JP2006194593A - 線幅測定方法 - Google Patents
線幅測定方法 Download PDFInfo
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- JP2006194593A JP2006194593A JP2005003442A JP2005003442A JP2006194593A JP 2006194593 A JP2006194593 A JP 2006194593A JP 2005003442 A JP2005003442 A JP 2005003442A JP 2005003442 A JP2005003442 A JP 2005003442A JP 2006194593 A JP2006194593 A JP 2006194593A
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- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 238000005259 measurement Methods 0.000 claims description 55
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims 1
- 238000005286 illumination Methods 0.000 description 22
- 238000002834 transmittance Methods 0.000 description 13
- 239000002184 metal Substances 0.000 description 11
- 239000011521 glass Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
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Classifications
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- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03B—INSTALLATIONS OR METHODS FOR OBTAINING, COLLECTING, OR DISTRIBUTING WATER
- E03B7/00—Water main or service pipe systems
- E03B7/09—Component parts or accessories
- E03B7/10—Devices preventing bursting of pipes by freezing
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- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03B—INSTALLATIONS OR METHODS FOR OBTAINING, COLLECTING, OR DISTRIBUTING WATER
- E03B7/00—Water main or service pipe systems
- E03B7/09—Component parts or accessories
- E03B7/10—Devices preventing bursting of pipes by freezing
- E03B7/12—Devices preventing bursting of pipes by freezing by preventing freezing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
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- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Public Health (AREA)
- Water Supply & Treatment (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
【解決手段】透明基板21上に不透明パターン22を形成し透明基板と不透明パターンにまたがって半透明膜23を形成してなる測定試料の両側を反射光と透過光で同時に照明して半透明膜の線幅を測定する線幅測定装置において、半透明膜の線幅を測定する際に、透明基板と不透明パターンにそれぞれ調光エリア26,27を指定して個別に調光し、その後半透明膜の線幅を測定することを特徴とする。
【選択図】図2
Description
X=k×Nab ……… (1)
したがって、測定試料のパターン50の線幅を測定するためには、輝度波形の中間の輝度レベルを正しく得る必要がある。
Claims (2)
- 透明基板上に不透明パターンを形成し前記透明基板と前記不透明パターンにまたがって半透明膜を形成してなる測定試料の両側を反射光と透過光で同時に照明して前記半透明膜の線幅を測定する線幅測定装置において、前記半透明膜の線幅を測定する際に、前記透明基板と前記不透明パターンにそれぞれ調光エリアを指定して個別に調光し、その後前記半透明膜の線幅を測定することを特徴とする線幅測定方法。
- 透明基板上に不透明パターンを形成し前記透明基板と前記不透明パターンにまたがって半透明膜を形成してなる測定試料の前記半透明膜を反射光源からの反射光で照明し、前記測定試料の前記半透明膜と反対側を透過光源からの透過光で同時に照明して、前記半透明膜の線幅を測定する線幅測定装置において、前記半透明膜の線幅を測定する際に、前記透明基板と前記不透明パターンにそれぞれ透過光の調光エリアと反射光の調光エリアを指定し、前記反射光の調光エリアから得られる輝度波形に対してはそのピークが所定値となるように調光アダプタ内のフィルタを調光し、前記透過光の調光エリアから得られる輝度波形に対してはそのピークが所定値となるように前記透過光源からの透過光で調光し、その後前記半透明膜の線幅を測定することを特徴とする線幅測定方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005003442A JP4663334B2 (ja) | 2005-01-11 | 2005-01-11 | 線幅測定方法 |
KR1020060002685A KR100674774B1 (ko) | 2005-01-11 | 2006-01-10 | 선폭 측정 방법 |
TW095100849A TWI276773B (en) | 2005-01-11 | 2006-01-10 | Line width measuring method |
CNB2006100049545A CN100378431C (zh) | 2005-01-11 | 2006-01-11 | 线宽测量方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005003442A JP4663334B2 (ja) | 2005-01-11 | 2005-01-11 | 線幅測定方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006194593A true JP2006194593A (ja) | 2006-07-27 |
JP4663334B2 JP4663334B2 (ja) | 2011-04-06 |
Family
ID=36800810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005003442A Active JP4663334B2 (ja) | 2005-01-11 | 2005-01-11 | 線幅測定方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4663334B2 (ja) |
KR (1) | KR100674774B1 (ja) |
CN (1) | CN100378431C (ja) |
TW (1) | TWI276773B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009058377A (ja) * | 2007-08-31 | 2009-03-19 | Hitachi Kokusai Electric Inc | 検査装置 |
JP2009300124A (ja) * | 2008-06-10 | 2009-12-24 | Keyence Corp | 画像計測装置、画像計測方法及びコンピュータプログラム |
US11419809B2 (en) | 2019-06-27 | 2022-08-23 | L'oreal | Hair treatment compositions and methods for treating hair |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102095377A (zh) * | 2010-11-04 | 2011-06-15 | 深圳市华星光电技术有限公司 | 线宽量测装置 |
CN103217107B (zh) * | 2013-03-29 | 2015-11-25 | 深圳市华星光电技术有限公司 | 精密测长机及其光量干涉排除方法和装置 |
CN103697812B (zh) * | 2013-12-18 | 2016-08-10 | 京东方科技集团股份有限公司 | 关键尺寸测量装置的光量强度调整***及调整方法 |
CN108181094A (zh) * | 2017-12-25 | 2018-06-19 | 中国航空工业集团公司洛阳电光设备研究所 | 一种平视显示器字符亮度及线宽测量方法 |
CN111189395A (zh) * | 2018-11-14 | 2020-05-22 | 苏州能讯高能半导体有限公司 | 底切结构测量***和底切结构测量方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01101407A (ja) * | 1987-10-15 | 1989-04-19 | Dainippon Screen Mfg Co Ltd | 線幅測定方法 |
JPH03261810A (ja) * | 1990-03-12 | 1991-11-21 | Fujitsu Ltd | 外観検査装置 |
JPH05302822A (ja) * | 1992-04-27 | 1993-11-16 | Sumitomo Electric Ind Ltd | プリント基板のエッチファクタ計測方法及び装置 |
JPH07218234A (ja) * | 1994-02-04 | 1995-08-18 | Citizen Watch Co Ltd | 微細パターンの寸法測定方法 |
JPH10227608A (ja) * | 1997-02-13 | 1998-08-25 | Olympus Optical Co Ltd | エッジ検出装置 |
JP2000028319A (ja) * | 1998-07-09 | 2000-01-28 | Hitachi Denshi Ltd | 顕微鏡用自動調光装置 |
JP2001091469A (ja) * | 1999-09-21 | 2001-04-06 | Olympus Optical Co Ltd | 表面欠陥検査装置 |
JP2004170400A (ja) * | 2002-10-30 | 2004-06-17 | Hitachi Kokusai Electric Inc | 寸法測定方法及び装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1220032C (zh) * | 2002-01-21 | 2005-09-21 | 株式会社日立国际电气 | 线宽测定方法和线宽测定装置 |
JP3830451B2 (ja) | 2002-01-21 | 2006-10-04 | 株式会社日立国際電気 | 線幅測定方法及び線幅測定装置 |
-
2005
- 2005-01-11 JP JP2005003442A patent/JP4663334B2/ja active Active
-
2006
- 2006-01-10 KR KR1020060002685A patent/KR100674774B1/ko active IP Right Grant
- 2006-01-10 TW TW095100849A patent/TWI276773B/zh active
- 2006-01-11 CN CNB2006100049545A patent/CN100378431C/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01101407A (ja) * | 1987-10-15 | 1989-04-19 | Dainippon Screen Mfg Co Ltd | 線幅測定方法 |
JPH03261810A (ja) * | 1990-03-12 | 1991-11-21 | Fujitsu Ltd | 外観検査装置 |
JPH05302822A (ja) * | 1992-04-27 | 1993-11-16 | Sumitomo Electric Ind Ltd | プリント基板のエッチファクタ計測方法及び装置 |
JPH07218234A (ja) * | 1994-02-04 | 1995-08-18 | Citizen Watch Co Ltd | 微細パターンの寸法測定方法 |
JPH10227608A (ja) * | 1997-02-13 | 1998-08-25 | Olympus Optical Co Ltd | エッジ検出装置 |
JP2000028319A (ja) * | 1998-07-09 | 2000-01-28 | Hitachi Denshi Ltd | 顕微鏡用自動調光装置 |
JP2001091469A (ja) * | 1999-09-21 | 2001-04-06 | Olympus Optical Co Ltd | 表面欠陥検査装置 |
JP2004170400A (ja) * | 2002-10-30 | 2004-06-17 | Hitachi Kokusai Electric Inc | 寸法測定方法及び装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009058377A (ja) * | 2007-08-31 | 2009-03-19 | Hitachi Kokusai Electric Inc | 検査装置 |
JP2009300124A (ja) * | 2008-06-10 | 2009-12-24 | Keyence Corp | 画像計測装置、画像計測方法及びコンピュータプログラム |
US11419809B2 (en) | 2019-06-27 | 2022-08-23 | L'oreal | Hair treatment compositions and methods for treating hair |
Also Published As
Publication number | Publication date |
---|---|
JP4663334B2 (ja) | 2011-04-06 |
CN100378431C (zh) | 2008-04-02 |
KR100674774B1 (ko) | 2007-01-25 |
KR20060082047A (ko) | 2006-07-14 |
CN1804545A (zh) | 2006-07-19 |
TWI276773B (en) | 2007-03-21 |
TW200632276A (en) | 2006-09-16 |
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