JP2003114626A5 - - Google Patents
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- Publication number
- JP2003114626A5 JP2003114626A5 JP2002175119A JP2002175119A JP2003114626A5 JP 2003114626 A5 JP2003114626 A5 JP 2003114626A5 JP 2002175119 A JP2002175119 A JP 2002175119A JP 2002175119 A JP2002175119 A JP 2002175119A JP 2003114626 A5 JP2003114626 A5 JP 2003114626A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- insulating film
- interlayer insulating
- atomic
- emitting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims 59
- 239000011229 interlayer Substances 0.000 claims 35
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 20
- 239000010409 thin film Substances 0.000 claims 18
- 239000010410 layer Substances 0.000 claims 12
- 125000005373 siloxane group Chemical group [SiH2](O*)* 0.000 claims 12
- 238000004519 manufacturing process Methods 0.000 claims 10
- 229910052757 nitrogen Inorganic materials 0.000 claims 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 10
- 229910052710 silicon Inorganic materials 0.000 claims 10
- 239000010703 silicon Substances 0.000 claims 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 6
- 229910052799 carbon Inorganic materials 0.000 claims 6
- 238000004544 sputter deposition Methods 0.000 claims 6
- 229910052739 hydrogen Inorganic materials 0.000 claims 4
- 239000001257 hydrogen Substances 0.000 claims 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 4
- 229920000642 polymer Polymers 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 210000000009 suboesophageal ganglion Anatomy 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002175119A JP2003114626A (ja) | 2001-06-18 | 2002-06-14 | 発光装置及びその作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-184067 | 2001-06-18 | ||
| JP2001184067 | 2001-06-18 | ||
| JP2002175119A JP2003114626A (ja) | 2001-06-18 | 2002-06-14 | 発光装置及びその作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005221022A Division JP2006012856A (ja) | 2001-06-18 | 2005-07-29 | 発光装置及びその作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003114626A JP2003114626A (ja) | 2003-04-18 |
| JP2003114626A5 true JP2003114626A5 (zh) | 2004-08-26 |
Family
ID=26617142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002175119A Pending JP2003114626A (ja) | 2001-06-18 | 2002-06-14 | 発光装置及びその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003114626A (zh) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4373159B2 (ja) * | 2003-08-21 | 2009-11-25 | 株式会社半導体エネルギー研究所 | 発光装置 |
| US7291967B2 (en) | 2003-08-29 | 2007-11-06 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting element including a barrier layer and a manufacturing method thereof |
| US7205716B2 (en) | 2003-10-20 | 2007-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
| JP4704004B2 (ja) * | 2003-10-20 | 2011-06-15 | 株式会社半導体エネルギー研究所 | 発光装置及び電子機器 |
| JP4656906B2 (ja) * | 2003-10-21 | 2011-03-23 | 株式会社半導体エネルギー研究所 | 発光装置 |
| US7902747B2 (en) | 2003-10-21 | 2011-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device having a thin insulating film made of nitrogen and silicon and an electrode made of conductive transparent oxide and silicon dioxide |
| JP4785339B2 (ja) * | 2003-10-24 | 2011-10-05 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
| JP4564364B2 (ja) * | 2004-01-19 | 2010-10-20 | 株式会社 日立ディスプレイズ | 有機エレクトロルミネッセンス表示装置とその製造方法 |
| US7274044B2 (en) * | 2004-01-26 | 2007-09-25 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
| JP2007115808A (ja) * | 2005-10-19 | 2007-05-10 | Toppan Printing Co Ltd | トランジスタ |
| JP4582004B2 (ja) | 2006-01-13 | 2010-11-17 | セイコーエプソン株式会社 | 発光装置および電子機器 |
| JP4655942B2 (ja) | 2006-01-16 | 2011-03-23 | セイコーエプソン株式会社 | 発光装置、発光装置の製造方法および電子機器 |
| JP4809087B2 (ja) | 2006-03-14 | 2011-11-02 | セイコーエプソン株式会社 | エレクトロルミネッセンス装置、電子機器、およびエレクトロルミネッセンス装置の製造方法 |
| WO2009054159A1 (ja) * | 2007-10-23 | 2009-04-30 | Sharp Kabushiki Kaisha | 表示装置及び表示装置の製造方法 |
| KR101649757B1 (ko) * | 2008-09-26 | 2016-08-19 | 코오롱인더스트리 주식회사 | 유기전계발광소자 및 그 제조방법 |
| JP6321310B1 (ja) * | 2017-06-13 | 2018-05-09 | 堺ディスプレイプロダクト株式会社 | 有機ｅｌデバイスおよびその製造方法 |
| JP6926169B2 (ja) * | 2018-03-28 | 2021-08-25 | 堺ディスプレイプロダクト株式会社 | 有機ｅｌ表示装置及びその製造方法 |
| WO2019202738A1 (ja) * | 2018-04-20 | 2019-10-24 | 堺ディスプレイプロダクト株式会社 | 有機ｅｌデバイスおよびその製造方法 |
-
2002
- 2002-06-14 JP JP2002175119A patent/JP2003114626A/ja active Pending
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