JP2006013243A - 回転カップ式塗布装置 - Google Patents
回転カップ式塗布装置 Download PDFInfo
- Publication number
- JP2006013243A JP2006013243A JP2004190202A JP2004190202A JP2006013243A JP 2006013243 A JP2006013243 A JP 2006013243A JP 2004190202 A JP2004190202 A JP 2004190202A JP 2004190202 A JP2004190202 A JP 2004190202A JP 2006013243 A JP2006013243 A JP 2006013243A
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- JP
- Japan
- Prior art keywords
- cup
- inner cup
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims description 27
- 238000000576 coating method Methods 0.000 claims description 27
- 239000007788 liquid Substances 0.000 abstract description 14
- 230000002093 peripheral effect Effects 0.000 abstract description 8
- 239000011521 glass Substances 0.000 description 7
- 210000000078 claw Anatomy 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000006698 induction Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Materials For Photolithography (AREA)
- Nozzles (AREA)
Abstract
【課題】 塗布液の飛散を有効に防止し得る回転カップ式塗布装置を提供する。
【解決手段】 インナーカップ3上にはトレイ7を固定し、このトレイ7の各隅部からはドレイン誘導管10が導出されている。ドレイン誘導管10は先部11が前記ドレイン回収通路3aの底部に向かうように外側に向かって斜め下方に傾斜している。そして、先部11の下端11aはインナーカップ3の底面3bよりも低くなっている。このためインナーカップ3とトレイ7を一体的に回転することで、板状被処理物Wの表面に供給された塗布液は遠心力で、庇状壁部9に形成した穴、ドレイン誘導管10内の流路およびドレイン誘導管10の先部11を通って排出される際に、インナーカップ3の内周壁に直接衝突することがない。
【選択図】 図2
Description
Claims (2)
- アウターカップ内にスピンナーによって回転せしめられるインナーカップが設けられ、このインナーカップ内にはインナーカップと一体的に回転するトレイが設けられ、このトレイの中央部には板状被処理物を保持する手段が配置され、トレイからはドレイン誘導管が導出され、このドレイン誘導管のインナーカップの内底部周縁に形成した貯留部に臨む先部は、外側に向かって斜め下方に傾斜していることを特徴とする回転カップ式塗布装置。
- 請求項1に記載の回転カップ式塗布装置において、前記ドレイン誘導管の先部の最外部分の下端はインナーカップの底面よりも低く設定されていることを特徴とする回転カップ式塗布装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004190202A JP4476042B2 (ja) | 2004-06-28 | 2004-06-28 | 回転カップ式塗布装置 |
TW094121009A TWI388377B (zh) | 2004-06-28 | 2005-06-23 | 旋轉杯式塗佈裝置 |
KR1020050055582A KR101204065B1 (ko) | 2004-06-28 | 2005-06-27 | 회전컵식 도포장치 |
CNA2005100810419A CN1714944A (zh) | 2004-06-28 | 2005-06-28 | 旋转杯式涂敷装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004190202A JP4476042B2 (ja) | 2004-06-28 | 2004-06-28 | 回転カップ式塗布装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006013243A true JP2006013243A (ja) | 2006-01-12 |
JP4476042B2 JP4476042B2 (ja) | 2010-06-09 |
Family
ID=35780102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004190202A Expired - Lifetime JP4476042B2 (ja) | 2004-06-28 | 2004-06-28 | 回転カップ式塗布装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4476042B2 (ja) |
KR (1) | KR101204065B1 (ja) |
CN (1) | CN1714944A (ja) |
TW (1) | TWI388377B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008182127A (ja) * | 2007-01-25 | 2008-08-07 | Tokyo Ohka Kogyo Co Ltd | 重ね合わせユニット及び貼り合わせ装置 |
CN114472090A (zh) * | 2022-02-10 | 2022-05-13 | 华能新能源股份有限公司 | 一种膜层生长设备及膜层生长方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100450640C (zh) * | 2006-07-17 | 2009-01-14 | 友达光电股份有限公司 | 旋涂*** |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3388628B2 (ja) | 1994-03-24 | 2003-03-24 | 東京応化工業株式会社 | 回転式薬液処理装置 |
-
2004
- 2004-06-28 JP JP2004190202A patent/JP4476042B2/ja not_active Expired - Lifetime
-
2005
- 2005-06-23 TW TW094121009A patent/TWI388377B/zh active
- 2005-06-27 KR KR1020050055582A patent/KR101204065B1/ko active IP Right Grant
- 2005-06-28 CN CNA2005100810419A patent/CN1714944A/zh active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008182127A (ja) * | 2007-01-25 | 2008-08-07 | Tokyo Ohka Kogyo Co Ltd | 重ね合わせユニット及び貼り合わせ装置 |
JP4750724B2 (ja) * | 2007-01-25 | 2011-08-17 | 東京応化工業株式会社 | 重ね合わせユニット及び貼り合わせ装置 |
CN114472090A (zh) * | 2022-02-10 | 2022-05-13 | 华能新能源股份有限公司 | 一种膜层生长设备及膜层生长方法 |
CN114472090B (zh) * | 2022-02-10 | 2023-06-02 | 华能新能源股份有限公司 | 一种膜层生长设备及膜层生长方法 |
Also Published As
Publication number | Publication date |
---|---|
JP4476042B2 (ja) | 2010-06-09 |
TWI388377B (zh) | 2013-03-11 |
KR20060048544A (ko) | 2006-05-18 |
TW200607574A (en) | 2006-03-01 |
CN1714944A (zh) | 2006-01-04 |
KR101204065B1 (ko) | 2012-11-22 |
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