JP2014162977A - 硬質皮膜およびその製造方法ならびに硬質皮膜被覆部材 - Google Patents
硬質皮膜およびその製造方法ならびに硬質皮膜被覆部材 Download PDFInfo
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Abstract
【解決手段】組成式が(TiaAlbSicRd)Oxであり(但し、Rは希土類元素を示す。またa、b、c、dは夫々Ti、Al、Si、Rの原子比を示し、xはOの原子比を示す)、かつ、0.30≦a≦0.7、0.30≦b≦0.70、0≦c≦0.2、0.005≦d≦0.05、a+b+c+d=1、0.5≦a/b<1、および、RがCeを含まない場合は下記式(1)を満たし、RがCeを含む場合は下記式(2)を満たす基材上に形成される硬質皮膜。
0.8≦[x/(2a+1.5b+2c+1.5d)]≦1.2 …(1)
0.8≦[x/(2a+1.5b+2c+2d)]≦1.2 …(2)
【選択図】なし
Description
組成式が(TiaAlbSicRd)Oxであり(但し、Rは希土類元素を示す。またa、b、c、dは夫々Ti、Al、Si、Rの原子比を示し、xはOの原子比を示す)、かつ、
0.30≦a≦0.7、
0.30≦b≦0.70、
0≦c≦0.2、
0.005≦d≦0.05、
a+b+c+d=1、
0.5≦a/b<1、および、
RがCeを含まない場合は下記式(1)を満たし、RがCeを含む場合は下記式(2)を満たすところに特徴を有する。
0.8≦[x/(2a+1.5b+2c+1.5d)]≦1.2 …(1)
0.8≦[x/(2a+1.5b+2c+2d)]≦1.2 …(2)
0.05≦a≦0.4、
0.10≦e≦0.85、
0≦b≦0.70、
0≦c≦0.2、
0.005≦d≦0.05、
a+b+c+d+e=1、
b=0の場合はa/e<1.0、および、
RがCeを含まない場合は下記式(3)を満たし、RがCeを含む場合は下記式(4)を満たすところに特徴を有する。
0.8≦[x/(2a+1.5e+1.5b+2c+1.5d)]≦1.2 …(3)
0.8≦[x/(2a+1.5e+1.5b+2c+2d)]≦1.2 …(4)
組成式が(TiaAlbSicRd)Oxであり
(但し、Rは希土類元素を示す。またa、b、c、dは夫々Ti、Al、Si、Rの原子比を示し、xはOの原子比を示す。以下同じ)、かつ、
0.30≦a≦0.7、
0.30≦b≦0.70、
0≦c≦0.2、
0.005≦d≦0.05、
a+b+c+d=1、
0.5≦a/b<1、および、
RがCeを含まない場合は下記式(1)を満たし、RがCeを含む場合は下記式(2)を満たすことを特徴とする硬質皮膜を規定する。
0.8≦[x/(2a+1.5b+2c+1.5d)]≦1.2 …(1)
0.8≦[x/(2a+1.5b+2c+2d)]≦1.2 …(2)
組成式が(TiaCreAlbSicRd)Oxであり
(但し、Rは希土類元素を示す。またa、e、b、c、dは夫々Ti、Cr、Al、Si、Rの原子比を示し、xはOの原子比を示す。以下同じ)、かつ、
0.05≦a≦0.4、
0.10≦e≦0.85、
0≦b≦0.70、
0≦c≦0.2、
0.005≦d≦0.05、
a+b+c+d+e=1、
b=0の場合はa/e<1.0、および、
RがCeを含まない場合は下記式(3)を満たし、RがCeを含む場合は下記式(4)を満たすことを特徴とする硬質皮膜を規定する。
0.8≦[x/(2a+1.5e+1.5b+2c+1.5d)]≦1.2 …(3)
0.8≦[x/(2a+1.5e+1.5b+2c+2d)]≦1.2 …(4)
表1に示す組成の酸化物皮膜を、AIP装置を用い、AIP法(カソード放電型アークイオンプレーティング法)で形成し、耐摩耗性の評価を行った。
被削材:FCD500(生材)
速度:300m/分
深さ切込:2mm
送り:0.25mm/刃
潤滑:ウェット(エマルジョン)
切削時間:6分
評価指標:フランク摩耗量
次に、中間層としてTiAlNを形成し、次いでx値の異なる(Ti0.45Al0.49Si0.03Y0.03)Ox皮膜(a/b=0.92)(元素名右下の数値は原子比を示す。以下同じ)、または(Ti0.15Cr0.3Al0.47Si0.05Y0.03)Ox皮膜を酸化物皮膜として形成し、比率Qまたは比率Rが耐摩耗性に及ぼす影響を調べた。
Claims (5)
- 基材上に形成される硬質皮膜であって、
組成式が(TiaAlbSicRd)Oxであり(但し、Rは希土類元素を示す。またa、b、c、dは夫々Ti、Al、Si、Rの原子比を示し、xはOの原子比を示す)、かつ、
0.30≦a≦0.7、
0.30≦b≦0.70、
0≦c≦0.2、
0.005≦d≦0.05、
a+b+c+d=1、
0.5≦a/b<1、および、
RがCeを含まない場合は下記式(1)を満たし、RがCeを含む場合は下記式(2)を満たすことを特徴とする硬質皮膜。
0.8≦[x/(2a+1.5b+2c+1.5d)]≦1.2 …(1)
0.8≦[x/(2a+1.5b+2c+2d)]≦1.2 …(2) - 基材上に形成される硬質皮膜であって、
組成式が(TiaCreAlbSicRd)Oxであり(但し、Rは希土類元素を示す。またa、e、b、c、dは夫々Ti、Cr、Al、Si、Rの原子比を示し、xはOの原子比を示す)、かつ、
0.05≦a≦0.4、
0.10≦e≦0.85、
0≦b≦0.70、
0≦c≦0.2、
0.005≦d≦0.05、
a+b+c+d+e=1、
b=0の場合はa/e<1.0、および、
RがCeを含まない場合は下記式(3)を満たし、RがCeを含む場合は下記式(4)を満たすことを特徴とする硬質皮膜。
0.8≦[x/(2a+1.5e+1.5b+2c+1.5d)]≦1.2 …(3)
0.8≦[x/(2a+1.5e+1.5b+2c+2d)]≦1.2 …(4) - 基材と、当該基材を被覆する請求項1または2に記載の硬質皮膜とを備えていることを特徴とする硬質皮膜被覆部材。
- 前記基材と前記硬質皮膜の間に、Tiおよび/またはCrを含む窒化物からなる中間層を有する請求項3に記載の硬質皮膜被覆部材。
- 請求項1または2に記載の硬質皮膜の製造方法であって、酸素分圧が0.5Pa以上4Pa以下の雰囲気中でカソード放電型アークイオンプレーティング法により形成することを特徴とする硬質皮膜の製造方法。
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JP2013037449A JP6208437B2 (ja) | 2013-02-27 | 2013-02-27 | 硬質皮膜およびその製造方法ならびに硬質皮膜被覆部材 |
KR1020157022869A KR20150110730A (ko) | 2013-02-27 | 2014-02-10 | 경질 피막 및 그 제조 방법, 및 경질 피막 피복 부재 |
US14/764,251 US9845392B2 (en) | 2013-02-27 | 2014-02-10 | Hard coating, method for manufacturing same, and hard-coated article |
PCT/JP2014/053104 WO2014132790A1 (ja) | 2013-02-27 | 2014-02-10 | 硬質皮膜およびその製造方法ならびに硬質皮膜被覆部材 |
KR1020177016101A KR101819876B1 (ko) | 2013-02-27 | 2014-02-10 | 경질 피막 및 그 제조 방법, 및 경질 피막 피복 부재 |
EP14756430.6A EP2963146A4 (en) | 2013-02-27 | 2014-02-10 | HARD COAT, METHOD FOR THE PRODUCTION THEREOF AND HARD COATING COATING ELEMENT |
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JP2013037449A JP6208437B2 (ja) | 2013-02-27 | 2013-02-27 | 硬質皮膜およびその製造方法ならびに硬質皮膜被覆部材 |
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JP6208437B2 JP6208437B2 (ja) | 2017-10-04 |
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EP (1) | EP2963146A4 (ja) |
JP (1) | JP6208437B2 (ja) |
KR (2) | KR20150110730A (ja) |
WO (1) | WO2014132790A1 (ja) |
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JP7409553B1 (ja) | 2022-09-22 | 2024-01-09 | 住友電気工業株式会社 | 切削工具 |
JP7409555B1 (ja) | 2022-09-22 | 2024-01-09 | 住友電気工業株式会社 | 切削工具 |
JP7409554B1 (ja) | 2022-09-22 | 2024-01-09 | 住友電気工業株式会社 | 切削工具 |
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US20220195606A1 (en) * | 2020-12-23 | 2022-06-23 | Raytheon Technologies Corporation | Method for metal vapor infiltration of cmc parts and articles containing the same |
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JP2004001154A (ja) * | 2002-06-03 | 2004-01-08 | Hitachi Tool Engineering Ltd | 酸化膜被覆工具 |
DE202004011430U1 (de) * | 2004-07-21 | 2004-09-23 | Jürgen Bach Immobilien und Maschinen KG | Düse zum Schneiden oder Schweißen |
JP2006150530A (ja) * | 2004-11-30 | 2006-06-15 | Sumitomo Electric Ind Ltd | 被膜および切削工具 |
JP2009249664A (ja) * | 2008-04-03 | 2009-10-29 | Kobe Steel Ltd | 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 |
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JP7409553B1 (ja) | 2022-09-22 | 2024-01-09 | 住友電気工業株式会社 | 切削工具 |
JP7409555B1 (ja) | 2022-09-22 | 2024-01-09 | 住友電気工業株式会社 | 切削工具 |
JP7409554B1 (ja) | 2022-09-22 | 2024-01-09 | 住友電気工業株式会社 | 切削工具 |
WO2024062611A1 (ja) * | 2022-09-22 | 2024-03-28 | 住友電気工業株式会社 | 切削工具 |
WO2024062613A1 (ja) * | 2022-09-22 | 2024-03-28 | 住友電気工業株式会社 | 切削工具 |
WO2024062612A1 (ja) * | 2022-09-22 | 2024-03-28 | 住友電気工業株式会社 | 切削工具 |
US12005508B2 (en) | 2022-09-22 | 2024-06-11 | Sumitomo Electric Industries, Ltd. | Cutting tool |
Also Published As
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JP6208437B2 (ja) | 2017-10-04 |
EP2963146A4 (en) | 2016-11-02 |
WO2014132790A1 (ja) | 2014-09-04 |
KR101819876B1 (ko) | 2018-01-17 |
KR20170070279A (ko) | 2017-06-21 |
US9845392B2 (en) | 2017-12-19 |
US20150361269A1 (en) | 2015-12-17 |
EP2963146A1 (en) | 2016-01-06 |
KR20150110730A (ko) | 2015-10-02 |
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