度特性を有する信号を生成するステップと
を有していることを特徴とする請求項４に記載の磁気センサの温度特性補正方法。 An execution step of performing each step on the magnetic sensor;
The same setting as the execution step for the magnetic sensor with respect to another magnetic sensor as the magnetic sensor;
The signal having the first-order temperature characteristic is generated so that the drive voltage or drive current of the other magnetic sensor after correction matches the drive voltage or drive current of the other magnetic sensor after correction at the third temperature. The method for correcting temperature characteristics of a magnetic sensor according to claim 4, further comprising: steps.
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