JP2012026544A - エアオペレートバルブ - Google Patents
エアオペレートバルブ Download PDFInfo
- Publication number
- JP2012026544A JP2012026544A JP2010168031A JP2010168031A JP2012026544A JP 2012026544 A JP2012026544 A JP 2012026544A JP 2010168031 A JP2010168031 A JP 2010168031A JP 2010168031 A JP2010168031 A JP 2010168031A JP 2012026544 A JP2012026544 A JP 2012026544A
- Authority
- JP
- Japan
- Prior art keywords
- piston
- valve
- casing
- air
- operated valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 15
- 230000001174 ascending effect Effects 0.000 claims 1
- 230000008878 coupling Effects 0.000 abstract 2
- 238000010168 coupling process Methods 0.000 abstract 2
- 238000005859 coupling reaction Methods 0.000 abstract 2
- 230000035939 shock Effects 0.000 abstract 1
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K13/00—Other constructional types of cut-off apparatus; Arrangements for cutting-off
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1226—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston the fluid circulating through the piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
Abstract
【解決手段】エア操作の複数のピストン9,10の移動によりダイヤフラム弁体6を環状弁座5に接離させ流体の流れを制御するエアオペレイトバルブ1の操作配管取付部において、ワンタッチ方式の継手に交換後も、外部からの衝撃を避けやすいように、取り付け高さを極力抑えた、破損を防ぐ構造とする。
【選択図】図1
Description
(2) ボディ
(2a)(2b) 流体通路
(4) ケーシング
(5) ダイヤフラム(弁体)
(8) 弁棒
(9)(10) ピストン
(9a) 軸部(弁棒上端部)
(12) ピストン駆動手段
(13) ワンタッチ継手
(14) 貫通孔
(14a) 小径部
(14b) めねじ部
(14c) 大径部
(16) リリースブッシュ
(17) おねじ部
(21) 下部ケーシング
(22) 上部ケーシング
Claims (2)
- 流体通路が設けられたボディと、ボディの上方に設けられたケーシングと、流体通路を開閉する弁体と、上昇または下降することにより弁体を開または閉方向に移動させる弁棒と、弁棒に設けられたピストンと、操作エアによってピストンを駆動するピストン駆動手段とを備えているエアオペレートバルブにおいて、
ケーシングは、互いにねじ合わされた上部ケーシングおよび下部ケーシングからなり、ピストン駆動手段は、上部ケーシングの頂部に取り付けられたワンタッチ継手を有していることを特徴とするエアオペレートバルブ。 - 上部ケーシングの頂壁の中央部に、貫通孔が設けられ、貫通孔は、下端側の小径部、上端側の大径部およびこれらの間に設けられた中間径のめねじ部からなり、ワンタッチ継手は、その下端部に設けられたおねじ部が貫通孔のめねじ部にねじ合わされて、その上端部に設けられたリリースブッシュが露出するように貫通孔の大径部に挿入されており、貫通孔の小径部に弁棒の上端部が移動可能に挿入されている請求項1のエアオペレートバルブ。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010168031A JP5597468B2 (ja) | 2010-07-27 | 2010-07-27 | エアオペレートバルブ |
PCT/JP2011/061648 WO2012014557A1 (ja) | 2010-07-27 | 2011-05-20 | エアオペレートバルブ |
SG2013006184A SG187207A1 (en) | 2010-07-27 | 2011-05-20 | Air operated valve |
KR1020137004393A KR101452658B1 (ko) | 2010-07-27 | 2011-05-20 | 에어 오퍼레이트 밸브 |
CN201180042679.5A CN103080622B (zh) | 2010-07-27 | 2011-05-20 | 气动阀 |
US13/812,268 US20130181148A1 (en) | 2010-07-27 | 2011-05-20 | Air-operated valve |
TW100126127A TWI507625B (zh) | 2010-07-27 | 2011-07-25 | 氣動閥 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010168031A JP5597468B2 (ja) | 2010-07-27 | 2010-07-27 | エアオペレートバルブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012026544A true JP2012026544A (ja) | 2012-02-09 |
JP5597468B2 JP5597468B2 (ja) | 2014-10-01 |
Family
ID=45529778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010168031A Active JP5597468B2 (ja) | 2010-07-27 | 2010-07-27 | エアオペレートバルブ |
Country Status (7)
Country | Link |
---|---|
US (1) | US20130181148A1 (ja) |
JP (1) | JP5597468B2 (ja) |
KR (1) | KR101452658B1 (ja) |
CN (1) | CN103080622B (ja) |
SG (1) | SG187207A1 (ja) |
TW (1) | TWI507625B (ja) |
WO (1) | WO2012014557A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014109314A (ja) * | 2012-11-30 | 2014-06-12 | Ckd Corp | 流量制御バルブ |
KR20160046090A (ko) * | 2014-10-20 | 2016-04-28 | 주식회사 군영 | 방폭형 피스톤 타입 고압 밸브 |
JP2016089885A (ja) * | 2014-10-31 | 2016-05-23 | 株式会社フジキン | バルブ、流体制御装置、半導体制御装置、および半導体製造方法 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5613420B2 (ja) * | 2010-02-05 | 2014-10-22 | 株式会社フジキン | 流体制御器 |
CN102620039A (zh) * | 2012-04-16 | 2012-08-01 | 广西大圆机械设备有限责任公司 | 液压控制汁气阀门 |
SG11201509861PA (en) * | 2013-10-30 | 2015-12-30 | Fujikin Kk | Vacuum valve |
KR101859163B1 (ko) * | 2014-10-07 | 2018-06-27 | 후지쿠라 고무 코교 가부시끼가이샤 | 다단 피스톤 액추에이터 |
US10072682B2 (en) * | 2015-07-07 | 2018-09-11 | Ge Oil & Gas Pressure Control Lp | Multi-chamber diaphragm actuator with synchronized supply system |
TWI649507B (zh) * | 2016-02-02 | 2019-02-01 | 藤倉橡膠工業股份有限公司 | 多段活塞致動器 |
JP6929098B2 (ja) * | 2017-03-30 | 2021-09-01 | 株式会社キッツエスシーティー | メタルダイヤフラムバルブ |
KR102278983B1 (ko) * | 2017-07-04 | 2021-07-16 | 가부시키가이샤 후지킨 | 액추에이터, 밸브 및 반도체 제조 장치 |
IL268254B1 (en) * | 2019-07-24 | 2024-06-01 | Ham Let Israel Canada Ltd | Flow control accessory |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03107577U (ja) * | 1990-02-20 | 1991-11-06 | ||
JPH0642666A (ja) * | 1992-07-24 | 1994-02-18 | Ckd Corp | 電磁弁マニホールド |
JPH11125354A (ja) * | 1997-10-20 | 1999-05-11 | Ckd Corp | 電磁弁の配管接続構造 |
JP2001116157A (ja) * | 1999-10-18 | 2001-04-27 | Smc Corp | 電磁弁集合体用給排気装置 |
JP2008002511A (ja) * | 2006-06-20 | 2008-01-10 | Ckd Corp | エアオペレイトバルブ |
JP2009002524A (ja) * | 2008-10-03 | 2009-01-08 | Fujikin Inc | 流体制御器用多段アクチュエータおよびこれを備えた流体制御器 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4477055A (en) * | 1983-06-30 | 1984-10-16 | Acf Industries, Incorporated | Valve seat for ball valves |
US4634099A (en) * | 1985-05-17 | 1987-01-06 | Nupro Company | High pressure inverted bellows valve |
US5007328A (en) * | 1989-07-24 | 1991-04-16 | Otteman John H | Linear actuator |
US5131627A (en) * | 1990-10-17 | 1992-07-21 | Nupro Company | Diaphragm valve |
US5755428A (en) * | 1995-12-19 | 1998-05-26 | Veriflow Corporation | Valve having metal-to metal dynamic seating for controlling the flow of gas for making semiconductors |
US5683120A (en) * | 1996-06-03 | 1997-11-04 | Parker-Hannifin Corporation | Releasable push-to-connect tube fitting |
JP3300686B2 (ja) * | 1999-07-16 | 2002-07-08 | 藤倉ゴム工業株式会社 | 多段ピストンアクチュエータ |
JP3437799B2 (ja) * | 1999-07-16 | 2003-08-18 | 藤倉ゴム工業株式会社 | 自動二段切換開閉弁 |
US20060065868A1 (en) * | 2004-09-28 | 2006-03-30 | Strong Warren N | Diaphragm valve |
JP5054904B2 (ja) * | 2005-08-30 | 2012-10-24 | 株式会社フジキン | ダイレクトタッチ型メタルダイヤフラム弁 |
US7971599B2 (en) * | 2006-06-20 | 2011-07-05 | Ckd Corporation | Air-operated valve |
US8025318B1 (en) * | 2008-05-20 | 2011-09-27 | Alkon Corporation | Push to connect fitting with formed gripper teeth |
US9273794B2 (en) * | 2008-12-29 | 2016-03-01 | Roger Gregoire | Pneumatic valve actuator having integral status indication |
CN201379914Y (zh) * | 2009-04-22 | 2010-01-13 | 斯博瑞安(中国)安全防护设备有限公司 | 移动供气源附属逃生装置的切换阀 |
-
2010
- 2010-07-27 JP JP2010168031A patent/JP5597468B2/ja active Active
-
2011
- 2011-05-20 CN CN201180042679.5A patent/CN103080622B/zh not_active Expired - Fee Related
- 2011-05-20 US US13/812,268 patent/US20130181148A1/en not_active Abandoned
- 2011-05-20 SG SG2013006184A patent/SG187207A1/en unknown
- 2011-05-20 KR KR1020137004393A patent/KR101452658B1/ko active IP Right Grant
- 2011-05-20 WO PCT/JP2011/061648 patent/WO2012014557A1/ja active Application Filing
- 2011-07-25 TW TW100126127A patent/TWI507625B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03107577U (ja) * | 1990-02-20 | 1991-11-06 | ||
JPH0642666A (ja) * | 1992-07-24 | 1994-02-18 | Ckd Corp | 電磁弁マニホールド |
JPH11125354A (ja) * | 1997-10-20 | 1999-05-11 | Ckd Corp | 電磁弁の配管接続構造 |
JP2001116157A (ja) * | 1999-10-18 | 2001-04-27 | Smc Corp | 電磁弁集合体用給排気装置 |
JP2008002511A (ja) * | 2006-06-20 | 2008-01-10 | Ckd Corp | エアオペレイトバルブ |
JP2009002524A (ja) * | 2008-10-03 | 2009-01-08 | Fujikin Inc | 流体制御器用多段アクチュエータおよびこれを備えた流体制御器 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014109314A (ja) * | 2012-11-30 | 2014-06-12 | Ckd Corp | 流量制御バルブ |
KR20160046090A (ko) * | 2014-10-20 | 2016-04-28 | 주식회사 군영 | 방폭형 피스톤 타입 고압 밸브 |
KR101645965B1 (ko) | 2014-10-20 | 2016-08-08 | 안종민 | 방폭형 피스톤 타입 고압 밸브 |
JP2016089885A (ja) * | 2014-10-31 | 2016-05-23 | 株式会社フジキン | バルブ、流体制御装置、半導体制御装置、および半導体製造方法 |
US10309549B2 (en) | 2014-10-31 | 2019-06-04 | Fujikin Incorporated | Valve device, fluid control apparatus, and semiconductor manufacturing apparatus |
Also Published As
Publication number | Publication date |
---|---|
CN103080622A (zh) | 2013-05-01 |
JP5597468B2 (ja) | 2014-10-01 |
WO2012014557A1 (ja) | 2012-02-02 |
TW201213687A (en) | 2012-04-01 |
KR20130031386A (ko) | 2013-03-28 |
US20130181148A1 (en) | 2013-07-18 |
CN103080622B (zh) | 2014-11-05 |
SG187207A1 (en) | 2013-02-28 |
TWI507625B (zh) | 2015-11-11 |
KR101452658B1 (ko) | 2014-10-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5597468B2 (ja) | エアオペレートバルブ | |
TWI475168B (zh) | 流體控制器 | |
JP3861206B2 (ja) | 流体制御器 | |
JP6105050B2 (ja) | 弁アクチュエータアセンブリにて使用される案内部材 | |
JP6346907B2 (ja) | オーバーフロー弁 | |
JP2015224649A (ja) | 二段パイロット式電磁弁 | |
JP2009002524A (ja) | 流体制御器用多段アクチュエータおよびこれを備えた流体制御器 | |
US7278441B2 (en) | Fluid controller | |
JP2001193846A (ja) | 2ポート弁 | |
CN110296246B (zh) | 电子膨胀阀 | |
JP4860506B2 (ja) | 制御弁 | |
JP6216551B2 (ja) | 圧力作動弁 | |
CN102759232A (zh) | 热力膨胀阀 | |
CN205715832U (zh) | 多功能自力式截止阀 | |
JP2012031950A (ja) | 二重弁栓装置 | |
WO2023162466A1 (ja) | アクチュエータ、および、バルブ | |
CN219639609U (zh) | 背压阀 | |
CN102777608A (zh) | 流体流动控制装置 | |
JP2009223544A (ja) | 減圧弁 | |
JP2008138847A (ja) | グローブバルブ | |
JP2005308202A (ja) | 結合構造 | |
JP2015010655A (ja) | 圧力作動弁及び圧力作動弁における設定圧力の設定方法 | |
CN111457146A (zh) | 电磁阀 | |
JP2006146832A (ja) | 減圧弁 | |
JP2010276111A (ja) | 減衰バルブ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130611 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140513 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140625 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140715 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140811 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5597468 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |